JP2002243420A5 - - Google Patents
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- Publication number
- JP2002243420A5 JP2002243420A5 JP2001042062A JP2001042062A JP2002243420A5 JP 2002243420 A5 JP2002243420 A5 JP 2002243420A5 JP 2001042062 A JP2001042062 A JP 2001042062A JP 2001042062 A JP2001042062 A JP 2001042062A JP 2002243420 A5 JP2002243420 A5 JP 2002243420A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001042062A JP4555925B2 (ja) | 2001-02-19 | 2001-02-19 | 立体形状測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001042062A JP4555925B2 (ja) | 2001-02-19 | 2001-02-19 | 立体形状測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002243420A JP2002243420A (ja) | 2002-08-28 |
| JP2002243420A5 true JP2002243420A5 (enExample) | 2008-03-27 |
| JP4555925B2 JP4555925B2 (ja) | 2010-10-06 |
Family
ID=18904414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001042062A Expired - Lifetime JP4555925B2 (ja) | 2001-02-19 | 2001-02-19 | 立体形状測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4555925B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4474535B2 (ja) * | 2004-02-27 | 2010-06-09 | 株式会社テクノネットワーク四国 | 立体形状測定及び分析装置 |
| JP2008164572A (ja) * | 2007-01-05 | 2008-07-17 | Nikon Corp | 測定装置および測定方法 |
| JP5019533B2 (ja) * | 2007-11-15 | 2012-09-05 | 株式会社トプコン | バンプ高さ測定方法及び測定装置 |
| CN118463826B (zh) * | 2024-07-08 | 2024-09-27 | 矽电半导体设备(深圳)股份有限公司 | 半导体载片台的精度测量系统、方法以及存储介质 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0672778B2 (ja) * | 1989-01-26 | 1994-09-14 | 松下電工株式会社 | 非接触型の表面形状測定装置 |
| JPH06160013A (ja) * | 1992-11-25 | 1994-06-07 | Matsushita Electric Works Ltd | 干渉測長器 |
| JPH0980313A (ja) * | 1995-09-13 | 1997-03-28 | Nikon Corp | 位相差顕微鏡、それに用いられる光吸収体および位相板 |
| JP2000010013A (ja) * | 1998-06-24 | 2000-01-14 | Nikon Corp | 位相差顕微鏡及び重ね合わせ測定装置 |
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2001
- 2001-02-19 JP JP2001042062A patent/JP4555925B2/ja not_active Expired - Lifetime