JP4530261B2 - Electroformed part and method for producing electroformed part - Google Patents

Description

  The present invention relates to an electroformed part and a method for producing the electroformed part. In particular, the present invention relates to a method for manufacturing an electroformed part for a mechanical timepiece, a method for manufacturing an electroformed part for an electronic timepiece, a part for a mechanical timepiece made by the manufacturing method, and an electronic made by the manufacturing method. It relates to parts for watches. Furthermore, the present invention relates to a mechanical timepiece including at least one electroformed part made by the manufacturing method and an analog electronic timepiece including at least one electroformed part made by the manufacturing method.

  In the first type of prior art, in the method of manufacturing a fine pattern duplication mold, a photoresist is applied to a silicon substrate, and a pattern on the photomask is exposed and developed on the photoresist to form a photoresist pattern. Then, the silicon substrate is etched, the photoresist pattern is removed, and the master for the replication mold is manufactured. Further, an ITO film is formed on the surface of the master, nickel electroforming is performed on the ITO film, and then a mold is manufactured by peeling off the electroformed parts (see Patent Document 1).

  In the second type of prior art, a method for manufacturing an electroformed component includes a step of patterning a non-conductive material on a partially conductive substrate to form an electroforming mold, and a conductive part on a base. And forming the electroformed part, removing the non-conductive material from the base and the electroformed part, and separating the electroformed part from the base. That is, in this method, a nickel conductive film is formed on a glass substrate, non-conductive mask patterning (resist) is performed, nickel electroforming is performed, and after registry move, ultrasonic waves, water pressure, air pressure, etc. are used. Thus, the electroformed part is separated from the base (see Patent Document 2).

In the third type of conventional technology, an ankle base is made, this base is transferred to a resin substrate to make a mother die, a conductive film is made on the entire surface of the resin substrate, and an ankle of the watch is formed by electroforming. (See Patent Document 3).
In the conventional electroforming process, a mother die is made. If the mother die is a conductor, the surface is subjected to a mold release treatment to enter the electrodeposition process. If the mother die is a non-conductor, the mother die surface After making the conductor into a mold, it is subjected to a mold release process and enters an electrodeposition process. After electrodeposition to the required thickness, the electroformed part is peeled off from the mother mold (see Non-Patent Document 1).

JP-A-2-170994 (pages 2 to 4, FIGS. 1 to 3) Japanese Patent Laid-Open No. 2001-254193 (pages 2 to 4, FIGS. 1 to 3) Japanese Patent Laid-Open No. 48-44138 (pages 2 to 4 and FIG. 4) Toshikazu Sato, “Special Processing”, pp. 235-261, 1st edition published in 1981, 8th edition published in 1997, Yokendo

  The first type of prior art is suitable for the production of molds used to produce flat parts having irregularities on the surface, such as optical disks and hologram disks, but mechanical parts having various shapes. There is a problem that it is difficult to apply to the production of a mold used for the manufacture of the mold.

  Using the second type of prior art or the third type of prior art, it is possible to produce mechanical parts. However, for example, when an electroformed part is used as a rotating machine part, it may be necessary to attach a part such as a shaft. For example, when the part size is very small, such as mechanical parts that make up a wristwatch, the process of attaching other parts to the electroformed part (for example, driving the shaft, bonding the parts to each other, etc.) Advanced technology is required for size selection, manufacturing and adjustment of processing machines, and processing operations. In the manufacturing process of such a micro component, in addition to the difficulty in handling the component, there is a problem that the component may be broken by stress due to press-fitting. In addition, since the component is very small in the bonding process, there is a problem that a sufficient bonding margin cannot be secured, and an excessive adhesive adversely affects the shape and thickness of the component.

  An object of the present invention is to provide a method of manufacturing a metal part composed of a plurality of parts in a simple process, without the step of attaching other parts to the electroformed part produced by electroforming. Another object of the present invention is to provide a small electroformed part manufactured by electroforming comprising a simple process.

  The present invention relates to a method for manufacturing an electroformed component, in which (a) a step of forming an etching hole 420h in a substrate having a mask and (b) a lower shaft portion including a tip of a lower shaft portion of the shaft component is formed on the substrate. And a step of performing electroforming on a substrate into which a part of the shaft part is inserted, and forming an electroformed metal part integrally with the shaft part. In the method of the present invention, after the step described in (a) above, a step of removing the mask from the surface of the substrate, a conductive film is attached to the surface of the substrate and the bottom surface of the etching hole, and the surface of the substrate It is preferable to further include a step of making the conductor. Alternatively, in the method of the present invention, a metal thin film is formed on the mask without performing the step of removing the mask from the surface of the substrate after the step described in (a) above, and for electroforming. And a step of forming a surface conductor. By using this method, a minute mechanical part can be manufactured by electroforming consisting of a simple process.

  Furthermore, the present invention provides a method for manufacturing an electroformed component, wherein (a) a step of preparing a substrate, (b) a photoresist is coated on the surface of the substrate, a necessary shape is exposed to the coated photoresist and developed. Patterning the mask, (c) forming an etching hole in the substrate having the mask, (d) removing the mask from the surface of the substrate, (e) the surface of the substrate, and the bottom surface of the etching hole (F) Preparing the shaft component and inserting the lower shaft portion including the tip of the lower shaft portion of the shaft component into the etching hole of the substrate. (G) depositing a thick film resist on the substrate, exposing a necessary shape to the deposited thick film resist, developing and patterning a resist for forming an outer shape, and (h) a part of the shaft component. Electroforming on the inserted substrate Performed, characterized in that it comprises a step of forming a electroformed metal portion between the resist and the axial component outline form.

  The method of the present invention may include a step of forming a metal thin film on the mask and forming a surface conductor for electroforming instead of the step described in (d) above. Alternatively, in the method of the present invention, instead of performing the step described in (g) after the step described in (f), the step described in (f) after the step described in (g) is performed. It can also be done. Further, in the method of the present invention, the shaft component is configured to be located in an electroformed metal portion formed integrally with the shaft component, and prevents the shaft component from coming off and / or rotating the shaft component. It is preferable to have a contour shape for the purpose. Furthermore, the present invention can provide an electroformed part manufactured by any of the above methods.

  Furthermore, in the wheel train component for a watch, the present invention forms an etching hole in the substrate having a mask, and inserts the lower shaft portion including the tip of the lower shaft portion of “Kana” into the etching hole of the substrate, The substrate is manufactured by performing electroforming on a substrate having “kana” inserted therein and forming a gear integrally with “kana”. In addition, the timepiece ankle of the present invention forms an etching hole in a substrate having a mask, inserts the lower shaft portion including the tip of the lower shaft portion of the ankle true into the etching hole of the substrate, and inserts the ankle true. The substrate is manufactured by performing electroforming on the substrate, forming an ankle body integrally with the ankle body, and further fixing a sword tip and a pallet to the ankle body. By using this method, a watch part can be manufactured by electroforming consisting of a simple process. Further, according to the present invention, in the method for manufacturing an ankle for a watch, (a) a step of forming an etching recess in a substrate having a mask, (ii) a conductive film is attached to the surface of the substrate and the surface of the etching recess. The step of conducting the surface of the substrate, the step of placing the urnite in the etching recess of the substrate, and (e) electroforming the substrate on which the pallet is disposed, And a step of forming a cast metal part. By using this method, an ankle for a watch provided with two pallet stones can be manufactured by electroforming consisting of a simple process.

  Furthermore, the present invention relates to a method for manufacturing an electroformed component, in which (a) a step of forming a convex portion of the substrate, a step of making the surface of the substrate conductive, and a center hole of a cylindrical component having a hollow shaft structure. Including a step of disposing a portion on the convex portion of the substrate, a step of patterning a resist for forming an outer shape on the substrate, and a step of forming an electroformed metal portion between the resist for forming the outer shape and the cylindrical part. It is characterized by. Further, according to the present invention, in the method for producing an electroformed component, the step of forming the convex portion of the substrate, the step of (ii) conducting the surface of the substrate, and (iii) patterning the resist for forming the outer shape on the substrate. A process, (e) a step of placing a central hole portion of a cylindrical part having a hollow shaft structure on the convex portion of the substrate, and (o) forming an electroformed metal part between the resist for forming the outer shape and the cylindrical part And a step of performing. In the above method, the tubular part preferably has a flange portion, and the flange portion is preferably disposed in the electroformed metal portion. Furthermore, according to the present invention, an electroformed part with a cylindrical part manufactured by any one of the above methods can be provided. In particular, according to the present invention, it is possible to provide a gear part for a watch with a cylindrical part manufactured by any one of the methods described above. Furthermore, according to the present invention, it is possible to provide a mechanical timepiece including at least one of an electroformed part manufactured by any one of the above methods and a timepiece ankle manufactured by the above method. Furthermore, according to the present invention, an analog electronic timepiece including at least one of the electroformed parts manufactured by any of the above methods can be provided.

  By using the manufacturing method of the present invention, a minute mechanical part can be manufactured by electroforming consisting of a simple process. By using the manufacturing method of the present invention, it is possible to improve the mounting accuracy of a part integrated with an electroformed part, for example, a minute part such as a shaft, “kana”, or a pallet. In this specification, “kana” means a small gear (pinion). In the manufacturing method of the present invention, parts are arranged at predetermined coordinates on the wafer, so that the process can be automated easily. According to the present invention, a small part including minute parts such as a shaft, a “kana”, and a pallet can be manufactured by an electroforming process including a simple process. Furthermore, by using the method of the present invention, an ankle for a watch provided with two pallets can be manufactured by electroforming consisting of a simple process. By using the method of the present invention, a train wheel part for a watch can be manufactured by electroforming consisting of a simple process. By using the method of the present invention, it is possible to provide a mechanical timepiece and an analog electronic timepiece including an electroformed part manufactured by electroforming with a simple process.

Embodiments of the present invention will be described below in detail with reference to the drawings.
(1) Manufacturing method of electroformed part With reference to FIG. 1, embodiment of the manufacturing method of the electroformed part of this invention is described. Referring to FIG. 1A, a substrate 420 used for manufacturing an electroformed component is prepared (step 401). The material constituting the substrate 420 is silicon, glass, plastic, or the like. Considering the processing accuracy of etching, silicon is suitable. The size of the substrate 420 is preferably a standard size used in semiconductor manufacturing, for example, in the range of 2 inches (about 50 mm) to 8 inches (about 200 mm). The thickness of the substrate 420 varies depending on the size of the substrate 420. For example, in the case of a 4-inch silicon substrate, a substrate having a thickness of 300 μm to 625 μm is used.
Referring to FIG. 1B, a photoresist is coated on the surface of the substrate 420, a necessary shape is exposed on the coated photoresist, and developed to pattern the mask 422 (step 402). Mask 422 may be formed photoresist, another oxide film such as SiO _2, Arumuniumu, a metal film such as chromium. In the case of using a mask made of a material other than a photoresist, the mask can be formed by etching a material other than the photoresist using the photoresist as a mask. The thickness of the mask 422 is determined by the etching selectivity and the etching depth of the substrate 420 and the mask 422. For example, when the selection ratio between the substrate 420 and the mask 422 is 100: 1, the required thickness of the mask 422 with respect to the etching depth of 100 μm of the substrate 420 is 1 μm or more. Preferably it is set as the range of 1.5 micrometers-10 micrometers.

