JP4552144B2 - Positioning stage and transfer system using the same - Google Patents

Description

  In the present invention, a pair of X-axis linear motors that move the slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member that is bridged between the sliders of the pair of X-axis linear motors. The present invention relates to a positioning stage that performs predetermined processing on a workpiece to be processed using a tool mounted on a slider, and a transfer system using the same. The workpiece to be processed in the present invention is a plate-like glass substrate, an LCD panel, a plasma panel, or the like.

As prior art documents related to the linear motor, there are Patent Document 1 and Patent Document 2.
FIG. 10 is an external perspective view of a conventional positioning stage, in which a pair of X-axis linear motors are arranged in parallel at a predetermined distance, and a bridge member bridges between sliders of each X-axis linear motor. A basic configuration is provided with a Y-axis linear motor on top.

  Reference numeral 1 denotes a casing of a positioning stage. Projections 1a and 1b parallel to the X-axis direction are formed at both ends of the upper surface in the X-axis direction so that the cross section is concave, and a workpiece to be processed is formed on the upper surface of the recess 1c. 2 is set at a predetermined position.

  Reference numeral 31 denotes an X1-axis linear motor in which a stator is installed on the upper surface of the protruding portion 1a. Reference numeral 32 denotes an X2-axis linear motor in which a stator is installed on the upper surface of the protruding portion 1b. These linear motors are parallel to the X-axis. Reference numerals 41 and 42 denote sliders that run on the stators of these linear motors.

  Reference numeral 5 denotes a bridge member, which bridges the sliders 41 and 42 and is arranged in parallel to the Y axis perpendicular to the X axis. Reference numeral 6 denotes a Y-axis linear motor in which a stator is disposed on the upper surface of the bridge member in parallel with the Y-axis, and 7 is a slider that runs on the stator.

  A tool (not shown) for performing predetermined processing (production, inspection of liquid crystal, semiconductor, electronic parts, etc.) on the workpiece 2 is mounted on the slider 7 of the Y-axis linear motor. XY positioning control for the workpiece 2 is performed. The XY servo system for positioning is disclosed in Patent Documents 1 and 2.

  When the processing process for the workpiece 2 to be processed by the positioning stage described above involves a plurality of steps, a plurality of positioning stages are arranged in cascade in the X-axis direction and processed from the upstream positioning stage to the downstream positioning stage. The target work 2 is sequentially transferred and transferred.

  FIG. 11 is a schematic diagram illustrating a transfer path of a workpiece transferred between a plurality of positioning stages. In order to transfer the workpiece 2 set on the upstream stage 1 as the workpiece 2 ′ of the downstream stage 2, the workpiece is transferred to the transfer device via the unloader formed on the stage 1, and this transfer device is used as the stage. Take the procedure of handing the workpiece to loader 2.

JP 63-213490 A

JP 2000-65970 A

In the conventional positioning stage, one function is fixed by one stage, and devices such as in-process process and inspection are specialized for each function. Therefore, the conventional transfer system using the positioning stage has the following problems.
(1) A loader and unloader for loading / unloading workpieces into / out of the stage and a transfer device are separately required as dedicated devices between the positioning stages, and the space occupied by these dedicated devices increases as the number of positioning stages connected increases. The number of positioning stages that can be installed is limited, and space efficiency is reduced.

(2) If the number of stages increases and the number of dedicated devices increases, incidental costs other than those for the positioning stage increase, which causes an increase in the cost of constructing the transfer system.

  The present invention has been made to solve the above-described problems, and realizes a positioning stage capable of minimizing the space occupied by the work transfer means and reducing the cost of constructing the transfer system, and a transfer system using the same. The purpose is that.

In order to achieve such a subject, the present invention has the following configuration.
(1) A pair of X-axis linear motors that move the slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member that is bridged between the sliders of the pair of X-axis linear motors. In a positioning stage that performs a predetermined process on a workpiece to be processed using a tool mounted on the slider of
A workpiece conveying means for supporting the workpiece and moving in the X-axis direction and delivering the workpiece to the outside of the stage ;
The workpiece transfer means includes:
A pair of transport slider members that move in the X-axis direction along the pair of X-axis linear motors;
A transport bridge member bridged between the transport slider members;
An arm member extending in the X-axis direction that is attached to the transport bridge member and supports the lower surface of the workpiece;
Positioning stage, wherein Rukoto equipped with.

