JP2005337071A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005337071A5 JP2005337071A5 JP2004155060A JP2004155060A JP2005337071A5 JP 2005337071 A5 JP2005337071 A5 JP 2005337071A5 JP 2004155060 A JP2004155060 A JP 2004155060A JP 2004155060 A JP2004155060 A JP 2004155060A JP 2005337071 A5 JP2005337071 A5 JP 2005337071A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004155060A JP4671624B2 (ja) | 2004-05-25 | 2004-05-25 | 真空ポンプ |
| PCT/JP2005/009148 WO2005116448A1 (ja) | 2004-05-25 | 2005-05-19 | 真空ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004155060A JP4671624B2 (ja) | 2004-05-25 | 2004-05-25 | 真空ポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005337071A JP2005337071A (ja) | 2005-12-08 |
| JP2005337071A5 true JP2005337071A5 (enExample) | 2007-06-28 |
| JP4671624B2 JP4671624B2 (ja) | 2011-04-20 |
Family
ID=35450953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004155060A Expired - Lifetime JP4671624B2 (ja) | 2004-05-25 | 2004-05-25 | 真空ポンプ |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4671624B2 (enExample) |
| WO (1) | WO2005116448A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2472119B1 (en) * | 2009-08-26 | 2016-10-12 | Shimadzu Corporation | Turbo-molecular pump and method of manufacturing rotor |
| JP5796948B2 (ja) * | 2010-11-09 | 2015-10-21 | エドワーズ株式会社 | 真空ポンプ |
| JP6069981B2 (ja) * | 2012-09-10 | 2017-02-01 | 株式会社島津製作所 | ターボ分子ポンプ |
| US9879684B2 (en) | 2012-09-13 | 2018-01-30 | Kla-Tencor Corporation | Apparatus and method for shielding a controlled pressure environment |
| JP6942610B2 (ja) * | 2017-07-14 | 2021-09-29 | エドワーズ株式会社 | 真空ポンプ、該真空ポンプに適用される温度調節用制御装置、検査用治具、及び温度調節機能部の診断方法 |
| JP7546410B2 (ja) * | 2020-08-07 | 2024-09-06 | エドワーズ株式会社 | 真空ポンプおよび真空ポンプ用回転翼 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0732956Y2 (ja) * | 1987-08-13 | 1995-07-31 | セイコー精機株式会社 | タ−ボ分子ポンプ |
| JPH0334699A (ja) * | 1989-06-30 | 1991-02-14 | Nec Corp | 低周波水中超音波送受波器 |
| JPH11247790A (ja) * | 1998-03-04 | 1999-09-14 | Shimadzu Corp | 真空ポンプ |
| JP2000161286A (ja) * | 1998-11-25 | 2000-06-13 | Shimadzu Corp | ターボ分子ポンプ |
| JP2001193686A (ja) * | 2000-01-14 | 2001-07-17 | Shimadzu Corp | 真空ポンプ |
| JP4657463B2 (ja) * | 2001-02-01 | 2011-03-23 | エドワーズ株式会社 | 真空ポンプ |
-
2004
- 2004-05-25 JP JP2004155060A patent/JP4671624B2/ja not_active Expired - Lifetime
-
2005
- 2005-05-19 WO PCT/JP2005/009148 patent/WO2005116448A1/ja not_active Ceased