  Referring to FIG. 1C, the substrate 420 having the mask 422 is etched by DRIE (Deep RIE) to form an etching hole 420h in the substrate 420 (Step 403). Referring to FIG. 1D, the mask 422 is removed from the surface of the substrate 420 (step 404). Alternatively, it is possible to form a metal thin film on the mask 422 without removing the mask 422 to make a surface conductor for electroforming. The metal thin film formed on the mask 422 can be composed of, for example, gold, silver, copper, nickel, or the like. In such a method, it is possible to use the electroformed component as a sacrificial layer when the electroformed component is removed from the surface of the substrate 420 by selecting a material constituting the mask 422. As a material that can be used as such a sacrificial layer, for example, a resin material typified by a photoresist can be given. The photoresist can be easily removed with an organic solvent, fuming nitric acid or the like.

  Referring to FIG. 1E, a conductive film 424 made of metal such as gold, silver, copper, or nickel is attached to the surface of the substrate 420 and the bottom surface of the etching hole 420h to make the surface of the substrate 420 conductive. (Step 405). The metal conductive film 424 can be attached by a method such as sputtering, vapor deposition, or electroless plating. The thickness of the metal conductive film 424 is preferably in the range of several nm (discontinuous film) to several μm.

  Referring to FIG. 2 (a), a shaft component 426 is prepared. As a material constituting the shaft component 426, a non-conductive material such as glass, ceramic, or plastic can be used. When the shaft component 426 is made of aluminum, the shaft component 426 may be anodized. When the shaft part 426 is made of a metal such as carbon steel or stainless steel, an oxide film is preferably added to the shaft part 426. Examples of the oxide film to be added include a metal anodic oxide film constituting the shaft component 426 and SiO 2. Alternatively, when the shaft component 426 is made of metal, the shaft component 426 may be coated with a synthetic resin such as Teflon (registered trademark). Examples of the material to be coated include non-conductive resins such as acrylic resins, epoxy resins, polycarbonates, and polyimides in addition to the Teflon (registered trademark). Alternatively, when the shaft component 426 is made of metal, a resist may be attached to a portion of the shaft component 426 where the electroformed metal is not deposited, and the resist may be peeled off after the electroforming process is completed.

  The shaft component 426 includes an upper shaft portion 426a, a lower shaft portion 426b, and a flange portion 426f positioned between the upper shaft portion 426a and the lower shaft portion 426b. The portion of the lower shaft portion including the tip of the lower shaft portion 426b of the shaft component 426 is inserted into the etching hole 420h of the substrate 420 (step 406). In this state, the lower surface of the flange portion 426f of the shaft component 426 is preferably disposed away from the conductive film 424. The inner diameter of the etching hole 420h is determined so that the lower shaft portion 426b can be received. According to the method of the present invention, the work can be performed more easily than inserting the shaft part 426 into the separated main body part. In the method of the present invention, since the position of the etching hole 420h of the substrate 420 into which the lower shaft portion 426b of the shaft component 426 is to be inserted is determined in advance, the process of inserting the shaft component 426 can be automated. Become. Further, in the method of the present invention, for example, the shaft component 426 is inserted into a large wafer having an outer diameter of 4 inches (about 100 mm) to 8 inches (about 200 mm). The mechanical strength is high and there is little risk of damage to this part.

Referring to FIG. 2B, a thick film resist is deposited on the substrate 420, a necessary shape is exposed to the deposited thick film resist, and developed to pattern the outer shape forming resist 428 (step 407). The thickness of the outer shape forming resist 428 is set to be thicker than the thickness of the main body of the component to be electroformed. The outer shape forming resist 428 is preferably formed to be thicker than the upper surface of the flange portion 426f of the shaft component 426. The thickness of the outer shape forming resist 428 varies depending on the thickness of the main body of the component to be electroformed, but is preferably in the range of 100 μm to several mm. In the method of the present invention, the step 407 may be performed after performing the step 406, or the order of performing these steps may be reversed and the step 406 may be performed after performing the step 407. Good. Referring to FIG. 2C, electroforming is performed on the substrate 420 into which the shaft component 426 is inserted, and an electroformed metal portion 430 is formed between the outer shape forming resist 428 and the shaft component 426 (step 408). In the case of forming a machine part, the electroformed metal forming the electroformed metal portion 430 is made of chromium, nickel, iron, and the like having high hardness in consideration of slidability when used for a structure such as a gear. It can be comprised with the alloy containing these. Moreover, the electroformed metal which forms the electroformed metal part 430 can be comprised with gold, silver, copper, nickel, chromium, and an alloy containing these, when using it for a structure with high decorating property. In addition, the characteristics are such that the inner surface of the structure is composed of chromium, nickel, iron, and alloys containing these with high hardness, and the surface of the structure is composed of tin, zinc, and alloys containing these with low hardness. The electroformed metal part 430 can be composed of two or more kinds of metals or alloys different from each other. In addition, the electroformed metal part 430 can be made of an alloy having a different metal composition between the surface and the inner surface of the structure.
The flange portion 426f of the shaft component 426 may be disposed in the electroformed metal portion 430. By disposing the flange part 426f in the electroformed metal part 430, the contact area between the shaft part 426 and the electroformed metal part 430 can be increased, and the shaft part 426 comes off from the electroformed metal part 430. In addition, the shaft component 426 can be effectively prevented from rotating relative to the electroformed metal portion 430. In other words, the flange portion 426f is configured to be located in the electroformed metal portion 430 formed integrally with the shaft component 426, and prevents the shaft component 426 from coming off and / or rotation of the shaft component 426. Contour shape is configured.

  Next, a specific method of electroforming will be described with reference to FIG. Referring to FIG. 3 (a), it is necessary to select an electroforming liquid according to a metal material to be electroformed. For example, a sulfamic acid bath, a watt bath, a sulfuric acid bath, etc. are used in nickel electroforming. When nickel electroforming is performed using a sulfamic acid bath, a sulfamic acid bath electroforming solution 742 containing nickel sulfamate hydrate as a main component is placed in a treatment tank 740 for electroforming. An anode electrode 744 made of a metal material to be electroformed is immersed in a sulfamic acid bath 742. For example, the anode electrode 744 can be configured by preparing a plurality of balls made of a metal material to be electroformed and placing the metal balls in a metal cage made of titanium or the like. An electroforming mold 748 to be electroformed is immersed in a sulfamic acid bath 742. Referring to FIG. 3B, when the electroforming mold 748 is connected to the cathode of the power source 760 and the anode electrode 744 is connected to the anode of the power source 760, the metal constituting the anode electrode 744 is ionized and moves in the sulfamic acid bath. Then, it is deposited as a metal on the mold cavity 748 f of the electroforming mold 748. A valve (not shown) can be connected to the processing tank 740 via a pipe (not shown). A filter for filtration is provided in the pipe, and the sulfamic acid bath discharged from the treatment tank 740 can be filtered. The filtered sulfamic acid bath can be returned to the treatment tank 740 from an injection pipe (not shown).

Referring to FIG. 2D, the outer shape forming resist 428 is removed from the substrate 420, and the electroformed component 432 is removed (step 409). The electroformed component 432 includes a shaft component 426 and an electroformed metal portion 430 integrated with the shaft component 426. Since the flange part 426f of the shaft part 426 is disposed in the electroformed metal part 430, there is no possibility that the shaft part 426 is separated from the electroformed metal part 430.
When the method for producing an electroformed part of the present invention is used, it is not necessary to drive another part into the electroformed metal part produced by electroforming, or it is not necessary to attach the other part to the electroformed metal part by bonding or the like. Therefore, according to the present invention, a metal part and a metal part (shaft, “kana”, etc.) can be integrally electroformed, and a metal part and a non-conductive part (shaft, “kana”, etc.) can be integrated. It can be electroformed. In other words, by using the method for producing an electroformed part of the present invention, a metal part and a metal part, or a metal part and a non-conductive part are integrally electroformed, so without preparing a retrofitting process, A machine part composed of a plurality of parts can be formed. Furthermore, by adjusting the electroforming processing conditions, it is possible to adjust the internal stress generated in the electroformed parts, and to control the mounting pressure of the non-conductive parts, and to firmly prevent the electroformed parts from being damaged. Conductive parts can be fixed to the electroformed metal part.

  Furthermore, various contour shapes which are uneven | corrugated to radial direction can be provided in the fixing | fixed part of the components which should be fixed to an electroformed metal part. Examples of the contour shape uneven in the radial direction include a flange portion, a wave-like portion, a male screw portion, a knurled portion, a round cut portion, and a groove portion. One or a plurality of contour shapes that are uneven in the radial direction provided on the parts to be fixed to the electroformed metal part, or a plurality of combinations of the contour shapes, By providing it in the fixed part of the parts to be fixed to the electroformed metal part, the parts to be fixed to the electroformed metal part may come off from the electroformed metal part, come out of the electroformed metal part, Slipping can be reliably and effectively prevented. That is, by arranging the contour shape uneven in the radial direction in the electroformed metal part, the contact area between the part to be fixed to the electroformed metal part and the electroformed metal part can be increased. Not only prevents the parts to be fixed to the metal part from coming out of the electroformed metal part, but also effectively prevents the parts to be fixed to the electroformed metal part from rotating relative to the electroformed metal part. it can. That is, the contour shape which is uneven in the radial direction provided in the part to be fixed to the electroformed metal part is positioned in the electroformed metal part integrally formed with the part to be fixed to the electroformed metal part. The contour shape for preventing the component to be fixed to the electroformed metal part and / or the rotation of the part to be fixed to the electroformed metal part from being configured is configured.

(2) Structure of electroformed part Referring to FIGS. 4 and 5, the electroformed part 435 includes a shaft part 436 and an electroformed metal part 437. In any of the embodiments described below, a non-conductive material such as glass, ceramic, or plastic can be used as the material constituting the shaft component. When the shaft part is made of aluminum, it is preferable to anodize the shaft part. When the shaft component is made of a metal such as carbon steel or stainless steel, an oxide film is preferably added to the shaft component. Alternatively, when the shaft part is made of metal, the shaft part is preferably coated with a synthetic resin such as Teflon (registered trademark). A gear portion 437 g can be formed on the outer peripheral portion of the electroformed metal portion 437. The planar shape of the gear portion 437g is determined by the inner shape of the outer shape forming resist 428 when the outer shape forming resist 428 is patterned in the step 407 described above. Alternatively, after the electroformed part 435 is formed, the gear portion 437g can be formed by pressing or gear cutting as secondary processing.

