JP4561471B2 - Method for manufacturing multilayer electronic component and screen printing plate for forming internal electrode of multilayer electronic component - Google Patents

Description

The present invention relates to a method for manufacturing a multilayer electronic component such as a multilayer ceramic capacitor, and more particularly to a method for cutting with high accuracy when cutting from a mother multilayer body to a chip-shaped multilayer body.

A multilayer ceramic capacitor is generally manufactured by the following process. That is, a predetermined number of internal electrodes are screen-printed on a ceramic green sheet, and the ceramic green sheets on which the internal electrodes are formed are laminated to form a mother laminate. The mother laminate is cut at a predetermined position to form individual chip laminates, and after firing the chip laminate, external electrodes are formed to obtain a finished product. When cutting the chip-like laminate from the mother laminate, the internal electrode is not exposed to the outside, so a mark for determining the cut position is required.

In Patent Document 1, after the cut sensing mark is printed at the same time as the internal electrode on the end portion of the ceramic green sheet corresponding to the ear of the mother laminate, the mother laminate is obtained by laminating the ceramic green sheets. Roughly cut the ears of the mother laminate so that the sensing marks are exposed, and cut the mother laminate into a chip-like laminate by recognizing the image of the cut sensing mark exposed on this cut surface (side surface of the mother laminate). The cutting position is determined.

FIG. 15 is a print pattern diagram disclosed in Patent Document 1, in which a plurality of rectangular internal electrodes 51 and cut sensing marks 52 and 53 are formed on a ceramic green sheet 50. The cut sensing mark 52 positioned in the longitudinal direction of the internal electrode 51 is continuously formed with the same width as the internal electrode 51, and the cut sensing mark 53 in the direction orthogonal to the longitudinal direction of the internal electrode 51 is narrow. It is formed in a line shape. Normally, the screen printing squeezing direction is set along the longitudinal direction of the internal electrode 51.

As described above, the cut sensing mark 53 in the direction orthogonal to the longitudinal direction of the internal electrode 51 is printed as a line extending toward the side of the ceramic green sheet 50, but is orthogonal to the screen printing squeezing direction. Since it extends in the direction, bleeding is likely to occur during printing, and the printed cut sensing mark 53 may swell like a drum (shown by 53a) as shown in FIG. In addition, the blur does not occur for every cut sensing mark 53 by a certain amount, and its shape tends to vary.

In an ideal case, as shown in FIG. 16A, the length and position of the cut sensing mark 53 exposed on the cut surface are constant, and the cut line CL can be clearly determined. Depending on the cutting position when the mother laminate is roughly cut, the positions and lengths of the cut sensing marks 53 and 53a exposed on the cut surface are not constant as shown in (b). As a result, there is a problem in that the cut position cannot be accurately determined and sufficient cut position accuracy cannot be obtained.
JP 2001-217139 A

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a multilayer electronic component manufacturing method capable of preventing bleeding and swelling when screen-printing a cut sensing mark and obtaining high cut position accuracy, and for forming an internal electrode of the multilayer electronic component. To provide a screen printing version.

The above object can be achieved by the method for manufacturing a multilayer electronic component according to claim 1 and the screen printing plate for forming an internal electrode of the multilayer electronic component according to claim 6.
The invention according to claim 1 is a step of simultaneously forming an internal electrode and a cut sensing mark on a ceramic green sheet by screen printing, wherein the cut sensing mark is formed to extend outward from the internal electrode formation region. Laminating the ceramic green sheets to obtain a mother laminate, cutting the outer periphery of the mother laminate, exposing the cut sensing mark on the cut surface, and the exposed cut sensing mark In the method for manufacturing a multilayer electronic component comprising: cutting the mother laminate into a chip-like laminate on the basis of the step; and firing the chip-like laminate, in the longitudinal direction of the cut sensing marks Is formed in a direction perpendicular to the screen printing squeegeeing direction. The mark is composed of a plurality of mark pieces divided in the longitudinal direction through gaps, and is arranged in a plurality of rows in parallel with the screen printing squeegeeing direction, and is adjacent to the screen printing squeegeeing direction. The pieces are a method for manufacturing a multilayer electronic component, wherein the adjacent gaps are arranged in a staggered manner so as not to overlap each other.

