JPH0768163A - Ultraviolet irradiation device - Google Patents
Ultraviolet irradiation deviceInfo
- Publication number
- JPH0768163A JPH0768163A JP13240794A JP13240794A JPH0768163A JP H0768163 A JPH0768163 A JP H0768163A JP 13240794 A JP13240794 A JP 13240794A JP 13240794 A JP13240794 A JP 13240794A JP H0768163 A JPH0768163 A JP H0768163A
- Authority
- JP
- Japan
- Prior art keywords
- reflector
- cover
- irradiation device
- cooling
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Supply, Installation And Extraction Of Printed Sheets Or Plates (AREA)
- Coating Apparatus (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は紫外線照射装置の改良に
関し、特に本体内部に取り付けた桶状の反射体の改良に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of an ultraviolet irradiation device, and more particularly to an improvement of a trough-shaped reflector mounted inside a main body.
【0002】[0002]
【従来の技術】従来、箱状の紫外線照射装置の下面開口
部にガラス、紙あるいは樹脂等の表面に紫外線硬化樹脂
を被着した被硬化材(ワーク)をコンベアで搬送し、同
装置本体の内部に配置した紫外線硬化用光源により前記
ワークの表面を照射することにより前記樹脂を硬化する
ことが行なわれている。従来の紫外線照射装置は図5の
一部縦断側面図に示すように、照射装置本体21の内部
に桶状の反射体23を取り付け、又、反射体の下面中央
に直管状の高圧放電ランプ22を配置してなる。なお、
前記同反射体は放電ランプから照射される紫外線を装置
の下面に配置したコンベア上のワークに反射集光させる
ため、断面が回転楕円状の曲線形状となっている。2. Description of the Related Art Conventionally, a material to be cured (a work) having an ultraviolet curable resin adhered on the surface of glass, paper, resin or the like is conveyed by a conveyor to a lower opening of a box-shaped ultraviolet irradiation device by a conveyor, The resin is cured by irradiating the surface of the work with an ultraviolet curing light source arranged inside. As shown in the partially longitudinal side view of FIG. 5, the conventional ultraviolet irradiation device has a trough-shaped reflector 23 mounted inside the irradiation device main body 21, and a straight tubular high-pressure discharge lamp 22 in the center of the lower surface of the reflector. It will be arranged. In addition,
The reflector has a spheroidal curved cross section for reflecting and condensing the ultraviolet light emitted from the discharge lamp on the work on the conveyor arranged on the lower surface of the device.
【0003】又、前記反射体23はワークに対する熱的
影響を抑えるために、紫外線を反射し熱線を吸収するガ
ラス部材で構成される。又、反射体の頂部には通風孔2
4を設けており、装置本体21の開口部から冷却風を送
り込み、前記通風孔から上面に排気して放電ランプ22
及び反射体23を冷却している。しかし、ワークに対す
る熱的影響を少なくするためには、反射体によりランプ
からの熱を多く吸収しなければならないが、その熱吸収
効率に応じて反射体を冷却しないと、反射体にクラック
が生じるという欠点がある。Further, the reflector 23 is composed of a glass member which reflects ultraviolet rays and absorbs heat rays in order to suppress thermal influence on the work. In addition, a ventilation hole 2 is provided on the top of the reflector.
4, the cooling air is sent from the opening of the apparatus main body 21 and exhausted to the upper surface from the ventilation hole to discharge the discharge lamp 22.
And the reflector 23 is cooled. However, in order to reduce the thermal effect on the work, a large amount of heat from the lamp must be absorbed by the reflector, but if the reflector is not cooled according to its heat absorption efficiency, the reflector will crack. There is a drawback that.
【0004】そこで、図3の一部縦断側面図に示すよな
紫外線照射装置が提案されている。照射装置本体21の
内部に桶状の反射体23を取り付け、又、反射体の下面
中央に直管状の高圧放電ランプ22を配置してなる。な
お、前記同反射体は放電ランプから照射される紫外線を
装置の下面に配置したコンベア上のワークに反射集光さ
せるため、断面が回転楕円状の曲線形状となっている。
又、前記反射体23は放電ランプ22からの紫外線及び
熱線により、熱膨張して早期に劣化あるいは変形が生じ
るので、これを防止するために反射体の外周面に密着し
て金属製部材で構成した覆体を24を配置してなり、該
覆体24の外周面には複数の冷却用放熱フィン25が所
定の間隔で設けられている。Therefore, an ultraviolet irradiation device as shown in the partially longitudinal side view of FIG. 3 has been proposed. A tub-shaped reflector 23 is attached inside the irradiation device main body 21, and a straight tubular high-pressure discharge lamp 22 is arranged in the center of the lower surface of the reflector. The reflector has a spheroidal curved cross section for reflecting and condensing the ultraviolet rays emitted from the discharge lamp onto the work on the conveyor arranged on the lower surface of the apparatus.