( 2 ) The positioning stage according to (1) , wherein the pair of transport slider members are moved and operated by the pair of X-axis linear motors.

( 3 ) The arm member is disposed outside the processing position of the workpiece in a standby state, and is moved and operated on the lower surface of the workpiece lifted up in the Z-axis direction when the workpiece is transported ( The positioning stage according to 1 ) or ( 2 ).

( 4 ) The positioning stage according to any one of (1) to ( 3 ), further comprising a plurality of lift pin means for lifting up or down the workpiece in the Z-axis direction from its lower surface side.

( 5 ) A transfer system comprising a plurality of the positioning stages according to any one of (1) to (4) connected in the X-axis direction.

( 6 ) The transfer system according to ( 5 ), wherein each positioning stage has a common mechanical interface structure on the receiving side and the receiving side of the workpiece.

( 7 ) The workpiece conveying means returns the workpiece processed by the upstream positioning stage to the standby position after conveying the workpiece to the processing position of the connected downstream positioning stage ( 5 ). Or the transfer system as described in ( 6 ).

( 8 ) The workpiece transfer means transfers the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage, and transfers the workpiece processed by the downstream positioning stage. The transfer system according to ( 5 ) or ( 6 ), wherein the transfer system returns to the standby position after being transported to the processing position of the upstream positioning stage.

As is apparent from the above description, the present invention has the following effects.
(1) Since the positioning stage itself is provided with a workpiece transfer means for loading and unloading the workpiece into and out of the stage, a dedicated device for transferring the workpiece is not required outside the stage. For this reason, even if the number of positioning stages connected as a transfer system increases, the space efficiency does not decrease due to the conveying means.

(2) Since a dedicated device for workpiece transfer is not required outside the stage, there is no increase in incidental costs other than the positioning stage, and the cost for constructing the transfer system can be reduced.

  Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is an external perspective view showing an embodiment of a positioning stage to which the present invention is applied. The same elements as those of the conventional positioning stage described with reference to FIGS. Hereinafter, the characteristic part of the present invention will be described.

  The present invention is characterized in that the positioning stage itself is provided with a workpiece transfer means that supports the workpiece and moves in the X-axis direction and delivers the workpiece to the outside of the stage. With reference to FIG. 1, the structure of the workpiece transfer means will be described.

  The basic configuration of the workpiece transfer means to which the present invention is applied is a bridge between the pair of transfer slider members 101 and 102 that move in the X-axis direction along the pair of X-axis linear motors 31 and 32 and the transfer slider member. The conveyance bridge member 200 includes arm members 501 and 502 that are attached to the conveyance bridge member and support the lower surface of the workpiece.

  The pair of transport slider members 101 and 102 are operated to move in the X-axis direction on the pair of X-axis linear motors 31 and 32 in common with the sliders 41 and 42. A transport bridge member 200 is disposed so as to bridge between the pair of transport slider members 101 and 102.

  Reference numeral 300 denotes a Y-axis linear motor, which is disposed on the transport bridge member 200 in the Y-axis direction. The Y-axis linear motor 300 can have the same structure as the Y-axis linear motor 5 disposed on the bridge member 5.

  Reference numerals 401 and 402 denote a pair of sliders that are independently moved on the Y-axis linear motor 300 in the Y-axis direction. These sliders can also have the same structure as the slider 7 disposed on the Y-axis linear motor 5.

  Reference numerals 501 and 502 denote a pair of arm members that support the lower surface of the lifted workpiece 2 and extend in the X-axis direction in parallel to the surface of the recess 1c, and carry the workpiece 2 out of the stage or remove the workpiece 2 from the outside of the stage. Carry in. The pair of arm members 501 and 502 are coupled to the pair of sliders 401 and 402 by connecting members 501a and 502a, and the pair of sliders 401 and 402 are independently operated to move in the Y-axis direction.

