JP5658344B2 - Manufacturing method of machine parts - Google Patents

Description

  The present invention relates to a method of manufacturing a machine part and a timepiece.

  Conventionally, many mechanical parts such as a watch wheel and escape wheel are used for precision machines such as watches. These mechanical parts are configured to drive the balance by sliding relative to each other so that the timepiece accurately keeps time. Since friction is generated at the place where the mechanical parts slide, it is necessary to supply lubricating oil to the sliding surface in order to prevent wear due to friction and to slide smoothly. Therefore, a escape wheel with a structure for holding lubricating oil at a sliding portion has been proposed (see, for example, Patent Document 1).

Special table 2007-506073

  By the way, the escape wheel of patent document 1 is provided with a level | step difference between the 1st part of the finger-like body which is the front-end | tip part of a tooth | gear, and the 2nd part, and has comprised the area | region of the level | step difference as an oil retaining part. There is a problem that lubricating oil is difficult to be supplied to the sliding portion. For example, when sliding the escape wheel with another part, if the sliding surface of the escape wheel and the separate part comes in parallel, lubricating oil is supplied. Lubricating oil is not supplied in the case of contacting in a direction away from the part.

  Moreover, in the structure like the escape wheel of patent document 1, when sliding with another part, since the escape wheel and another part will be in surface contact, the problem that frictional force will become large. There is.

  Therefore, the present invention has been made in view of the above circumstances, and when sliding with another component, the lubricating oil can be reliably supplied to the sliding portion, and the frictional force can be reduced. A machine part, a method for manufacturing the machine part, and a timepiece are provided.

  In order to solve the above problems, the present invention provides the following means.

  The mechanical component according to the present invention is formed by electroforming, and is configured to be slidable with another component that rotates around the shaft portion and is adjacent, and at least three layers are laminated in the axial direction, A recess is formed on a sliding surface that contacts the another component of at least one layer sandwiched between the uppermost layer and the lowermost layer of the at least three layers, and at least becomes convex with respect to the recess of the at least three layers. A peak portion is formed in one layer, and the peak portion is configured to be able to abut against the another part.

Moreover, the said peak part is formed so that the said sliding surface may be followed in the circumferential direction.
Or the said peak part is formed so that the axial direction may be formed in the said sliding surface.

  With this configuration, the recess that becomes the lubricating oil holding part is not positioned on one side in the stacking direction, so when sliding with another part, the sliding part is reliably lubricated without being affected by the contact angle. Oil can be supplied.

  Further, by applying the lubricating oil around the ridges of the machine parts, the lubricating oil can be reliably supplied to the sliding surface. Further, when a plurality of peak portions are formed, the lubricating oil can be held between the adjacent peak portions, so that the amount of the lubricating oil retained can be increased. Furthermore, when a plurality of crests are formed along the circumferential direction or the axial direction, the surface area of the sliding surface (outer circumferential surface) of the machine part increases, so that the amount of lubricating oil retained can be further increased. Therefore, the lubricating oil can be reliably supplied to the sliding surface and the lubricating oil can be supplied for a long period of time, so that the frequency of maintenance can be reduced.

  Moreover, when comprised in this way, when sliding a mechanical component and another component, it can be made to slide, making a peak part and another member point-contact. Accordingly, the contact area between the machine part and the separate part can be reduced, and the frictional force can be reduced.

  Furthermore, since the machine part is formed by electroforming, it has sufficient strength and can make the accuracy of the product uniform. Therefore, the yield can be improved.

  In addition, at least one of at least one layer sandwiched between the uppermost layer and the lowermost layer of at least three layers in which the recesses are stacked may be formed to recede.

  Further, a plurality of the concave portions are formed in the axial direction. By comprising in this way, when making it slide with another component, it becomes difficult to receive the influence by a contact angle, and lubricating oil can be supplied more reliably.

  Moreover, the said recessed part is formed over the perimeter of an outer peripheral surface, It is characterized by the above-mentioned. By comprising in this way, the retention amount of the lubricating oil by a recessed part can be increased. Therefore, the lubricating oil can be reliably supplied to the sliding surface and the lubricating oil can be supplied for a long period of time, so that the frequency of maintenance can be reduced.

  The mechanical component according to the present invention may have a structure in which at least three layers made of at least two kinds of different materials are laminated. At this time, the material of at least one of the layers may have better thermal conductivity than the material of the other layers.

  The mountain portion has a curved surface shape. By comprising in this way, when sliding a machine part and another part, it can be made to slide, making the curved-shaped peak part and another member point-contact. Accordingly, the contact area between the machine part and the separate part can be reliably reduced, and the frictional force can be reduced.

  Further, a plurality of the peak portions are formed in one layer. By comprising in this way, since lubricating oil can be hold | maintained between adjacent peak parts, it becomes possible to increase the holding | maintenance amount of lubricating oil. Furthermore, when a plurality of crests are formed along the circumferential direction or the axial direction, the surface area of the sliding surface (outer circumferential surface) of the machine part increases, so that the amount of lubricating oil retained can be further increased. Therefore, the lubricating oil can be reliably supplied to the sliding surface and the lubricating oil can be supplied for a long period of time, so that the frequency of maintenance can be reduced.

  Further, the peak portion is formed in a plurality of layers. With this configuration, when sliding a machine part and another part, the peak part and another member are point-contacted regardless of which layer and another part come into contact without being affected by the contact angle. It can be slid while. Accordingly, the contact area between the machine part and the separate part can be reduced, and the frictional force can be reduced.

  Further, the mechanical component is a gear, and the peak portion is formed over the entire circumference of the outer peripheral surface. With this configuration, since a large amount of lubricating oil can be retained on the outer peripheral surface of the gear serving as the sliding surface, wear of the sliding surface can be suppressed and the gear can be smoothly rotated. Is possible. That is, the gear can be accurately rotated over a long period of time without maintenance.

  Further, the mechanical component is a gear, and the peak portion is formed only at a tooth tip portion that contacts the another component. By comprising in this way, since much lubricating oil can be hold | maintained at the gear tip part of the gear used as a sliding surface, while being able to suppress wear of a tooth tip part, a gear is rotated smoothly. It becomes possible. That is, the gear can be rotated with high accuracy.

  Further, a method of manufacturing a mechanical component according to the present invention is a method of manufacturing a mechanical component having a sliding surface that can slide with another component using a substrate composed of a plurality of layers, the method comprising: Forming a first mask material including a contour corresponding to a position corresponding to the sliding surface in an area other than a mechanical part forming area; and isotropic etching of the upper layer to a predetermined depth using the first mask material An etching process, a protective film forming process for forming a protective film on the bottom and side surfaces of the recess formed by the isotropic etching, and a protective film removing process for removing the protective film formed on the bottom of the recess , Repeating the etching step, the protective film forming step and the protective film removing step to expose the lower layer of the substrate, and depositing at least two kinds of material layers on the surface of the lower layer by electroforming An electroformed product forming step, a step of removing the substrate including the upper layer remaining at a position corresponding to the sliding surface, and a step of selectively removing a part of the surface of the material layer. It is characterized by having.

  By using the semiconductor process in this way, the peak portion can be formed at low cost without using precision machining. Further, by using a substrate composed of a plurality of layers, it becomes possible to stop the etching of the upper layer when the lower layer is exposed, and it is possible to manufacture a mechanical part with high accuracy.