Further, the reflector 23 is thermally expanded by ultraviolet rays and heat rays from the discharge lamp 22 and is deteriorated or deformed at an early stage. To prevent this, the reflector 23 is closely attached to the outer peripheral surface of the reflector and is made of a metal member. The cover 24 is arranged, and a plurality of cooling radiating fins 25 are provided on the outer peripheral surface of the cover 24 at predetermined intervals.
【0005】又、この種紫外線照射装置は、前記のよう
に装置本体内部が高温となるので、本体21の下面開口
部から冷却風を送風して放電ランプ22を冷却し、反射
体23の頂部通風孔26を介し、本体の上面に設けた排
気筒27を通して外部に排出される。この際、冷却風は
反射体の内面及び放電ランプを冷却してランプの壁面温
度を下げるばかりでなく、反射体に密着した覆体24の
外面をも冷却することとなり、放熱フィン25により覆
体24及び反射体25を冷却することとなる。In addition, since the inside of the main body of this type of ultraviolet irradiation device has a high temperature as described above, cooling air is blown from the lower opening of the main body 21 to cool the discharge lamp 22 and the top of the reflector 23. The air is exhausted to the outside through the ventilation hole 26 and the exhaust pipe 27 provided on the upper surface of the main body. At this time, the cooling air not only cools the inner surface of the reflector and the discharge lamp to lower the temperature of the wall surface of the lamp, but also cools the outer surface of the cover 24 that is in close contact with the reflector. 24 and the reflector 25 will be cooled.
【0006】しかし、この構造の場合も放電ランプの入
力電力が20KW以上の高出力の場合や、反射体として
その内面に熱線を吸収し紫外線を反射する皮膜を被着し
た金属製部材を使用した場合、覆体の放熱フィンを形成
するだけでは十分に反射体の熱膨張により劣化等を抑え
ることはできないという問題がある。However, even in the case of this structure, when the input power of the discharge lamp is a high output of 20 KW or more, or as the reflector, a metal member coated with a coating that absorbs heat rays and reflects ultraviolet rays is used as the reflector. In this case, there is a problem that deterioration and the like due to thermal expansion of the reflector cannot be sufficiently suppressed only by forming the radiation fin of the cover.
【0007】[0007]
【発明が解決しようとする課題】そこで、冷却風の風量
を大きくして冷却効果を上げるようにすることも考えら
れるが、コスト高になるばかりか、ワークに対する冷却
風の悪影響が生じるという問題がある。又、図4に示す
ように、反射体23の覆体24の外面に放熱フィン25
と共に水冷用の金属製パイプ27を取り付ける構造が提
案されている。そして、前記パイプに冷却水を流通して
水冷し、併せ空冷することにより冷却効果が上がるとい
う利点がある。しかし、覆体24を水冷構造とする場
合、覆体24の窪み部28に水冷用の金属パイプ27を
取り付けて接触させているが、この構造では水冷効率は
金属パイプ27と覆体24の接触面積で決ってしまい、
接触面積を大きくすることには限界がある。又、金属パ
イプ27と覆体24の窪み部を完全に密着することは不
可能であり、十分な冷却効果が得られないという問題が
ある。Therefore, it is conceivable to increase the cooling air volume to increase the cooling effect, but there is a problem that not only the cost becomes high, but also the work is adversely affected by the cooling air. is there. In addition, as shown in FIG. 4, heat radiation fins 25 are formed on the outer surface of the cover 24 of the reflector 23.
