JP4547671B2 - High saturation magnetic flux density low loss magnetic alloy and magnetic parts using the same - Google Patents

Description

  The present invention relates to various types of reactors for large currents, choke coils for active filters, smooth choke coils, various transformers, high frequency reactors, common mode choke coils, electromagnetic shields and other noise countermeasure components, magnetic shield members, laser power supplies, accelerators High saturation magnetic flux density and low loss magnetic alloy with good temperature characteristics, especially high saturation magnetic flux density and low magnetic core loss, used in magnetic power components for motors, motors, generator cores and various sensor members Performance magnetic parts

  Various high current reactors, choke coils for active filters, smooth choke coils, various transformers, high frequency reactors, common mode choke coils and electromagnetic shields and other noise countermeasure components, magnetic shield members, laser power supplies, pulse power magnets for accelerators As soft magnetic materials used for parts, motors, generator magnetic cores, various sensor members, etc., silicon steel, ferrite, amorphous alloys, Fe-based nanocrystalline alloy materials, and the like are known. Ferrite materials have a problem of low saturation magnetic flux density and poor temperature characteristics, and are not suitable for high power applications where the operating magnetic flux density is large and the ferrite is likely to be magnetically saturated. Silicon steel sheet is inexpensive and has high magnetic flux density, but there is a problem of high core loss for high frequency applications. The Fe-based amorphous alloy has a problem that its magnetostriction is large and its characteristics deteriorate due to stress, and there is a problem that noise is high in applications where currents in an audible frequency band are superimposed. On the other hand, the Co-based amorphous alloy has a problem that the saturation magnetic flux density is as low as 1 T or less in a practical material and is thermally unstable. For this reason, when used for high power applications, there are problems that the parts become large and that the magnetic core loss increases due to aging.

Fe-based nanocrystalline alloys exhibit excellent soft magnetic properties, and are therefore used in magnetic cores such as common mode choke coils, high frequency transformers, and pulse transformers. Typical composition systems are Fe-Cu- (Nb, Ti, Zr, Hf, Mo, W, Ta) -Si-B alloys and Fe-Cu- (Nb, Ti, Zr, Hf, Mo, W, Ta) alloys described in JP-B-4-4393 and JP-A-1-242755. -Cu- (Nb, Ti, Zr, Hf, Mo, W, Ta) -B alloys and the like are known. These Fe-based nanocrystalline alloys are usually produced by rapidly cooling from a liquid phase or a gas phase to form an amorphous alloy and then microcrystallizing it by heat treatment. As a method of quenching from the liquid phase, a single roll method, a twin roll method, a centrifugal quench method, a spinning in spinning solution, an atomizing method, a cavitation method, and the like are known. Further, as a method of quenching from the gas phase, a sputtering method, a vapor deposition method, an ion plating method and the like are known. Fe-based nanocrystalline alloy is a microcrystallized amorphous alloy produced by these methods, has almost no thermal instability as found in amorphous alloys, and is as high as Fe-based amorphous alloys. It is known to exhibit excellent soft magnetic characteristics at a saturation magnetic flux density and low magnetostriction. Furthermore, nanocrystalline alloys are known to have little change over time and excellent temperature characteristics.
Further, addition of Co to these Fe-based nanocrystalline alloys is also under study, and JP-A-9-20965 describes that the range of a good Co amount ratio is 0.2 or less.
Japanese Patent Laid-Open No. 9-20965 ((0019), FIG. 1) Japanese Patent Laying-Open No. 2004-218037 ((0006), (0015), FIG. 3)

  Compared with conventional soft magnetic materials, Fe-based nanocrystalline soft magnetic alloys have higher permeability, lower magnetic core loss, and better soft magnetic properties than conventional soft magnetic materials. Yes. However, a FeCuNbSiB alloy with a large amount of Si, which is a typical nanocrystalline soft magnetic alloy, is difficult to achieve a low magnetic core loss with a material having a saturation magnetic flux density exceeding 1.76 T. Further, even when Co is added to the FeCuNbSiB alloy having a large amount of Si, no significant increase in the saturation magnetic flux density is observed. As Co-based nanocrystalline alloys, alloys described in JP-A-3-249151 are known, but it is difficult to achieve high magnetic flux density in these alloys.

