JP4660263B2 - 真空発生装置および該真空発生装置の起動方法 - Google Patents

真空発生装置および該真空発生装置の起動方法 Download PDF

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Publication number
JP4660263B2
JP4660263B2 JP2005122976A JP2005122976A JP4660263B2 JP 4660263 B2 JP4660263 B2 JP 4660263B2 JP 2005122976 A JP2005122976 A JP 2005122976A JP 2005122976 A JP2005122976 A JP 2005122976A JP 4660263 B2 JP4660263 B2 JP 4660263B2
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port
container
vacuum generator
air separator
circulation pump
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Japanese (ja)
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JP2006299933A5 (https=
JP2006299933A (ja
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博文 中山
孝久 関野
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Ebara Corp
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Ebara Corp
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  • Degasification And Air Bubble Elimination (AREA)
JP2005122976A 2005-04-20 2005-04-20 真空発生装置および該真空発生装置の起動方法 Expired - Lifetime JP4660263B2 (ja)

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JP2005122976A JP4660263B2 (ja) 2005-04-20 2005-04-20 真空発生装置および該真空発生装置の起動方法

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JP2005122976A JP4660263B2 (ja) 2005-04-20 2005-04-20 真空発生装置および該真空発生装置の起動方法

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JP2006299933A JP2006299933A (ja) 2006-11-02
JP2006299933A5 JP2006299933A5 (https=) 2007-07-05
JP4660263B2 true JP4660263B2 (ja) 2011-03-30

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108980120A (zh) * 2017-06-05 2018-12-11 深圳市和科达超声设备有限公司 真空发生器及其制造方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101133033B1 (ko) 2008-05-08 2012-04-04 가부시끼가이샤 다쓰노.메카트로닉스 펌프장치
CA2669521A1 (en) * 2008-06-20 2009-12-20 Gojo Industries, Inc. Diaphragm foam pump
CN105864112B (zh) * 2014-07-31 2018-11-09 何贞芳 一种采用潜水泵的出水压力可调的射流真空泵
CN105251241B (zh) * 2015-09-15 2018-01-30 京东方科技集团股份有限公司 除泡系统
JP6799733B2 (ja) * 2018-03-12 2020-12-16 国立研究開発法人産業技術総合研究所 ガス生産システム、及びガス生産方法
JP7786926B2 (ja) * 2021-11-24 2025-12-16 株式会社ディスコ バキューム装置および加工装置
CN118881604A (zh) * 2024-09-27 2024-11-01 台州天工医化设备有限公司 一种基于文丘里效应的真空发生装置及其工艺方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012599B2 (ja) * 1980-06-30 1985-04-02 三菱重工業株式会社 固形物の捕集装置
JPS5843909U (ja) * 1981-09-18 1983-03-24 トキコ株式会社 気液分離装置
JPS63111903U (https=) * 1987-01-08 1988-07-19
JPS63198799A (ja) * 1987-02-13 1988-08-17 Tatsuo Tsubokawa 真空ポンプ装置
JPH01123698A (ja) * 1987-11-05 1989-05-16 Taisei Corp 気液固体分離方法とその装置
JPH0356241Y2 (https=) * 1988-09-22 1991-12-17
JPH0396610A (ja) * 1989-09-08 1991-04-22 Nissan Motor Co Ltd ドライサンプ用オイルタンク

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108980120A (zh) * 2017-06-05 2018-12-11 深圳市和科达超声设备有限公司 真空发生器及其制造方法
CN108980120B (zh) * 2017-06-05 2021-08-31 深圳市和科达超声设备有限公司 真空发生器及其制造方法

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