At the same time, a structure in which a metal pipe 27 for water cooling is attached is proposed. Then, there is an advantage that the cooling effect is enhanced by circulating cooling water through the pipe for water cooling and air cooling. However, when the cover 24 has a water-cooling structure, the metal pipe 27 for water cooling is attached to the recess 28 of the cover 24 and brought into contact therewith. In this structure, the water cooling efficiency is the contact between the metal pipe 27 and the cover 24. It is decided by the area,
There is a limit to increasing the contact area. Further, it is impossible to completely adhere the metal pipe 27 and the recessed portion of the cover 24, and there is a problem that a sufficient cooling effect cannot be obtained.
【0008】本発明は、前記の点に鑑みなされたもので
あり、反射体の耐熱性が向上して、反射体の熱膨張によ
る劣化および変形を防止し、安定に紫外線硬化性能を有
するばかりでなく、コスト高となることがなくワークに
対する熱的影響が生じないので、ワークの連続処理が可
能な紫外線照射装置を提供することを目的とする。The present invention has been made in view of the above points, and the heat resistance of the reflector is improved, deterioration and deformation due to thermal expansion of the reflector are prevented, and stable ultraviolet curing performance is provided. It is an object of the present invention to provide an ultraviolet irradiating device capable of continuously treating a work, since it does not increase the cost and does not cause a thermal influence on the work.
【0009】[0009]
【課題を解決するための手段】本発明に係わる紫外線照
射装置は、下面を開口し上面に排気筒を設けた箱状照射
装置本体の内部に桶状の反射体を取り付けてなり該反射
体の光学上の焦点近傍に直管状の高圧放電ランプを配置
してなる紫外線照射装置において、前記反射体の外周面
に金属製部材で構成した覆体を密着して配置してなり、
該覆体は外周面に所定間隔で複数の放熱フィンを形成す
ると共に該覆体の内部に所定間隔で複数の冷却水空孔を
一体的に形成してなる。又、前記反射体はその内面を高
純度アルミニウムの鏡面仕上げ部材で構成してなる。更
に、前記反射体はその内面に熱線を吸収し紫外線を反射
する皮膜を被着した金属製部材で構成してなる。An ultraviolet irradiating device according to the present invention comprises a box-shaped irradiating device main body having an opening on the lower surface and an exhaust pipe on the upper surface, and a trough-like reflecting member is attached to the inside of the irradiating member. In an ultraviolet irradiation device in which a straight tubular high-pressure discharge lamp is arranged in the vicinity of an optical focus, a cover made of a metal member is closely arranged on the outer peripheral surface of the reflector,
The cover has a plurality of radiating fins formed at predetermined intervals on the outer peripheral surface thereof, and a plurality of cooling water holes are integrally formed inside the cover at predetermined intervals. The inner surface of the reflector is made of a high-purity aluminum mirror finish member. Further, the reflector is composed of a metal member having an inner surface coated with a film that absorbs heat rays and reflects ultraviolet rays.
【0010】[0010]
【作用】前記構成により、覆体の内部に直接、水を通す
空孔を形成して水冷するので熱吸収が大きく、冷却効率
が極めて良い。又、その空孔により構成される冷却水用
通路の位置は反射体が最も高熱になる部分にあり、かつ
冷却水用通路の間には空冷用の冷却フィンが適切な間隔
で設けているので、更に冷却効率を高めることができ、
万一冷却水が流れなくなった場合でも反射体が使用不可
能な熱変形を起こすことはない。With the above-described structure, since holes for passing water are directly formed inside the cover for water cooling, heat absorption is large and cooling efficiency is extremely good. Further, the position of the cooling water passage constituted by the holes is at the portion where the reflector has the highest heat, and the cooling fins for air cooling are provided at appropriate intervals between the cooling water passages. , The cooling efficiency can be further increased,
Even if the cooling water stops flowing, the reflector will not cause unusable thermal deformation.