  As a modification, referring to FIG. 6, the electroformed part 440 includes a shaft part 442 and an electroformed metal part 444. The shaft component 442 includes an upper shaft portion 442a, a lower shaft portion 442b, and a flange portion 442f positioned between the upper shaft portion 442a and the lower shaft portion 442b. A gear portion 444 g can be formed on the outer peripheral portion of the electroformed metal portion 444. The planar shape of the gear portion 444g is determined by the inner shape of the outer shape forming resist 428 when the outer shape forming resist 428 is patterned in the step 407 described above. Alternatively, after the electroformed part 440 is formed, the gear portion 444g can be formed by pressing or gear cutting as secondary processing. By providing a flange portion at a fixed portion of the shaft component 442 disposed in the electroformed metal portion 444, the shaft component 442 can be detached from the electroformed metal portion 444, removed from the electroformed metal portion 444, or electroformed. Sliding with respect to the metal part 444 can be reliably and effectively prevented. Furthermore, as a modified example, as shown by a two-dot chain line in FIG. 6, before performing electroforming, a pinion portion (a small gear portion provided with a gear portion on the outer peripheral portion) is provided on the lower shaft portion 442 b of the shaft component 442. Can be formed. With such a configuration of the present invention, as a component constituting the speed reduction gear train or the speed increasing gear train, a gear train component including two gear portions (for example, a “watch wheel” of a watch, a “sun wheel”, "Gank wheel", "Transmission wheel", etc.) can be manufactured efficiently.

  Referring to FIG. 7, as a modification of the structure shown in FIG. 6, an electroformed component 450 includes a shaft component 452 and an electroformed metal portion 454. The shaft component 452 includes an upper shaft portion 452a, a lower shaft portion 452b, and a corrugated portion 452j located between the upper shaft portion 452a and the lower shaft portion 452b. FIG. 7 shows a configuration in which a male screw is provided on a part of the shaft component 452 as an example of the corrugated portion 452j. The cross-sectional shape of the corrugated portion 452j may be a triangle, a quadrangle, a semicircle, a triangle having an arc portion at the tip, or the like. The corrugated portion 452j may be a male screw, a single convex portion, or a plurality of convex portions arranged in the axial direction of the shaft component 452. The corrugated portion 452j is preferably constituted by a male screw including a plurality of pitches or a plurality of convex portions. With this configuration, it is possible to more reliably and effectively prevent the shaft component 452 from being detached from the electroformed metal portion 454, coming out of the electroformed metal portion 454, or sliding with respect to the electroformed metal portion 454. . The contact area between the shaft part 452 and the electroformed metal part 454 can be increased by arranging a contour shape that is uneven in the radial direction, such as the corrugated part 452j (or male screw), in the electroformed metal part 454. In addition to preventing the shaft component 452 from coming off the electroformed metal portion 454, the shaft component 452 can be effectively prevented from rotating with respect to the electroformed metal portion 454. That is, the contour shape that is uneven in the radial direction, such as the corrugated portion 452j (or male screw) provided in the shaft component 452, is configured to be located in the electroformed metal portion 454 formed integrally with the shaft component 452. The contour shape for preventing the shaft part 452 from coming off and / or rotating the shaft part 452 is formed.

  Referring to FIG. 8, as a further modification of the structure shown in FIG. 6, the electroformed part 460 includes a shaft part 462 and an electroformed metal part 464. The shaft component 462 includes an upper shaft portion 462a, a lower shaft portion 462b, and a detent portion 462k positioned between the upper shaft portion 462a and the lower shaft portion 462b. FIG. 8 shows a configuration in which two knurled portions arranged in the axial direction of the shaft component 462 are provided in a part of the shaft component 462 as an example of the rotation preventing portion 462k. Referring to FIG. 9, a plan view of the knurled portion 462k is shown. The knurled portion 462k may be formed by rolling, may be formed by gear cutting, or may be formed by another processing method. One anti-rotation portion 462k may be arranged in the axial direction of the shaft component 462, but a plurality of anti-rotation portions 462k are preferably arranged in the axial direction of the shaft component 462. With this configuration, it is possible to more reliably and effectively prevent the shaft component 462 from being detached from the electroformed metal portion 464, coming out of the electroformed metal portion 464, or sliding with respect to the electroformed metal portion 464. . In other words, the contour shape that is uneven in the radial direction, such as the knurled portion 462k provided in the shaft component 462, is configured to be positioned in the electroformed metal portion 464 formed integrally with the shaft component 462. A contour shape is formed to prevent the part 462 from coming off and / or the shaft part 462 from rotating.

  Referring to FIG. 10, a flange portion 462m including a flange that is cut into two faces can be provided instead of the knurled portion 462k shown in FIG. The flange portion 462m can be provided with a groove portion 462n that is recessed in the radial direction in a part of the intermediate portion in the thickness direction of the flange portion 462m. The flange portion 462m may be formed by rolling, may be formed by gear cutting, or may be formed by another processing method. One flange portion 462m may be formed in the axial direction of the shaft component 462, but a plurality of flange portions 462m may be formed in the axial direction of the shaft component 462. With this configuration, it is possible to more reliably and effectively prevent the shaft component 462 from being detached from the electroformed metal portion 464, coming out of the electroformed metal portion 464, or sliding with respect to the electroformed metal portion 464. .

  Referring to FIG. 11, a flange portion 462u having a notch portion 462t cut in the radial direction is provided in a part of the intermediate portion in the thickness direction of the flange portion in place of the knurled portion 462k shown in FIG. it can. The flange portion 462u may be formed by a rolling process, may be formed by a lathe process, or may be formed by another processing method. One flange portion 462u may be formed in the axial direction of the shaft component 462, or a plurality of flange portions 462u may be formed in the axial direction of the shaft component 462. With this configuration, it is possible to more reliably and effectively prevent the shaft component 462 from being detached from the electroformed metal portion 464, coming out of the electroformed metal portion 464, or sliding with respect to the electroformed metal portion 224. . In addition, in any of the embodiments shown in FIGS. 5 to 8, the gear portion 464 g can be formed on the outer peripheral portion of the electroformed metal portion 464. Furthermore, in any of the embodiments shown in FIGS. 5 to 8, a pinion portion (small gear portion) can be formed on the upper shaft portion 462 a and / or the lower shaft portion 462 b of the shaft component 462.

(3) Structure of mechanical timepiece Next, an embodiment of a mechanical timepiece to which the electroformed part of the present invention is applied will be described. 12 to 14, in a mechanical timepiece, a movement (machine body) 300 of the mechanical timepiece has a main plate 302 that constitutes a substrate of the movement. A winding stem 310 is rotatably incorporated in a winding stem guide hole 302a of the main plate 302. A dial 304 (shown in phantom lines in FIG. 26) is attached to the movement 300. In general, of the two sides of the main plate, the side with the dial is referred to as the “back side” of the movement, and the side opposite to the side with the dial is referred to as the “front side” of the movement. A train wheel incorporated in the “front side” of the movement is referred to as “front train wheel”, and a train wheel incorporated in the “back side” of the movement is referred to as “back train wheel”. The position of the winding stem 310 in the axial direction is determined by a switching device including a setting lever 390, a yoke 392, a yoke spring 394, and a back presser 396. A chisel wheel 312 is rotatably provided on the guide shaft portion of the winding stem 310. If the winding stem 310 is rotated in a state where the winding stem 310 is in the first winding stem position (0th stage) closest to the inside of the movement along the rotation axis direction, the rotation of the pinion wheel is caused. Then, the chichi wheel 312 rotates. The round hole wheel 314 is rotated by the rotation of the hour wheel 312. The square hole wheel 316 is rotated by the rotation of the round hole wheel 314. By rotating the square hole wheel 316, the mainspring 322 accommodated in the barrel complete 320 is wound up. The center wheel & pinion 324 is rotated by the rotation of the barrel complete 320. The escape wheel & pinion 330 rotates through the rotation of the fourth wheel & pinion 328, the third wheel & pinion 326, and the second wheel & pinion 324. The barrel complete 320, the second wheel 324, the third wheel 326, and the fourth wheel 328 constitute a front train wheel.

  The escapement and speed control device for controlling the rotation of the front train wheel includes a balance 340, an escape wheel 330 and an ankle 342. The balance with hairspring 340 includes a balance stem 340a, a balance wheel 340b, and a hairspring 340c. Based on the rotation of the center wheel & pinion 324, the cylindrical pinion 350 is rotated simultaneously. The minute hand 352 attached to the cylindrical pinion 350 displays “minute”. The cylindrical pinion 350 is provided with a slip mechanism for the center wheel & pinion 324. Based on the rotation of the hour pinion 350, the hour wheel 354 is rotated through the rotation of the minute wheel. An hour hand 356 attached to the hour wheel 354 displays “hour”. The hairspring 340c is a thin plate spring having a spiral shape having a plurality of winding numbers. An inner end portion of the hairspring 340c is fixed to a whisker ball 340d fixed to the balance spring 340a, and an outer end portion of the hairspring 340c has a hairspring 370a attached to a hairspring receiver 370 fixed to the balance holder 366. It is fixed by screwing. A slow / fast needle 368 is rotatably attached to the balance holder 366. A beard receiver 1340 and a beard bar 1342 are attached to the slow and quick needle 368. A portion near the outer end portion of the hairspring 340 c is located between the hair support 1340 and the hair stick 1342. The balance with hairspring 340 is supported so as to be rotatable with respect to the main plate 302 and the balance with hairspring 366.

  The barrel complete 320 includes a barrel complete gear 320d, a barrel complete 320f, and a mainspring 322. The barrel complete 320f includes an upper shaft portion 320a and a lower shaft portion 320b. The barrel complete 320f is formed of a metal such as carbon steel. The barrel gear 320d is formed of a metal such as brass. The center wheel & pinion 324 includes an upper shaft portion 324a, a lower shaft portion 324b, a pinion portion 324c, a gear portion 324d, and an abacus ball portion 324h. The pinion 324c of the center wheel & pinion 324 is configured to mesh with the barrel gear 320d. The upper shaft portion 324a, the lower shaft portion 324b, and the abacus ball portion 324b are formed of a metal such as carbon steel. The gear portion 324d is formed of a metal such as brass. The third wheel & pinion 326 includes an upper shaft portion 326a, a lower shaft portion 326b, a pinion portion 326c, and a gear portion 326d. The pinion portion 326c of the third wheel & pinion 326 is configured to mesh with the gear portion 324d. The fourth wheel & pinion 328 includes an upper shaft portion 328a, a lower shaft portion 328b, a pinion portion 328c, and a gear portion 328d. The pinion portion 328c of the fourth wheel & pinion 328 is configured to mesh with the gear portion 326d. The upper shaft portion 328a and the lower shaft portion 328b are formed of a metal such as carbon steel. The gear portion 328d is formed of a metal such as brass. The escape wheel & pinion 330 includes an upper shaft portion 330a, a lower shaft portion 330b, a pinion portion 330c, and a gear portion 330d. The pinion portion 330c of the escape wheel & pinion 330 is configured to mesh with the gear portion 328d. The ankle 342 includes an ankle body 342d and an ankle true 342f. The ankle true 342f includes an upper shaft portion 342a and a lower shaft portion 342b.