On the other hand, a material exhibiting a saturation magnetic flux density exceeding 1.76 T in FeZrB-based and FeNbB-based alloys has a reduced amorphous forming ability, and it is difficult to produce a large amount of material. It is difficult to realize the loss. In addition, the magnetic core loss rapidly increases as the temperature rises, resulting in a disadvantage that the temperature characteristics are poor. Although the disadvantage that the temperature characteristics are inferior when Co is added is eliminated and the saturation magnetic flux density is high, the alloy that is heat-treated in the absence of a magnetic field is significantly more magnetic than the Fe-based material without Co. There is a problem with a large loss. For this reason, it is difficult to use for the above-mentioned various magnetic components. Therefore, the appearance of a material having a higher saturation magnetic flux density and a lower magnetic core loss is strongly desired.
An alloy described in JP-A-2004-218037 is known as a material that can eliminate such drawbacks. However, the saturation magnetic flux density of the alloy disclosed in the patent is highest at 1.76 T, and an alloy exhibiting a low loss at a further high saturation magnetic flux density has been desired.

The present inventors to solve the above problems result of extensive studies, the range where there is a Co amount, Si amount is predetermined amount or less, and the amount of B is relatively _{large, (Fe 1-a Co a} ) 100 'represented by _y Si _c B _z (atomic%), wherein, M' _{-y-c -z} M is V, Ti, Zr, Nb, Mo, at least one selected from Hf, Ta and W element , A, y, and c satisfy 0.2 <a <0.6, 1 ≦ y ≦ 6, 0 <c ≦ 2.5, 7 ≦ z ≦ 15, and 10 ≦ y + c + z ≦ 20, respectively. An alloy composed of crystal grains having a composition with part or all of a grain size of 100 nm or less has a saturation magnetic flux density B _{s at} 23 ° C. of more than 1.76 T, 120 ° C., 100 kHz, 0.2 T per unit volume low magnetic, especially in high saturation magnetic flux density core losses _{P cv} is 800KWm ^-3 or less It shows the loss characteristics, and conceived the heading present invention that the soft magnetic alloy excellent in temperature characteristics.

The alloy of the present invention is obtained by quenching a molten metal having the above composition by a super rapid cooling method such as a single roll method, once producing an amorphous alloy, processing this, raising the temperature to the crystallization temperature or higher, and performing a heat treatment to obtain an average particle size It is produced by forming microcrystals of 100 nm or less. Although it is desirable that the amorphous alloy before the heat treatment does not contain a crystalline phase, it may contain a crystalline phase in part. The crystal grains formed in this alloy are crystal grains having a grain size of 100 nm or less, and at least a part or all of them are crystal grains having a body-centered cubic structure.
The ultra-rapid cooling method such as the single roll method can be performed in the atmosphere when no active metal is contained, but when it contains an active metal, it is carried out in an inert gas such as Ar or He or under reduced pressure. Moreover, it may manufacture in the atmosphere containing nitrogen gas, carbon monoxide, or a carbon dioxide gas. The heat treatment is usually performed in an inert gas such as argon gas, nitrogen gas, helium, or in vacuum. Applying a magnetic field that is strong enough to saturate the alloy for at least part of the heat treatment period and performing heat treatment in the magnetic field to provide induced magnetic anisotropy results in a reduction in core loss. can get. Although it depends on the shape of the alloy magnetic core, a magnetic field of 8 kAm ⁻¹ or more is generally applied in the width direction of the ribbon (in the case of a wound core, the height direction of the magnetic core). As the magnetic field to be applied, any of direct current, alternating current, and repetitive pulse magnetic field may be used. A magnetic field is usually applied for 20 minutes or more in a temperature range of 200 ° C. or more. When the temperature is raised, kept at a constant temperature and during cooling, the magnetic core loss is lower and the squareness ratio is smaller, and a more preferable result is obtained. When the squareness ratio B _r B _s ⁻¹ is adjusted to 10% or less, a particularly low magnetic core loss can be obtained, and a favorable result can be obtained in application. By applying a heat treatment in a magnetic field and imparting a relatively large induced magnetic anisotropy, excellent soft magnetic properties are realized even in such a high saturation magnetic flux density alloy. Although the crystal grain size becomes relatively large in the high saturation magnetic flux density composition, the deterioration of the soft magnetic characteristics can be suppressed by performing the heat treatment in a magnetic field. On the other hand, when the heat treatment is performed without a magnetic field and the heat treatment in a magnetic field is not applied, the magnetic core loss tends to increase.