According to a sixth aspect of the present invention, there are provided an internal electrode formation region in which a plurality of internal electrodes are formed in a matrix, and a plurality of internal electrodes formed around the internal electrode formation region and extending outward from the internal electrode formation region. A screen printing plate for forming an internal electrode of a multilayer electronic component having a cut sensing mark forming region on which a cut sensing mark is formed, and the longitudinal direction of the cut sensing mark is formed in a direction perpendicular to the squeezing direction The cut sensing mark made is composed of a plurality of mark pieces divided in the longitudinal direction through gaps, and arranged in a plurality of rows in parallel in the squeegeeing direction, and the mark piece adjacent to the squeezing direction is The internal electrodes of the multilayer electronic component are arranged in a staggered manner so that adjacent gaps do not overlap each other It is a screen printing plate.

The present invention is based on the knowledge that if the cut sensing mark perpendicular to the screen printing squeezing direction is composed of a plurality of mark pieces (dashed lines) divided in the longitudinal direction, bleeding due to screen printing can be suppressed. Based. With a cut sensing mark that extends long in the direction orthogonal to the squeegeeing direction as in the prior art, the screen opening opens due to friction with the squeegee, and bleeding cannot be prevented. By shortening the dimension in the orthogonal direction, the opening of the screen can be suppressed and bleeding can be prevented.
However, if the cut sensing mark is simply a broken line, if the edge of the mother laminate is cut at a location where the gaps between adjacent cut sensing marks match, the cut sensing mark is exposed on the cut surface. A new problem occurs. Therefore, in the present invention, the cut sensing mark is not only composed of a plurality of mark pieces divided in the longitudinal direction, but the mark pieces adjacent in the squeezing direction are staggered so that the adjacent gap portions do not overlap each other. Is arranged. As a result, even if the edge of the mother laminate is roughly cut at the position of the gap of one cut sensing mark, the adjacent cut sensing mark can cut the part of the mark piece. It can be exposed to the cut surface. If the mother laminate is cut with this mark piece as a reference, high cutting position accuracy can be obtained.

According to a preferred embodiment of the manufacturing method of the present invention, the ratio of the dimension in the longitudinal direction of the mark piece to the dimension in the width direction is preferably 2 or less.
If the ratio of the dimension in the longitudinal direction to the dimension in the width direction of the mark piece is greater than 2, each mark piece extends long in the direction perpendicular to the squeegeeing direction as in the conventional case, and is therefore susceptible to bleeding during screen printing. Become. On the other hand, if the ratio between the dimension in the longitudinal direction and the dimension in the width direction of the mark pieces is set to 2 or less, the dimension in the direction orthogonal to the squeezing direction of each mark piece is shortened, so that it is hardly affected by bleeding.

According to a further preferred embodiment of the present invention, the widths of adjacent mark pieces in the screen printing squeezing direction may be different from each other. If the widths of adjacent marks are the same, when only one of the marks is exposed, it is impossible to determine which of the mark pieces on the right side or the left side is exposed. It can be determined whether it is exposed. Therefore, even if the ear of the mother laminate is cut at an arbitrary position, the position to be cut can be recognized.

According to another aspect, the cut sensing mark is preferably provided at a position corresponding to each internal electrode.
In this case, cutting can be performed while correcting the cutting position one by one, and cutting with higher accuracy can be performed.

According to still another aspect, the cut sensing mark may be composed of a plurality of mark pieces divided in the longitudinal direction over the entire circumference of the internal electrode formation region.
In this case, an accurate cut position can be determined by squeezing from any direction.

As described above, according to the present invention, the cut sensing mark formed at the time of screen printing is formed by forming the cut sensing mark whose longitudinal direction is perpendicular to the squeezing direction of screen printing in a broken line shape. Bleeding and swelling can be suppressed. Moreover, since the mark pieces of the cut sensing marks are arranged in a zigzag pattern, the cut sensing marks can always be exposed on the cut surface regardless of where the ears of the mother laminate are cut, and the accuracy Good cuts can be made.

Embodiments of the present invention will be described below with reference to examples.

1 and 2 show a first embodiment of a screen-printed ceramic green sheet according to the present invention. Here, a method for manufacturing a multilayer ceramic capacitor will be described as an example.
The ceramic green sheet 1 backed by a long resin carrier film such as PET, PP, or PEN is unwound by a roll-to-roll, sucked and held on a flat printing table, and an internal electrode is formed on the ceramic green sheet 1 by screen printing. Pattern 2 and cut sensing mark 3 are formed simultaneously. In addition, although the elongate continuous ceramic green sheet 1 is used here, you may supply in a strip card state.

