JP4662606B2 - 圧電バルブおよび流体流制御方法 - Google Patents

圧電バルブおよび流体流制御方法 Download PDF

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Publication number
JP4662606B2
JP4662606B2 JP2000152696A JP2000152696A JP4662606B2 JP 4662606 B2 JP4662606 B2 JP 4662606B2 JP 2000152696 A JP2000152696 A JP 2000152696A JP 2000152696 A JP2000152696 A JP 2000152696A JP 4662606 B2 JP4662606 B2 JP 4662606B2
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JP
Japan
Prior art keywords
valve
piezoelectric
valve body
chamber
piezoelectric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000152696A
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English (en)
Japanese (ja)
Other versions
JP2000346224A (ja
JP2000346224A5 (enrdf_load_stackoverflow
Inventor
エヌ．オーネイル ウィリアム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Caterpillar Inc
Original Assignee
Caterpillar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Caterpillar Inc filed Critical Caterpillar Inc
Publication of JP2000346224A publication Critical patent/JP2000346224A/ja
Publication of JP2000346224A5 publication Critical patent/JP2000346224A5/ja
Application granted granted Critical
Publication of JP4662606B2 publication Critical patent/JP4662606B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2278—Pressure modulating relays or followers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86622—Motor-operated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86879—Reciprocating valve unit
    • Y10T137/86895—Plural disk or plug

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Multiple-Way Valves (AREA)
JP2000152696A 1999-05-18 2000-05-18 圧電バルブおよび流体流制御方法 Expired - Fee Related JP4662606B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/314,063 US6170526B1 (en) 1999-05-18 1999-05-18 Piezoelectric actuated poppet valve to modulate pilot pressures and control main valve activation
US09/314063 1999-05-18

Publications (3)

Publication Number Publication Date
JP2000346224A JP2000346224A (ja) 2000-12-15
JP2000346224A5 JP2000346224A5 (enrdf_load_stackoverflow) 2007-06-21
JP4662606B2 true JP4662606B2 (ja) 2011-03-30

Family

ID=23218405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000152696A Expired - Fee Related JP4662606B2 (ja) 1999-05-18 2000-05-18 圧電バルブおよび流体流制御方法

Country Status (3)

Country Link
US (3) US6170526B1 (enrdf_load_stackoverflow)
JP (1) JP4662606B2 (enrdf_load_stackoverflow)
DE (1) DE10023981A1 (enrdf_load_stackoverflow)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6302495B1 (en) * 1999-06-04 2001-10-16 Ge Harris Railway Electronics, Llc Railway car braking system including piezoelectric pilot valve and associated methods
DE10141136A1 (de) * 2001-04-07 2002-10-10 Continental Teves Ag & Co Ohg Ventil.insbesondere für hydraulische Kraftfahrzeugbremsen
US6526864B2 (en) 2001-04-17 2003-03-04 Csa Engineering, Inc. Piezoelectrically actuated single-stage servovalve
DE10223216B4 (de) * 2002-05-24 2005-10-27 Siemens Ag Vorrichtung zur Stoßdämpfung mittels eines Piezoaktoren
US7591266B2 (en) * 2003-02-04 2009-09-22 Inovo, Inc. Hybrid electro-pneumatic conserver for oxygen conserving regulator
US20070075286A1 (en) * 2005-10-04 2007-04-05 Par Technologies, Llc Piezoelectric valves drive
US7717132B2 (en) * 2006-07-17 2010-05-18 Ford Global Technologies, Llc Hydraulic valve actuated by piezoelectric effect
US20100326530A1 (en) * 2007-11-01 2010-12-30 Honeywell International, Inc. Piezoelectric flow control valve
DE102012006658A1 (de) * 2012-04-03 2013-10-10 Burkhard Büstgens Mikro-Pilotventil
DE102013111025A1 (de) * 2013-10-04 2015-04-09 Krones Ag Ventileinrichtung zum gesteuerten Einleiten eines Blasmediums
JP6475441B2 (ja) * 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
US10107409B2 (en) * 2015-06-16 2018-10-23 Marotta Controls, Inc. Multi-function valve
EP3321516B1 (en) * 2016-11-09 2020-05-13 Hamilton Sundstrand Corporation Servovalve
JP7216425B2 (ja) * 2017-11-30 2023-02-01 株式会社フジキン 流量制御装置
DE102018001048A1 (de) * 2018-02-09 2019-08-14 Atlas Copco Ias Gmbh Dosierventil
JP2020089037A (ja) * 2018-11-22 2020-06-04 株式会社堀場エステック ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置
EP3660368B1 (en) * 2018-11-27 2025-01-01 Hamilton Sundstrand Corporation Servo valve
KR20250106635A (ko) * 2024-01-03 2025-07-10 삼성전자주식회사 질량 유량 제어기, 이를 이용한 유량 제어 방법 및 이를 포함하는 기판 처리 방법

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2912008A (en) * 1954-08-27 1959-11-10 Gen Motors Corp Valve actuating means
US4176822A (en) * 1977-10-31 1979-12-04 Chrysler Corporation Fuel injection system and control valve for multi-cylinder engines
GB1601306A (en) * 1978-05-08 1981-10-28 Philips Electronic Associated Fluidcontrol valve
DE3006231A1 (de) * 1980-02-20 1981-08-27 Daimler-Benz Ag, 7000 Stuttgart Hydraulisches ventil
JPH063270B2 (ja) * 1985-12-27 1994-01-12 山田 三恵 駆動制御装置
US4825894A (en) * 1988-06-08 1989-05-02 Moog, Inc. Piezoelectric torque motor
CH675752A5 (enrdf_load_stackoverflow) * 1988-10-25 1990-10-31 Sulzer Ag
JPH03234981A (ja) * 1990-02-13 1991-10-18 Koganei Ltd 積層形圧電素子を用いた弁
US5085125A (en) * 1990-12-21 1992-02-04 Allied-Signal Inc. Optically controlled transducer
JPH05272656A (ja) * 1992-03-25 1993-10-19 Nissan Motor Co Ltd 圧力制御弁
JPH06117561A (ja) * 1992-10-05 1994-04-26 Unisia Jecs Corp 圧電素子駆動流体制御弁
US5267589A (en) 1993-04-05 1993-12-07 Ford Motor Company Piezoelectric pressure control valve
US5445185A (en) 1993-04-05 1995-08-29 Ford Motor Company Piezoelectric fluid control valve
DE19538791C2 (de) * 1995-10-18 1998-04-09 Daimler Benz Ag Piezosteuerventil für Kraftstoffeinspritzanlagen von Brennkraftmaschinen
US5779149A (en) 1996-07-02 1998-07-14 Siemens Automotive Corporation Piezoelectric controlled common rail injector with hydraulic amplification of piezoelectric stroke

Also Published As

Publication number Publication date
US6202670B1 (en) 2001-03-20
DE10023981A1 (de) 2001-02-22
US6206341B1 (en) 2001-03-27
JP2000346224A (ja) 2000-12-15
US6170526B1 (en) 2001-01-09

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