JP4626056B2 - UV irradiation equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an improvement of an ultraviolet irradiation device.
[0002]
[Prior art]
Usually, organic substances adhere to the surface of optical parts such as lenses or plastic electrical parts. If an organic substance adheres to the surface of an optical component such as a lens or a plastic electrical component, for example, the adhesion to the coating film is deteriorated, which causes frequent defective products. Therefore, conventionally, the active oxygen separated from the ozone generated by the action of ultraviolet rays is used to clean organic substances adhering to the surface of optical components and to modify the surface of electrical components, and to adhere to the coating film. It has been done to improve.
[0003]
As shown in FIG. 4, a conventional ultraviolet irradiation device is configured such that a reflector 2 is housed inside an irradiation device body 1 and a straight tube light source 3 is mounted on the inner surface of the reflector 2. It is. In addition, an inert gas is injected into the light source storage chamber 4 of the ultraviolet irradiation device 1 to prevent the ultraviolet rays irradiated from the ultraviolet light source from being attenuated.
[0004]
[Problems to be solved by the invention]
By turning on the light source, heat is accumulated inside the ultraviolet irradiation device 1 and the temperature becomes high, so that the ultraviolet light source cannot fully perform, and the high heat causes damage to the irradiated object and surrounding devices. There is a drawback that will give.
[0005]
The present invention has been invented in view of the above points, and the ultraviolet irradiation device does not become high temperature, the ultraviolet light source can sufficiently exert its ability, and damages the irradiated object and surrounding devices. Further, an object of the present invention is to provide an ultraviolet irradiation device that does not endanger the operator.
[0006]
[Means for Solving the Problems]
Means for solving the problems of the present invention will be described below. That is, the invention described in claim 1 is configured by arranging the ultraviolet transmissive glass on the lower surface of the straight tube light source mounted in the horizontal direction in the light source storage chamber of the irradiation apparatus main body.
In addition, a water-cooled heat sink having a number of vertical grooves along the straight tube light source and configured to allow cooling air to flow in the same direction is provided above the straight tube light source, and one end of the straight tube light source is provided. A fan is disposed in the cooling air, and the cooling air cooled by the water-cooled heat sink is blown from the fan toward the straight tube light source.
[0007]
According to the ultraviolet irradiation device of the first aspect, the ultraviolet irradiation device does not reach a high temperature, and the ultraviolet light source can sufficiently exhibit its ability. Further, the work can be performed without damaging the irradiated object and surrounding devices.
[0008]
According to a second aspect of the present invention, a reflector is disposed across the upper surface and both side surfaces in the longitudinal direction of the straight tube light source in the ultraviolet irradiation device according to the first aspect , and the lower end of the reflector is an ultraviolet transmissive glass. It is constituted close to.
[0009]
According to the ultraviolet irradiating device of claim 2, the cooling air is hardly blown to the outside of the reflector, and the light source is close to the irradiated object, so that the ultraviolet irradiating device is efficiently cooled. In addition, the object to be irradiated can be more effectively cleaned and modified.
[0010]
In the invention according to claim 3, a heat conductor is arranged on the upper surface of the water-cooled heat sink in the ultraviolet irradiation device according to claim 1 and claim 2, and a circuit board is arranged on the upper surface of the heat conductor, The circuit components are configured to be cooled.
[0011]
According to the ultraviolet irradiation device of the third aspect, the circuit components inside the ultraviolet irradiation device are not adversely affected by heat.
[0012]
According to a fourth aspect of the present invention, the light source attached to the ultraviolet irradiation device according to the first to third aspects uses an excimer lamp, and the light source storage chamber is configured as an inert gas atmosphere.
[0013]
According to the ultraviolet irradiation device of the fourth aspect, ultraviolet light having a wavelength of 172 nm is effectively generated from the excimer lamp, and cleaning or modification can be performed efficiently. Further, since the light source storage chamber is configured as an inert gas atmosphere, it is possible to efficiently use ultraviolet rays having a wavelength of 172 nm generated from an excimer lamp.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
The present invention will be described below with reference to FIGS. FIG. 1 is a perspective view of a sealed ultraviolet irradiation apparatus according to the present invention, and FIG. 2 is a front view of FIG. 1 and 2,
Reference numeral 11 denotes an irradiation apparatus body, which is configured in a box shape. The irradiation device main body 11 is formed on the base 12 so as to be freely opened and closed. Reference numeral 13 denotes a straight tube type light source mounted in the light source storage chamber 14 of the irradiation apparatus main body 11, and is configured by mounting, for example, four 200 watt excimer lamps at the same interval in the horizontal plane direction. The light source storage chamber 14 is configured as an inert gas atmosphere. As the inert gas, for example, nitrogen gas is used.
[0015]
Reference numeral 20 denotes an ultraviolet light transmitting glass supported on the lower surface of the straight tube light source, and is made of, for example, synthetic quartz glass. A water-cooled heat sink 21 is provided on the top of the straight tube light source, and has a number of vertical grooves 22 along the straight tube light source. The water-cooled heat sink is composed of an aluminum material. is there. Reference numeral 23 denotes a fan disposed at one end of the straight tube light source, which is configured to suck the cooling air cooled by the water-cooled heat sink and blow it toward the straight tube light source. Thereafter, the exhaust air that has cooled the light source flows into the water-cooled heat sink, is cooled again, and is circulated by a fan.
[0016]