  The barrel complete 320 is supported so as to be rotatable with respect to the main plate 302 and the barrel holder 360. That is, the upper shaft portion 320a of the barrel complete 320f is supported so as to be rotatable with respect to the barrel holder 360. The lower shaft portion 320b of the barrel complete 320f is rotatably supported with respect to the main plate 302. The second wheel 324, the third wheel 326, the fourth wheel 328, and the escape wheel 330 are supported so as to be rotatable with respect to the main plate 302 and the train wheel bridge 362. That is, the upper shaft portion 324 a of the second wheel 324, the upper shaft portion 326 a of the third wheel 326, the upper shaft portion 328 a of the fourth wheel 328, and the upper shaft portion 330 a of the escape wheel 330 are connected to the train wheel bridge 362. And is supported so as to be rotatable. In addition, the lower shaft portion 324 b of the center wheel 324, the lower shaft portion 326 b of the third wheel 326, the lower shaft portion 328 b of the fourth wheel 328, and the lower shaft portion 330 b of the escape wheel 330 are It is rotatably supported. The ankle 342 is supported so as to be rotatable with respect to the main plate 302 and the ankle receiver 364. That is, the upper shaft portion 342 a of the ankle 342 is supported so as to be rotatable with respect to the ankle receiver 364. The lower shaft portion 342b of the ankle 342 is rotatably supported with respect to the main plate 302.

  The bearing portion of the barrel holder 360 that rotatably supports the upper shaft portion 320a of the barrel complete 320f, the bearing portion of the train wheel bridge 362 that rotatably supports the upper shaft portion 324a of the center wheel 324, and the third wheel 326 The bearing portion of the train wheel bridge 362 that rotatably supports the upper shaft portion 326a, the bearing portion of the train wheel bridge 362 that rotatably supports the upper shaft portion 328a of the fourth wheel & pinion 328, and the escape wheel 330 Lubricating oil is injected into the bearing portion of the train wheel bridge 362 that rotatably supports the upper shaft portion 330a and the bearing portion of the ankle receiver 364 that rotatably supports the upper shaft portion 342a of the ankle 342. The bearing portion of the main plate 302 that rotatably supports the lower shaft portion 276b of the second rotor 276, the bearing portion of the main plate 302 that rotatably supports the lower shaft portion 320b of the barrel complete 320f, and the lower shaft portion of the center wheel & pinion 324. The bearing portion of the main plate 302 that rotatably supports 324b, the bearing portion of the main plate 302 that rotatably supports the lower shaft portion 326b of the third wheel & pinion 326, and the lower shaft portion 328b of the fourth wheel & pinion 328 are rotatably supported. The bearing portion of the ground plate 302, the bearing portion of the ground plate 302 that rotatably supports the lower shaft portion 320b of the escape wheel 330, and the bearing portion of the ground plate 302 that rotatably supports the lower shaft portion 342b of the ankle 342. Lubricating oil is injected. This lubricating oil is preferably a precision machine oil, particularly preferably a so-called watch oil. Each of the bearing portions of the main plate 302, the bearing portion of the barrel holder 360, and each of the bearing portions of the train wheel bridge 362 has a conical, cylindrical, or frustoconical oil shape in order to improve lubricating oil retention performance. It is preferable to provide a reservoir. Providing the oil reservoir can effectively prevent the oil from diffusing due to the surface tension of the lubricating oil. The base plate 302, barrel holder 360, train wheel bridge 362, and ankle receiver 364 may be formed of metal such as brass, or may be formed of engineering plastic such as poly-carbonate.

(4) Third wheel manufacturing method and structure Referring to FIGS. 15 to 17, in the embodiment of the present invention, the third wheel 326 includes a third pinion 326f and a third gear 326g. The thickness of the third gear 326g is, for example, 100 μm to 500 μm, preferably 150 μm to 250 μm. The third kana 326f includes an upper shaft portion 326a, a lower shaft portion 326b, and a kana portion 326c. The third gear 326g includes a center support portion 326h, an ledge portion 326j, and a gear portion 326d. In the embodiment shown in the figure, there are five amida portions 326j. The number of amide portions 326j may be three, or may be four or more. Alternatively, the amide portion 326j may not be provided. The third kana 326f is formed of a metal such as carbon steel. The third gear 326g is formed of a metal such as nickel.

  Referring to FIG. 2A, a third kana 326 f is prepared as the shaft part 326. It is preferable to coat the third kana 326f with a synthetic resin such as Teflon (registered trademark). Alternatively, a resist may be attached to a portion of the third kana 326f where the electroformed metal is not deposited, and the resist may be peeled off after electroforming. As a modification, the third pinion 326f may be formed of an engineering plastic such as polyacetal. In this case, it is not necessary to coat the third kana 326f with a synthetic resin such as Teflon (registered trademark), and it is not necessary to attach a resist to the third kana 326f.

  Referring to FIG. 2B, a thick film resist is deposited on the substrate 420, and the deposited thick film resist is exposed to a necessary shape including the outline shape of the gear and the window shape of the window, and developed to develop a resist for forming the outer shape. 428 is patterned (step 407). The thickness of the outer shape forming resist 428 is set to be larger than the thickness of the third gear 326g. When the thickness of the third gear 326g is 200 μm, the thickness of the outer shape forming resist 428 is preferably in the range of 200 μm to 500 μm.

  Referring to FIG. 2C, electroforming is performed on the substrate 420 into which the lower shaft portion 326b of the third pinion 326f is inserted, and an electroformed metal portion is formed between the outer shape forming resist 428 and the third pinion 326f. (Step 408). When forming the third gear 326g, the electroformed metal part is preferably nickel or copper. Referring to FIG. 2D, the outer shape forming resist 428 is removed from the substrate 420, and the third wheel 326 in which the gear portion 326d is not processed is removed as an electroformed component (step 409). As the electroformed part, the gear portion 326d of the third gear 326g can be formed by pressing, gear cutting, or the like as the secondary processing after the gear portion 326d forms the unfinished third wheel 326. it can. As described above, although the embodiment of the present invention has been described with respect to the third wheel, the present invention is not limited to the third wheel, but the second wheel, fourth wheel, fifth wheel, transmission wheel, day wheel, correction It can also be applied to cars.

(5) Manufacturing method and structure of escape wheel Referring to FIGS. 18 to 20, in the embodiment of the present invention, escape wheel 330 includes escape wheel 330f and escape wheel 330g. . The thickness of the escape gear 330 g is, for example, 100 μm to 500 μm, preferably 100 μm to 200 μm. The escape shaft 330f includes an upper shaft portion 330a, a lower shaft portion 330b, and a kana portion 330c. The escape gear 330g includes a center support portion 330h, an abutment portion 330j, and a gear portion (that is, a portion that operates in contact with an ankle pallet) 330d. In the illustrated embodiment, there are four amide portions 330j. The number of the paddle portions 330j may be three, or four or more. Alternatively, the amide portion 326j may not be provided. The treacherous 330f is formed of a metal such as carbon steel. The escape gear 330g is formed of a metal such as nickel.

  Referring to FIG. 2 (a), as a shaft component 126, a striking 330 f is prepared. It is preferable to coat synthetic resin such as Teflon (registered trademark) on the treacherous 330f. Alternatively, a resist may be attached to a portion where the electrocast metal of frank 330f is not deposited, and the resist may be peeled off after electroforming. As a modification, the striking 330f may be formed of an engineering plastic such as polyacetal. In this case, it is not necessary to coat the synthetic resin such as Teflon (registered trademark) on the hard hook 330f, and it is not necessary to attach a resist to the hard hook 330f.

  Referring to FIG. 2B, a thick film resist is deposited on the substrate 120, and the deposited thick film resist is exposed to a necessary shape including the contour shape of the escape wheel and the window shape of Amida, and developed to develop the outer shape. The forming resist 128 is patterned (step 107). The thickness of the outer shape forming resist 128 is set to be larger than the thickness of the escape gear 330g. When the thickness of the escape gear 330 g is 100 μm to 500 μm, preferably 100 μm to 200 μm, the thickness of the outer shape forming resist 128 is the same as the thickness of the escape gear 330 g or the same to a range of about 500 μm. It is preferable to do this.

  Referring to FIG. 2 (c), electroforming is performed on the substrate 420 into which the lower shaft portion 330b of the stubborn 330f is inserted, and the electroformed metal part is formed between the outer shape forming resist 428 and the stubborn 330f. Is formed (step 408). When the escape gear 330g is formed, the electroformed metal part is preferably nickel or copper. Referring to FIG. 2D, the outer shape forming resist 428 is removed from the substrate 420, and the escape wheel 330 whose gear portion 330d is not processed is removed as an electroformed component (step 409). As the electroformed part, the gear portion 330d forms an unprocessed escape wheel 330, and then, as the secondary processing, the gear portion 330d of the escape gear 330g is formed by pressing, gear cutting, or the like. be able to. Furthermore, as shown in the drawing, when it is necessary to provide the slope portion 330k on the outermost peripheral portion of the escape gear 330g, the slope portion 330k is formed by pressing or milling as secondary processing. be able to.

(6) Ankle Manufacturing Method and Structure Referring to FIGS. 21 to 23, in the embodiment of the present invention, the ankle 342 includes an ankle body 342d, ankle true 342f, a sword tip 342g, and two pallets, An entering pallet 342j and an outgoing pallet 342k are provided. The thickness of the ankle body 342d is, for example, 100 μm to 500 μm, and preferably 100 μm to 200 μm. The ankle true 342f includes an upper shaft portion 342a and a lower shaft portion 342b. The ankle body 342d is formed of a metal such as nickel. The ankle true 342f is made of a metal such as carbon steel. The ankle true 342f is formed of a metal such as carbon steel. The ankle body 342d is formed of a metal such as nickel.

  Referring to FIG. 2A, an ankle true 342f is prepared as a shaft component 126. It is preferable to coat the ankle true 342f with a synthetic resin such as Teflon (registered trademark). Alternatively, a resist may be attached to a portion of the ankle true 342f where no electroformed metal is deposited, and the resist may be peeled off after electroforming. As a modification, the ankle true 342f may be formed of an engineering plastic such as polyacetal. In this case, it is not necessary to coat the ankle true 342f with a synthetic resin such as Teflon (registered trademark), and it is not necessary to attach a resist to the ankle true 342f.

  Referring to FIG. 2B, a thick film resist is deposited on the substrate 420, a necessary shape is exposed to the deposited thick film resist, and developed to pattern the outer shape forming resist 428 (step 407). The thickness of the outline forming resist 428 is set to be larger than the thickness of the ankle body 342d. When the thickness of the ankle body 342d is 100 μm to 500 μm, preferably 100 μm to 200 μm, it is preferable that the thickness of the outer shape forming resist 428 is the same as the thickness of the ankle body 342d or is in the range of about 500 μm. .