  Further, the machine part is a gear, the sliding surface is a tooth tip part of the gear, and the first mask material includes only a position corresponding to the tooth tip part on the outer periphery of the machine part in the outline. And forming a second mask material in a region other than the formation region of the mechanical part before the electroformed product forming step, and in the electroformed product forming step, The electroformed product is formed in a formation region of the machine part using one mask material and the second mask material.

  By comprising in this way, when forming a metal layer on a board | substrate as an electrode before the formation process of an electroformed part, it becomes possible to form a metal layer on a board | substrate continuously. That is, in the electroformed product forming process, the power source is supplied to all the electroformed product forming regions simply by connecting the power source to one place of the metal layer, so that the electroformed product can be formed.

  Further, the mechanical part has a through hole into which a shaft member can be fitted, and in the step of forming the first mask material, the first mask material is also formed in the formation region of the through hole. .

  By comprising in this way, a peak part can be formed also in the through-hole of a machine component. When the shaft member is fitted to the machine part manufactured as described above, the mechanical part and the shaft member come into point contact, and the top portion is deformed to hold the shaft member, so that the stress is relieved. That is, since the stress is absorbed by the peak portion of the machine part, the entire machine part can be prevented from warping or cracking. Furthermore, since the shape of the through hole of the machine component is uniform in the circumferential direction, it is not necessary to align the shaft member when the shaft member is fitted to the machine component, and the production efficiency can be improved.

  The substrate includes a metal layer in the lower layer, and the electroformed product is formed by using the metal layer as an electrode in the electroformed product forming step.

  By comprising in this way, since the metal layer formed in the lower layer of a board | substrate can be utilized as an electrode, the process of forming an electrode (metal layer) can be skipped. Therefore, production efficiency can be improved.

  Further, the substrate is an SOI substrate having a buried oxide film layer in the lower layer, and has a step of forming a metal layer on the surface of the buried oxide film layer before the second mask material forming step, The electroformed product forming step is characterized in that the electroformed product is formed using the metal layer as an electrode.

  In this way, by using a generally distributed SOI substrate, it is possible to keep the manufacturing cost low. Further, by forming a metal layer on the surface of the buried oxide film layer, the power can be supplied to all the electroformed product forming regions by simply connecting a power source to one place of the metal layer, thereby forming the electroformed product. .

  The timepiece according to the present invention is characterized in that the above-described mechanical parts are used as timepiece assembly parts.

  In addition, the assembly part is at least one of a wheel, a pinion, a escape wheel, a square hole wheel, and a barrel gear.

  With this configuration, the lubricating oil is held in the recess formed on the sliding surface, so that the sliding of each machine part and another part (for example, a car wheel) that meshes with the machine part when it rotates. Lubricating oil is reliably supplied to the moving part, and the slidability is improved. In addition, the crests formed on the sliding surface make point contact between each machine component and another component that meshes when the machine component rotates, thereby improving wear resistance. In addition, since the surface area of the sliding surface (outer peripheral surface) of the machine part increases, the amount of lubricating oil retained can be increased. In addition, by forming a plurality of ridges on the sliding surface, it becomes possible to hold the lubricating oil between the adjacent ridges and prevent the lubricant from flowing out.

  Lubricating oil is reliably supplied to the sliding surface by holding the lubricating oil between the recess formed in the sliding portion and the plurality of ridges formed. Therefore, energy loss when the gears mesh is reduced and the balance angle of the balance with hairspring is increased. Therefore, it is possible to provide a highly accurate timepiece that accurately records time. And since the amount of lubricating oil retained can be increased, the maintenance frequency of the watch can be reduced.

  According to the mechanical component according to the present invention, the lubricating oil can be reliably supplied to the sliding surface by holding the lubricating oil in the concave portion of the mechanical component and applying the lubricating oil around the peak portion. Further, when a plurality of peak portions are formed, the lubricating oil can be held between the adjacent peak portions, so that the amount of the lubricating oil retained can be increased. Furthermore, when a plurality of crests are formed along the circumferential direction or the axial direction, the surface area of the sliding surface (outer circumferential surface) of the machine part increases, so that the amount of lubricating oil retained can be further increased. Therefore, the lubricating oil can be reliably supplied to the sliding surface and the lubricating oil can be supplied for a long period of time, so that the frequency of maintenance can be reduced.

  Moreover, when sliding a machine part and another part, it can be made to slide, making a curved-shaped peak part and another member point-contact. Accordingly, the contact area between the machine part and the separate part can be reduced, and the frictional force can be reduced.

  In addition, when another part that slides with the machine part also has the structure of the present invention, it is possible to always perform constant energy transmission by selectively forming the peak.

  Furthermore, since the machine part is formed by electroforming, it has sufficient strength and can make the accuracy of the product uniform. Therefore, the yield can be improved.