【0011】[0011]
【実施例】以下、本発明の一実施例を図1及び図2に基
づき説明する。1は断面長方形の箱形に構成してなる紫
外線照射装置本体であり、下面に開口部を上面に排気筒
2を形成してなる。3は紫外線照射装置本体1の内部に
配置してなる桶状の反射体であって、その断面形状は回
転放物面状に形成し、高純度アルミニウム反射板を用
い、その内面を鏡面仕上げ処理している。又、この他に
ステンレス製の金属製反射板を用い、その内面に熱線を
吸収し紫外線を反射する皮膜、例えばTiO2等の酸化
金属蒸着膜を被着して構成してある。なお、同皮膜を被
着した反射板は、240nmから460nmの波長領域
で90%以上の紫外線を反射し、かつ500nmから1
200nmの波長領域で30%以下の反射特性を有する
ように構成する。4は反射体3の外周面に密着して配置
した覆体であって、アルミニウム押出し材等の金属製部
材で構成する。5は覆体4の内部に所定間隔で形成した
複数の冷却水用空孔であり、冷却水を流通するように構
成している。又、6は覆体5の外周面の冷却水用空孔5
の間に所定間隔で形成した多数の放熱フィンである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. Reference numeral 1 is a main body of an ultraviolet irradiation device configured in a box shape having a rectangular cross section, and has an opening on the lower surface and an exhaust tube 2 on the upper surface. Reference numeral 3 denotes a trough-shaped reflector disposed inside the ultraviolet irradiation apparatus main body 1, the cross-section of which is formed into a paraboloid of revolution, and a high-purity aluminum reflector is used, and its inner surface is mirror-finished. is doing. In addition to this, a stainless metal reflection plate is used, and a film that absorbs heat rays and reflects ultraviolet rays, for example, a metal oxide vapor deposition film such as TiO 2 is deposited on the inner surface thereof. The reflection plate coated with the same film reflects 90% or more of ultraviolet rays in the wavelength region of 240 nm to 460 nm and has a wavelength of 500 nm to 1 nm.
It is configured to have a reflection characteristic of 30% or less in the wavelength region of 200 nm. Reference numeral 4 denotes a cover which is arranged in close contact with the outer peripheral surface of the reflector 3 and is composed of a metal member such as an aluminum extruded material. Reference numeral 5 denotes a plurality of cooling water holes formed inside the cover body 4 at predetermined intervals and configured to allow the cooling water to flow therethrough. Further, 6 is a hole 5 for cooling water on the outer peripheral surface of the cover 5.
It is a large number of heat radiation fins formed at predetermined intervals between.
【0012】7は反射体3の内面のその焦点位置に配置
した、例えば20キロワットの高圧放電ランプであり、
両端に電極を封着し、内部に水銀、希ガスと共に金属ハ
ロゲン化物が封入してある。8は反射体3を紫外線照射
装置本体1に支持するための支持具、9は放電ランプ7
を固定するための支持板、10はソケット、11は接続
碍子である。Numeral 7 is a high-pressure discharge lamp of, for example, 20 kilowatts, which is arranged at the focal position on the inner surface of the reflector 3.
Electrodes are sealed at both ends, and a metal halide is sealed inside together with mercury and a rare gas. Reference numeral 8 is a support tool for supporting the reflector 3 on the ultraviolet irradiation apparatus main body 1, and 9 is a discharge lamp 7.
Is a support plate for fixing the socket, 10 is a socket, and 11 is a connection insulator.
【0013】そして、紫外線照射装置の下面開口部にそ
の表面に紫外線硬化樹脂を被着したワークをコンベアで
搬送し、同装置本体の内部に配置した高圧放電ランプに
よりワークの表面を照射することにより前記樹脂を硬化
することが行なわれる。ところで、硬化の際、高圧放電
ランプは800℃以上の高温となるので、装置の運転中
にランプの管壁を冷却するための冷却風が取り入れられ
る。その冷却風は、実線矢印で示すように、本体1の下
面開口部から取り入れられ、ランプ7の管壁に当り冷却
した後に、反射体3の上部に形成した通風孔3a及び本
体1の排気筒2を通して外部に排出される。又、冷却風
の一部は覆体4の放熱フィン6に接触し、冷却した後排
気筒2を通して外部に排出される。Then, the work whose UV-curable resin is adhered to the surface of the lower surface of the ultraviolet irradiation device is conveyed by a conveyor, and the surface of the work is irradiated by a high pressure discharge lamp arranged inside the main body of the device. Curing the resin is performed. By the way, since the high pressure discharge lamp has a high temperature of 800 ° C. or higher during curing, cooling air for cooling the tube wall of the lamp is introduced during the operation of the apparatus. The cooling air is taken in from the opening on the lower surface of the main body 1 as shown by the solid line arrow, hits the tube wall of the lamp 7 and is cooled, and then the ventilation hole 3a formed in the upper portion of the reflector 3 and the exhaust pipe of the main body 1 are cooled. 2 is discharged to the outside. Further, a part of the cooling air comes into contact with the heat radiation fins 6 of the cover 4, is cooled, and is then discharged to the outside through the exhaust pipe 2.