The squeegee moving direction (squeezing direction) S for screen printing is a uniaxial direction, which is the longitudinal direction with respect to the long ceramic green sheet 1 here, but may be the width direction. Further, the unidirectional squeezing may be repeated, or the unidirectional squeezing may be followed by the reverse squeezing and the reciprocating direction for switching the direction.

The internal electrode pattern 2 is formed at the center in the width direction of the ceramic green sheet 1, and a plurality of rectangular internal electrodes 2a are arranged in a lattice pattern. A staggered arrangement may be used. The internal electrode 2a is arranged such that its long side coincides with the squeezing direction S. Here, one internal electrode 2a has a size corresponding to two multilayer ceramic capacitors C (indicated by a one-dot chain line in FIG. 1).

Cut sensing marks 3 extending in a direction orthogonal to the squeezing direction S are formed in both end regions in the short side direction of the internal electrode pattern 2, that is, in both end regions in the width direction of the ceramic green sheet 1. As shown in FIG. 2, a plurality of cut sensing marks 3 are formed in parallel so as to extend in the short side direction of the internal electrode 2a, and two cut sensing marks 3 are provided for each internal electrode 2a. The cut sensing mark 3 is composed of a plurality of mark pieces 3a that are broken lines, that is, divided in the longitudinal direction via gaps 3b, and the cut sensing mark 3 adjacent to the squeezing direction S is adjacent to the gap 3b. The mark pieces 3a are arranged in a staggered manner so that they do not overlap each other. The vertical / horizontal dimension ratio A / B of each mark piece 3a (A: dimension in a direction orthogonal to the squeezing direction S, B: dimension in the squeezing direction S) is set to 2 or less. The shorter the pitch of the mark pieces 3a, the better as long as it can be screen printed. In this embodiment, the thickness is about 0.5 to 1 mm.

Although it is not necessary to provide the cut sensing marks 3 on the entire surface of the both ends in the short side direction of the internal electrode pattern 2, if the cut sensing marks 3 arranged in a staggered manner are arranged on the entire surface as shown in FIG. This is preferable because the flow of the film can be suppressed and the stacking collapse can be prevented.

The distance d between adjacent broken-line cut sensing marks 3 is set to coincide with the subsequent stacking shift amount δ so that the adjacent cut sensing marks 3 are alternately shifted one by one during stacking. In the present embodiment, at the time of subsequent cutting, the above-described staggered mark pieces 3a are sensed and a cut CL parallel to the short side direction of the internal electrode 2a is performed. It is assumed that the short side of the electrode 2a is sensed and cut.

The ceramic green sheet 1 screen-printed as described above is punched into approximately squares P1 and P2 in consideration of the stacking displacement amount δ, and peeled off from the carrier film and stacked. Then, the laminated ceramic green sheet laminate is fully pressed to form a mother laminate. You may press this simultaneously at the time of lamination. The ears of the pressed substantially square mother laminate are roughly cut to expose the cut sensing marks 3 in the cross section. Note that the internal electrode 2a is also exposed for cutting parallel to the long side direction of the internal electrode 2a. Thereafter, the mother multilayer body is cut into a chip-shaped multilayer body with reference to the internal electrodes 2a and the cut sensing marks 3 exposed on the side surfaces. After cutting into a chip-shaped laminate, this is fired, and an external electrode is formed on the end face, whereby a multilayer electronic component can be obtained.

FIGS. 3A to 3C show cut surfaces obtained by cutting the mother laminate M along the rough cutting lines L1 to L3 shown in FIG.
(A) is cut at a position where all the adjacent mark pieces 3a of the cut sensing mark 3 are exposed, and the mark pieces 3a are regularly exposed horizontally and vertically.
(B) and (c) are cut at positions where only one adjacent mark piece 3a is exposed, and the mark pieces 3a are alternately exposed for each layer.
In any case, the chip-shaped laminate C as shown in FIG. 4 can be obtained by cutting along the line CL with reference to the exposed mark piece 3a. As can be seen from FIG. 4, a plurality of internal electrodes 2 a are stacked at regular intervals inside the chip-shaped stacked body C, and are alternately drawn to both end faces of the stacked body C.