FIG. 4 is a plan view of the movement front side of the mechanical timepiece according to the embodiment of the present invention (some parts are omitted and the receiving member is indicated by an imaginary line). It is a schematic fragmentary sectional view which shows the part of the escape wheel from the barrel in the embodiment of the present invention. It is a general | schematic fragmentary sectional view which shows the part of the balance with the escape wheel & pinion in embodiment of this invention. It is a top view showing the third wheel & pinion in the embodiment of the present invention. It is sectional drawing which follows the AA line of FIG. It is a perspective view showing the third wheel in the embodiment of the present invention. It is the B section enlarged view of FIG. It is an expansion perspective view equivalent to the B section of FIG. It is explanatory drawing (1) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is explanatory drawing (2) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is explanatory drawing (3) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is a top view which shows the state of FIG. It is explanatory drawing (4) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is a top view which shows the state of FIG. It is explanatory drawing (1) which shows the manufacturing method of the tooth tip of the 3rd gear in 1st embodiment of this invention. It is explanatory drawing (2) which shows the manufacturing method of the tooth tip of the 3rd gear in 1st embodiment of this invention. It is explanatory drawing (3) which shows the manufacturing method of the tooth tip of the 3rd gear in 1st embodiment of this invention. It is explanatory drawing (4) which shows the manufacturing method of the tooth tip of the 3rd gear in 1st embodiment of this invention. It is explanatory drawing (5) which shows the manufacturing method of the tooth tip of the 3rd gear in 1st embodiment of this invention. It is explanatory drawing (6) which shows the manufacturing method of the tooth tip of the 3rd gear in 1st embodiment of this invention. It is explanatory drawing (7) which shows the manufacturing method of the tooth-tip of the 3rd gear in 1st embodiment of this invention. It is explanatory drawing (5) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is a top view which shows the state of FIG. It is explanatory drawing (6) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is a top view which shows the state of FIG. It is explanatory drawing (7) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is a top view which shows the state of FIG. It is explanatory drawing (8) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is a top view which shows the state of FIG. It is explanatory drawing (9) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is explanatory drawing (10) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is explanatory drawing (11) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is explanatory drawing (12) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is explanatory drawing (13) which shows the manufacturing method of the 3rd gearwheel in 1st embodiment of this invention. It is explanatory drawing (14) which shows the manufacturing method of the 3rd gear in 1st embodiment of this invention. It is explanatory drawing (1) which shows the electroforming process in 1st embodiment of this invention. It is explanatory drawing (2) which shows the electroforming process in 1st embodiment of this invention. It is sectional drawing which shows another aspect of the board | substrate used for manufacture of the 3rd gearwheel in 1st embodiment of this invention. It is sectional drawing which shows another aspect of the board | substrate used for manufacture of the 3rd gear in 1st embodiment of this invention. It is a partial expansion perspective view which shows another aspect of the 3rd gearwheel in 1st embodiment of this invention (The position equivalent to FIG. 8 is shown). It is explanatory drawing which shows another manufacturing method of the 3rd gearwheel in 1st embodiment of this invention (The state just before the 2nd photoresist application process is shown). It is a top view which shows the state of FIG. It is explanatory drawing which shows another manufacturing method of the 3rd gearwheel in 1st embodiment of this invention (The state immediately before an electroforming process is shown). It is a top view which shows the state of FIG. It is a partial expanded sectional view (equivalent to FIG. 7 of 1st embodiment) of the tooth tip of the 3rd gear in 2nd embodiment of this invention. It is a partial expansion perspective view (equivalent to FIG. 8 of 1st embodiment) of the tooth tip of the 3rd gear in 2nd embodiment of this invention. It is explanatory drawing (1) which shows the manufacturing method of the 3rd gearwheel in 2nd embodiment of this invention. It is explanatory drawing (1) which shows the manufacturing method of the tooth tip of the 3rd gear in 2nd embodiment of this invention. It is explanatory drawing (2) which shows the manufacturing method of the tooth tip of the 3rd gear in 2nd embodiment of this invention. It is explanatory drawing (2) which shows the manufacturing method of the 3rd gearwheel in 2nd embodiment of this invention. It is explanatory drawing (3) which shows the manufacturing method of the 3rd gearwheel in 2nd embodiment of this invention. It is explanatory drawing (4) which shows the manufacturing method of the 3rd gearwheel in 2nd embodiment of this invention. It is explanatory drawing (5) which shows the manufacturing method of the 3rd gearwheel in 2nd embodiment of this invention. It is explanatory drawing (6) which shows the manufacturing method of the 3rd gearwheel in 2nd embodiment of this invention. It is a partial expanded sectional view which shows sliding with the other components of the 3rd gear in 2nd embodiment of this invention. It is a partial expanded sectional view which shows sliding with the other components of the 3rd gear in 2nd embodiment of this invention. It is a partial expanded sectional view which shows sliding with the other components of the 3rd gear in 1st embodiment of this invention. It is a partial expanded sectional view which shows sliding with the other components of the number 3 gear in 1st embodiment of this invention. It is a partial expanded sectional view (equivalent to FIG. 45) which shows another aspect (1) of the tooth tip of the 3rd gearwheel in 2nd embodiment of this invention. It is a partial expanded sectional view (equivalent to FIG. 45) which shows another aspect (2) of the tooth tip of the 3rd gear in 2nd embodiment of this invention. It is a partial expanded sectional view (equivalent to FIG. 45) which shows another aspect (3) of the tooth tip of the 3rd gearwheel in 2nd embodiment of this invention. It is a partial expansion perspective view (equivalent to FIG. 46) which shows another aspect (4) of the tooth tip of the 3rd gearwheel in 2nd embodiment of this invention. It is a partial expanded sectional view (equivalent to FIG. 45) which shows another aspect (5) of the tooth tip of the 3rd gearwheel in 2nd embodiment of this invention. It is a partial expansion perspective view (equivalent to FIG. 46) which shows another aspect (5) of the tooth tip of the third gear in 2nd embodiment of this invention. It is sectional drawing explaining another aspect of the manufacturing method of the 3rd gearwheel (electroformed product) in embodiment of this invention. It is a perspective view which shows the state which applied the technique of this invention to the escape wheel.

(First embodiment)
Next, a first embodiment of a mechanical component according to the present invention will be described with reference to FIGS. In the present embodiment, the case of a gear (number wheel) used as a mechanical part in a mechanical timepiece will be described.

(Mechanical watch)
As shown in FIGS. 1 to 3, the movement 100 of the mechanical timepiece has a base plate 102 that constitutes a substrate of the movement 100. A winding stem 110 is rotatably incorporated in the winding stem guide hole 102 a of the main plate 102. The dial 104 (see FIG. 2) is attached to the movement 100. In general, of both sides of the main plate 102, the side on which the dial plate 104 is disposed is referred to as the back side of the movement 100, and the opposite side of the side on which the dial plate 104 is disposed is referred to as the front side of the movement 100. A train wheel incorporated on the front side of the movement 100 is referred to as a front train wheel, and a train wheel incorporated on the back side of the movement 100 is referred to as a back train wheel.

  The position of the winding stem 110 in the axial direction is determined by a switching device including the setting lever 190, the yoke 192, the yoke spring 194, and the back presser 196. The chisel wheel 112 is rotatably provided on the guide shaft portion of the winding stem 110. When the winding stem 110 is rotated in a state where the winding stem 110 is in the first winding stem position (0th stage) closest to the inside of the movement 100 along the rotation axis direction, the rotation of the handwheel is caused. The chic wheel 112 is rotated through. The round hole wheel 114 is rotated by the rotation of the chichi wheel 112. Further, the square hole wheel 116 is rotated by the rotation of the round hole wheel 114. As the square hole wheel 116 rotates, the mainspring 122 (see FIG. 2) accommodated in the barrel complete 120 is wound up.

  The center wheel & pinion 124 is rotated by the rotation of the barrel complete 120. The escape wheel & pinion 130 rotates through the rotation of the fourth wheel 128, the third wheel 126, and the second wheel 124. The barrel wheel 120, the second wheel 124, the third wheel 126, and the fourth wheel 128 constitute a front train wheel.

  The escapement and speed control device for controlling the rotation of the front wheel train includes a balance with hairspring 140, escape wheel 130 and ankle 142. The balance with hairspring 140 includes a balance stem 140a and a hairspring 140c. Based on the rotation of the center wheel & pinion 124, the cylindrical pinion 150 rotates simultaneously. The minute hand 152 attached to the cylindrical pinion 150 displays “minute”. The cylindrical pinion 150 is provided with a slip mechanism for the center wheel & pinion 124. Based on the rotation of the hour pinion 150, the hour wheel 154 rotates through the rotation of the minute wheel. An hour hand 156 attached to the hour wheel 154 displays “hour”.

  The hairspring 140c is a thin leaf spring having a spiral shape having a plurality of winding numbers. An inner end portion of the hairspring 140c is fixed to a hairball 140d fixed to the balance stem 140a, and an outer end portion of the hairspring 140c has a hairspring 170a attached to a hairspring holder 170 fixed to the balance holder 166. It is fixed by screwing. The slow / fast needle 168 is rotatably attached to the balance holder 166. The balance with hairspring 140 is supported so as to be rotatable with respect to the main plate 102 and balance holder 166.

  The barrel complete 120 includes a barrel complete gear 120d, a barrel complete 120f, and a mainspring 122. The barrel complete 120f includes an upper shaft portion 120a and a lower shaft portion 120b. The barrel complete 120f is made of a metal such as carbon steel. The barrel gear 120d is formed of a metal such as brass.

  The center wheel & pinion 124 includes an upper shaft portion 124a, a lower shaft portion 124b, a pinion portion 124c, a gear portion 124d, and an abacus ball portion 124h. The pinion portion 124c of the center wheel & pinion 124 is configured to mesh with the barrel gear 120d. The upper shaft portion 124a, the lower shaft portion 124b, and the abacus ball portion 124h are made of a metal such as carbon steel. The gear portion 124d is formed of a metal such as nickel.

