JP4640924B2 - 磁気光学デバイスの製造方法 - Google Patents
磁気光学デバイスの製造方法 Download PDFInfo
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- JP4640924B2 JP4640924B2 JP2004270411A JP2004270411A JP4640924B2 JP 4640924 B2 JP4640924 B2 JP 4640924B2 JP 2004270411 A JP2004270411 A JP 2004270411A JP 2004270411 A JP2004270411 A JP 2004270411A JP 4640924 B2 JP4640924 B2 JP 4640924B2
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- single crystal
- film
- magneto
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/09—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/24—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates from liquids
- H01F41/28—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates from liquids by liquid phase epitaxy
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/09—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect
- G02F1/093—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect used as non-reciprocal devices, e.g. optical isolators, circulators
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/12—Function characteristic spatial light modulator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
- H01F10/20—Ferrites
- H01F10/24—Garnets
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Description
(a)ガーネット単結晶基板(例えばSGGG基板あるいはGGG基板)30の表面に鉄ガーネット単結晶膜32を液相エピタキシャル成長によって作製する工程、
(b)それを熱処理することにより、前記鉄ガーネット単結晶膜を非単結晶化した鉄ガーネット膜34に変換する工程、
(c)その非単結晶化した鉄ガーネット膜34の一部の領域(ピクセル間ギャップ部分に相当する領域)に、フォトレジスト36によるマスクを形成する工程、
(d)前記フォトレジストをマスクとしてエッチングし、非単結晶化した鉄ガーネット膜34の一部の領域(ピクセル間ギャップ部分に相当する領域)を残し他の部分を除去してピクセルに相当する領域のガーネット単結晶基板30を露出する工程、
(e)それらの上に磁性ガーネット膜38を液相エピタキシャル成長させる工程。
(a)ガーネット単結晶基板(例えばSGGG基板あるいはGGG基板)40の表面の一部(ピクセル部分)に金属マスク(例えばTiマスク)42を形成する工程、
(b)それらガーネット単結晶基板40及び金属マスク42の上に、鉄ガーネット膜44を気相エピタキシャル成長によって作製する工程、
(c)エッチングにより金属マスクを除去することで、ピクセル間ギャップ部分に鉄ガーネット膜44を残す工程、
(d)それを熱処理することで鉄ガーネット膜を非単結晶化した鉄ガーネット膜46にする工程、
(e)それらの上に磁性ガーネット膜48を液相エピタキシャル成長させる工程、
を具備している。
32 鉄ガーネット単結晶膜
34 非単結晶化した鉄ガーネット膜
36 フォトレジスト
38 磁性ガーネット膜
38a 磁性ガーネット膜領域(単結晶;ピクセル部)
38b 磁性ガーネット膜領域(非単結晶;ピクセル間ギャップ部)
Claims (7)
- 単結晶基板の表面に鉄ガーネット単結晶膜を作製する工程、それを熱処理することで前記単鉄ガーネット結晶膜を非単結晶化する工程、その非単結晶化した膜の一部の領域を除去して単結晶基板を露出する工程、それらの上に磁性膜を液相エピタキシャル成長させる工程を具備し、単結晶基板上に育成した磁性膜領域と非単結晶膜上に育成した磁性膜領域とで磁性膜の結晶構造が2次元的に異なるようにしたことを特徴とする磁気光学デバイスの製造方法。
- 単結晶基板の表面の一部の領域に鉄ガーネット単結晶膜を作製する工程、それを熱処理することで前記鉄ガーネット単結晶膜を非単結晶化する工程、それらの上に磁性膜を液相エピタキシャル成長させる工程を具備し、単結晶基板上に育成した磁性膜領域と非単結晶膜上に育成した磁性膜領域とで磁性膜の結晶構造が2次元的に異なるようにしたことを特徴とする磁気光学デバイスの製造方法。
- 単結晶基板がSGGGあるいはGGG単結晶基板であり、該単結晶基板上に作製され熱処理で非単結晶化される鉄ガーネット単結晶膜が、液相あるいは気相エピタキシャル法により育成した膜である請求項1又は2記載の磁気光学デバイスの製造方法。
- 非単結晶化のための熱処理を、還元雰囲気下500℃〜800℃で行う請求項3記載の磁気光学デバイスの製造方法。
- 非単結晶化のための熱処理を、酸化雰囲気下1200℃〜1400℃で行う請求項3記載の磁気光学デバイスの製造方法。
- 磁性膜をエピタキシャル成長させた後、酸化雰囲気下900℃〜1150℃で熱処理することにより保磁力を低減する請求項4又は5記載の磁気光学デバイスの製造方法。
- 磁気光学デバイスが、磁気光学空間光変調器であり、単結晶基板上に育成した磁性膜領域を2次元アレイ状に配列してピクセルとし、それらピクセルの間に位置する非単結晶膜上に育成した磁性膜領域によって各ピクセルを磁気的に分離した請求項6記載の磁気光学デバイスの製造方法。
Priority Applications (2)
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JP2004270411A JP4640924B2 (ja) | 2004-09-16 | 2004-09-16 | 磁気光学デバイスの製造方法 |
PCT/JP2005/016967 WO2006030836A1 (ja) | 2004-09-16 | 2005-09-14 | 磁気光学デバイスの製造方法 |
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JP2004270411A JP4640924B2 (ja) | 2004-09-16 | 2004-09-16 | 磁気光学デバイスの製造方法 |
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JP2006084871A JP2006084871A (ja) | 2006-03-30 |
JP4640924B2 true JP4640924B2 (ja) | 2011-03-02 |
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WO (1) | WO2006030836A1 (ja) |
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JP4720730B2 (ja) * | 2006-01-27 | 2011-07-13 | Tdk株式会社 | 光学素子の製造方法 |
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2004
- 2004-09-16 JP JP2004270411A patent/JP4640924B2/ja not_active Expired - Fee Related
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- 2005-09-14 WO PCT/JP2005/016967 patent/WO2006030836A1/ja not_active Application Discontinuation
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JP2006084871A (ja) | 2006-03-30 |
WO2006030836A1 (ja) | 2006-03-23 |
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