JP4611348B2 - 基板支持装置、基板処理装置及び基板処理方法 - Google Patents

基板支持装置、基板処理装置及び基板処理方法 Download PDF

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Publication number
JP4611348B2
JP4611348B2 JP2007168842A JP2007168842A JP4611348B2 JP 4611348 B2 JP4611348 B2 JP 4611348B2 JP 2007168842 A JP2007168842 A JP 2007168842A JP 2007168842 A JP2007168842 A JP 2007168842A JP 4611348 B2 JP4611348 B2 JP 4611348B2
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Prior art keywords
substrate
support device
floating pin
neck portion
base portion
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Expired - Lifetime
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JP2007168842A
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Japanese (ja)
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JP2007311814A5 (https=
JP2007311814A (ja
Inventor
公幸 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Priority to JP2007168842A priority Critical patent/JP4611348B2/ja
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Publication of JP2007311814A5 publication Critical patent/JP2007311814A5/ja
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  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2007168842A 2007-06-27 2007-06-27 基板支持装置、基板処理装置及び基板処理方法 Expired - Lifetime JP4611348B2 (ja)

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JP2007168842A JP4611348B2 (ja) 2007-06-27 2007-06-27 基板支持装置、基板処理装置及び基板処理方法

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JP2007168842A JP4611348B2 (ja) 2007-06-27 2007-06-27 基板支持装置、基板処理装置及び基板処理方法

Related Parent Applications (1)

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JP2001163031A Division JP4042350B2 (ja) 2001-05-30 2001-05-30 基板支持装置

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JP2007311814A JP2007311814A (ja) 2007-11-29
JP2007311814A5 JP2007311814A5 (https=) 2008-07-03
JP4611348B2 true JP4611348B2 (ja) 2011-01-12

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JP2007168842A Expired - Lifetime JP4611348B2 (ja) 2007-06-27 2007-06-27 基板支持装置、基板処理装置及び基板処理方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100991195B1 (ko) * 2008-01-14 2010-11-01 주식회사 코미코 기판 지지 유닛 및 이를 포함하는 기판 처리 장치
JP5951095B1 (ja) * 2015-09-08 2016-07-13 株式会社日立国際電気 基板処理装置、半導体装置の製造方法、プログラム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2806650B2 (ja) * 1991-08-19 1998-09-30 東京エレクトロン株式会社 温度調整装置

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