JP4603925B2 - 薬液供給装置 - Google Patents

薬液供給装置 Download PDF

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Publication number
JP4603925B2
JP4603925B2 JP2005115634A JP2005115634A JP4603925B2 JP 4603925 B2 JP4603925 B2 JP 4603925B2 JP 2005115634 A JP2005115634 A JP 2005115634A JP 2005115634 A JP2005115634 A JP 2005115634A JP 4603925 B2 JP4603925 B2 JP 4603925B2
Authority
JP
Japan
Prior art keywords
bellows
chemical
pump chamber
drive
supply apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005115634A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006291891A5 (enExample
JP2006291891A (ja
Inventor
丈夫 矢島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Priority to JP2005115634A priority Critical patent/JP4603925B2/ja
Priority to PCT/JP2006/307360 priority patent/WO2006112271A1/ja
Priority to US11/909,083 priority patent/US8087910B2/en
Priority to TW095112805A priority patent/TWI301526B/zh
Publication of JP2006291891A publication Critical patent/JP2006291891A/ja
Publication of JP2006291891A5 publication Critical patent/JP2006291891A5/ja
Application granted granted Critical
Publication of JP4603925B2 publication Critical patent/JP4603925B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/084—Machines, pumps, or pumping installations having flexible working members having tubular flexible members the tubular member being deformed by stretching or distortion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2005115634A 2005-04-13 2005-04-13 薬液供給装置 Expired - Fee Related JP4603925B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005115634A JP4603925B2 (ja) 2005-04-13 2005-04-13 薬液供給装置
PCT/JP2006/307360 WO2006112271A1 (ja) 2005-04-13 2006-04-06 薬液供給装置
US11/909,083 US8087910B2 (en) 2005-04-13 2006-04-06 Chemical liquid supplying apparatus
TW095112805A TWI301526B (en) 2005-04-13 2006-04-11 Liquid chemicals supplying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005115634A JP4603925B2 (ja) 2005-04-13 2005-04-13 薬液供給装置

Publications (3)

Publication Number Publication Date
JP2006291891A JP2006291891A (ja) 2006-10-26
JP2006291891A5 JP2006291891A5 (enExample) 2007-10-25
JP4603925B2 true JP4603925B2 (ja) 2010-12-22

Family

ID=37114998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005115634A Expired - Fee Related JP4603925B2 (ja) 2005-04-13 2005-04-13 薬液供給装置

Country Status (4)

Country Link
US (1) US8087910B2 (enExample)
JP (1) JP4603925B2 (enExample)
TW (1) TWI301526B (enExample)
WO (1) WO2006112271A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547369B2 (ja) * 2006-11-29 2010-09-22 株式会社コガネイ 薬液供給装置
US9297410B2 (en) * 2012-12-31 2016-03-29 Smith International, Inc. Bearing assembly for a drilling tool
US10121685B2 (en) * 2015-03-31 2018-11-06 Tokyo Electron Limited Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus
KR200483917Y1 (ko) * 2015-09-09 2017-07-11 주식회사 디엠에스 약액토출장치
US10890172B2 (en) 2018-06-18 2021-01-12 White Knight Fluid Handling Inc. Fluid pumps and related systems and methods
JP2024075196A (ja) * 2022-11-22 2024-06-03 日本ピラー工業株式会社 ローリングダイアフラムポンプ

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1513052A (en) * 1922-12-04 1924-10-28 Charles A Criqui Pump
US1580479A (en) * 1924-12-27 1926-04-13 Frankenfield Budd Diaphragm pump
US1692921A (en) * 1926-10-13 1928-11-27 Jr Thomas A Banning Pumping and metering apparatus
US1715735A (en) * 1926-10-13 1929-06-04 Jr Thomas A Banning Pumping and metering apparatus
US2613610A (en) * 1949-02-04 1952-10-14 Milton Roy Co Differential bellows pump
US2613607A (en) * 1949-10-27 1952-10-14 Milton Roy Co Bellows pump
US2951450A (en) * 1956-04-17 1960-09-06 John C Fisher Fluid pump
FR1328970A (fr) * 1962-04-21 1963-06-07 Commissariat Energie Atomique Pompe doseuse
US3598505A (en) * 1969-10-24 1971-08-10 Us Navy Bellows pump
US4417861A (en) * 1981-08-10 1983-11-29 Monsanto Company Cell culture pumping system
JPS608485A (ja) * 1983-06-28 1985-01-17 Konan Denki Kk 容積ポンプ
US4886432A (en) * 1988-06-23 1989-12-12 Engineering Enterprises, Inc. Bladder pump assembly
US4902206A (en) * 1988-09-30 1990-02-20 Haluna Kabushiki Kaisha Bellows pump
JPH1054368A (ja) * 1996-08-13 1998-02-24 Koganei Corp ベローズポンプ
JP3554115B2 (ja) * 1996-08-26 2004-08-18 株式会社コガネイ 薬液供給装置
US5964580A (en) * 1997-04-18 1999-10-12 Taga; Jun Positive displacement pump having a ratchet drive guide for dispersing cyclic compression stresses over the circumference of an internal flexible member
JP4011210B2 (ja) * 1998-10-13 2007-11-21 株式会社コガネイ 薬液供給方法および薬液供給装置
JP4276757B2 (ja) 1999-11-29 2009-06-10 株式会社コガネイ 液体吐出ポンプ
JP2004301255A (ja) * 2003-03-31 2004-10-28 Saginomiya Seisakusho Inc 駆動装置の脱調検出装置、およびそれを用いたベローズポンプの脱調検出装置、および塗布装置の脱調検出装置、ならびにレジスト塗布装置の脱調検出装置

Also Published As

Publication number Publication date
US8087910B2 (en) 2012-01-03
TWI301526B (en) 2008-10-01
JP2006291891A (ja) 2006-10-26
TW200636162A (en) 2006-10-16
US20090123312A1 (en) 2009-05-14
WO2006112271A1 (ja) 2006-10-26

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