JP4634379B2 - 有機電子デバイス製造の際の有機層の除去方法およびその方法によって形成される有機電子デバイス - Google Patents

有機電子デバイス製造の際の有機層の除去方法およびその方法によって形成される有機電子デバイス Download PDF

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Publication number
JP4634379B2
JP4634379B2 JP2006521256A JP2006521256A JP4634379B2 JP 4634379 B2 JP4634379 B2 JP 4634379B2 JP 2006521256 A JP2006521256 A JP 2006521256A JP 2006521256 A JP2006521256 A JP 2006521256A JP 4634379 B2 JP4634379 B2 JP 4634379B2
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Japan
Prior art keywords
conductive
layer
organic
conductive member
organic layer
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Expired - Fee Related
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JP2006521256A
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English (en)
Japanese (ja)
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JP2007500919A5 (enExample
JP2007500919A (ja
Inventor
プラカシュ シバ
リー フェン
アマリリス ロペス グティエレス リネッテ
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EIDP Inc
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EI Du Pont de Nemours and Co
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Publication date
Priority claimed from US10/625,112 external-priority patent/US6953705B2/en
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JP2007500919A publication Critical patent/JP2007500919A/ja
Publication of JP2007500919A5 publication Critical patent/JP2007500919A5/ja
Application granted granted Critical
Publication of JP4634379B2 publication Critical patent/JP4634379B2/ja
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
    • H10K85/1135—Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/114—Poly-phenylenevinylene; Derivatives thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight
    • H10K85/611—Charge transfer complexes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight
    • H10K85/649—Aromatic compounds comprising a hetero atom
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight
    • H10K85/649—Aromatic compounds comprising a hetero atom
    • H10K85/656—Aromatic compounds comprising a hetero atom comprising two or more different heteroatoms per ring
    • H10K85/6565—Oxadiazole compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
JP2006521256A 2003-07-22 2004-07-22 有機電子デバイス製造の際の有機層の除去方法およびその方法によって形成される有機電子デバイス Expired - Fee Related JP4634379B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/625,112 US6953705B2 (en) 2003-07-22 2003-07-22 Process for removing an organic layer during fabrication of an organic electronic device
US10/890,360 US7235420B2 (en) 2003-07-22 2004-07-13 Process for removing an organic layer during fabrication of an organic electronic device and the organic electronic device formed by the process
PCT/US2004/023671 WO2005057681A1 (en) 2003-07-22 2004-07-22 Process for removing an organic layer during fabrication of an organic electronic device and the organic electronic device formed by the process

Publications (3)

Publication Number Publication Date
JP2007500919A JP2007500919A (ja) 2007-01-18
JP2007500919A5 JP2007500919A5 (enExample) 2007-09-13
JP4634379B2 true JP4634379B2 (ja) 2011-02-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006521256A Expired - Fee Related JP4634379B2 (ja) 2003-07-22 2004-07-22 有機電子デバイス製造の際の有機層の除去方法およびその方法によって形成される有機電子デバイス

Country Status (4)

Country Link
EP (1) EP1647064B1 (enExample)
JP (1) JP4634379B2 (enExample)
KR (1) KR101207073B1 (enExample)
WO (1) WO2005057681A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007220360A (ja) * 2006-02-14 2007-08-30 Tokyo Electron Ltd 発光素子、発光素子の製造方法および基板処理装置
US8115326B2 (en) * 2006-11-30 2012-02-14 Corning Incorporated Flexible substrates having a thin-film barrier
JP2008311037A (ja) * 2007-06-13 2008-12-25 Panasonic Electric Works Co Ltd 面発光体の製造方法
US7833074B2 (en) 2007-09-04 2010-11-16 Global Oled Technology Llc Method of making a top-emitting OLED device having improved power distribution
JP2010009779A (ja) * 2008-06-24 2010-01-14 Tokyo Electron Ltd プラズマ処理装置、プラズマ処理方法及び有機電子デバイス
JP5699064B2 (ja) * 2011-09-29 2015-04-08 富士フイルム株式会社 カラーフィルタの製造方法
WO2016172740A2 (en) * 2015-11-10 2016-10-27 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Etching reactants and plasma-free oxide etching processes using the same
EP3605587A4 (en) * 2017-03-27 2020-12-30 Kanto Denka Kogyo Co., Ltd. DRY ENGRAVING OR DRY CLEANING PROCESS

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000512428A (ja) * 1996-06-12 2000-09-19 ザ トラスティーズ オブ プリンストン ユニバーシテイ 有機多色表示器製造のための薄膜パターン化
JP3653942B2 (ja) * 1997-07-24 2005-06-02 松下電器産業株式会社 有機発光素子及びその製造方法
US6153254A (en) * 1998-09-30 2000-11-28 U.S. Philips Corporation Method and device for manufacturing an electroluminescent display screen
GB9928014D0 (en) * 1999-11-26 2000-01-26 Cambridge Display Tech Ltd Method of producing an organic light-emissive device
US6699728B2 (en) * 2000-09-06 2004-03-02 Osram Opto Semiconductors Gmbh Patterning of electrodes in oled devices
SG115381A1 (en) * 2001-06-20 2005-10-28 Univ Singapore Removal of organic layers from organic electronic devices
JP2003017251A (ja) * 2001-06-28 2003-01-17 Canon Electronics Inc 有機エレクトロルミネセンス表示装置の製造方法

Also Published As

Publication number Publication date
KR20060057578A (ko) 2006-05-26
KR101207073B1 (ko) 2012-11-30
EP1647064B1 (en) 2011-12-07
JP2007500919A (ja) 2007-01-18
EP1647064A1 (en) 2006-04-19
WO2005057681A1 (en) 2005-06-23
WO2005057681A8 (en) 2005-08-11

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