Referring to FIG. 2C, electroforming is performed on the substrate 420 into which the lower shaft portion 342b of the pallet fork 342f is inserted, and an electroformed metal part is formed between the outer shape forming resist 428 and the pallet fork 342f (see FIG. 2C). Step 408). When forming the ankle body 342d, the electroformed metal part is preferably nickel or copper. Referring to FIG. 2D, the outer shape forming resist 428 is removed from the substrate 420, and the ankle body 342d having no sword and pallet is removed as an electroformed component (step 409). After forming the ankle body 342d without the sword tip and the pallet as the electroformed part, the entering pallet 342j and the exit pallet 342k can be bonded to the ankle body 342d as secondary processing. Further, as a secondary process, the sword tip 342g can be attached to the ankle body 342d. The sword tip 342g can be fixed by fitting the sword tip shaft portion 342h into the ankle body 342d, or can be fixed by adhering the sword tip shaft portion 342h to the ankle body 342d. Further, formed when as shown, it is necessary to provide an inclined surface 342m in a portion adjacent to the point of a sword 342g ankle member 342d, as a secondary process, press working, or the like milling, the slope portion 342m can do.

(7) Manufacturing method of an ankle with a pallet With reference to FIG. 24 and FIG. 25, a manufacturing method of an ankle with a pallet in an embodiment of the manufacturing method of an electroformed part of the present invention will be described below. Referring to FIG. 24A, a substrate 520 used for manufacturing an electroformed component is prepared (step 501). The material constituting the substrate 520 is silicon, glass, plastic, or the like. Considering the processing accuracy of etching, silicon is suitable. The size of the substrate 520 is preferably a standard size used in semiconductor manufacturing, for example, in the range of 2 inches (about 50 mm) to 8 inches (about 200 mm). The thickness of the substrate 520 varies depending on the size of the substrate 520. For example, in the case of a 4-inch silicon substrate, a substrate having a thickness of 300 μm to 625 μm is used.

Referring to FIG. 24B, a SiO ₂ film 522 is coated on the surface of the substrate 520, and an amorphous silicon film 524 is coated on the SiO ₂ film 522 (step 502). The thickness of the SiO ₂ film 522 is preferably in the range of 0.1 μm to 100 μm. The thickness of the amorphous silicon film 524 is preferably about ¼ of the thickness of the SiO ₂ film 522 in consideration of the selection ratio when the SiO ₂ film 522 is etched. Referring to FIG. 24C, a photoresist is coated on the amorphous silicon film 524, a required shape is exposed on the coated photoresist, developed, and a mask 526 is patterned (step 503). The thickness of the mask 526 is determined by the etching selectivity and the etching depth of the amorphous silicon film 524 and the mask 526. For example, when the selection ratio of the amorphous silicon film 524 to the mask 526 is 10 to 1, the required thickness of the mask 526 when the film thickness of the amorphous silicon film 524 is 5 μm is 0.5 μm or more. Preferably it is set as the range of 1 micrometer-10 micrometers.

Referring to FIG. 24D, the amorphous silicon film 524 of the substrate 520 is etched to form an etching recess 524h in the amorphous silicon film 524 (step 504). Referring to FIG. 24E, the mask 526 is removed from the surface of the substrate 520 by a lift-off method or the like (step 505). Referring to FIG. 24F, the SiO ₂ film 522 of the substrate 520 is etched by RIE to form an etching recess 522h in the SiO ₂ film 522 (step 506). Referring to FIG. 24G, the surface of the substrate 520 is etched by DRIE (Deep RIE) or RIE to form an etching recess 520h in the substrate 520 (step 507). Even if the amorphous silicon film 524 is not etched in advance, it is removed when the substrate 520 is etched.

Referring to FIG. 25A, the SiO ₂ film 522 of the substrate 520 is etched by HF or BHF (step 508). Referring to FIG. 25 (b), a metal conductive film 530 is formed on the surface of the substrate 520 and on the side wall and the bottom surface of the etching recess 520h of the substrate 520 to form a surface conductor for electroforming ( Step 509). A cavity 530h is formed in a portion corresponding to the etching recess 520h of the substrate 520. The metal thin film formed on the substrate 520 can be composed of, for example, gold, silver, copper, nickel, or the like. The metal conductive film 530 can be attached by a method such as sputtering, vapor deposition, or electroless plating. The thickness of the metal conductive film 530 is preferably in the range of 10 nm to several μm.

  Referring to FIG. 25 (c), a granite 550 is placed in the cavity 530h (step 510). To simplify the drawing, only one calcite 550 is shown in FIG. 25 (c), but in step 510, two calculus, ie, an entering calculus and an output calculus, are placed in the cavity 530h. . Artificial ruby, ceramic (alumina, zirconia), or the like can be used as a material constituting the calcite 550 (entered calcite or calcite). In the method of the present invention, since the position of the cavity 530h where the granite 550 is to be arranged is determined in advance, the process of arranging the granule 550 can be automated. Further, in the method of the present invention, the pallet 550 is arranged on a large wafer having an outer diameter of 4 inches (about 100 mm) to 8 inches (about 200 mm), for example. The mechanical strength is high, and there is almost no possibility that the parts on which the pallet 550 is to be disposed are damaged.

  Referring to FIG. 25D, a thick film resist is deposited on the substrate 520, the necessary shape is exposed to the deposited thick film resist, and developed to pattern the outer shape forming resist 532 (step 511). The thickness of the outer shape forming resist 532 is set to be larger than the thickness of the main body of the component to be electroformed. The outer shape forming resist 532 is preferably formed to be thicker than the upper surface of the ankle body to be manufactured. The thickness of the outer shape forming resist 532 is preferably in the range of several tens of μm to several mm, although it varies depending on the thickness of the main body (for example, ankle body) of the part to be electroformed. In the method of the present invention, the step 511 may be performed after performing the step 510, or the order in which these steps are performed may be reversed, and the step 510 may be performed after performing the step 511. Good. Referring to FIG. 25 (e), electroforming is performed on the substrate 520 on which the pallet 550 is arranged, and an electroformed metal part 540 that holds the calcite 550 is formed inside the outer shape forming resist 532 (step 512). ). The electroforming can be performed by the method described above with reference to FIG. When forming a mechanical part such as an ankle, the electroformed metal portion 540 is preferably nickel or copper. In this step 512, the granite 550 is integrated with the electroformed metal part 540. The dimensional shape of the electroformed metal part 540 is determined so as to correspond to the dimensional shape of the ankle body to be manufactured.

  Referring to FIG. 25F, the outer shape forming resist 532 is removed from the substrate 520, and the electroformed part 542 with a pallet is removed (step 513). The glazed electroformed part 542 includes an electroformed metal portion 540 and a crushed stone 550. As described above, the granite 550 is composed of two granules, that is, an entering granite 342j and an outgoing granule 342k. When the method for producing an electroformed part of the present invention is used, it is not necessary to fix the pallet 550 to the electroformed metal part 540 produced by electroforming in a subsequent process. Alternatively, if necessary, an adhesive may be attached to the electroformed metal portion 540 and the pallet 550 to increase the holding strength of the pallet 550. Therefore, according to the present invention, a metal part and another non-conductive part (such as a pallet stone) can be integrally electroformed. That is, by using the method for producing an electroformed part of the present invention, a metal part and a non-conductive part are integrally electroformed, so that a mechanical part composed of a plurality of parts can be formed without preparing a retrofit process. can do. Furthermore, by adjusting the electroforming processing conditions, it is possible to adjust the internal stress generated in the electroformed parts, and to control the mounting pressure of the non-conductive parts, and to firmly prevent the electroformed parts from being damaged. Conductive parts can be fixed to the electroformed metal part.

  As described above with reference to FIGS. 21 to 23, the ankle 342 includes the ankle body 342d, the ankle true 342f, the tip of the sword 342g, and the two calculi, that is, the entering calcite 342j and the exit calculus 342k. Prepare. The thickness of the ankle body 342d is, for example, 100 μm to 500 μm, and preferably 100 μm to 200 μm. The ankle true 342f includes an upper shaft portion 342a and a lower shaft portion 342b. The ankle body 342d is formed of a metal such as nickel. The ankle true 342f is made of a metal such as carbon steel. The ankle true 342f is formed of a metal such as carbon steel. The ankle body 342d including the entering pallet stone 342j and the outgoing pallet stone 342k can be formed as the electroformed part 542 with the pallet stone described above with reference to FIGS. Referring to FIGS. 21 to 23, after forming an ankle body 342d without a sword and ankle true 342f as an electroformed part 542 with a pallet, the ankle true 342f is fixed to the ankle body 342d as secondary processing. Can do. Further, as a secondary process, the sword tip 342g can be attached to the ankle body 342d. The sword tip 342g can be fixed by fitting the sword tip shaft portion 342h into the ankle body 342d, or can be fixed by adhering the sword tip shaft portion 342h to the ankle body 342d. Furthermore, as shown in the drawing, when it is necessary to provide a sloped portion 342k at a portion adjacent to the sword tip 342g of the ankle body 342d, the sloped portion 342k is formed by pressing or milling as secondary processing. can do. By this method, an ankle provided with a minute part such as a granite can be manufactured by electroforming consisting of a simple process.

(8) Manufacturing method of electroformed part provided with hollow shaft part With reference to FIG. 26 and FIG. 27, in the embodiment of the manufacturing method of the electroformed part of the present invention, the manufacture of the electroformed part provided with the hollow shaft part. A method will be described. The following description mainly describes the difference in the embodiment of the method for producing an electroformed part having a hollow shaft part of the present invention from the embodiment of the method for producing an electroformed part having a solid shaft part of the present invention. . Therefore, the description about embodiment of the manufacturing method of the electroformed component provided with the solid-shaft component of this invention mentioned above applies mutatis mutandis here. Referring to FIG. 26A, a substrate 620 used for manufacturing an electroformed component is prepared (step 601). Referring to FIG. 26B, a photoresist is coated on the surface of the substrate 620, a shape corresponding to the hole of the hollow shaft is exposed on the coated photoresist, and developed to pattern the central mask 622 (step). 602). The central mask 622 can be formed of a photoresist, another oxide film such as SiO ₂ , or a metal film such as aluminum or chromium. Referring to FIG. 26C, the substrate 620 having the central mask 622 is etched by DRIE (Deep RIE) to form a recess 620b in the substrate 620 (Step 603). In this step 603, a convex portion 620h is formed at a location corresponding to the central mask 622 of the substrate 620. Referring to FIG. 26D, the central mask 622 is removed from the surface of the convex portion 620h of the substrate 620 (step 604). Referring to FIG. 26 (e), a conductive film 624 made of metal such as gold, silver, copper, or nickel is attached to the surface of the recess 620b of the substrate 620 to make the surface of the substrate 620 conductive (step 605). .