Usually, the heat treatment is desirably performed in an inert gas atmosphere having a dew point of −30 ° C. or lower. When the heat treatment is performed in an inert gas atmosphere having a dew point of −60 ° C. or lower, a more favorable result can be obtained with less variation. The highest temperature reached during the heat treatment is equal to or higher than the crystallization temperature, and is usually in the range of 400 to 700 ° C. In the case of the heat treatment pattern held at a constant temperature, the holding time at the constant temperature is usually 24 hours or less, preferably 4 hours or less from the viewpoint of mass productivity. The average heating rate during the heat treatment is preferably from 0.1 ° C / min to 200 ° C / min, more preferably from 0.1 ° C / min to 100 ° C / min, and the average cooling rate is preferably 0.1 ° C / min. To 3000 ° C./min, more preferably 0.1 ° C./min to 100 ° C./min. In this range, an alloy having a particularly low magnetic core loss can be obtained. The heat treatment is not limited to a single step, and a multi-step heat treatment or a plurality of heat treatments can be performed. Furthermore, the alloy can be heated and heat-treated by passing a direct current, an alternating current or a pulsed current through the alloy.
The present invention alloy manufactured through the process described above, the saturation magnetic flux density _{B s} of greater than 1.76 T, 120 ° C., 100kHz, core loss _{P cv} per unit volume in the 0.2T is 800 kW m ^-3 The following characteristics can be realized.

  In the present invention, the Co amount ratio a needs to be 0.2 <a <0.6. If a is 0.2 or less, it is not preferable because it is difficult to obtain a high saturation magnetic flux density of 1.76 T or more in a low loss state, and if a is 0.6 or more, the saturation magnetic flux density decreases or the core loss increases rapidly. Is not preferable. A particularly preferable range of the Co amount ratio a is 0.3 ≦ a ≦ 0.4. In this range, a saturation magnetic flux density of 1.8 T or more and an alloy having a low magnetic core loss at a use temperature higher than room temperature can be obtained.

M ′ is an element that promotes amorphous formation. M ′ is at least one element selected from V, Ti, Zr, Nb, Mo, Hf, Ta, and W, and the M ′ amount y is 1 ≦ y ≦ 6. If y is less than 1 atomic%, the magnetic core loss is remarkably increased, which is not preferable. If y exceeds 6 atomic%, the saturation magnetic flux density decreases, and it becomes difficult for the saturation magnetic flux density to exceed 1.76 T. A more preferable range is 1.5 ≦ y ≦ 5 Si is an essential element and has an effect of reducing magnetic core loss, but the Si amount c needs to satisfy c ≦ 2.5. This is because when the Si amount c exceeds 2.5 atomic%, the saturation magnetic flux density is significantly reduced. A particularly preferable Si amount c is 0.1 ≦ c ≦ 2. In this range, an alloy showing a low core loss while maintaining a particularly high saturation magnetic flux density can be obtained. B is an essential element and has an effect of assisting the formation of amorphous. The B amount z needs to satisfy 7 ≦ z ≦ 15. When the amount of B is less than 7 atomic%, an alloy exhibiting a saturation magnetic flux density exceeding 1.76 T is difficult to be completely amorphized at the time of rapid cooling, and the structure becomes non-uniform after heat treatment, thereby realizing low core loss. Is difficult. On the other hand, if the amount of B exceeds 15 atomic%, an alloy exhibiting a saturation magnetic flux density exceeding 1.76 T is preferable because crystallization by heat treatment significantly increases the crystal grain size and significantly increases the core loss. Absent. A particularly desirable range of the B amount z is z ≧ 10. Within this range, a high saturation magnetic flux density of 1.8 T or more is exhibited, and a low core loss characteristic is obtained. The total amount y + c + z of M ′, Si, and B needs to satisfy 10 ≦ y + c + z ≦ 20. If the total amount of M ′, Si, and B is less than 10 atomic%, it becomes difficult to be amorphized at the time of rapid cooling, and the structure after heat treatment becomes non-uniform. If the total amount exceeds 20 atomic%, the saturation magnetic flux density decreases and it becomes difficult to realize a saturation magnetic flux density exceeding 1.76 T, which is not preferable.
When 2 atomic% or less of Fe is substituted with at least one element selected from Cu and Au, when the Co content ratio a is a ≦ 0.4, the core loss can be remarkably reduced, and preferable results Is obtained.
When 5 atomic% or less of Fe is replaced with Ni, corrosion resistance and ribbon surface properties can be improved while suppressing a decrease in magnetic flux density.
Part of M ′ is replaced with at least one element selected from Cr, Mn, Sn, Zn, In, Ag, Sc, white metal elements, Mg, Ca, Sr, Y, rare earth elements, N, O and S In this case, effects such as improving the corrosion resistance, increasing the low efficiency, and adjusting the magnetic characteristics can be obtained.
When a part of B is substituted with at least one element selected from C, Ge, Ga, Al and P, effects such as adjusting magnetostriction and refining crystal grains can be obtained.