【0014】又、冷却水は片側(図2の左側)の覆体4
の上部冷却水用空孔5aを流れ、終端部で反対側(図2
の右側)の上部冷却水用空孔5aを通り、その後下部冷
却水用空孔5b(図2の右側)を通り最後に覆体4の下
部冷却水用空孔5b(図2左側)に戻り外部の冷却装置
に入り、更に循環するように構成されている。そして、
覆体4は水冷されるので反射体3を冷却し、かつランプ
7の管壁付近の空気までも冷却することとなり、ランプ
管壁を適温に冷却する風量は、覆体を水冷にしない場合
の約半分ですむ。又、反射体の温度は覆体を水冷にしな
い場合に対して著しく低いので、反射体の変形が生じる
ことがなく、反射光のずれによる紫外線硬化性能が低下
することはないし、反射体の劣化が生じることもない。Further, the cooling water is covered on one side (left side in FIG. 2) of the cover 4.
Flow through the upper cooling water hole 5a at the opposite end (see FIG. 2).
(On the right side of FIG. 2), passing through the upper cooling water hole 5a, then passing through the lower cooling water hole 5b (right side of FIG. 2) and finally returning to the lower cooling water hole 5b (left side of FIG. 2) of the cover 4. It is configured to enter an external cooling device and further circulate. And
Since the cover 4 is water-cooled, the reflector 3 is also cooled, and even the air near the tube wall of the lamp 7 is cooled. Therefore, the air volume for cooling the lamp tube wall to an appropriate temperature is the same as when the cover is not water-cooled. It takes about half. Further, since the temperature of the reflector is significantly lower than that when the cover is not water-cooled, the reflector is not deformed, the ultraviolet curing performance is not deteriorated by the deviation of the reflected light, and the deterioration of the reflector is prevented. Does not occur.
【0015】更に、上記した紫外線照射装置において、
ワーク表面の紫外線硬化樹脂を紫外線で硬化する場合、
前記したように覆体の外壁内部の冷却水用空孔に冷却水
を流すと同時にランプを点灯し、装置本体の下面開口部
から冷却風を吸引する。この際、反射体3は冷却水で冷
却されるので熱膨張が生じない。同装置において、ラン
プからワークまでの距離を、例えば10センチメートル
とした場合、ワーク表面の温度上昇は約10度となり、
紙あるいは樹脂等のいずれについても実施できる。又、
万一冷却水が流れなくなった場合、多数の放熱フィン6
を形成し空冷しているので、反射体の一時的な熱膨張を
抑えることができる。更に、高圧放電ランプの容量が小
さい場合、水冷あるいは空冷の一方を中止し、一つの冷
却構造での装置の運転が可能である。Further, in the above ultraviolet irradiation device,
When the UV curable resin on the surface of the work is cured with UV,
As described above, the cooling water is caused to flow into the cooling water holes inside the outer wall of the cover body, and at the same time, the lamp is turned on to suck the cooling air from the lower opening of the apparatus body. At this time, since the reflector 3 is cooled by the cooling water, thermal expansion does not occur. In the same device, when the distance from the lamp to the work is set to, for example, 10 cm, the temperature rise on the work surface is about 10 degrees,
It can be carried out on either paper or resin. or,
Should cooling water stop flowing, a large number of radiating fins 6
Since it is formed and is air-cooled, temporary thermal expansion of the reflector can be suppressed. Further, when the capacity of the high pressure discharge lamp is small, either water cooling or air cooling can be stopped and the apparatus can be operated with one cooling structure.