The third wheel & pinion 126 includes an upper shaft portion 126a, a lower shaft portion 126b, a pinion portion 126c, and a gear portion 126d. The pinion 126c of the third wheel & pinion 126 is configured to mesh with the gear portion 124d.
The fourth wheel & pinion 128 includes an upper shaft portion 128a, a lower shaft portion 128b, a pinion portion 128c, and a gear portion 128d. The pinion portion 128c of the fourth wheel & pinion 128 is configured to mesh with the gear portion 126d. The upper shaft portion 128a and the lower shaft portion 128b are formed of a metal such as carbon steel. The gear portion 128d is formed of a metal such as nickel.

  The escape wheel & pinion 130 includes an upper shaft portion 130a, a lower shaft portion 130b, a pinion portion 130c, and a gear portion 130d. The pinion 130c of the escape wheel & pinion 130 is configured to mesh with the gear portion 128d. The ankle 142 includes an ankle body 142d and an ankle true 142f. The ankle true 142f includes an upper shaft portion 142a and a lower shaft portion 142b.

  The barrel complete 120 is rotatably supported with respect to the main plate 102 and the barrel holder 160. That is, the upper shaft portion 120 a of the barrel complete 120 f is supported so as to be rotatable with respect to the barrel holder 160. The lower shaft part 120b of the barrel complete 120f is supported to be rotatable with respect to the main plate 102. The second wheel 124, the third wheel 126, the fourth wheel 128, and the escape wheel 130 are supported rotatably with respect to the main plate 102 and the train wheel bridge 162. That is, the upper shaft portion 124a of the center wheel & pinion 124, the upper shaft portion 126a of the third wheel & pinion 126, the upper shaft portion 128a of the fourth wheel & pinion 128, and the upper shaft portion 130a of the escape wheel & pinion 130 are And is rotatably supported. In addition, the lower shaft portion 124b of the center wheel 124, the lower shaft portion 126b of the third wheel 126, the lower shaft portion 128b of the fourth wheel 128, and the lower shaft portion 130b of the escape wheel 130 are defined with respect to the main plate 102. It is rotatably supported.

  The ankle 142 is rotatably supported with respect to the main plate 102 and the ankle receiver 164. That is, the upper shaft portion 142 a of the ankle 142 is supported so as to be rotatable with respect to the ankle receiver 164. The lower shaft portion 142b of the ankle 142 is rotatably supported with respect to the main plate 102.

  The bearing portion of the barrel holder 160 that rotatably supports the upper shaft portion 120a of the barrel complete 120f, the bearing portion of the train wheel ring 162 that rotatably supports the upper shaft portion 124a of the center wheel & pinion 124, and the third wheel & pinion 126 The bearing portion of the train wheel bridge 162 that rotatably supports the upper shaft portion 126a, the bearing portion of the train wheel bridge 162 that rotatably supports the upper shaft portion 128a of the fourth wheel & pinion 128, and the escape wheel 130 Lubricating oil is injected into the bearing portion of the train wheel bridge 162 that rotatably supports the upper shaft portion 130a and the bearing portion of the ankle receiver 164 that rotatably supports the upper shaft portion 142a of the ankle 142. Further, the bearing portion of the main plate 102 that rotatably supports the lower shaft portion 120b of the barrel complete 120f, the bearing portion of the main plate 102 that rotatably supports the lower shaft portion 124b of the center wheel & pinion 124, and the third wheel 126 A bearing portion of the main plate 102 that rotatably supports the lower shaft portion 126b, a bearing portion of the main plate 102 that rotatably supports the lower shaft portion 128b of the fourth wheel & pinion 128, and a lower shaft portion 130b of the escape wheel 130. Lubricating oil is injected into the bearing portion of the base plate 102 that is rotatably supported and the bearing portion of the base plate 102 that rotatably supports the lower shaft portion 142 b of the ankle 142. This lubricating oil is preferably a precision machine oil, particularly preferably a so-called watch oil.

  In order to improve the retention performance of the lubricating oil, the conical, cylindrical, or frustoconical oil sump is provided on each bearing portion of the main plate 102, the bearing portion of the barrel holder 160, and each bearing portion of the train wheel bridge 162. It is preferable to provide a part. Providing the oil reservoir can effectively prevent the oil from diffusing due to the surface tension of the lubricating oil. The main plate 102, the barrel holder 160, the train wheel bridge 162, and the ankle receiver 164 may be formed of metal such as brass, or may be formed of resin such as polycarbonate.

(Structure of the wheel)
Next, the structure of the number wheel of this embodiment will be described. In addition, since the structure of a number wheel is substantially the same, it demonstrates using the number 3 wheel 126. FIG.

  As shown in FIGS. 4 to 6, the third wheel & pinion 126 includes a third pinion 126f and a third gear 126g. The third kana 126f includes an upper shaft portion 126a, a lower shaft portion 126b, and a kana portion 126c. The third gear 126g includes a center support portion 126h, an amide portion 126j (5 in this embodiment), and a gear portion 126d. The third kana 126f is made of a metal such as carbon steel. The third gear 126g is formed of a metal such as nickel. The third wheel & pinion 126 is fixed by inserting a third pinion 126f through a through hole 126k formed at the center of the third gear 126g.

  Here, as shown in FIGS. 7 and 8, the gear portion 126g has a multilayer structure in which at least three layers 126p, 126q, and 126r are laminated along the axial direction of the third pinion 126f. In the embodiment, the first and third metal layers 126p and 126r are made of the same material, and the second metal layer 126q is made of a material different from that between the first and third metal layers. The outer shape of the second metal layer 126q is smaller than the outer shapes of the first and third metal layers 126p and 126r. The outer peripheral surface of the second metal layer 126q is set back from the outer shape of the third gear 126g. Therefore, the third gear 126g has a concave portion 126n that is not opened in the axial direction of the third pinion 126f over the entire outer periphery 126e of the third gear 126g in the present embodiment at least a part of the sliding surface. Have. Further, the shape of the sliding surface of the tooth tip 126i of the gear portion 126d (the portion meshed with the pinion portion 128c of the fourth wheel & pinion 128) is the axial direction of the third pinion 126f on the first and third metal layers 126p and 126r. A plurality of curved ridges 126m are formed along the ridge, and the ridges 126m abut against the kana 128c.

  A thickness T0 of the third gear 126g is, for example, not less than 10 μm and not more than 10 mm. The thickness T1 of the first metal layer 126p and the thickness T3 of the third metal layer 126r are 1 μm or more and 900 μm. The thicknesses T1 and T3 do not have to be the same value. The thickness T2 of the second metal layer 126q is set to 500 nm to 500 μm. The depth D1 of the recess 126n is 1 μm to 1 mm. Further, the width W1 in the axial direction of one peak portion 126m is, for example, not less than 1 μm and not more than 10 mm. The cross-sectional shape of the mountain portion 126m is substantially an arc, and its radius R1 is approximately half of W1. The number of peak portions 126m is 1 or more and 10,000 or less.

(Manufacturing method of the wheel)
Next, the manufacturing method of the number wheel (third gear 126g) of this embodiment will be described.
9 to 37 are views for explaining a method of manufacturing the third gear 126g.