When the amorphous phase is present in the remainder of the crystal grains having an average grain size of 100 nm or less, a higher resistivity can be realized, and the crystal grains become finer and the magnetic core loss is reduced. The crystal grains are desirably 30% or more of the structure, more preferably 50% or more, and particularly preferably 60% or more.
The alloy of the present invention is coated with a powder or film of SiO ₂ , MgO, Al ₂ O ₃ or the like as necessary, and the surface of the alloy ribbon is formed by chemical conversion treatment to form an insulating layer, and the surface is oxidized by anodic oxidation treatment. More preferable results can be obtained by performing a treatment such as forming an insulating layer on the surface with an organic resin such as polyimide, epoxy, polyamide, or acrylic based on forming an insulating layer and performing interlayer insulation. This is particularly because the effect of eddy currents at high frequencies across the layers is reduced and magnetic core loss at high frequencies is improved. This effect is particularly remarkable when used in a magnetic core having a good surface state and a wide ribbon. Furthermore, impregnation and coating can be performed as necessary when producing a magnetic core from the alloy of the present invention. The alloy of the present invention is most effective for high-frequency applications, particularly for applications where a pulsed current flows, but can also be used for sensors and low-frequency magnetic parts. In particular, it can exhibit excellent characteristics in applications where magnetic saturation is a problem, and is particularly suitable for applications in high-power power electronics.
The alloy of the present invention, which is heat-treated while applying a magnetic field in a direction substantially perpendicular to the direction of magnetization during use, can obtain a lower core loss than a conventional material having a high saturation magnetic flux density. Furthermore, the alloy of the present invention can obtain excellent characteristics even in a thin film or powder.

The crystal grains formed in the above-described alloy of the present invention have a body-centered cubic (bcc) crystal phase mainly composed of FeCo, and may contain Si, B, Al, Ge, Zr, or the like as a solid solution. Further, a regular lattice may be included, and the regular lattice is easily formed in the vicinity of a = 0.5. When the composition in the vicinity is ordered, soft magnetism is improved. The balance other than the crystalline phase is mainly an amorphous phase, but an alloy consisting essentially of the crystalline phase is also included in the present invention. In the case of an alloy containing Cu or Au, a face centered cubic phase (fcc phase) partially containing Cu or Au may also exist.
Further, when an amorphous phase is present around the crystal grains, the resistivity is increased, and by suppressing the crystal grain growth, the crystal grains are refined and the soft magnetic characteristics are improved, so that a more preferable result is obtained.
In the alloy of the present invention, when the compound phase is not present, a lower magnetic core loss is exhibited, but a compound phase that does not deteriorate the soft magnetic characteristics may be partially included.

  Another aspect of the present invention is a magnetic component comprising the high saturation magnetic flux density and low loss magnetic alloy having excellent temperature characteristics. By configuring magnetic parts with the alloy of the present invention, various types of reactors for large currents such as anode reactors, choke coils for active filters, smooth choke coils, various transformers, magnetic shields, noise shielding parts such as electromagnetic shield materials, High performance or small magnetic parts suitable for laser power supplies, pulse power magnetic parts for accelerators, motors, generators, etc. can be realized.

  According to the present invention, various types of reactors for large currents, choke coils for active filters, smooth choke coils, various transformers, noise shielding parts such as electromagnetic shield materials, laser power supplies, pulse power magnetic parts for accelerators, motors, generators The high saturation magnetic flux density and low loss magnetic alloy showing a particularly low magnetic core loss at the high saturation magnetic flux density used in the above and the high performance magnetic parts using the same can be realized, and the effect is remarkable.