As described above, by shortening the dimension A in the direction orthogonal to the squeezing direction S and reducing the aspect ratio A / B of the mark piece 3a, printing blur can be reduced and the variation in the width dimension B is small and accurate. Cut sensing mark 3 can be formed. Moreover, since the mark piece 3a is always exposed even if the mother laminate M is roughly cut at any position, high cut position accuracy can be ensured by cutting along the line CL with the exposed mark piece 3a as a reference. Can do.

FIG. 5 shows a ceramic green sheet 1A according to the second embodiment of the present invention.
In the first embodiment, an example in which the cut sensing marks are not provided in the both ends in the long side direction of the internal electrode 2a is shown, but in this embodiment, the cut sensing in a broken line shape is also provided in the both ends in the long side direction of the internal electrode 2a. A mark 4 is provided. Also in this case, the mark pieces 4a of the cut sensing marks 4 are staggered.
In this embodiment, since the cut sensing marks 3 and 4 are provided in both the short side direction and the long side direction of the internal electrode 2a, the cut position is accurately determined regardless of the squeezing direction S. it can.

FIG. 6 shows a ceramic green sheet 1B according to a third embodiment of the present invention.
In this embodiment, a strip-shaped cut sensing mark 5 continuous with the internal electrode 2a is provided at both end regions in the long side direction of the internal electrode 2a. This case is suitable when the squeezing direction S is the long side direction of the internal electrode 2a.

FIG. 7 shows a ceramic green sheet 1C according to a fourth embodiment of the present invention.
In this embodiment, the cut sensing marks 3 and 4 having broken lines are provided in both the short-side end region and the long-side end region of the internal electrode 2a, respectively, and both sides in the width direction of the cut sensing mark 4 are blank portions 6. . That is, the cut sensing marks 3 and 4 are provided only at the position where the cut position is sensed.
This is suitable for increasing the yield of the printing paste and when there is a limitation in lamination and pressing, and the cut sensing mark cannot be disposed on the entire surface around the internal electrode 2a.
The effect of improving the cut accuracy of the cut sensing marks 3 and 4 is the same as that of the first embodiment.

FIG. 8 shows a ceramic green sheet 1D according to the fifth embodiment of the present invention.
In this embodiment, as in the fourth embodiment, the cut sensing marks 3 and 5 are provided only at the position where the cut position is sensed, and both sides in the width direction of the cut sensing mark 5 are the blank portions 6. The cut sensing marks 3 formed at both end regions in the short side direction of the internal electrode 2a are in a broken line shape, and the cut sensing marks 5 formed in both end regions in the long side direction of the internal electrode 2a are formed in a continuous belt shape with the internal electrode 2a. It is.

FIG. 9 shows a series type multilayer capacitor having a structure in which internal electrodes 2b extending from both end faces toward the center and internal electrodes 2c not exposed at both end faces are provided alternately. Such series multilayer capacitors can be manufactured using the ceramic green sheets 1 and 1A to 1D shown in the first to fifth embodiments. In this case, the ceramic green sheet is punched into a substantially square shape in consideration of the stacking displacement δ, peeled off from the carrier film, laminated and pressed to form a mother laminate, and this mother laminate is twice the stacking displacement δ. What is necessary is just to cut | disconnect by the cut line CL of the pitch space | interval. However, when the cut sensing mark 3 having the mark piece 3a having the same width B as in the first to fifth embodiments is used, the genuine product as shown in FIG. Two types of Cr and an erroneously cut product Ce as shown in FIG. That is, in the regular product Cr, the uppermost and lowermost internal electrodes are the internal electrodes 2b extending from the both end faces toward the center, and in the erroneously cut product Ce, the uppermost and lowermost internal electrodes are not exposed at the both end faces. Electrode 2c. The regular product and the erroneously cut product have the same capacitance value, but the outermost internal electrode closest to the upper and lower surfaces of the external electrode formed on the end face has the same potential as the external electrode. The product is better.

10 and 11 show a ceramic green sheet 1E according to a sixth embodiment of the present invention, which is suitable for manufacturing a series type multilayer capacitor as shown in FIG.
In the ceramic green sheet 1E, as in the first embodiment, an internal electrode pattern 2 in which rectangular internal electrodes 2a are arranged in a grid pattern is formed at the center in the width direction of the ceramic green sheet 1E, and the short side direction of the internal electrode pattern 2 is formed. A broken-line cut sensing mark 3 extending in a direction orthogonal to the squeezing direction S is formed in both end regions. As shown in FIG. 11, each cut sensing mark 3 is composed of mark pieces 3c and 3d divided in the longitudinal direction, and the widths of the mark pieces 3c and 3d adjacent to the squeezing direction S are different from each other. . Also in this case, the mark pieces 3c and 3d are arranged in a staggered manner so that the adjacent gaps 3e and 3f do not overlap each other.