FIG. 9 shows the substrate 10 for forming the third gear 126g. The substrate 10 is an SOI (Silicon On Insulator) substrate in which a BOX layer 10c is sandwiched between a support layer 10a and an active layer 10b. The support layer 10a and the active layer 10b are silicon (Si), and the BOX layer 10c is silicon dioxide. It is made of (SiO ₂ ). The thickness of the support layer 10a is set to 100 μm or more and 1 mm or less so that damage or deformation does not occur in a subsequent process. The thickness of the active layer 10b is not less than the thickness T0 of the third gear 126g to be manufactured. The thickness of the BOX layer 10c is 1 μm or more and 1 mm or less. In addition to the SOI substrate, a substrate (see FIG. 38) in which a metal material is sandwiched between Si of the support layer 10a and Si of the active layer 10b, or a metal material is used for the support layer 10a, and the active layer 10b is formed thereon. The third gear 126g can be manufactured even with a substrate having Si (see FIG. 39). This manufacturing method will be described later.

  FIG. 10 is a view in which a photoresist 11 is applied. A photoresist 11 is deposited on the active layer 10b. The photoresist 11 may be a negative type or a positive type, but will be described using a negative type. The thickness of the photoresist 11 is 1 μm or more and 1 mm or less.

  FIG. 11 shows the photoresist 11 exposed and developed. Using a photomask (not shown) in which a pattern of the tooth tip 126i of the third gear 126g is formed, a portion corresponding to the tooth tip 126i of the third gear 126g is irradiated with exposure light such as ultraviolet rays or X-rays. The photoresist 11 in the region corresponding to the outer side in the radial direction of the third gear 126g is cured. Then, the uncured photoresist 11 portion is removed to complete the etching pattern. FIG. 12 is a partial plan view of FIG. As shown in FIG. 11, the photoresists 11 corresponding to the adjacent tooth tips 126i are not connected but are left independently.

  FIG. 13 is a view obtained by etching the active layer 10b. The Si of the active layer 10b is etched to the surface of the BOX layer 10c, leaving the photoresist 11 portion. Here, in the present embodiment, the active layer 10b is formed so that a plurality of trough portions 15 corresponding to the crest portions 126m having a substantially semicircular cross section formed along the axial direction of the tooth tips 126i are connected. FIG. 14 is a partial plan view of FIG.

  Here, a method of etching while continuously forming the valleys 15 in the active layer 10b will be described with reference to FIGS.

  FIG. 15 is a partially enlarged view showing the state of FIG. In FIG. 15, two photoresists 11 at positions corresponding to the tooth tips 126i are displayed.

  FIG. 16 is a diagram for explaining the first Si etching step. The thickness of Si to be shaved in one Si etching process is W1. Here, a recess 14 is formed between adjacent photoresists 11. The exposed portion of the Si surface without the photoresist 11 is etched, but by performing isotropic etching, the side surface 17 of the active layer 10b under the photoresist 11 is also partially etched, Part 15 is formed. By controlling the etching thickness W1, the radius R1 of the valley portion 15 of the side surface 17 corresponding to the tooth tip 126i of the third gear 126g can be set to an arbitrary size. One trough 15 corresponding to one crest 126m is formed by one etching.

FIG. 17 is a diagram in which a protective film is formed. A protective film 19 is formed on the first etching surface (recess 14) so that the active layer 10b under the photoresist 11 is not etched more than the state of FIG. 16 by the second etching. The protective film 19 is made of, for example, fluorocarbon. The protective film 19 is formed on the surface of Si by CVD using C ₄ F ₈ gas or the like.

FIG. 18 is a view in which only the protective film 19 on the bottom surface 21 of the recess 14 is removed. The protective film 19 on the side surface (side surface 17) of the recess 14 is left, and only the protective film 19 on the bottom surface 21 is removed to expose the active layer 10b (Si surface). In order to remove only the protective film 19 on the bottom surface 21 in this way, for example, when etching is performed using SF ₆ gas, ions collide with the protective film 19 on the bottom surface 21 from the vertical direction, and the bottom surface is caused by the ion bombardment. Only the protective film 19 is removed.

  FIG. 19 is a diagram for explaining the second Si etching step. Similar to FIG. 16, isotropic etching of Si is performed. Then, Si on the bottom surface 21 where the protective film 19 is not formed is isotropically etched. Thereafter, the steps of FIGS. 17 to 19 are performed a predetermined number of times.

FIG. 20 shows a BOX layer (SiO ₂ surface) for Si etching, protection film formation, and bottom surface protection film removal.
It is the figure repeated until it reached | attained the surface of 10c. The Si etching step in FIG. 16, the protective film forming step in FIG. 17, and the protective film removing step in FIG. 18 are repeated until the BOX layer 10c of the substrate 10 is reached (in this embodiment, it is repeated nine times). Then, a plurality (nine) of valleys 15 are formed on the side surface 17 of the active layer 10b.

  FIG. 21 is a view in which all of the protective film 19 is removed. The protective film 19 is removed by oxygen plasma ashing. The protective film 19 formed on the side surface 17 of the active layer 10b is removed. FIG. 21 shows the same state as FIG.

  FIG. 22 is a view in which the photoresist 11 is removed. The photoresist 11 is removed by etching or physical force. This step may be omitted if there is no problem with a later step. FIG. 23 is a plan view of FIG.

  FIG. 24 is a diagram in which electrodes are formed. An electrode 23 is formed on the substrate 10 (BOX layer 10c) by vapor deposition or the like. The electrode 23 is formed of chromium (Cr), gold (Au), copper (Cu), titanium (Ti), or the like. The thickness of the electrode 23 is 10 nm or more and 10 μm or less. FIG. 25 is a plan view of FIG. As shown in FIG. 25, the electrode 23 is formed so as to be integrally connected.

  FIG. 26 is a view in which a photoresist 25 is applied. A photoresist 25 is deposited on the electrode 23. The photoresist 25 may be a negative type or a positive type, but will be described using a negative type. The photoresist 25 is formed thicker than the thickness T0 of the third gear 126g. FIG. 27 is a plan view of FIG.

  FIG. 28 shows the photoresist 25 exposed and developed. Using a photomask (not shown) in which the pattern of the entire third gear 126g is formed, the photoresist 25 is irradiated with exposure light such as ultraviolet rays and X-rays, and the portion other than the portion used for electroforming the third gear 126g. The photoresist 25 is cured. The uncured photoresist 27 portion is removed, and the electroforming mold 31 is completed. FIG. 29 is a plan view of FIG. The photoresist 25b at the position corresponding to the through hole 126k of the third gear 126g remains.

FIG. 30 is a diagram illustrating an electroforming process. A first electroformed product 33 is deposited on the electrode 23 so as to have a thickness T1. Electroforming materials include nickel (Ni), cobalt (Co), platinum (Pt), rhodium (Rh), Cr, palladium (Pd), and other metals, alloys such as Ni-W and Ni-B, Composite in which metal matrix is co-deposited with ceramics such as alumina (Al ₂ O ₃ ) and silicon carbide (SiC), resin such as polytetrafluoroethylene (PTFE), and other organic or inorganic particles or fibers Is mentioned.