In addition, after performing step 603, the central mask 622 is not removed, and the step 605 is performed to attach the metal conductive film 624 to the entire surface including the concave portion 620b of the substrate 620 and the central mask 622. It is also possible to make the surface of 620 conductive, and further perform the steps in the order in which step 604 is performed and the central mask 622 is removed. In this case, when removing the central mask 622 in step 604, the conductive film 624 on the central mask 622 is lifted off, so that the conductive film 624 is easily disposed only on the recess 620b shown in FIG. Can be produced. Referring to FIG. 27A, a cylindrical part 626 is prepared. The structure of the cylindrical part 626 is a hollow shaft. A metal material such as brass, carbon steel, stainless steel, aluminum, or the like can be used as a material constituting the cylindrical part 626. When the tubular part 626 is made of aluminum, the tubular part 626 may be anodized. When the cylindrical part 626 is made of a metal such as carbon steel or stainless steel, an oxide film may be added to the cylindrical part 626. Examples of the oxide film to be added include a metal anodic oxide film constituting the cylindrical part 626 and SiO ₂ . Alternatively, when the cylindrical part 626 is made of metal, the cylindrical part 626 may be coated with a synthetic resin such as Teflon (registered trademark). Examples of the material to be coated include non-conductive resins such as acrylic resins, epoxy resins, polycarbonates, and polyimides in addition to the Teflon (registered trademark). Alternatively, when the cylindrical part 626 is made of metal, a resist may be attached to a portion of the cylindrical part 626 where the electroformed metal is not deposited, and the resist may be peeled after the electroforming process is finished.

  The cylinder part 626 includes an upper cylinder part 626a, a lower cylinder part 626b, a flange part 626f positioned between the upper cylinder part 626a and the lower cylinder part 626b, and a center hole 626h. A portion of the center hole 626h of the lower cylinder portion 626b of the cylinder component 626 is disposed on the convex portion 620h of the substrate 620 (step 606). In this state, the lower surface of the flange portion 626f of the tubular part 626 is preferably disposed away from the conductive film 624. The outer diameter of the convex portion 620h is determined so that it can be fitted into the center hole 626h of the lower cylindrical portion 626b of the cylindrical component 626. According to the method of the present invention, the work can be performed more easily than inserting the cylindrical part 626 into the separated main part. In the method of the present invention, since the position of the convex portion 620h of the substrate 620 where the center hole 626h of the cylindrical part 626 is to be arranged is determined in advance, the process of arranging the cylindrical part 626 can be automated. . Furthermore, in the method of the present invention, for example, the cylindrical part 626 is inserted into a large wafer having an outer diameter of 4 inches (about 100 mm) to 8 inches (about 200 mm). The mechanical strength is high and there is little risk of damage to this part.

  Referring to FIG. 27B, a thick film resist is deposited on the substrate 620, a necessary shape is exposed to the deposited thick film resist, and developed to pattern the outer shape forming resist 628 (step 607). The thickness of the outer shape forming resist 628 is set to be larger than the thickness of the main body of the component to be electroformed. The outer shape forming resist 628 is preferably formed so as to be thicker than the upper surface of the flange portion 626f of the cylindrical part 626. The thickness of the outer shape forming resist 628 varies depending on the thickness of the main body of the part to be electroformed, but is preferably in the range of 100 μm to several mm. In the method of the present invention, the step 607 may be performed after the step 606 is performed, or the order in which these steps are performed may be reversed, and the step 606 may be performed after the step 607 is performed. Good. Referring to FIG. 27C, electroforming is performed on the substrate 620 on which the cylindrical part 626 is disposed, and an electroformed metal portion 630 is formed between the outer shape forming resist 628 and the cylindrical part 626 (step 608). When forming a machine part, the electroformed metal portion 630 is preferably nickel or copper. The flange part 626f of the cylindrical part 626 is preferably arranged in the electroformed metal part 630. By disposing the flange part 626f in the electroformed metal part 630, the contact area between the tubular part 626 and the electroformed metal part 630 can be increased, and the tubular part 626 comes off from the electroformed metal part 630. In addition, the cylindrical part 626 can be effectively prevented from rotating with respect to the electroformed metal part 630. In other words, the flange portion 626f is configured to be positioned in the electroformed metal portion 630 formed integrally with the cylindrical component 626, and prevents the cylindrical component 626 from coming off and / or rotating the cylindrical component 626. Contour shape is configured. Referring to FIG. 27D, the outer shape forming resist 628 is removed from the substrate 620, and the electroformed component 632 is removed (step 609). The electroformed part 632 includes a tubular part 626 and an electroformed metal part 630 integrated with the tubular part 626. Since the flange part 626f of the cylindrical part 626 is disposed in the electroformed metal part 630, there is no possibility that the cylindrical part 626 is separated from the electroformed metal part 630. As described above, the mechanical timepiece to which the method for producing an electroformed part of the present invention is applied preferably includes at least one of the electroformed parts produced by the method for producing an electroformed part of the present invention.

(9) Structure of Analog Electronic Timepiece An embodiment to which the method for producing an electroformed part of the present invention described below is applied relates to a timepiece having a train wheel, that is, an analog electronic timepiece. However, the method for producing an electroformed part of the present invention is not limited to an analog electronic timepiece, and is widely applied to members constituting a train wheel of measuring instruments, printing machines, video equipment, recording equipment, recording equipment, etc. can do. Referring to FIGS. 28 to 31, a movement (mechanical body) 100 of an analog electronic timepiece has a main plate 102 that constitutes a substrate of the movement. A winding stem 110 is rotatably incorporated in a winding stem guide hole of the main plate 102. A dial 104 (shown in phantom lines in FIG. 29) is attached to the movement 100. The movement 100 includes a switching spring 166 for determining the position of the winding stem 110 in the axial direction. On the “front side” of the movement 100, a battery 120, a circuit block 116, an hour motor 210, an hour display wheel train 220, a minute motor 240, a minute display wheel train 250, a second motor 270, a second display train wheel 280, and the like are arranged. . The main plate 102, the train wheel bridge 112, and the second ring bridge 114 constitute a support member. The hour display train wheel 220 is rotated by the rotation of the hour motor 210, and “hour” of the current time is displayed by the hour hand 230. The minute display wheel train 250 is rotated by the rotation of the minute motor 240, and “minute” of the current time is displayed by the minute hand 260. The second display train 280 is rotated by the rotation of the second motor 270, and “second” of the current time is displayed by the second hand 290. The IC 118 and the crystal unit 122 are attached to the circuit block 116. The circuit block 116 is fixed to the main plate 102 and the train wheel bridge 112 by the switch spring 162 via the insulating plate 160. The switching spring 166 is integrally formed with the switch spring 162. The battery 120 constitutes a power source of the analog electronic timepiece. As a power source for the analog electronic timepiece, a rechargeable secondary battery or a chargeable capacitor can be used. The crystal unit 122 constitutes the source oscillation of an analog electronic timepiece, and oscillates at, for example, 32,768 hertz.

  Referring to FIGS. 29 and 30, the second motor 270 includes a second coil block 272, a second stator 274, and a second rotor 276. When the second coil block 272 receives a second motor drive signal, the second stator 274 is magnetized to rotate the second rotor 276. The second rotor 276 is configured to rotate 180 degrees every second, for example. Second rotor 276 includes an upper shaft portion 276a, a lower shaft portion 276b, a pinion portion 276c, and a rotor magnet 276d. The upper shaft portion 276a, the lower shaft portion 276b, and the kana portion 276c are formed of a metal such as carbon steel. Based on the rotation of the second rotor 276, the second wheel 284 is configured to rotate via the rotation of the second transmission wheel 282. Second transmission wheel 282 includes an upper shaft portion 282a, a lower shaft portion 282b, a pinion portion 282c, and a gear portion 282d. The pinion portion 276c is configured to mesh with the gear portion 282d. The upper shaft portion 282a, the lower shaft portion 282b, and the kana portion 282c are formed of a metal such as carbon steel. The gear portion 282d is formed of a metal such as brass.

  The second wheel 284 is configured to rotate once per minute. The second wheel 284 includes an upper shaft portion 284a, an abacus ball portion 284b, and a gear portion 284d. The pinion portion 282c is configured to mesh with the gear portion 284d. The upper shaft portion 284a and the abacus ball portion 284b are formed of a metal such as carbon steel. The gear portion 284d is formed of a metal such as brass. A second hand 290 is attached to the second wheel 284. The second wheel 284 may be disposed at the center of the analog electronic timepiece, or may be disposed at a position different from the center of the analog electronic timepiece. The second hand 290 constitutes a second display member. As the second display member, a second hand may be used, a disk may be used, or a display member having another shape including a flower or a geometric shape may be used. The second display train wheel 220 includes a second transmission wheel 282 and a second wheel 284. The second rotor 276 and the second transmission wheel 282 are rotatably supported by the main plate 102 and the train wheel bridge 112. The second wheel 284 is rotatably supported with respect to the center pipe 126 and the train wheel bridge 112 provided in the second receiver 114. That is, the upper shaft portion 276a of the second rotor 276, the upper shaft portion 282a of the second transmission wheel 282, and the upper shaft portion 284a of the second wheel 284 are rotatably supported by the train wheel bridge 112. The center pipe 126 is made of a metal such as carbon steel. Further, the lower shaft portion 276 b of the second rotor 276 and the lower shaft portion 282 b of the second transmission wheel 282 are rotatably supported by the main plate 102.

  29 to 31, the bearing portion of the train wheel bridge 112 that rotatably supports the upper shaft portion 276 a of the second rotor 276 and the train wheel train receiver that rotatably supports the upper shaft portion 282 a of the second transmission wheel 282. Lubricating oil is injected into the bearing portion 112 and the bearing portion of the train wheel bridge 112 that rotatably supports the upper shaft portion 284 a of the second wheel 284. Lubricating oil is injected into the bearing portion of the base plate 102 that rotatably supports the lower shaft portion 276b of the second rotor 276 and the bearing portion of the base plate 102 that rotatably supports the lower shaft portion 282b of the second transmission wheel 282. . This lubricating oil is preferably a precision machine oil, particularly preferably a so-called watch oil. An example of such a watch oil is “Mavis A ™” available from Mavis. It is preferable to provide a conical, cylindrical, or frusto-conical oil reservoir in each bearing portion of the train wheel bridge 112 and each bearing portion of the main plate 102 in order to improve the lubricating oil retention performance. . Providing the oil reservoir can effectively prevent the oil from diffusing due to the surface tension of the lubricating oil. The date dial 170 is supported rotatably with respect to the main plate 102. A date dial holder 172 supports the date dial 170 with respect to the main plate 102. It is preferable to lubricate the contact portion between the tooth tip portion of the date dial 170 and the main plate 102. This lubricating oil is preferably a precision machine oil, particularly preferably a so-called watch oil.

  A battery negative terminal 170 is attached to the main plate 102. The battery minus terminal 170 conducts the cathode of the battery 120 and the minus input portion Vss of the IC 118 through the minus pattern of the circuit block 116. A battery retainer 172 is attached to the switch spring 162. The battery retainer 172 and the switch spring 162 conduct the anode of the battery 120 and the plus input portion Vdd of the IC 118 through the plus pattern of the circuit block 116. The minute motor 240 includes a minute coil block 242, a minute stator 244, and a minute rotor 246. When the minute coil block 242 receives the minute motor drive signal, the minute stator 244 is magnetized to rotate the minute rotor 246. The minute rotor 246 is configured to rotate 180 degrees every 20 seconds, for example. The minute rotor 246 includes an upper shaft portion 246a, a lower shaft portion 246b, a pinion portion 246c, and a rotor magnet 246d. The upper shaft portion 246a, the lower shaft portion 246b, and the kana portion 246c are formed of a metal such as carbon steel.