As shown in FIG. 11, the mark piece 3c which is wide in the squeezing direction is formed along one short side of the internal electrode 2a, and the narrow mark piece 3d is formed from the other short side of the internal electrode 2a. It is formed at a position inside the dimension. The distance D1 from one short side of the internal electrode 2a to the center of the mark piece 3c and the distance D2 from the other short side of the internal electrode 2a to the center of the mark piece 3d are equal to each other, and the center of the mark piece 3c and the mark piece The distance to the center of 3d is equal to the stacking shift amount δ.

12 (a) to 12 (c), the ceramic green sheet 1E shown in FIG. 9 is punched into a substantially square shape in consideration of the stacking displacement amount δ, peeled off from the carrier film, stacked and pressed, and the mother stacked body M. Each cut surface obtained by cutting the mother laminated body along rough cutting lines L1 to L3 shown in FIG. 11 is shown.
(A) is cut at a position where all the mark pieces 3c and 3d are exposed, and the mark pieces 3c and 3d are exposed in a state where they are alternately arranged in the thickness direction and the plane direction.
(B) is cut at a position where only the wide mark piece 3c is exposed, and the mark pieces 3c are exposed in a staggered manner in the thickness direction.
(C) is cut at a position where only the narrow mark piece 3d is exposed, and the mark pieces 3d are exposed in a staggered manner in the thickness direction.

Since there are three exposed patterns as described above, a regular series multilayer capacitor shown in FIG. 9A can be obtained by cutting according to the following rules. That is,
(I) When the mark piece on the uppermost layer is wide 3c, the mark is cut at a line CL based on the intermediate position with the mark piece on the right side.
(II) When the mark piece on the uppermost layer is narrow 3d, it is cut at a line CL based on an intermediate position with the mark piece on the left side.

13 and 14 are an electrode pattern diagram and a sectional view of the ceramic green sheet of the seventh embodiment. This embodiment is for obtaining a series type multilayer capacitor as shown in FIG. 9A, and differs from the sixth embodiment only in the position of the cut sensing mark 3 relative to the internal electrode 2a.
That is, the wide mark piece 3c is formed along the center position of the long side of the internal electrode 2a, and the narrow mark piece 3d is formed along the gap between the short sides of the internal electrode 2a. The distance from the center of the mark piece 3c to the center of the mark piece 3d is equal to the stacking shift amount δ.

14 (a) to 14 (c), a ceramic green sheet having the electrode pattern shown in FIG. 13 is punched into a substantially square shape in consideration of the stacking displacement δ, peeled off from the carrier film, stacked and pressed, and mother laminated. The cut surface which formed the body M and cut this mother laminated body by the rough cutting lines L1-L3 shown in FIG. 13 is shown.
(A) is cut at a position where all the mark pieces 3c and 3d are exposed, and the mark pieces 3c and 3d are exposed in a state where they are alternately arranged in the thickness direction and the plane direction.
(B) is cut at a position where only the wide mark piece 3c is exposed, and the mark pieces 3c are exposed in a staggered manner in the thickness direction.
(C) is cut at a position where only the narrow mark piece 3d is exposed, and the mark pieces 3d are exposed in a staggered manner in the thickness direction.

Also in this case, since there are three exposed patterns as in the sixth embodiment, a regular series multilayer capacitor shown in FIG. 9A is obtained by cutting according to the following rules. Can do. That is,
(I) When the mark piece on the uppermost layer is wide 3c, it is cut along the line CL with the center position as a reference.
(II) When the mark piece on the uppermost layer is narrow 3d, the mark is cut along a line CL based on the center position of the adjacent mark piece.