Hereinafter, the present invention will be described with reference to examples, but the present invention is not limited thereto.
Example 1
_{. (Fe 0.75 Co 0.35) bal} Cu 0.9 Nb y Si 0.9 B 15-y Tanro molten alloy (atomic%) - was quenched by Le method to obtain an amorphous alloy ribbon of width 5mm thickness 21 [mu] m. The amorphous alloy ribbon was wound around an outer diameter of 19 mm and an inner diameter of 15 mm to produce a toroidal magnetic core.
The produced magnetic core was inserted into a heat treatment furnace in a nitrogen gas atmosphere, and heat treatment was performed with the heat treatment pattern shown in FIG. During the heat treatment, a magnetic field of 240 kAm ⁻¹ was applied in a direction perpendicular to the magnetic path of the alloy magnetic core (in the width direction of the alloy ribbon), that is, in the height direction of the magnetic core. FIG. 2 shows an X-ray diffraction pattern of the free solidified surface of the alloy after the heat treatment. From the X-ray diffraction pattern, a crystal peak indicating a phase of a body-centered cubic structure was observed. FIG. 3 shows a microstructure observed by a transmission electron microscope TEM. The crystal grain size increases as the Nb amount y decreases, but is 100 nm or less. Next, the core loss P _cv per unit volume of these alloy magnetic cores at a DC BH loop, 100 kHz, 0.2 T was measured. FIG. 4 shows saturation magnetic flux density B _s at 23 ° C., squareness ratio B _r / B _s , coercive force H _c , AC ratio initial permeability μ _{r at} 1 kHz, magnetic core loss P _cv at 120 ° C., 100 kHz, 0.2T. . FIG. 5 shows (Fe _0.75 Co _0.35 ) _bal. It shows a DC B-H loop at 23 ° C. of Cu _0.9 Nb ₂ Si _0.9 B ₁₃ alloy.
A high saturation magnetic flux density Bs exceeding 1.76 T is obtained when the Nb amount y is 6 atomic% or less within the range of the present invention. When the Nb amount y is less than 1 atomic%, the magnetic core loss exceeds 800 kWm ⁻³ and is low. It can be seen that no core loss is obtained. From FIG. 5, it can be seen that the alloy of the present invention can realize a BH loop with a very good hysteresis and a small hysteresis while having a high saturation magnetic flux density of 1.86T. For this reason, it can contribute to the miniaturization of various choke coils and transformers.

(Example 2)
The molten alloy having the composition shown in Table 1 was rapidly cooled in an Ar atmosphere by a single roll method to obtain an amorphous alloy ribbon having a width of 5 mm and a thickness of 21 μm. The amorphous alloy ribbon was wound around an outer diameter of 19 mm and an inner diameter of 15 mm to produce a toroidal magnetic core. This alloy magnetic core was heat-treated with the same heat-treatment pattern as in Example 1 and subjected to magnetic measurements. In the alloy structure after the heat treatment, ultrafine crystal grains having a grain size of 100 nm or less were formed in the amorphous matrix. The main phase is a bcc phase mainly containing Fe and Co. When Cu or Au is contained, it is not clear by X-ray and is not shown in the table, but the particle size containing Cu or Au is the result of electron beam diffraction by an electron microscope. It was confirmed that a fcc phase of 10 nm or less was also formed slightly. Table 1 shows the saturation magnetic flux density B _s at 23 ° C., the squareness ratio B _r / B _s , the magnetic core loss P _cv per unit volume at 120 ° C., 100 kHz, and 0.2 T. For comparison, the magnetic properties of alloys outside the composition of the present invention are also shown. The alloy of the present invention having a squareness ratio B _r / B _s of 10% or less exhibits a particularly low magnetic core loss P _cv . On the other hand, an alloy having a saturation magnetic flux density exceeding 1.76 T outside the present invention has a larger P _cv than the alloy according to the present invention, and has a high core loss although it is a high saturation magnetic flux density material. The loss alloy has a low Bs of 1.76 T or less, and the alloy of the present invention exhibits a low magnetic core loss and excellent characteristics while having a high saturation magnetic flux density exceeding 1.76 T.