  The minute transmission wheel 252 is rotated based on the rotation of the minute rotor 246, and the minute wheel 256 is rotated via the second transmission wheel 254 based on the rotation of the first minute transmission wheel 252. The most minute transmission wheel 252 includes an upper shaft portion 252a, a lower shaft portion 252b, a pinion portion 252c, and a gear portion 252d. The pinion portion 246c is configured to mesh with the gear portion 252d. The upper shaft portion 252a, the lower shaft portion 252b, and the kana portion 252c are formed of a metal such as carbon steel. The gear portion 252d is formed of a metal such as brass. The second transmission wheel 254 includes an upper shaft portion 254a, a lower shaft portion 254b, a pinion portion 254c, and a gear portion 254d. The pinion portion 252c is configured to mesh with the gear portion 254d. The upper shaft portion 254a, the lower shaft portion 254b, and the kana portion 254c are formed of a metal such as carbon steel. The gear portion 254d is formed of a metal such as brass. The minute wheel 256 includes a cylindrical portion 256a and a gear portion 256d. The pinion portion 254c is configured to mesh with the gear portion 256d. The cylindrical portion 256a is formed of a metal such as carbon steel. The gear portion 256d is formed of a metal such as brass.

  The minute wheel 256 is configured to rotate once per hour. A minute hand 260 is attached to the minute wheel 256. The rotation center of the minute wheel 256 is the same as the rotation center of the second wheel 284. The minute hand 260 forms a minute display member. As the minute display member, a minute hand may be used, a disk may be used, or a display member having another shape including a flower or a geometric shape may be used. The minute display wheel train 250 includes a first minute transmission wheel 252, a second minute transmission wheel 254, and a minute wheel 256. The minute rotor 246, the first minute transmission wheel 252, and the second minute transmission wheel 254 are rotatably supported by the main plate 102 and the train wheel bridge 112. The minute wheel 256 comes into contact with the outer peripheral portion of the center pipe 126 provided in the second receiver 114 and is rotatably supported. That is, the upper shaft portion 246a of the minute rotor 246, the upper shaft portion 252a of the first minute transmission wheel 252 and the upper shaft portion 254a of the second minute transmission wheel 254 are rotatably supported by the train wheel bridge 112. Is done. Further, the lower shaft portion 246b of the minute rotor 246, the lower shaft portion 252b of the first minute transmission wheel 252 and the lower shaft portion 254b of the second minute transmission wheel 254 are rotatably supported with respect to the main plate 102. . A bearing portion of the train wheel bridge 112 that rotatably supports the upper shaft portion 246a of the minute rotor 246; a bearing portion of the train wheel bridge 112 that rotatably supports the upper shaft portion 252a of the minute transmission wheel 252; Lubricating oil is injected into the bearing portion of the train wheel bridge 112 that rotatably supports the upper shaft portion 254a of the transmission wheel 254. The bearing portion of the lower shaft portion 246b of the minute rotor 246, the bearing portion of the main plate 102 that rotatably supports the lower shaft portion 252b of the first minute transmission wheel 252 and the lower shaft portion 254b of the second minute transmission wheel 254 are rotated. Lubricating oil is injected into the bearing portion of the main plate 102 that is supported. This lubricating oil is preferably a precision machine oil, particularly preferably a so-called watch oil. It is preferable to provide a conical, cylindrical, or frusto-conical oil reservoir in each bearing portion of the train wheel bridge 112 and each bearing portion of the main plate 102 in order to improve the lubricating oil retention performance. .

  The hour motor 210 includes an hour coil block 212, an hour stator 214, and an hour rotor 216. When the hour coil block 212 receives the hour motor drive signal, the hour stator 214 is magnetized to rotate the hour rotor 216. The hour rotor 216 is configured to rotate 180 degrees every 20 minutes, for example. The hour rotor 216 includes an upper shaft portion 216a, a lower shaft portion 216b, a kana portion 216c, and a rotor magnet 216d. The upper shaft portion 216a, the lower shaft portion 216b, and the kana portion 216c are formed of a metal such as carbon steel. Based on the rotation of the hour rotor 216, the hour transmission wheel 222 rotates. Based on the rotation of the hour transmission wheel 222, the hour wheel, that is, the hour wheel 226 is rotated through the rotation of the second transmission wheel 224. The hour transmission wheel 222 includes an upper shaft portion 222a, a lower shaft portion 222b, a pinion portion 222c, and a gear portion 222d. The pinion portion 216c is configured to mesh with the gear portion 222d. The upper shaft portion 222a, the lower shaft portion 222b, and the kana portion 222c are formed of a metal such as carbon steel. The gear portion 222d is formed of a metal such as brass. The second transmission wheel 224 includes an upper shaft portion 224a, a lower shaft portion 224b, a pinion portion 224c, and a gear portion 224d. The pinion portion 222c is configured to mesh with the gear portion 224d. The upper shaft portion 224a, the lower shaft portion 224b, and the kana portion 224c are formed of a metal such as carbon steel. The gear portion 224d is formed of a metal such as brass. The hour wheel or hour wheel 226 includes a cylindrical portion 226a and a gear portion 226d. The pinion portion 224c is configured to mesh with the gear portion 226d. The hour wheel 226 is formed of a metal such as brass.

  The hour wheel 226 is configured to rotate once in 12 hours. An hour hand 230 is attached to the hour wheel 226. The center of rotation of the hour wheel 226 is the same as the center of rotation of the minute wheel 256. Therefore, the rotation center of the hour wheel 226, the rotation center of the minute wheel 256, and the rotation center of the second wheel 284 are the same. The hour hand 230 constitutes an hour display member. As the hour display member, an hour hand may be used, a disk may be used, or a display member having another shape including a flower or a geometric shape may be used. The hour display wheel train 220 includes a first hour transmission wheel 222, a second hour transmission wheel 224, and an hour wheel, that is, an hour wheel 226. The hour rotor 216, the first hour transmission wheel 222, and the second hour transmission wheel 224 are rotatably supported with respect to the main plate 102 and the train wheel bridge 112. The hour wheel, that is, the hour wheel 226 comes into contact with the outer peripheral portion of the minute wheel 256 and is rotatably supported. That is, the upper shaft portion 216a of the hour rotor 216, the upper shaft portion 222a of the hour transmission wheel 222, and the upper shaft portion 224a of the second transmission wheel 224 are rotatably supported by the train wheel bridge 112. Is done. Further, the lower shaft portion 216b of the hour rotor 216, the lower shaft portion 222b of the hour transmission wheel 222, and the lower shaft portion 224b of the second transmission wheel 224 are rotatably supported with respect to the main plate 102. .

  A bearing portion of the train wheel bridge 112 that rotatably supports the upper shaft portion 216a of the hour rotor 216; a bearing portion of the train wheel bridge 112 that rotatably supports the upper shaft portion 222a of the hour transmission wheel 222; Lubricating oil is injected into the bearing portion of the train wheel bridge 112 that rotatably supports the upper shaft portion 224a of the hour transmission wheel 224. The bearing portion of the lower shaft portion 216b of the hour rotor 216, the bearing portion of the main plate 102 that rotatably supports the lower shaft portion 222b of the hour transmission wheel 222, and the lower shaft portion 224b of the second hour transmission wheel 224 are rotated. Lubricating oil is injected into the bearing portion of the main plate 102 that is supported. This lubricating oil is preferably a precision machine oil, particularly preferably a so-called watch oil. It is preferable to provide a conical, cylindrical, or frusto-conical oil reservoir in each bearing portion of the train wheel bridge 112 and each bearing portion of the main plate 102 in order to improve the lubricating oil retention performance. . When the hour wheel, that is, the hour wheel 226 rotates, a date driving wheel (not shown) is configured to rotate. The date indicator driving wheel is provided to rotate once a day by the rotation of the hour wheel, that is, the hour wheel 226. A date indicator (not shown) provided on the date indicator driving wheel is configured to feed the date indicator 170 one tooth per day.

(10) Structure of hour wheel The embodiment to which the method for producing an electroformed part of the present invention described below is applied relates to a time wheel of a watch, that is, an hour wheel. Here, the hour wheel constitutes an electroformed part with a cylinder part. However, the method for producing an electroformed part of the present invention can be applied to a mechanical watch part, an electronic watch part, or a cylindrical part applied to other equipment. It can also be applied to an electroformed part. That is, the method for producing an electroformed component according to the present invention is not limited to the hour wheel of a watch (that is, the hour wheel), but is also used for a clock train wheel part (a cylinder part having a gear portion) such as a clock transmission wheel, a correction wheel, and a display wheel. It can be widely applied to gear parts with attached electroformed parts. Furthermore, the method for producing electroformed parts of the present invention is widely applied to train wheel parts (electroformed parts with a cylindrical part having a gear part) for measuring instruments, printing machines, video equipment, recording equipment, recording equipment, and the like. be able to.

  Referring to FIGS. 32 and 33, the hour wheel or hour wheel 226 includes a cylinder portion 226c and a gear plate portion 226h. The cylinder part 226c includes an upper cylinder part 226a, a lower cylinder part 226b, a flange part 226f positioned between the upper cylinder part 226a and the lower cylinder part 226b, and a center hole 226h. The gear plate portion 226h before forming the gear portion 226g can be formed by the method for manufacturing an electroformed component of the present invention described above with reference to FIGS. The cylindrical portion 226c corresponds to the cylindrical component 626 in FIGS. The gear portion 226h corresponds to the electroformed metal portion 630 in FIG. The flange portion 226f of the cylindrical portion 226c is preferably disposed in a gear plate portion 226h that is an electroformed metal portion. By disposing the flange portion 226f in the gear plate portion 226h, the contact area between the cylindrical portion 226c and the gear plate portion 226h can be increased, and the cylindrical portion 226c is prevented from coming off from the gear plate portion 226h. In addition, the cylindrical portion 226c can be effectively prevented from rotating with respect to the gear plate portion 226h. In other words, the flange portion 226f is configured to be positioned in the gear plate portion 226h formed integrally with the cylindrical portion 226c, so as to prevent the cylindrical portion 226c from coming off and / or the cylindrical portion 226c from rotating. The outline shape is configured. As the electroformed part, the gear portion 226g forms the unprocessed gear plate portion 226h, and then the gear portion 226g can be formed by pressing or gear cutting as secondary processing. As described above, the analog electronic timepiece to which the method for manufacturing an electroformed part of the present invention is applied preferably includes at least one of the electroformed parts manufactured by the method for manufacturing an electroformed part of the present invention.