It is a top view of the 1st example of the ceramic green sheet concerning the present invention. It is a partially expanded view of the ceramic green sheet shown in FIG. FIG. 3 is a cross-sectional view of a mother laminate cut along rough cutting lines L1 to L3 in FIG. 2. It is sectional drawing of the manufactured chip-shaped laminated body. It is a top view of 2nd Example of the ceramic green sheet concerning this invention. It is a top view of 3rd Example of the ceramic green sheet concerning this invention. It is a top view of the 4th example of a ceramic green sheet concerning the present invention. It is a top view of 5th Example of the ceramic green sheet concerning this invention. It is sectional drawing of the regular product of a series type | mold multilayer capacitor, and a mistaken cut product. It is a top view of 6th Example of the ceramic green sheet concerning this invention. It is a partially expanded view of the ceramic green sheet shown in FIG. FIG. 12 is a cross-sectional view of the mother laminated body cut along rough cutting lines L1 to L3 in FIG. 11. It is a partially expanded view of the seventh embodiment of the ceramic green sheet according to the present invention. FIG. 14 is a cross-sectional view of a mother laminated body cut along rough cutting lines L1 to L3 in FIG. 13. It is a top view of the conventional ceramic green sheet. FIG. 16 is a cross-sectional view of a mother laminate produced using the ceramic green sheet shown in FIG.

Explanation of symbols

1, 1A to 1E Ceramic green sheet 2 Internal electrode pattern 2a Internal electrode 3 Cut sensing marks 3a, 3c, 3d Mark pieces 3b, 3e, 3f Air gap 4 Cut sensing mark C Chip-like laminate M Mother laminate

Claims (10)

Forming the internal electrode and the cut sensing mark on the ceramic green sheet simultaneously by screen printing, forming the cut sensing mark so as to extend outward from the internal electrode formation region; and
Laminating the ceramic green sheets to obtain a mother laminate,
Cutting the outer periphery of the mother laminate and exposing the cut sensing mark on the cut surface;
Cutting the mother laminated body into a chip-like laminated body based on the exposed cut sensing mark; and
In the method for producing a multilayer electronic component comprising the step of firing the chip-shaped laminate,
Among the cut sensing marks, the cut sensing mark formed in a direction in which the longitudinal direction is orthogonal to the squeezing direction of screen printing is composed of a plurality of mark pieces divided in the longitudinal direction through gaps, and the screen It is arranged in multiple rows in parallel in the squeezing direction of printing,
A method of manufacturing a multilayer electronic component, wherein mark pieces adjacent to each other in a screen printing squeezing direction are arranged in a staggered manner so that adjacent gap portions do not overlap each other. 2. The method for manufacturing a multilayer electronic component according to claim 1, wherein a ratio of a dimension in the longitudinal direction and a dimension in the width direction of the mark piece is 2 or less. 3. The method of manufacturing a multilayer electronic component according to claim 1, wherein the widths of the mark pieces adjacent to each other in the screen printing squeezing direction are different from each other. The method of manufacturing a multilayer electronic component according to any one of claims 1 to 3, wherein the cut sensing mark is provided at a position corresponding to each internal electrode. 5. The laminate according to claim 1, wherein the cut sensing mark is configured by a plurality of mark pieces divided in a longitudinal direction over the entire circumference of the internal electrode formation region. Type electronic component manufacturing method. An internal electrode formation region in which a plurality of internal electrodes are formed in a matrix;
A screen for forming an internal electrode of a multilayer electronic component having a cut sensing mark formation region provided around the internal electrode formation region and formed with a plurality of cut sensing marks extending outward from the internal electrode formation region A print version,
Among the cut sensing marks, the cut sensing mark formed in the direction in which the longitudinal direction is orthogonal to the squeezing direction is composed of a plurality of mark pieces that are divided in the longitudinal direction via gaps, and in the squeezing direction. Arranged in multiple rows in parallel,
The screen printing plate for forming an internal electrode of a multilayer electronic component, wherein the mark pieces adjacent in the squeezing direction are arranged in a staggered manner so that the adjacent gaps do not overlap each other. The screen printing plate for forming an internal electrode of a multilayer electronic component according to claim 6, wherein the ratio of the dimension in the longitudinal direction to the dimension in the width direction of the mark piece is 2 or less. The screen printing plate for forming an internal electrode according to claim 6 or 7, wherein the widths of the mark pieces adjacent to each other in the squeezing direction are different from each other. The screen printing plate for forming an internal electrode according to any one of claims 6 to 8, wherein the cut sensing mark is provided at a position corresponding to each internal electrode. 10. The interior according to claim 6, wherein the cut sensing mark is configured by a plurality of mark pieces that are divided in a longitudinal direction over the entire circumference of the internal electrode formation region. Screen printing plate for electrode formation.

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