【0016】[0016]
【発明の効果】以上説明したように本発明に係わる紫外
線照射装置は、その反射体を工夫することにより空冷と
水冷とを併せ持つ構造としたので、反射体の熱膨張によ
る変形あるいは劣化がなく、常に安定した紫外線硬化を
行うことができる。又、冷却するための風量は、水冷構
造としない場合の約半分ですむ。更に、多数の放熱フィ
ン6を形成し空冷しているので、反射体の一時的な熱膨
張を抑えることができ、装置の不慮の事故あるいは光源
の容量に併せて対応できる等の利点がある。As described above, since the ultraviolet irradiation device according to the present invention has a structure having both air cooling and water cooling by devising the reflector, there is no deformation or deterioration due to thermal expansion of the reflector, It is possible to always perform stable UV curing. In addition, the air volume for cooling is about half that of the case without a water cooling structure. Further, since a large number of radiating fins 6 are formed and air-cooled, there is an advantage that temporary thermal expansion of the reflector can be suppressed, and an accident of the device or a capacity of the light source can be dealt with.
【図1】本発明に係わる紫外線照射装置の一実施例を示
す正面図である。FIG. 1 is a front view showing an embodiment of an ultraviolet irradiation device according to the present invention.
【図2】図1の照射装置の要部縦断側面図である。FIG. 2 is a vertical sectional side view of a main part of the irradiation device of FIG.
【図3】本願出願人より提案されている紫外線照射装置
の要部縦断側面図である。FIG. 3 is a vertical sectional side view of a main part of an ultraviolet irradiation device proposed by the applicant of the present application.
【図4】本願出願人より提案されている紫外線照射装置
の要部縦断側面図である。FIG. 4 is a vertical sectional side view of a main part of an ultraviolet irradiation device proposed by the applicant of the present application.
【図5】従来の紫外線照射装置の要部縦断側面図であ
る。FIG. 5 is a vertical sectional side view of a main part of a conventional ultraviolet irradiation device.
1 照射装置本体 2 排気筒 3 反射体 3a 通風孔 4 覆体 5 冷却水用空孔 6 放熱フィン 7 高圧放電ランプ 8 支持具 9 支持板 10 ソケット 11 接続碍子 1 Irradiator Main Body 2 Exhaust Cylinder 3 Reflector 3a Ventilation Hole 4 Cover 5 Coolant Hole 6 Heat Dissipation Fin 7 High Pressure Discharge Lamp 8 Support Tool 9 Support Plate 10 Socket 11 Connection Insulator
Claims (3)
照射装置本体の内部に桶状の反射体を取り付けてなり、
該反射体の光学上の焦点近傍に直管状の高圧放電ランプ
を配置してなる紫外線照射装置において、前記反射体の
外周面に金属製部材で構成した覆体を密着して配置して
なり、該覆体は外周面に所定間隔で複数の放熱フィンを
形成すると共に該覆体の内部に所定間隔で複数の冷却水
用空孔を一体的に形成してなる紫外線照射装置。1. A trough-shaped reflector is attached to the inside of a box-shaped irradiation device main body having a lower surface opened and an exhaust pipe provided on the upper surface,
In an ultraviolet irradiation device in which a straight tubular high-pressure discharge lamp is arranged in the vicinity of the optical focus of the reflector, a cover made of a metal member is closely arranged on the outer peripheral surface of the reflector, An ultraviolet irradiation device in which a plurality of radiating fins are formed on the outer peripheral surface of the cover body at predetermined intervals and a plurality of cooling water holes are integrally formed inside the cover body at predetermined intervals.
ニウムの鏡面仕上げ部材で構成してなる請求項1記載の
紫外線照射装置。2. The ultraviolet irradiation device according to claim 1, wherein the reflector has an inner surface made of a mirror-finish member made of high-purity aluminum.
紫外線を反射する皮膜を被着した金属製部材で構成して
なる請求項1記載の紫外線照射装置。3. The ultraviolet irradiation device according to claim 1, wherein the reflector is made of a metal member having an inner surface coated with a film that absorbs heat rays and reflects ultraviolet rays.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13240794A JP3522333B2 (en) | 1993-06-29 | 1994-05-24 | UV irradiation device |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5-182181 | 1993-06-29 | ||
JP18218193 | 1993-06-29 | ||
JP13240794A JP3522333B2 (en) | 1993-06-29 | 1994-05-24 | UV irradiation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0768163A true JPH0768163A (en) | 1995-03-14 |
JP3522333B2 JP3522333B2 (en) | 2004-04-26 |
Family
ID=26466993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13240794A Expired - Fee Related JP3522333B2 (en) | 1993-06-29 | 1994-05-24 | UV irradiation device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3522333B2 (en) |
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