  The pair of arm members 501 and 502 are in a standby state during the processing of the workpiece 2, are shifted in the Y-axis direction outside the workpiece processing position, and the transport bridge member 200 is also upstream of the stage in the X-axis direction. It is shifted at the end and set at a position that does not hinder the processing of the workpiece 2.

  The pair of arm members 501 and 502 supports the workpiece 2 from the lower surface by moving the gap generated in the lower surface of the workpiece 2 lifted up in the Z-axis direction in the Y-axis direction when the workpiece 2 is carried out / in. In this state, it is moved in the X-axis direction.

  FIGS. 2 to 4 are plan views for explaining the movement of the workpiece processing bridge 6 and the workpiece transfer conveying bridge member 200. 2 is a plan view showing a standby state before workpiece machining, FIG. 3 is a plan view showing a state during workpiece machining, and FIG. 4 is a plan view showing a state during workpiece transfer.

  In the standby state shown in FIG. 2, the transport bridge member 200 is shifted at the upstream end of the stage. Reference numeral 600 denotes a suction disk, which is formed on the surface of the recess 1c with a predetermined height in the Z-axis direction in accordance with the shape of the workpiece 2 (not shown). The work 2 is processed by being fixed to the upper surface of the suction disk 600 by vacuum suction means (not shown).

  Reference numeral 700 denotes a plurality of lift pin means arranged in the lower surface side space of the suction disk 600. The pins protrude in the Z-axis direction from holes formed on the upper surface of the suction disk 600, and the workpiece 2 is lifted up in the Z-axis direction. Lift up.

  The plurality of lift pin means 700 are arranged in a grid at predetermined intervals in the X-axis direction and the Y-axis direction. The pair of rows 700A and 700A ′ in the X-axis direction is the outermost row A and row A ′ in the Y-axis direction. The pair of rows 700B and 700B ′ in the X-axis direction are the rows B and B ′ inside the rows A and A ′. The number of columns is arbitrary.

  In the state during the workpiece machining shown in FIG. 3, the bridge member 5 is moved on the workpiece 2 (not shown) fixed to the suction disk 600 in the X-axis direction to execute a predetermined machining process. During the processing period, the transport bridge means 200 maintains the standby position shown in FIG.

  In the state during workpiece transfer shown in FIG. 4, the bridge member 6 that has been processed is moved to the most downstream position in the X-axis direction of the stage and stopped at that position (state shown in the figure). When the processing is completed, the workpiece 2 is lifted up in the Z-axis direction by the lift pin means 700.

  In the standby state, the arm members 501 and 502 arranged at the end in the Y-axis direction outside the workpiece processing position are predetermined toward the center in the Y-axis direction through the gap between the work 2 and the suction plate 600 generated by the lift-up. Move to the position.

  When the movement operation of the arm member is completed, the work 2 is lifted down by the lift pin means 700 and mounted on the arm members 501 and 502. When the mounting is completed, the transfer bridge means 200 is moved to the downstream side in the X-axis direction (arrow P), and the work 2 is unloaded from the stage as shown in the state of being mounted on the arm members 501 and 502, Passed to the next process equipment.

  5 to 7 are image diagrams for explaining the transition of the lift-up and lift-down of the workpiece 2 and the movement operation of the arm members 501 and 502 by the lift pin means 700. FIG. For the sake of simplicity, one lift pin in each of the A row and the B row and a portion of the arm member 501 are shown.

  FIG. 5A to FIG. 5J show the transition from the initial position where the arm members 501 and 502 are in the standby state to the time when the workpiece 2 is supported. At the initial position in FIG. 5A, the workpiece 2 is held by suction on the suction disk 600.

  The lift pin means installed in the lower surface space of the suction board 600 is composed of a pin 701 extending in the Z-axis direction and a pin operation unit 702, and the pin 701 is pulled down to the lowest position at this initial position. The arm member 501 (same for 502, the same applies hereinafter) is located at a position deviating from the processing position of the workpiece 2 in the Y-axis direction.

  In FIG. 5B, all the pins of the lift pin means 700 are extended in the Z-axis direction, and the workpiece 2 whose suction has been released is lifted up from the surface of the suction disk 600 in the Z-axis direction. In FIG. 5C, only the pins in the A row are drawn to the initial position, so that a movement space to the B row of the arm members 501 appears.

