JP4583868B2 - スパッタ装置 - Google Patents
スパッタ装置 Download PDFInfo
- Publication number
- JP4583868B2 JP4583868B2 JP2004300845A JP2004300845A JP4583868B2 JP 4583868 B2 JP4583868 B2 JP 4583868B2 JP 2004300845 A JP2004300845 A JP 2004300845A JP 2004300845 A JP2004300845 A JP 2004300845A JP 4583868 B2 JP4583868 B2 JP 4583868B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- target
- sputtering
- cathode
- rotation axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
- H01J37/347—Thickness uniformity of coated layers or desired profile of target erosion
Description
2 真空空間
3 真空容器
4 基板ホルダ
5 基板
6 ターゲット
7 スパッタカソード
Claims (3)
- 真空室内に回転自在に設置された基板ホルダと、該基板ホルダ上に載置された基板と、該基板に薄膜を形成するためのターゲットと、該ターゲットが搭載される回転可能なスパッタカソードとを少なくとも具備し、前記ターゲットをスパッタして前記基板に薄膜を形成するスパッタ装置において、
前記スパッタカソードを基板に対して傾斜させると共に、前記ターゲットの中心を前記スパッタカソードの回転軸に対して偏心させたことを特徴とするスパッタ装置。 - 前記スパッタカソードは、前記ターゲット背面に設けられる冷却手段と、前記ターゲットに磁界を発生させるマグネットと、前記ターゲットの周辺に配設されるアースシールドとを少なくとも具備し、回転手段によって回転自在であることを特徴とする請求項1記載のスパッタ装置。
- 前記スパッタカソードの回転軸の延長線は、前記基板ホルダの回転軸の延長線と、基板の略中心の位置において交差することを特徴とする請求項1又は2記載のスパッタ装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004300845A JP4583868B2 (ja) | 2004-10-15 | 2004-10-15 | スパッタ装置 |
US11/248,257 US7563349B2 (en) | 2004-10-15 | 2005-10-13 | Sputtering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004300845A JP4583868B2 (ja) | 2004-10-15 | 2004-10-15 | スパッタ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006111927A JP2006111927A (ja) | 2006-04-27 |
JP4583868B2 true JP4583868B2 (ja) | 2010-11-17 |
Family
ID=36179572
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004300845A Active JP4583868B2 (ja) | 2004-10-15 | 2004-10-15 | スパッタ装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7563349B2 (ja) |
JP (1) | JP4583868B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009044705A1 (ja) | 2007-10-04 | 2009-04-09 | Ulvac, Inc. | 成膜装置及び成膜方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63313427A (ja) * | 1987-06-15 | 1988-12-21 | Furukawa Electric Co Ltd:The | 高温超伝導体膜の製造方法 |
JPH02310994A (ja) * | 1989-05-25 | 1990-12-26 | Matsushita Electric Works Ltd | 回路板のスルーホール形成方法 |
JPH0497335U (ja) * | 1991-12-11 | 1992-08-24 | ||
JPH06116721A (ja) * | 1992-10-06 | 1994-04-26 | Nec Yamaguchi Ltd | スパッタリング装置 |
JPH0722348A (ja) * | 1993-06-29 | 1995-01-24 | Nec Yamaguchi Ltd | 半導体製造装置 |
JPH07292469A (ja) * | 1994-04-26 | 1995-11-07 | Sony Corp | スパッタリング装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4250009A (en) * | 1979-05-18 | 1981-02-10 | International Business Machines Corporation | Energetic particle beam deposition system |
EP0140240B1 (en) * | 1983-10-14 | 1988-07-06 | Hitachi, Ltd. | Process for forming an organic thin film |
JPS61159571A (ja) * | 1985-01-07 | 1986-07-19 | Hitachi Ltd | スパツタリング装置 |
US4664935A (en) * | 1985-09-24 | 1987-05-12 | Machine Technology, Inc. | Thin film deposition apparatus and method |
JPH0240739B2 (ja) * | 1986-03-11 | 1990-09-13 | Fujitsu Ltd | Supatsutasochi |
US4756810A (en) * | 1986-12-04 | 1988-07-12 | Machine Technology, Inc. | Deposition and planarizing methods and apparatus |
JPH01219158A (ja) * | 1988-02-25 | 1989-09-01 | Shin Meiwa Ind Co Ltd | 合金薄膜製造装置 |
US5114556A (en) * | 1989-12-27 | 1992-05-19 | Machine Technology, Inc. | Deposition apparatus and method for enhancing step coverage and planarization on semiconductor wafers |
JPH04371577A (ja) * | 1991-06-19 | 1992-12-24 | Sony Corp | マグネトロン型スパッタリング装置 |
US5308461A (en) * | 1992-01-14 | 1994-05-03 | Honeywell Inc. | Method to deposit multilayer films |
JPH05255842A (ja) * | 1992-03-11 | 1993-10-05 | Matsushita Electric Ind Co Ltd | レーザ・スパッタリング装置 |
JP3255469B2 (ja) * | 1992-11-30 | 2002-02-12 | 三菱電機株式会社 | レーザ薄膜形成装置 |
USH1933H1 (en) * | 1996-04-08 | 2001-01-02 | The United States Of America As Represented By The Secretary Of The Air Force | Magnetron sputter-pulsed laser deposition system and method |
US6190511B1 (en) * | 1997-03-13 | 2001-02-20 | David T. Wei | Method and apparatus for ion beam sputter deposition of thin films |
US6899795B1 (en) * | 2000-01-18 | 2005-05-31 | Unaxis Balzers Aktiengesellschaft | Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers |
JP2002020864A (ja) | 2000-07-05 | 2002-01-23 | Anelva Corp | 磁性薄膜用のスパッタリング装置及び磁性薄膜形成方法 |
JP4516199B2 (ja) * | 2000-09-13 | 2010-08-04 | キヤノンアネルバ株式会社 | スパッタ装置及び電子デバイス製造方法 |
JP2003247065A (ja) * | 2002-02-20 | 2003-09-05 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜形成装置 |
-
2004
- 2004-10-15 JP JP2004300845A patent/JP4583868B2/ja active Active
-
2005
- 2005-10-13 US US11/248,257 patent/US7563349B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63313427A (ja) * | 1987-06-15 | 1988-12-21 | Furukawa Electric Co Ltd:The | 高温超伝導体膜の製造方法 |
JPH02310994A (ja) * | 1989-05-25 | 1990-12-26 | Matsushita Electric Works Ltd | 回路板のスルーホール形成方法 |
JPH0497335U (ja) * | 1991-12-11 | 1992-08-24 | ||
JPH06116721A (ja) * | 1992-10-06 | 1994-04-26 | Nec Yamaguchi Ltd | スパッタリング装置 |
JPH0722348A (ja) * | 1993-06-29 | 1995-01-24 | Nec Yamaguchi Ltd | 半導体製造装置 |
JPH07292469A (ja) * | 1994-04-26 | 1995-11-07 | Sony Corp | スパッタリング装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2006111927A (ja) | 2006-04-27 |
US7563349B2 (en) | 2009-07-21 |
US20060081463A1 (en) | 2006-04-20 |
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