(Example 3)
A molten alloy of (Fe _0.72 Co _0.38 ) _bal. Cu _1.1 Nb _2.5 Si _1.1 B _12.5 (atomic%) was rapidly cooled by a single roll method, and was 20 mm wide and 20.5 μm thick. An amorphous alloy ribbon was obtained. The amorphous alloy ribbon was wound to produce a toroidal magnetic core.
The produced magnetic core was inserted into a heat treatment furnace in a nitrogen gas atmosphere, and heat treatment was performed with the heat treatment pattern shown in FIG. During the heat treatment, a magnetic field of 240 kAm ⁻¹ was applied in a direction perpendicular to the magnetic path of the alloy magnetic core (in the width direction of the alloy ribbon), that is, in the height direction of the magnetic core. The alloy after heat treatment is crystallized, and as a result of electron microscope observation, most of the structure consists of fine body-centered cubic crystal grains with a grain size of about 50 nm, and the proportion of crystal grains is estimated to be about 65%. It was. Most of the crystal phase had a body-centered cubic structure. The remaining matrix was mainly in the amorphous phase. The saturation magnetic flux density B _{s at} 23 ° C. was 1.84 T, 120 ° C., 20 kHz, and the core loss P _cv per unit volume at 0.2 T was 610 kW m ⁻³ . This magnetic core was impregnated with an epoxy resin, and a part thereof was cut to form a 0.5 mm gap. Next, a choke coil was prepared by winding a formal wire, and the cross-sectional area measured for DC superposition characteristics at a frequency of 10 kHz was 1 cm ² , the average diameter was 3 cm, and the number of turns was 20 turns. Fig. 6 shows the DC superposition characteristics at 23 ° C. For comparison, the result of a choke coil using a conventional material is also shown. It can be seen that the DC superimposition characteristics of the choke coil using the alloy of the present invention are superior to those of the conventional choke, and show a high inductance up to a larger current.

It is the figure which showed an example of the heat processing pattern concerning this invention. It is the figure which showed an example of the X-ray-diffraction pattern of the free solidification surface after heat processing of the alloy concerning this invention. It is the figure which showed the microstructure observed with the transmission electron microscope TEM after the heat processing of the alloy concerning this invention. The saturation magnetic flux density B _s , squareness ratio B _r / B _s , coercive force H _c , AC ratio initial permeability μ _{r at} 1 kHz, magnetic core loss P _cv at 120 ° C., 100 kHz, 0.2 T are shown for the alloys according to the present invention. It is a figure. It is the figure which showed an example of direct current | flow BH loop of this invention alloy. It is the figure which showed an example of the direct current superimposition characteristic of the choke coil using this invention alloy and the conventional material.

Claims (12)

_{(Fe 1-a Co a)} ' is represented by _y Si _c B _z (atomic%), _{wherein, M' 100-y-c} -z M is V, Ti, Zr, Nb, Mo, Hf, Ta and At least one element selected from W, a, y, and c satisfy 0.2 <a <0.6, 1 ≦ y ≦ 6, 0 <c ≦ 2.5, and 7 ≦ z ≦ 15, respectively. In addition, the composition satisfies 10 ≦ y + c + z ≦ 20, and part or all of the structure is made of crystal grains having a particle size of 100 nm or less, and the saturation magnetic flux density B _{s at} 23 ° C. exceeds 1.76 T, 120 ° C., 100 kHz, 0 high saturation magnetic flux density and low loss magnetic alloy core losses _{P c v} per unit volume in .2T is characterized in that it 800KWm ^-3 or less. High saturation magnetic flux density and low loss magnetic alloy according to claim 1, saturation magnetic flux density B _s at 23 ° C. is characterized in that at least 1.80T. Heat treated in a magnetic field, squareness ratio B _r
The high saturation magnetic flux density low loss magnetic alloy according to claim 1 or 2, wherein B _s ^-1 is 10% or less. The high saturation magnetic flux density and low loss magnetic alloy according to any one of claims 1 to 3, wherein z ≧ 10. The high saturation magnetic flux density and low loss magnetic alloy according to claim 1, wherein 0.1 ≦ c ≦ 2. 6. The high saturation magnetic flux density and low loss magnetic alloy according to claim 1, wherein an amorphous phase is partially present. The high saturation magnetic flux density low loss magnetic alloy according to any one of claims 1 to 6, wherein at least a part or all of crystal grains having a grain size of 100 nm or less are crystal grains having a body-centered cubic structure. 0.3 ≦ a ≦ 0.4 a high saturation flux density low loss magnetic alloy according to any one of claims 1 to 7, characterized in that. Cu 2 atomic% or less of Fe, the high saturation magnetic flux density and low loss magnetic alloy according to any one of claims 1 to 8, characterized in that substituted with at least one element selected from Au. The high saturation magnetic flux density and low loss magnetic alloy according to any one of claims 1 to 9 , wherein 5 atomic% or less of Fe is substituted with Ni. Part of M ′ is replaced with at least one element selected from Cr, Mn, Sn, Zn, In, Ag, Sc, white metal elements, Mg, Ca, Sr, Y, rare earth elements, N, O and S The high saturation magnetic flux density low loss magnetic alloy according to any one of claims 1 to 10 . A magnetic component comprising the high saturation magnetic flux density and low-loss magnetic alloy according to any one of claims 1 to 11 .