JP4593768B2 - 光干渉装置及び位置検出装置 - Google Patents

光干渉装置及び位置検出装置 Download PDF

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Publication number
JP4593768B2
JP4593768B2 JP2000391425A JP2000391425A JP4593768B2 JP 4593768 B2 JP4593768 B2 JP 4593768B2 JP 2000391425 A JP2000391425 A JP 2000391425A JP 2000391425 A JP2000391425 A JP 2000391425A JP 4593768 B2 JP4593768 B2 JP 4593768B2
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JP
Japan
Prior art keywords
light beam
optical
separated
light
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000391425A
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English (en)
Japanese (ja)
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JP2001249003A (ja
JP2001249003A5 (enExample
Inventor
成樹 加藤
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Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2000391425A priority Critical patent/JP4593768B2/ja
Priority to US09/747,960 priority patent/US6529278B2/en
Priority to EP00128543A priority patent/EP1113243A3/en
Publication of JP2001249003A publication Critical patent/JP2001249003A/ja
Publication of JP2001249003A5 publication Critical patent/JP2001249003A5/ja
Application granted granted Critical
Publication of JP4593768B2 publication Critical patent/JP4593768B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Moving Of Head For Track Selection And Changing (AREA)
  • Moving Of The Head To Find And Align With The Track (AREA)
JP2000391425A 1999-12-27 2000-12-22 光干渉装置及び位置検出装置 Expired - Fee Related JP4593768B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000391425A JP4593768B2 (ja) 1999-12-27 2000-12-22 光干渉装置及び位置検出装置
US09/747,960 US6529278B2 (en) 1999-12-27 2000-12-27 Optical interference apparatus and position detection apparatus
EP00128543A EP1113243A3 (en) 1999-12-27 2000-12-27 Optical interference apparatus and position detection apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-369379 1999-12-27
JP36937999 1999-12-27
JP2000391425A JP4593768B2 (ja) 1999-12-27 2000-12-22 光干渉装置及び位置検出装置

Publications (3)

Publication Number Publication Date
JP2001249003A JP2001249003A (ja) 2001-09-14
JP2001249003A5 JP2001249003A5 (enExample) 2008-04-10
JP4593768B2 true JP4593768B2 (ja) 2010-12-08

Family

ID=26582108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000391425A Expired - Fee Related JP4593768B2 (ja) 1999-12-27 2000-12-22 光干渉装置及び位置検出装置

Country Status (3)

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US (1) US6529278B2 (enExample)
EP (1) EP1113243A3 (enExample)
JP (1) JP4593768B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985232B2 (en) * 2003-03-13 2006-01-10 Tokyo Electron Limited Scatterometry by phase sensitive reflectometer
KR100503007B1 (ko) * 2003-06-24 2005-07-21 삼성전기주식회사 광픽업용 액추에이터의 부공진 측정 장치
CN101876538A (zh) * 2010-05-07 2010-11-03 中国科学院光电技术研究所 一种接近式纳米光刻中的间隙测量方法
WO2014064701A1 (en) * 2012-10-26 2014-05-01 Applied Spectral Imaging Ltd. Method and system for spectral imaging
TWI503619B (zh) * 2014-03-12 2015-10-11 玉晶光電股份有限公司 量測設備及其量測方法
CN103983198B (zh) * 2014-05-29 2016-09-07 山东师范大学 一种利用涡旋光测量离面位移的系统及方法
CN104976965B (zh) * 2015-06-30 2017-11-10 福建师范大学 一种会聚光路偏振干涉面型偏差检测装置及其方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473065A (en) * 1977-11-22 1979-06-12 Canon Inc Interferometer
JPS61251703A (ja) * 1985-04-30 1986-11-08 Ricoh Co Ltd シアリング干渉測定方式におけるシア量測定方法
US4732483A (en) * 1987-03-19 1988-03-22 Zygo Corporation Interferometric surface profiler
US6134003A (en) * 1991-04-29 2000-10-17 Massachusetts Institute Of Technology Method and apparatus for performing optical measurements using a fiber optic imaging guidewire, catheter or endoscope
US5502466A (en) 1993-06-29 1996-03-26 Canon Kabushiki Kaisha Doppler velocimeter and position information detection apparatus for use with objects having variations in surface depth
US5815267A (en) 1994-09-09 1998-09-29 Canon Kabushiki Kaisha Displacement information measuring apparatus in which a light-receiving condition on a photodetector is adjustable
US5796470A (en) 1995-02-28 1998-08-18 Canon Kabushiki Kaisha Frequency shifter and optical displacement measuring apparatus using the frequency shifter
JP3492012B2 (ja) 1995-03-09 2004-02-03 キヤノン株式会社 変位情報検出装置
CA2169141A1 (en) * 1995-04-07 1996-10-08 Ivan Prikryl Interferometer having a micromirror
JP3548275B2 (ja) 1995-05-12 2004-07-28 キヤノン株式会社 変位情報測定装置
JPH08304430A (ja) 1995-05-12 1996-11-22 Canon Inc 周波数シフタ及びそれを用いた光学式変位計測装置
JP3230983B2 (ja) * 1996-01-12 2001-11-19 富士写真光機株式会社 光波干渉装置の被検体位置調整方法
JP3647135B2 (ja) 1996-04-15 2005-05-11 キヤノン株式会社 光学式変位情報測定装置
US5880838A (en) * 1996-06-05 1999-03-09 California Institute Of California System and method for optically measuring a structure
JPH10141917A (ja) * 1996-11-11 1998-05-29 Canon Inc 位置検出装置と位置決め装置及びそれを用いた情報記録装置
DE19721843C1 (de) * 1997-05-26 1999-02-11 Bosch Gmbh Robert Interferometrische Meßvorrichtung
US6631047B2 (en) * 1997-09-22 2003-10-07 Canon Kabushiki Kaisha Interference device, position detecting device, positioning device and information recording apparatus using the same
JP3943668B2 (ja) * 1997-09-22 2007-07-11 キヤノン株式会社 干渉装置、位置検出装置、位置決め装置およびそれを用いた情報記録装置
US6317200B1 (en) * 1999-04-13 2001-11-13 Excel Precision Corp. Positional measurement with normalized signal processing
US6195168B1 (en) * 1999-07-22 2001-02-27 Zygo Corporation Infrared scanning interferometry apparatus and method

Also Published As

Publication number Publication date
JP2001249003A (ja) 2001-09-14
US6529278B2 (en) 2003-03-04
EP1113243A2 (en) 2001-07-04
EP1113243A3 (en) 2005-11-09
US20020163647A1 (en) 2002-11-07

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