  FIG. 31 is a diagram illustrating an electroforming process. A second electroformed product 34 is deposited on the first electroformed product 33 so as to have a thickness T2. Note that the sum of the thicknesses T1 and T2 is smaller than the thickness T0. Electroforming materials include metals such as Cu, Au, zinc (Zn), silver (Ag), iron (Fe), tin (Sn), alloys such as Cu-Au, Cu-Ag, or the metal matrix. And composites in which the particles or fibers are co-deposited.

  FIG. 32 is a diagram illustrating an electroforming process. A third electroformed product 35 is deposited on the second electroformed product 34 so as to have a thickness T3 or more. However, when the grinding / polishing step shown in FIG. 33 is omitted, the third electroformed product 35 is deposited to a thickness T3. The material to be electroformed is the same as that of the first electroformed product 33. The material of the first electroformed product 33 and the third electroformed product 35 need not be the same. However, after that, in the recess forming step shown in FIG. 35, the second electroformed product 34 is etched to form the recessed portion 126n. Therefore, a combination of materials that can selectively etch only the second electroformed product 34, or an etching rate. Adopt a combination of materials with a difference of.

  As shown in FIGS. 36 and 37, the electroforming process is performed by immersing the electroforming mold 31 in which the electrode 23 is formed in the electroforming liquid 41 in a state of being attached to the jig 42, and between the anode 43 and the electrode 23. A power source 44 is disposed on the electrode 23 and a voltage is applied to deposit a metal (first electroformed product 33 in FIG. 37) on the surface of the electrode 23.

  FIG. 33 is a diagram illustrating a grinding / polishing process. By grinding, the third electroformed product 35 and the photoresist 25 are shaved so that the total thickness T1, T2, and T3 of the electroformed product becomes the thickness T0 of the third gear 126g. Further, polishing is performed to finish the surface of the third electroformed product 35 into a mirror surface.

  FIG. 34 is a view of the first, second and third electroformed products 33, 34 and 35 (third gear 126g) taken out. The substrate 10, the photoresist 25, and the electrode 23 are removed by etching or physical force, and the first, second, and third electroformed products 33, 34, and 35 (third gear 126g) are taken out. Note that Si of the support layer 10a and the active layer 10b may be removed by being dissolved in an etching solution.

  FIG. 35 is a diagram for explaining a recess forming step. The second electroformed product 34 is etched, and the third gear 126 g is immersed in a solution that does not etch the first and third electroformed products 33 and 35. Only the second electroformed product 34 is etched to form a recess 126n having a depth D1. As an example, when Ni is deposited on the first and third electroformed products and Cu is deposited on the second electroformed product, only Cu can be etched by using an ammonium persulfate solution as an etchant.

  The third gear 126g manufactured in this way has a recess 126n on the outer peripheral surface 126e of the gear. With this configuration, the lubricating oil is held in the recess 126n, and when the third gear 126g and the pinion portion 128c are engaged with each other, the lubricating oil can be reliably supplied to the sliding portion. In addition, the tooth top 126i of the gear has a plurality of curved ridges 126m along the axial direction. By comprising in this way, since the surface area of the tooth top 126i increases, the retention amount of lubricating oil can be increased. Moreover, it becomes possible to hold | maintain lubricating oil between the adjacent peak parts 126m, and the outflow of lubricating oil can be prevented. Further, since the lubricating oil is held between the adjacent peak portions 126m, the lubricating oil is reliably supplied by the sliding surface with the pinion portion 128c. Therefore, energy loss when the third gear 126g and the pinion portion 128c mesh with each other is reduced, and the swing angle of the balance with hairspring 140 is increased. Therefore, it is possible to provide a highly accurate timepiece that accurately records time. And since the amount of lubricating oil retained can be increased, the maintenance frequency of the watch can be reduced.

  Further, with this configuration, when the tooth tip 126i of the third gear 126g and the pinion portion 128c are engaged with each other, the peak portion 126m and the pinion portion 128c of the fourth wheel & pinion 128 come into point contact, and the peak portion 126m Since the contact area with the kana portion 128c can be reduced, the frictional force can be reduced and the wear resistance is improved. Since the third gear 126g is formed by electroforming, it has sufficient strength.

  Further, by manufacturing the third gear 126g by the above-described manufacturing method, a third wheel 126g having a recess 126n over the entire outer periphery 126e of the gear and a plurality of crests 126m on the tooth tip 126i is obtained by electroforming. It can be formed easily.

  Next, another manufacturing method of the number wheel (third gear 126g) will be described.

  FIG. 38 is a cross-sectional view of a substrate used when manufacturing the third gear 126g. As shown in FIG. 38, the substrate 50 is a substrate in which a metal layer 50c is formed between Si of the support layer 50a and Si of the active layer 50b. The metal layer 50c is made of Cr, Au, Cu, Ti, or the like. The thickness of Si of the support layer 50a is 100 μm or more and 1 mm or less, as in the case described above. The thickness of Si of the active layer 50b is not less than the thickness T0 of the third gear 126g to be manufactured. The thickness of the metal layer 50c is 1 μm or more and 1 mm or less.

  By using such a substrate 50, the metal layer 50c is exposed when the above-described process of FIG. 13 is completed, so that it can be used as an electrode in the subsequent electroforming process. In addition, since the electrode forming step shown in FIG. 23 is not necessary, the production efficiency can be improved.

  As shown in FIG. 39, the third gear 126g can be manufactured by a similar process even on a substrate 55 in which a metal material is used for the support layer 55a and the Si of the active layer 55b is formed thereon. The metal material is composed of Cr, Au, Cu, Ti, or the like. The thickness of the support layer 55a is not less than 100 μm and not more than 1 mm, and the thickness of Si of the active layer 55b is not less than the thickness T0 of the third gear 126g to be manufactured. Even when such a substrate 55 is used, the production efficiency can be improved as described above.

  Here, when manufacturing the third gear 126g using the substrate 50 or the substrate 55 described above, as shown in FIG. 40, not only the tooth tip 126i but also the mountain portion 126m is formed over the entire circumference of the outer peripheral surface 126e. can do. Thus, when forming a crest on the entire circumference of the outer peripheral surface 126e, only the photoresist 25 at a position corresponding to the third gear 126g is removed, and the photoresist 25 in other regions remains. When the substrate 10 is used, the electrode 23 is isolated and cannot be electrically connected to the electrode 23 and cannot be electroformed. However, when the substrate 50 or 55 is used, as shown in FIG. 41, when only the active layer 50b or 55b at the position corresponding to the third gear 126g is removed, the metal layer 50c or 55a that functions as the electrode 23 is removed. Since the metal layers 50c and 55a are formed integrally with the substrates 50 and 55, they can be electrically connected, and the third gear 126g can be manufactured by electroforming. FIG. 42 is a plan view of FIG.

  By forming the peak portion 126m over the entire circumference of the outer peripheral surface 126e in this way, the amount of lubricating oil retained can be further increased, so that the sliding surface can be more reliably and over a long period of time. Lubricating oil can be supplied.

  Further, by using the substrate 50 or the substrate 55, the metal layers 50c and 55a can be used as electrodes, and the step of forming the electrodes after etching the active layers 50b and 55b can be omitted. Therefore, production efficiency can be improved.

