JP4565954B2 - 導電性窒化ケイ素材料とその製造方法 - Google Patents

導電性窒化ケイ素材料とその製造方法 Download PDF

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Publication number
JP4565954B2
JP4565954B2 JP2004290328A JP2004290328A JP4565954B2 JP 4565954 B2 JP4565954 B2 JP 4565954B2 JP 2004290328 A JP2004290328 A JP 2004290328A JP 2004290328 A JP2004290328 A JP 2004290328A JP 4565954 B2 JP4565954 B2 JP 4565954B2
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silicon nitride
weight
oxide
sintered body
titanium
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JP2004290328A
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Japanese (ja)
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JP2006103994A5 (enExample
JP2006103994A (ja
Inventor
勝利 米屋
純一 多々見
竹司 目黒
智文 片島
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Yokohama TLO Co Ltd
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Yokohama TLO Co Ltd
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Priority to JP2004290328A priority Critical patent/JP4565954B2/ja
Priority to PCT/JP2005/017701 priority patent/WO2006038489A1/ja
Priority to US11/664,072 priority patent/US7612006B2/en
Publication of JP2006103994A publication Critical patent/JP2006103994A/ja
Publication of JP2006103994A5 publication Critical patent/JP2006103994A5/ja
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JP2004290328A 2004-10-01 2004-10-01 導電性窒化ケイ素材料とその製造方法 Expired - Fee Related JP4565954B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004290328A JP4565954B2 (ja) 2004-10-01 2004-10-01 導電性窒化ケイ素材料とその製造方法
PCT/JP2005/017701 WO2006038489A1 (ja) 2004-10-01 2005-09-27 導電性窒化ケイ素材料とその製造方法
US11/664,072 US7612006B2 (en) 2004-10-01 2005-09-27 Conductive silicon nitride materials and method for producing the same

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JP2004290328A JP4565954B2 (ja) 2004-10-01 2004-10-01 導電性窒化ケイ素材料とその製造方法

Publications (3)

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JP2006103994A JP2006103994A (ja) 2006-04-20
JP2006103994A5 JP2006103994A5 (enExample) 2007-05-10
JP4565954B2 true JP4565954B2 (ja) 2010-10-20

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006182590A (ja) * 2004-12-27 2006-07-13 Yokohama National Univ 導電性窒化ケイ素材料とその製造方法
JP5088851B2 (ja) * 2006-04-28 2012-12-05 東芝マテリアル株式会社 耐摩耗性部材用窒化珪素焼結体、その製造方法、およびそれを用いた耐摩耗性部材
JP5170612B2 (ja) * 2006-09-14 2013-03-27 国立大学法人横浜国立大学 導電性窒化ケイ素焼結体とその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004002067A (ja) * 2002-05-29 2004-01-08 Toshiba Corp 耐摩耗性部材およびその製造方法

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