JP4575913B2 - Cmosイメージセンサの製造方法 - Google Patents
Cmosイメージセンサの製造方法 Download PDFInfo
- Publication number
- JP4575913B2 JP4575913B2 JP2006344400A JP2006344400A JP4575913B2 JP 4575913 B2 JP4575913 B2 JP 4575913B2 JP 2006344400 A JP2006344400 A JP 2006344400A JP 2006344400 A JP2006344400 A JP 2006344400A JP 4575913 B2 JP4575913 B2 JP 4575913B2
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- Prior art keywords
- conductive layer
- region
- forming
- cmos image
- film
- Prior art date
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- Expired - Fee Related
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- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 238000000034 method Methods 0.000 claims description 82
- 239000000758 substrate Substances 0.000 claims description 44
- 238000009792 diffusion process Methods 0.000 claims description 40
- 239000004065 semiconductor Substances 0.000 claims description 37
- 150000002500 ions Chemical class 0.000 claims description 18
- 238000005468 ion implantation Methods 0.000 claims description 17
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 9
- 230000003647 oxidation Effects 0.000 claims description 7
- 238000007254 oxidation reaction Methods 0.000 claims description 7
- 229910052785 arsenic Inorganic materials 0.000 claims description 4
- 238000010791 quenching Methods 0.000 claims 1
- 230000000171 quenching effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 65
- 238000002955 isolation Methods 0.000 description 19
- 239000012535 impurity Substances 0.000 description 13
- 238000011161 development Methods 0.000 description 10
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 238000001039 wet etching Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
Claims (3)
- フォトダイオード領域とトランジスタ領域を有する半導体基板を準備する段階と、
前記半導体基板の全面にゲート絶縁膜用絶縁膜とゲート電極用導電層を順次積層する段階と、
前記導電層の上にゲート電極用感光膜パターンを形成した後、前記感光膜パターンをマスクとして前記導電層の一部の厚さだけエッチングする段階と、
前記エッチングされた導電層にイオン注入工程を施し、一部の厚さだけ除去された導電層をドーピングし、ドーピングされた導電層を形成する段階と、
前記ドーピングされた導電層を含む結果物に酸化工程を施し、前記ドーピングされた導電層を酸化膜に形成する段階と、
前記酸化膜と前記酸化膜の下部に形成された前記絶縁膜をウエットエッチング工程により除去し、前記トランジスタ領域に前記ゲート電極とゲート絶縁膜を形成する段階とを含むことを特徴とするCMOSイメージセンサの製造方法。 - 前記ゲート電極とゲート絶縁膜が形成された結果物上にイオン注入工程を施し、前記フォトダイオード領域に第1拡散領域を形成する段階と、
前記ゲート電極とゲート絶縁膜の側壁にスペーサを形成する段階と、
前記スペーサが形成された結果物にイオン注入工程を施し、前記トランジスタ領域に第2拡散領域を形成する段階と、
前記第2拡散領域が形成された結果物上にイオン注入工程を施し、前記第1拡散領域に第3拡散領域を形成する段階とをさらに含むことを特徴とする請求項1に記載のCMOSイメージセンサの製造方法。 - 前記ドーピングされた導電層を形成するイオン注入工程が、As、P、Bのいずれか1つのイオンを使用して行うことを特徴とする請求項1に記載のCMOSイメージセンサの製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050134452A KR100685889B1 (ko) | 2005-12-29 | 2005-12-29 | 씨모스 이미지센서의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007184586A JP2007184586A (ja) | 2007-07-19 |
JP4575913B2 true JP4575913B2 (ja) | 2010-11-04 |
Family
ID=38104394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006344400A Expired - Fee Related JP4575913B2 (ja) | 2005-12-29 | 2006-12-21 | Cmosイメージセンサの製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7598135B2 (ja) |
JP (1) | JP4575913B2 (ja) |
KR (1) | KR100685889B1 (ja) |
CN (1) | CN100470761C (ja) |
DE (1) | DE102006061032B4 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100898452B1 (ko) * | 2007-09-27 | 2009-05-21 | 주식회사 동부하이텍 | 이미지 센서 및 그 제조방법 |
US9494697B2 (en) * | 2012-02-28 | 2016-11-15 | Carestream Health, Inc. | Digital radiographic imaging arrays including patterned anti-static protective coating with systems and methods for using the same |
CN113540140B (zh) * | 2021-07-15 | 2022-12-09 | 上海芯物科技有限公司 | 背照式互补金属氧化物半导体图像传感器及其制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH065565A (ja) * | 1992-06-17 | 1994-01-14 | Fujitsu Ltd | 半導体装置の製造方法 |
JP2004214665A (ja) * | 2002-12-27 | 2004-07-29 | Hynix Semiconductor Inc | Cmosイメージセンサの製造方法 |
JP2004247444A (ja) * | 2003-02-13 | 2004-09-02 | Sony Corp | 薄膜パターンの形成方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100204017B1 (ko) | 1995-12-16 | 1999-06-15 | 김영환 | 반도체 장치의 콘택 형성방법 |
US6303421B1 (en) * | 2000-07-17 | 2001-10-16 | United Microelectronics Corp. | Method of manufacturing CMOS sensor |
JP3840214B2 (ja) * | 2003-01-06 | 2006-11-01 | キヤノン株式会社 | 光電変換装置及び光電変換装置の製造方法及び同光電変換装置を用いたカメラ |
US7354789B2 (en) * | 2003-11-04 | 2008-04-08 | Dongbu Electronics Co., Ltd. | CMOS image sensor and method for fabricating the same |
KR100603247B1 (ko) * | 2003-12-31 | 2006-07-20 | 동부일렉트로닉스 주식회사 | 시모스 이미지 센서 및 그 제조방법 |
-
2005
- 2005-12-29 KR KR1020050134452A patent/KR100685889B1/ko not_active IP Right Cessation
-
2006
- 2006-12-19 US US11/612,609 patent/US7598135B2/en not_active Expired - Fee Related
- 2006-12-21 JP JP2006344400A patent/JP4575913B2/ja not_active Expired - Fee Related
- 2006-12-22 DE DE102006061032A patent/DE102006061032B4/de not_active Expired - Fee Related
- 2006-12-25 CN CNB2006101701841A patent/CN100470761C/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH065565A (ja) * | 1992-06-17 | 1994-01-14 | Fujitsu Ltd | 半導体装置の製造方法 |
JP2004214665A (ja) * | 2002-12-27 | 2004-07-29 | Hynix Semiconductor Inc | Cmosイメージセンサの製造方法 |
JP2004247444A (ja) * | 2003-02-13 | 2004-09-02 | Sony Corp | 薄膜パターンの形成方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1992218A (zh) | 2007-07-04 |
DE102006061032A1 (de) | 2007-07-12 |
CN100470761C (zh) | 2009-03-18 |
KR100685889B1 (ko) | 2007-02-26 |
US7598135B2 (en) | 2009-10-06 |
US20070155082A1 (en) | 2007-07-05 |
JP2007184586A (ja) | 2007-07-19 |
DE102006061032B4 (de) | 2011-09-15 |
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