  In FIG. 5D, the arm member 501 is moved in the Y-axis direction to the front of the B row. In FIG. 5E, the pins in the A row that have been drawn are extended to the lower surface of the workpiece 2. In FIG. 5 (F), only the B row pins are pulled to the initial position, so that a movement space to the C row (not shown) of the arm members 501 appears.

  In FIG. 5G, the arm member 501 is moved in the Y-axis direction to the front of the C row. In FIG. 5 (H), the pins in the B row that have been pulled in are extended to the lower surface of the workpiece 2. FIG. 5 (I) shows the repetition of the above operations, and this operation sequentially moves the arm member 501 to the target Y-axis direction position.

  FIG. 5J shows a state in which the movement operation of the arm member 501 is completed and all the pins of the lift pin means 700 are pulled to the initial position, and the workpiece 2 is supported by the arm member 501 that has been moved. It becomes a state. In this state, the transfer bridge member 200 is moved in the X-axis direction, and the work 2 supported by the arm member 501 is carried out of the stage.

  FIGS. 6A to 6J show a transition in which the lifted workpiece 2 is lifted down onto the suction disk 600 and the arm member 501 is moved to the standby position. 6A, the work 2 is supported by the arm member 501 in a state where all the pins of the lift pin means 700 are pulled to the initial position.

  In FIG. 6B, all the pins of the lift pin means 700 are extended in the Z-axis direction, and the work 2 is further lifted up from the support surface of the arm member 501 in the Z-axis direction. In FIG. 6C, since only the pins in the B row are drawn to the initial position, a movement space to the A row of the arm members 501 appears.

  In FIG. 6D, the arm member 501 is moved and operated in the Y-axis direction up to the front of the A row. In FIG. 6E, the B row pins that have been drawn are extended to the lower surface of the workpiece 2. In FIG. 6F, since only the pins in the A row are pulled to the initial position, a movement space to the standby position of the arm member 501 appears.

In FIG. 6G, the arm member 501 is moved to the standby position in the Y-axis direction. FIG.
In (H), the pins in the B row that have been pulled in are extended to the lower surface of the workpiece 2. FIG. 6I shows the repetition of the above operation, and by this operation, the arm member 501 moves to the Y-axis direction position to the standby position.

  FIG. 6J shows a state in which the operation of moving the arm member 501 to the standby position is completed and all the pins of the lift pin means 700 are pulled to the initial position, and the work 2 is held on the upper surface of the suction disk 600. It will be in the state.

  FIGS. 7A to 7D show a transition in which the work 2 unloaded from the upstream stage is placed on the suction plate of the downstream stage in the coupled transfer system. FIG. 7A shows a state in which the workpiece 2 is transferred to the position of the suction plate 600 of the downstream stage by the arm member 501 of the upstream stage, and all the pins of the lift pin means 700 of the downstream stage are in the initial position. Has been drawn into. Reference numeral 801 denotes an arm member of the downstream stage.

  In FIG. 7B, all the pins that have been drawn are extended to the lower surface of the work 2, and the work 2 is separated by the arm member 501 and lifted up in the Z-axis direction. In FIG. 7C, the arm member 501 of the upstream stage is returned to the upstream stage. In FIG. 7D, all the pins of the lift pin means 700 are drawn to the initial position, and the workpiece 2 is held on the upper surface of the suction disk 600.

  In the embodiment illustrated in FIG. 1, the transport slider members 101 and 102 are configured to be moved and operated in common with the pair of X-axis linear motors 31 and 32 shared with the sliders 41 and 42, but the present invention is not limited thereto. Is not to be done.

  FIG. 8 is an external perspective view of a positioning stage showing another embodiment of the present invention. Reference numerals 901 and 902 denote a pair of guide rails arranged in the X-axis direction on the inner wall portions of the projecting portions 1a and 1b of the housing 1, and the transport slider members 101 and 102 are attached to these guide rails and mounted in the X-axis direction. Is moved to. As the operation means, a linear motor, a ball screw, a timing belt, or the like can be adopted.