  Further, by using the substrate 50 or the substrate 55, the third gear 126g can be manufactured with one photomask. When the photoresist 11 is exposed and developed using a photomask (not shown) in which the entire shape of the third gear 126g is formed, and the active layer 50b or 55b is etched, as shown in FIG. 43, the third gear 126g. And the active layer 50b or 55b at a position corresponding to the through hole 126k remains. Then, the metal layer 50c or 55a that functions as the electrode 23 is exposed, and since the metal layers 50c and 55a are formed integrally with the substrates 50 and 55, they can be electrically connected. The gear 126g can be manufactured. As described above, in the present embodiment, the third gear 126g is manufactured using a single photomask, so that there is no mask alignment error and the dimensional accuracy can be improved.

  Further, the dimensional accuracy can be improved, and the step of forming electrodes after etching the active layers 50b and 55b and the step of applying the photoresist 25, exposing and developing can be omitted. Therefore, production efficiency can be improved.

  Then, the second wheel 124, the fourth wheel 128, the escape wheel 130, the square wheel 116, and the barrel wheel 120d, which are assembly parts of the watch, are manufactured by using the manufacturing method described above, and a recess is formed on the outer peripheral surface. Thus, it is possible to reliably supply the lubricating oil to the sliding portion between each machine part and another part (for example, a wheel or the like) that meshes with each other when the machine part rotates. Further, by forming a crest on the tooth tip or the outer peripheral surface, each mechanical component and another component that meshes with each other when the mechanical component rotates are brought into point contact, and wear resistance is improved.

  Furthermore, since the surface area of the sliding surface (outer peripheral surface) is increased by forming a plurality of crests on the tooth tip or the outer peripheral surface, the amount of lubricating oil retained can be increased. Moreover, it becomes possible to hold | maintain lubricating oil between adjacent peak parts, and the outflow of lubricating oil can be prevented. Further, since the lubricating oil is held between the adjacent peaks, the lubricating oil is reliably supplied from the sliding surface. Therefore, energy loss when the gears mesh with each other is reduced, and the swing angle of the balance with hairspring 140 is increased. Therefore, it is possible to provide a highly accurate timepiece that accurately records time. And since the amount of lubricating oil retained can be increased, the maintenance frequency of the watch can be reduced.

  In addition, since these assembly parts are formed by electroforming, they have sufficient strength.

(Second embodiment)
Next, a second embodiment of the machine part according to the present invention will be described with reference to FIGS. This embodiment is different from the first embodiment only in the shape of the tooth tip of the gear (third gear), and the other parts are substantially the same as those in the first embodiment. A detailed description is omitted with reference numerals. Further, the number of the third gear in this embodiment is 226 g.

  As shown in FIGS. 45 and 46, the gear portion 226g has a multilayer structure in which at least three layers 226p, 226q, and 226r are laminated along the axial direction of the third pinion 226f. The first and third metal layers 226p and 226r made of the same material, and the second metal layer 226q made of a material different from those sandwiched between the first and third metal layers. The outer shape of the second metal layer 226q is smaller than the outer shapes of the first and third metal layers 226p and 226r. The outer peripheral surface of the second metal layer 226q is set back from the outer shape of the third gear 226g. Therefore, the third gear 226g is provided with a recess 226n that is not opened in the axial direction of the third pinion 226f over the entire circumference of the outer peripheral surface 226e of the third gear 226g in at least a part of the sliding surface. Have. Further, the sliding surface of the tooth tip 226i of the gear portion 226d is formed such that a plurality of curved ridges 226m are formed in the third metal layer 226r along the axial direction of the third pinion 226f, and the ridge 226m is formed. It is configured to contact the kana portion 128c. The thickness of the metal layer, the depth of the recesses, the width of the peaks, the radius, and the number are the same as in the first embodiment.

  Next, the manufacturing method of the number wheel (third gear 226g) of this embodiment will be described. In the present embodiment, the steps different from those in the first embodiment will be mainly described.

  First, the substrate 10 for forming the third gear 226g is substantially the same as that shown in FIG. Then, a photoresist 11 is applied on the active layer 10 b of the substrate 10. Subsequently, the photoresist 11 is exposed and developed, and the photoresist 11 in a region corresponding to the tooth tip 226i of the third gear 226g and a region corresponding to the radially outer side of the third gear 226g is cured. Subsequently, the uncured photoresist 11 is removed to complete an etching pattern as shown in FIG.

  FIG. 47 is a diagram obtained by etching the active layer 10b. The Si of the active layer 10b is etched to the surface of the BOX layer 10c, leaving the photoresist 11 portion. Here, in the present embodiment, the trough portion 115 corresponding to the peak portion 226m having a substantially semicircular cross section formed in the active layer 10b along the axial direction of the tooth tip 226i corresponds to the third metal layer 226r. It is formed in the part.

  A method of etching the active layer 10b into the shape shown in FIG. 47 will be described with reference to FIGS.

  FIG. 48 is a step of etching while continuously forming the valley portion 115 in the active layer 10b described in FIGS. 15 to 19, and forming the valley portion 115 in a portion corresponding to the mountain portion 226m of the third metal layer 226r. It is the figure which formed the protective film 19 (other embodiment).

FIG. 49 is a view in which Si etching is performed until the BOX layer (SiO ₂ surface) 10c is reached. By performing anisotropic etching, the side surface 17 of the active layer 10b corresponding to the first and second metal layers 226p and 226q is formed perpendicularly to the substrate 10 until the BOX layer 10c is reached without forming the valley 115. Etch Si.

  Thereafter, the electroforming mold 31 shown in FIG. 50 is manufactured by the same method as that shown in FIGS. 22 to 29 of the first embodiment.

  FIG. 51 is a diagram illustrating an electroforming process. A first electroformed product 133 is deposited on the electrode 23 so as to have a thickness of T1. The material for electroforming is the same as in the first embodiment.

  FIG. 52 is a diagram illustrating an electroforming process. A second electroformed product 134 is deposited on the first electroformed product 133 to a thickness T2. Note that the sum of the thicknesses T1 and T2 is smaller than the thickness T0. The material for electroforming is the same as in the first embodiment.

  FIG. 53 is a diagram for explaining an electroforming process. A third electroformed product 135 is deposited on the second electroformed product 134 so as to have a thickness T3 or more. The material for electroforming is the same as in the first embodiment.

  Thereafter, an electroformed product (third gear 226g) shown in FIG. 54 is manufactured by the same method as that shown in FIGS. 33 to 35 of the first embodiment. FIG. 54 corresponds to FIG. 35 of the first embodiment.

  The third wheel 226g manufactured in this manner has a concave portion 226n on the outer peripheral surface 226e of the gear, and a plurality of curved peaks formed on the third metal layer 226r along the axial direction of the third pinion 226f. Part 226m. That is, the peak portion 226m formed in the third metal layer 226r is configured to abut on the kana portion 128c.

