JP4548088B2 - 弾性表面波装置 - Google Patents

弾性表面波装置 Download PDF

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Publication number
JP4548088B2
JP4548088B2 JP2004305211A JP2004305211A JP4548088B2 JP 4548088 B2 JP4548088 B2 JP 4548088B2 JP 2004305211 A JP2004305211 A JP 2004305211A JP 2004305211 A JP2004305211 A JP 2004305211A JP 4548088 B2 JP4548088 B2 JP 4548088B2
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Japan
Prior art keywords
reflective layer
acoustic wave
layer
surface acoustic
thickness
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Expired - Fee Related
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JP2004305211A
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Japanese (ja)
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JP2006121259A (ja
JP2006121259A5 (enExample
Inventor
誠 古畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2004305211A priority Critical patent/JP4548088B2/ja
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Publication of JP2006121259A5 publication Critical patent/JP2006121259A5/ja
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Publication of JP4548088B2 publication Critical patent/JP4548088B2/ja
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  • Oscillators With Electromechanical Resonators (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2004305211A 2004-10-20 2004-10-20 弾性表面波装置 Expired - Fee Related JP4548088B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004305211A JP4548088B2 (ja) 2004-10-20 2004-10-20 弾性表面波装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004305211A JP4548088B2 (ja) 2004-10-20 2004-10-20 弾性表面波装置

Publications (3)

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JP2006121259A JP2006121259A (ja) 2006-05-11
JP2006121259A5 JP2006121259A5 (enExample) 2007-08-02
JP4548088B2 true JP4548088B2 (ja) 2010-09-22

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JP2004305211A Expired - Fee Related JP4548088B2 (ja) 2004-10-20 2004-10-20 弾性表面波装置

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JP (1) JP4548088B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230231527A1 (en) * 2021-03-04 2023-07-20 Spectron (Shenzhen) Technologies Co., Ltd Method for manufacturing acoustic resonator in lateral excitation shear mode

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2099129A4 (en) 2006-12-27 2014-03-26 Murata Manufacturing Co Surface acoustic wave device
WO2012086441A1 (ja) * 2010-12-24 2012-06-28 株式会社村田製作所 弾性波装置及びその製造方法
DE102010056562B4 (de) 2010-12-30 2018-10-11 Snaptrack, Inc. Elektroakustisches Bauelement und Verfahren zur Herstellung des elektroakustischen Bauelements
DE102010056572B4 (de) * 2010-12-30 2018-12-27 Snaptrack, Inc. Elektronisches Bauelement und Verfahren zur Herstellung des elektronischen Bauelements
CN103891139B (zh) 2011-10-24 2016-08-24 株式会社村田制作所 弹性表面波装置
KR102029503B1 (ko) * 2014-12-08 2019-11-08 삼성전기주식회사 체적 음향 공진기 및 필터

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251310A (ja) * 1985-04-30 1986-11-08 Asahi Glass Co Ltd 超音波遅延線
JPH0324719U (enExample) * 1990-07-12 1991-03-14
US5373268A (en) * 1993-02-01 1994-12-13 Motorola, Inc. Thin film resonator having stacked acoustic reflecting impedance matching layers and method
KR100316383B1 (ko) * 1998-10-30 2002-02-19 윤덕용 모노리딕직접회로위에박막또는후막단결정압전소자를집적한단일칩라디오구조및그제조방법
JP2004187204A (ja) * 2002-12-06 2004-07-02 Sony Corp 音響共振器および信号処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230231527A1 (en) * 2021-03-04 2023-07-20 Spectron (Shenzhen) Technologies Co., Ltd Method for manufacturing acoustic resonator in lateral excitation shear mode

Also Published As

Publication number Publication date
JP2006121259A (ja) 2006-05-11

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