  FIG. 9 is a perspective view showing an embodiment of a transfer system in which a plurality of the positioning stages of the present invention shown in FIG. 1 are connected in the X-axis direction. In this embodiment, a transfer system in which three stages S1, S2, and S3 are connected is shown.

  In the connected transfer system, each stage needs to have a common mechanical interface structure on the workpiece receiving side from the upstream stage and the workpiece transferring side to the downstream stage.

  In a general transfer system in which the processing for the workpiece 2 is sequentially transferred from the upstream stage to the downstream stage, the workpiece transfer means of each stage is configured to connect the workpiece processed in the upstream stage to the connected downstream side. After transporting to the processing position on the stage, it returns to the standby position.

  When a workpiece that has been processed on the downstream stage is returned to the upstream stage for reprocessing, the workpiece transfer means on the upstream stage moves the workpiece 2 to the processing position on the connected downstream stage. The workpiece 2 that has been transferred and processed on the downstream stage is transferred again to the processing position on the upstream stage, and then returned to the standby position.

It is an external appearance perspective view which shows one Embodiment of the positioning stage to which this invention is applied. It is a top view explaining a bridge for work processing, and a movement of a work conveyance bridge member. It is a top view explaining a bridge for work processing, and a movement of a work conveyance bridge member. It is a top view explaining a bridge for work processing, and a movement of a work conveyance bridge member. It is an image figure explaining the transition of the lift operation of the workpiece | work by the lift pin means, the lift down, and the movement operation of an arm member. It is an image figure explaining the transition of the lift operation of the workpiece | work by the lift pin means, the lift down, and movement operation of an arm member. It is an image figure explaining the transition of the lift operation of the workpiece | work by the lift pin means, the lift down, and the movement operation of an arm member. It is an external appearance perspective view of the positioning stage which shows other embodiment of this invention. It is a perspective view showing an embodiment of a transfer system in which a plurality of positioning stages of the present invention are connected in the X-axis direction. It is an external appearance perspective view of the conventional positioning stage. It is a schematic diagram which shows the transfer path | route of the workpiece | work transferred between several positioning stages.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Case 1c Concave part 2 Workpieces 31, 32 X1-axis, X2-axis linear motors 41, 42 Slider 5 Bridge member 6 Y-axis linear motor 7 Slider 101, 102 Transport slider member 200 Transport bridge member 300 Y-axis linear motor 401, 402 Slider 501,502 Arm member

Claims (8)

A pair of X-axis linear motors that move the slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member bridged between the sliders of the pair of X-axis linear motors. In a positioning stage that performs predetermined processing on the workpiece to be processed using the mounted tool,
A workpiece conveying means for supporting the workpiece and moving in the X-axis direction and delivering the workpiece to the outside of the stage ;
The workpiece transfer means includes:
A pair of transport slider members that move in the X-axis direction along the pair of X-axis linear motors;
A transport bridge member bridged between the transport slider members;
An arm member extending in the X-axis direction that is attached to the transport bridge member and supports the lower surface of the workpiece;
Positioning stage, wherein Rukoto equipped with. The positioning stage according to claim 1, wherein the pair of transport slider members are moved and operated by the pair of X-axis linear motors. The said arm member is arrange | positioned out of the process position of the said workpiece | work in a standby state, and is moved and operated to the lower surface of the said workpiece lifted up in the Z-axis direction at the time of the conveyance of the said workpiece | work. 2. The positioning stage according to 2. The positioning stage according to any one of claims 1 to 3, further comprising a plurality of lift pin means for lifting up or down the workpiece in the Z-axis direction from its lower surface side. A transfer system comprising a plurality of the positioning stages according to claim 1 connected in the X-axis direction. The transfer system according to claim 5, wherein each positioning stage has a common mechanical interface structure on a receiving side and a transferring side of the workpiece. The workpiece transfer means returns the workpiece to the standby position after transferring the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage. The transfer system described. The workpiece conveying means conveys the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage, and transfers the workpiece processed by the downstream positioning stage to the upstream side. The transfer system according to claim 5 or 6, wherein the transfer system returns to the standby position after being conveyed to the processing position of the positioning stage.

Images