  By using the manufacturing method of the present invention, a small component including a minute component such as a solid shaft, a hollow shaft, “kana”, a pallet, etc. can be manufactured by an electroforming process consisting of a simple process. . In particular, according to the present invention, parts for mechanical watches and parts for analog electronic watches can be manufactured by electroforming. Further, by using the manufacturing method of the present invention, it is possible to provide a mechanical timepiece and an analog electronic timepiece including at least one electroformed part manufactured by electroforming consisting of simple steps.

FIG. 1 is a principle diagram (part 1) for explaining a part of a manufacturing process of an electroformed part having a solid shaft part in the embodiment of the method for producing an electroformed part of the present invention. FIG. 2 is a principle diagram (part 2) for explaining a part of the manufacturing process of the electroformed part including the solid shaft part in the embodiment of the electroformed part manufacturing method of the present invention. FIG. 3 is a principle diagram for explaining the outline of electroforming. FIG. 4 is a top view showing the structure of the electroformed part in the embodiment of the electroformed part of the present invention. FIG. 5 is a cross-sectional view showing the structure of a shaft part in the electroformed part embodiment of the present invention. FIG. 6 is a cross-sectional view showing the structure of an electroformed part in another embodiment of the electroformed part of the present invention. FIG. 7 is a cross-sectional view showing the structure of an electroformed part in another embodiment of the electroformed part of the present invention. FIG. 8 is a cross-sectional view showing the structure of an electroformed part in another embodiment of the electroformed part of the present invention. FIG. 9 is a top view showing a structure of a rotation stopper provided in the shaft part in another embodiment of the electroformed part of the present invention. FIG. 10 is a top view showing another structure of the rotation stopper provided in the shaft part in another embodiment of the electroformed part of the present invention. FIG. 11 is a top view showing still another structure of the rotation stopper provided in the shaft part in another embodiment of the electroformed part of the present invention. FIG. 12 is a plan view showing a schematic shape on the front side of the movement in the embodiment of the present invention (in FIG. 12, some parts are omitted, and the receiving member is indicated by an imaginary line). FIG. 13 is a schematic partial cross-sectional view showing an ankle part from a barrel in the embodiment of the present invention. FIG. 14 is a schematic partial cross-sectional view showing the balance from the escape wheel and the balance in the embodiment of the present invention. FIG. 15 is a top view showing the third wheel in the embodiment of the present invention. FIG. 16 is a side view showing the third wheel in the embodiment of the present invention. FIG. 17 is a perspective view showing a third wheel in the embodiment of the present invention. FIG. 18 is a top view showing the escape wheel in the embodiment of the present invention. FIG. 19 is a side view showing the escape wheel in the embodiment of the present invention. FIG. 20 is a perspective view showing an escape wheel & pinion in the embodiment of the present invention. FIG. 21 is a top view showing an ankle in the embodiment of the present invention. FIG. 22 is a side view showing an ankle in the embodiment of the present invention. FIG. 23 is a perspective view showing an ankle in the embodiment of the present invention. FIG. 24 is a principle diagram (part 1) for explaining a part of the ankle manufacturing process in the embodiment of the method for manufacturing an electroformed component of the present invention. FIG. 25 is a principle diagram (part 2) for explaining a part of the ankle manufacturing process in the embodiment of the method for manufacturing an electroformed component of the present invention. FIG. 26 is a principle diagram (part 1) for explaining a part of the manufacturing process of the electroformed component including the hollow shaft component in the embodiment of the electroformed component manufacturing method of the present invention. FIG. 27 is a principle diagram (part 2) for explaining a part of the manufacturing process including the hollow shaft component in the embodiment of the method for manufacturing the electroformed component of the present invention. FIG. 28 is a plan view showing a schematic shape of a movement to which an electroformed component is applied as viewed from the front side in an embodiment of the method for producing an electroformed component of the present invention (some components are omitted in FIG. 28). ing). FIG. 29 is a schematic partial cross-sectional view showing a portion from the second motor to the second hand in a movement to which the electroformed component is applied in the embodiment of the method for producing an electroformed component of the present invention. FIG. 30 is a schematic partial cross-sectional view showing a minute hand portion from a minute motor in a movement to which the electroformed component is applied in the embodiment of the method for producing an electroformed component of the present invention. FIG. 31 is a schematic partial sectional view showing the hour hand portion from the hour motor in the movement to which the electroformed component is applied in the embodiment of the method for producing an electroformed component of the present invention. FIG. 32 is a cross-sectional view showing an hour wheel which is an electroformed part in the embodiment of the method for producing an electroformed part of the present invention. FIG. 33 is a partial cross-sectional perspective view showing an hour wheel which is an electroformed part in the embodiment of the method for producing an electroformed part of the present invention.

Explanation of symbols

100 movement (machine body)
102 Ground plate 112 Train wheel receiver 114 Second receiver 216 Hour rotor 226 Hour wheel 246 Minute rotor 256 Minute wheel 276 Second rotor 284 Second wheel 300 Movement (mechanical body)
302 ground plate 320 barrel wheel 324 second wheel 326 third wheel 328 fourth wheel 330 escape wheel 342 ankle 420 substrate 420h etching hole 422 mask 426 shaft component 426b lower shaft portion 428 outer shape forming resist 430 electroformed metal portion 520 substrate 520h Etching recess 522 SiO ₂ film 524 Amorphous silicon film 526 Mask 530 Metal conductive film 532 Outline forming resist 540 Electroformed metal part 542 Electroformed part with spar 550 Slag 620 Substrate 622 Central mask 624 Conductive 626 Cylindrical part 628 Outline forming resist 630 Electroformed metal part

Claims (15)

In the production method of electroformed parts,
(A) forming an etching hole (420h) in a substrate (420) having a mask (422);
(Ii) inserting a portion of the lower shaft portion including the tip of the lower shaft portion (426b) of the shaft component (426) into the etching hole (420h) of the substrate (420);
(C) performing electroforming on the substrate (420) into which a part of the shaft component (426) is inserted, and forming an electroformed metal part (430) integrally with the shaft component (426) ,
The method according to claim 1, wherein the steps (a) to (u) are performed according to the order described above .   The method according to claim 1, wherein after the step of forming the etching hole (420h) described in (a) above, a step of removing the mask (422) from the surface of the substrate (420); The method further comprising the step of attaching the conductive film (424) to the surface and the bottom surface of the etching hole (420h) to make the surface of the substrate (420) conductive.   The method according to claim 1, wherein the step of removing the mask 422 from the surface of the substrate (420) is not performed after the step of forming the etching hole (420h) described in (a). And a step of forming a metal thin film on the surface and forming a surface conductor for electroforming.   The method of claim 1, wherein the shaft component (426) is configured to be located in an electroformed metal part (430) formed integrally with the shaft component (426). ) And / or having a contour shape (426f) to prevent rotation of the shaft part (426). In the production method of electroformed parts,
(A) preparing a substrate (420) ;
(B) coating a photoresist on the surface of the substrate (420) , exposing the required shape to the coated photoresist, developing and patterning the mask (422);
(C) forming an etching hole (420h) in a substrate (420) having a mask (422);
(D) removing the mask (422) from the surface of the substrate (420);
(E) attaching the conductive film (424) to the surface of the substrate (420) and the bottom surface of the etching hole (420h) to make the surface of the substrate (420) conductive;
(F) preparing a shaft component (426) and inserting a portion of the lower shaft portion including the tip of the lower shaft portion (426b) of the shaft component (426) into the etching hole (420h) of the substrate (420);
(G) depositing a thick film resist on the substrate (420), exposing a necessary shape to the deposited thick film resist, developing and patterning a resist for shape formation (428);
(H) Electroforming is performed on the substrate (420) into which a part of the shaft component (426) is inserted, and an electroformed metal portion (430) is placed between the outer shape forming resist (428) and the shaft component (426). Forming a process ,
Steps (a) to (h) are performed according to the order described above.
A method characterized by that.   6. The method according to claim 5, wherein instead of the step of removing the mask (422) described in (d) above, a metal thin film is formed on the mask (422) to form a surface conductor for electroforming. The method characterized by including the process of performing.   6. The method of claim 5, wherein the shaft component (426) is configured to be located in an electroformed metal part (430) formed integrally with the shaft component (426). ) And / or having a contour shape (426f) to prevent rotation of the shaft part (426). In the production method of electroformed parts,
(A) preparing a substrate (420) ;
(B) coating a photoresist on the surface of the substrate (420) , exposing the required shape to the coated photoresist, developing and patterning the mask (422);
(C) forming an etching hole (420h) in a substrate (420) having a mask (422);
(D) removing the mask (422) from the surface of the substrate (420);
(E) attaching the conductive film (424) to the surface of the substrate (420) and the bottom surface of the etching hole (420h) to make the surface of the substrate (420) conductive;
(F) depositing a thick film resist on the substrate (420), exposing a necessary shape to the deposited thick film resist, developing and patterning a resist for shape formation (428);
(G) preparing a shaft component (426) and inserting a portion of the lower shaft portion including the tip of the lower shaft portion (426b) of the shaft component (426) into the etching hole (420h) of the substrate (420);
(H) Electroforming is performed on the substrate (420) into which a part of the shaft component (426) is inserted, and an electroformed metal portion (430) is placed between the outer shape forming resist (428) and the shaft component (426). Forming a process ,
Steps (a) to (h) are performed according to the order described above.
A method characterized by that.   An electroformed part manufactured by the method according to any one of claims 1 to 8.   In a wheel train component for a watch, an etching hole (420h) is formed in a substrate (420) having a mask (422), and the lower shaft portion including the tip of the lower shaft portion (326b) of “Kana” (326f) Is inserted into the etching hole (420h) of the substrate (420), and the substrate (420) into which the “kana” (326f) is inserted is electroformed to form a gear (326g) integrally with the “kana” (326). A train wheel part manufactured by doing   In a watch ankle, an etching hole (420h) is formed in a substrate (420) having a mask (422), and the lower shaft portion including the tip of the lower shaft portion (342b) of the ankle true (342f) is formed on the substrate ( 420) is inserted into the etching hole (420h), and electroforming is performed on the substrate (420) into which the ankle true (342f) is inserted to form an ankle body (342d) integrally with the ankle true (342f). An ankle characterized by being manufactured by fixing a sword tip (342g) and a pallet (342j, 342k) to an ankle body (342d). In the manufacturing method of an ankle for a watch,
(A) forming an etching recess (520h) in a substrate (520) having a mask (522);
(Ii) attaching the conductive film (530) to the surface of the substrate (520) and the surface of the etching recess (520h) to make the surface of the substrate (520) conductive;
(U) Placing the stone (550) in the etching recess (520h) of the substrate (520);
(E) performing electroforming on the substrate (520) on which the pallet stone (550) is disposed, and forming an electroformed metal part (540) integrally with the pallet stone (550) ,
The steps (A) to (E) are performed in the order described above.
A method characterized by that.   A timepiece ankle manufactured by the method according to claim 12. An electroformed part manufactured by the method according to any one of claims 1 to 8, and at least one of a watch ankle manufactured by the method according to claim 12. A mechanical watch characterized by An analog electronic timepiece comprising an electroformed part manufactured by the method according to any one of claims 1 to 8.

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