JP4555925B2 - 立体形状測定装置 - Google Patents

立体形状測定装置 Download PDF

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Publication number
JP4555925B2
JP4555925B2 JP2001042062A JP2001042062A JP4555925B2 JP 4555925 B2 JP4555925 B2 JP 4555925B2 JP 2001042062 A JP2001042062 A JP 2001042062A JP 2001042062 A JP2001042062 A JP 2001042062A JP 4555925 B2 JP4555925 B2 JP 4555925B2
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light
phase
measured
movable
reflected
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Japanese (ja)
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JP2002243420A5 (enExample
JP2002243420A (ja
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伊知郎 石丸
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国立大学法人 香川大学
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Priority to JP2001042062A priority Critical patent/JP4555925B2/ja
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Publication of JP2002243420A5 publication Critical patent/JP2002243420A5/ja
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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2001042062A 2001-02-19 2001-02-19 立体形状測定装置 Expired - Lifetime JP4555925B2 (ja)

Priority Applications (1)

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JP2001042062A JP4555925B2 (ja) 2001-02-19 2001-02-19 立体形状測定装置

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Application Number Priority Date Filing Date Title
JP2001042062A JP4555925B2 (ja) 2001-02-19 2001-02-19 立体形状測定装置

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JP2002243420A JP2002243420A (ja) 2002-08-28
JP2002243420A5 JP2002243420A5 (enExample) 2008-03-27
JP4555925B2 true JP4555925B2 (ja) 2010-10-06

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JP2001042062A Expired - Lifetime JP4555925B2 (ja) 2001-02-19 2001-02-19 立体形状測定装置

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4474535B2 (ja) * 2004-02-27 2010-06-09 株式会社テクノネットワーク四国 立体形状測定及び分析装置
JP2008164572A (ja) * 2007-01-05 2008-07-17 Nikon Corp 測定装置および測定方法
JP5019533B2 (ja) * 2007-11-15 2012-09-05 株式会社トプコン バンプ高さ測定方法及び測定装置
CN118463826B (zh) * 2024-07-08 2024-09-27 矽电半导体设备(深圳)股份有限公司 半导体载片台的精度测量系统、方法以及存储介质

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0672778B2 (ja) * 1989-01-26 1994-09-14 松下電工株式会社 非接触型の表面形状測定装置
JPH06160013A (ja) * 1992-11-25 1994-06-07 Matsushita Electric Works Ltd 干渉測長器
JPH0980313A (ja) * 1995-09-13 1997-03-28 Nikon Corp 位相差顕微鏡、それに用いられる光吸収体および位相板
JP2000010013A (ja) * 1998-06-24 2000-01-14 Nikon Corp 位相差顕微鏡及び重ね合わせ測定装置

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JP2002243420A (ja) 2002-08-28

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