JP4551061B2 - 圧電変位素子および圧電アクチュエータ - Google Patents

圧電変位素子および圧電アクチュエータ Download PDF

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Publication number
JP4551061B2
JP4551061B2 JP2003096622A JP2003096622A JP4551061B2 JP 4551061 B2 JP4551061 B2 JP 4551061B2 JP 2003096622 A JP2003096622 A JP 2003096622A JP 2003096622 A JP2003096622 A JP 2003096622A JP 4551061 B2 JP4551061 B2 JP 4551061B2
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piezoelectric
ceramic layer
piezoelectric ceramic
electrode
crystal phase
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Japanese (ja)
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JP2004304028A (ja
JP2004304028A5 (enExample
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喜裕 由宇
昌一 川原
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Kyocera Corp
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Kyocera Corp
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  • Compositions Of Oxide Ceramics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2003096622A 2003-03-31 2003-03-31 圧電変位素子および圧電アクチュエータ Expired - Fee Related JP4551061B2 (ja)

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JP2003096622A JP4551061B2 (ja) 2003-03-31 2003-03-31 圧電変位素子および圧電アクチュエータ

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JP2003096622A JP4551061B2 (ja) 2003-03-31 2003-03-31 圧電変位素子および圧電アクチュエータ

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JP2004304028A JP2004304028A (ja) 2004-10-28
JP2004304028A5 JP2004304028A5 (enExample) 2005-06-16
JP4551061B2 true JP4551061B2 (ja) 2010-09-22

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JP2003096622A Expired - Fee Related JP4551061B2 (ja) 2003-03-31 2003-03-31 圧電変位素子および圧電アクチュエータ

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5052175B2 (ja) 2007-03-27 2012-10-17 京セラ株式会社 積層圧電アクチュエータおよび液体吐出ヘッド
JP2010018514A (ja) * 2009-07-13 2010-01-28 Seiko Epson Corp 圧電材料の製造方法、圧電素子および圧電発電機
US10707404B2 (en) * 2016-07-07 2020-07-07 Tdk Corporation Piezoelectric element

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1134321A (ja) * 1997-07-17 1999-02-09 Mita Ind Co Ltd インクジェットヘッド
JPH11274595A (ja) * 1998-03-23 1999-10-08 Hitachi Metals Ltd 圧電セラミックス、積層型圧電セラミックス振動子およびその製造方法
JP3480561B2 (ja) * 1998-03-31 2003-12-22 日本碍子株式会社 圧電／電歪素子
JP2000133853A (ja) * 1998-10-22 2000-05-12 Tdk Corp 編機選針用圧電アクチュエータ
JP3108724B2 (ja) * 1999-01-22 2000-11-13 ファインセラミックス技術研究組合 高耐久性圧電複合セラミックス及びその製法
JP2000252541A (ja) * 1999-03-01 2000-09-14 Hitachi Metals Ltd 積層圧電トランス
JP4022801B2 (ja) * 2000-04-27 2007-12-19 富士通株式会社 セラミックス圧電素子の製造方法

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