Reference numeral 30 denotes a reflecting plate arranged over the upper surface and both side surfaces in the longitudinal direction of the straight tube light source, and the lower end is close to the ultraviolet light transmitting glass so that the cooling air does not escape. The distance between the reflecting plate 30 and the ultraviolet ray transmitting glass is set close to, for example, about 2 mm.
[0017]
Reference numeral 40 denotes a heat conductor disposed on the upper surface of the water-cooled heat sink, and is formed into a plate shape with, for example, an aluminum material. Reference numeral 41 denotes a circuit board that is disposed in contact with the upper surface of the heat conductor 40, and is configured so that the circuit components are effectively cooled.
[0018]
FIG. 3 is a front view of another ultraviolet irradiation apparatus according to the present invention. 3 differs from that shown in FIG. 2 in that, for example, a rectangular cooling pipe 50 that is bent into a plurality of strips is provided on the upper surface of the water-cooled heat sink. The other structure is the same as that of the sealed ultraviolet irradiation apparatus shown in FIG.
[0019]
Next, cleaning or modification by the above-described ultraviolet irradiation apparatus will be described.
(1) This ultraviolet irradiation device is installed in a clean room, for example. Then, the irradiation device main body 11 configured to be openable and closable with respect to the base 12 is opened, and an irradiated object 60 such as an optical component such as a lens or a plastic electrical component is disposed between the two, and the post-irradiation device The main body 11 is closed.
(2) Next, turn on the excimer lamp.
Here, ultraviolet rays are irradiated for about 5 to 60 seconds to clean organic substances on the surface of optical components such as lenses, or to modify the surface of plastic electrical components.
{Circle around (3)} After this, the cleaned or modified optical parts such as lenses and plastic electrical parts are replaced with unprocessed ones.
[0020]
When the excimer lamp is turned on, the organic matter on the surface of the optical component such as a lens or the plastic electrical component is effectively cleaned or the surface is effectively modified mainly by the ultraviolet ray having a wavelength of 172 nm. In addition, cleaning of inorganic materials such as glass plates can be performed effectively. The ultraviolet rays with a wavelength of 172 nm emitted from the excimer lamp can be processed at a speed twice to three times faster than the ultraviolet rays with wavelengths of 185 nm and 254 nm emitted from the conventional low-pressure mercury lamp.
According to the conventional low-pressure mercury lamp, oxygen in the air absorbs ultraviolet rays of 185 nm to generate ozone, and the generated ozone absorbs ultraviolet rays of 254 nm and is decomposed into active oxygen. Surface modification such as decomposing organic substances on the surface of the irradiated object or making the surface hydrophilic is performed by energy.
On the other hand, when an ultraviolet ray having a wavelength of 172 nm emitted from the excimer lamp is irradiated to oxygen in the air where the irradiated object is arranged, active oxygen is directly generated. This is because the ultraviolet rays emitted from the excimer lamp have strong energy at a short wavelength as compared with the conventional low-pressure mercury lamp, so that the reaction speed is increased and the process can be performed at a high speed.
[0021]
【The invention's effect】
According to the ultraviolet irradiation device according to claim 1 described above, the ultraviolet irradiation device does not reach a high temperature, the light source can sufficiently exert its ability, and damages the irradiated object and surrounding devices. In addition, there is a special effect that the worker can be efficiently cleaned or modified without being in danger.
[0022]
According to the ultraviolet irradiation device described in claim 2, the cooling air is less likely to be blown to the outside of the reflector, and the light source is close to the irradiated object. There is a special effect that can be cooled and that the irradiated object can be more effectively cleaned or modified.
[0023]
According to the ultraviolet irradiation device described in claim 3, there is a special effect that the circuit components inside the ultraviolet irradiation device are not adversely affected by heat.
[0024]
According to the ultraviolet irradiation device described in claim 4, the ultraviolet rays of 172 nm are effectively generated, cleaning or modification can be performed efficiently, and the light source storage chamber is configured as an inert gas atmosphere. Therefore, there is a special effect that the 172 nm ultraviolet rays generated from the excimer lamp can be efficiently used.
[Brief description of the drawings]
FIG. 1 is a perspective view of an ultraviolet irradiation apparatus according to the present invention.
FIG. 2 is a front view of FIG.
FIG. 3 is a front view of another ultraviolet irradiation apparatus according to the present invention.
FIG. 4 is a front view of a conventional ultraviolet irradiation device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 Irradiation device main body 12 Base 13 Straight tube light source 14 Light source storage chamber 20 Ultraviolet transmissive glass 21 Water-cooled heat sink 22 Vertical groove 23 Fan 30 Reflector 40 Heat conductor 41 Circuit board 50 Cooling pipe 60

Claims (4)

An ultraviolet transmissive glass is arranged on the lower surface of the straight tube light source mounted horizontally in the light source storage chamber of the irradiation device main body, and a number of vertical light sources are arranged on the upper portion of the straight tube light source along the straight tube light source. A water-cooled heat sink having a groove and configured to flow cooling air in the same direction is provided, and a fan is disposed at one end of the straight tube light source, and the cooling air cooled by the water-cooled heat sink is An ultraviolet irradiation device configured to be blown toward a straight tube light source. A reflecting plate is arranged over the upper surface and both side surfaces in the longitudinal direction of the straight tube light source, and the lower end of the reflecting plate is close to the ultraviolet ray transmitting glass so that the cooling air does not escape. Item 1. An ultraviolet irradiation device according to Item 1. 3. A heat conductor is disposed on the upper surface of the water-cooled heat sink, and a circuit board is disposed on the upper surface of the heat conductor so that the circuit components are cooled. The ultraviolet irradiation device described. 4. The ultraviolet irradiation apparatus according to claim 1, wherein an excimer lamp is used as the straight tube light source, and the light source storage chamber is an inert gas atmosphere.

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