  With this configuration, substantially the same operational effects as in the first embodiment can be obtained, and when the pinion portion 228c of the fourth wheel & pinion 228 that contacts the third gear 226g is manufactured in this embodiment, Sliding between the number gear 226g and the kana portion 228c can be performed stably. That is, when the pinion portion 128c that contacts the third gear 126g of the first embodiment is manufactured in the first embodiment, as shown in FIGS. 57 and 58, the peak portion 126m and the peak portion 128m slide. At this time, as shown in FIG. 57, when the tops of the mountain portions 126m and 128m slide, the contact area is minimized, so that energy loss due to friction is small. However, when the contact position is deviated and sliding is performed at a position deviated from the top, the energy transfer may be different from the state shown in FIG. In particular, as shown in FIG. 58, when the top part enters between the ridges of the other party, the contact area increases and energy loss due to friction increases. In other words, since the swing angle of the balance with hairspring 140 becomes small, the accuracy of the timepiece deteriorates. On the other hand, as shown in FIGS. 55 and 56, when the gears 226g and 228c of the second embodiment come into contact with each other, the first metal layer not forming the peak and the third metal layer forming the peak are applied. If contact is made, the contact area does not change even if the contact position shifts in the axial direction, so that stable energy transmission can be performed. That is, the accuracy of the watch is stabilized.

  Note that the present invention is not limited to the above-described embodiment, and includes various modifications made to the above-described embodiment without departing from the spirit of the present invention. That is, the specific shapes, configurations, and the like given in the embodiment are merely examples, and can be changed as appropriate.

  For example, as shown in FIG. 59, in each metal layer forming the peak, only the peak 326m on both sides in the axial direction may be formed so as to protrude from the other peak. That is, a plurality of peak portions 226m may be formed so that the central portion in the axial direction is concave. By comprising in this way, since lubricating oil can be hold | maintained at the recessed part, the holding | maintenance amount of lubricating oil can be ensured more. Further, as shown in FIG. 60, in each metal layer, only the peak portion 326m at the central portion in the axial direction is formed so as to protrude from the other peak portions, or as shown in FIG. A plurality of peak portions 326m having different widths may be formed so that the width of the peak portion 326m increases toward the head. With this configuration, the contact area between the third gear 326g and the pinion portion 128c of the fourth wheel & pinion 128 can be minimized, so that energy loss due to friction during sliding can be reduced.

  Further, as shown in FIG. 62, the gear tooth tip 426i is shaped such that a plurality of protrusions 426z are formed at substantially equal intervals in the circumferential direction, and a plurality of peak portions 426m are formed in the axial direction. May be. With this configuration, the gear 426g and the pinion portion 128c of the fourth wheel & pinion 128 come into point contact, and the lubricating performance can be further improved.

  Moreover, although the above-mentioned embodiment demonstrated the case where the metal layer was three layers, there may be three or more metal layers. 63 and 64 show the case where there are five metal layers. The gear portion 526g has a multilayer structure in which five layers 526p, 526q, 526r, 526s, and 526t are stacked along the axial direction of the third pinion 526f. For example, in the present embodiment, the first, The third and fifth metal layers 526p, 526r, and 526t, and the second and fourth metal layers 526q and 536s made of different materials between the first, third, and fifth metal layers. The outer shapes of the second and fourth metal layers 526q and 526s are smaller than the outer shapes of the first, third and fifth metal layers 526p, 526r and 526t. The outer peripheral surfaces of the second and fourth metal layers 526q and 526t are set back from the outer shape of the third gear 526g. Therefore, the third gear 526g has a recess 526n that is not opened in the axial direction of the third pinion 526f over the entire circumference of the outer peripheral surface 526e of the third gear 526g in at least a part of the sliding surface. Have multiple. Further, the shape of the sliding surface of the gear tip 526i of the gear portion 526d (the portion that meshes with the pinion portion 128c of the fourth wheel & pinion 128) is third in the first, third, and fifth metal layers 526p, 526r, and 526t. A plurality of curved ridges 526m are formed along the axial direction of the kana 526f, and the ridges 526m are configured to contact the kana 128c. With this configuration, the amount of lubricating oil retained increases due to having a plurality of recesses, and the lubricating oil retaining portions are widely distributed in the axial direction, so that the lubricating oil is more reliably supplied to the sliding portions. be able to.

  Moreover, in this embodiment, although the case where the peak part was formed only in the tooth tip and outer peripheral surface of the gear was explained, the inner peripheral surface of the through hole through which the kana part formed in the gear part is inserted (fitted) Also, a similar peak portion may be formed. By forming the peak portion on the inner peripheral surface of the through hole of the gear portion, stress can be relieved when the kana portion is fitted.

  Moreover, in this embodiment, although the case where a peak part was formed along the circumferential direction on the sliding surface of a gearwheel was demonstrated, if the method demonstrated in the said embodiment is used, the peak part extended in an axial direction will be manufactured. Of course you can.

Further, for example, after the step shown in FIG. 35 or 54 in the above embodiment, plating may be performed with a coating film 99 as shown in FIG. As a material for the coating film 99, a metal such as Ni, Cr, Rh, or Au, an alloy such as Ni—W or Ni—Co, or a composite such as Ni—Al ₂ O ₃ or Ni—PTFE should be adopted. Can do. The thickness of the coating film 99 is about 100 nm to 100 μm. In particular, when it is desired to improve the sliding performance, wear-resistant plating such as Cr, Ni-W, Ni-SiC, or lubrication plating such as Au or Ni-PTFE may be performed. The plating may be either electroless or electrolytic, and a metal film or a ceramic film may be formed by a technique such as ion plating or sputtering. Thus, by plating the electroformed products 33 to 35 with the coating film 99, the functions of the electroformed products 33 to 35 (gears) such as corrosion resistance, wear resistance, and decorativeness can be improved.

  In the present embodiment, the case of the third gear has been described, but as shown in FIG. 66, a recess 130n is formed on the peripheral surface of the gear portion 130d of the escape wheel 130, and a crest 130m is formed at the tip. It may be formed. In addition, you may form the peak part 130m in the surrounding surface of the gear part 130d like the said embodiment. In addition, the shape of the peak may be any one of the above-described embodiments.

DESCRIPTION OF SYMBOLS 10 ... Board | substrate 11 ... Photoresist (1st mask material) 14 ... Recessed part 17 ... Side surface 19 ... Protective film 21 ... Bottom surface 23 ... Electrode 25 ... Photoresist (second mask material) 33 ... 1st electroforming 34 ... 2nd 35 ... 3rd electroformed product 50 ... Substrate 50c ... Metal layer 55 ... Substrate 55c ... Metal layer 116 ... Square hole wheel 120d ... Hour wheel gear 124 ... Second wheel (wheel) 126 ... Third wheel (gear, No. wheel) 126f ... No. 3 pinion (shaft) 126e ... Outer peripheral surface 126g ... No. 3 gear (mechanical part) 126i ... Addendum (sliding surface, addendum portion) 126m ... Mountain portion 126n ... Concave portion 126p ... First Metal layer 126q ... Second metal layer 126r ... Third metal layer 128 ... Fourth wheel (wheel) 128c ... Kana portion (separate parts) 130 ... escape wheel

Claims (5)

A method of manufacturing a mechanical component having a sliding surface that can slide with another component using a substrate composed of a plurality of layers,
Forming a first mask material including an outline of a position corresponding to the sliding surface in a region other than the formation region of the mechanical component in the upper layer of the substrate;
An etching step of isotropically etching the upper layer to a predetermined depth using the first mask material;
A protective film forming step of forming a protective film on the bottom and side surfaces of the recess formed by the isotropic etching;
A protective film removing step of removing the protective film formed on the bottom surface of the recess;
Repeating the etching step, the protective film forming step and the protective film removing step to expose a lower layer of the substrate;
An electroformed product forming step of depositing at least two kinds of material layers on the surface of the lower layer by electroforming;
Removing the substrate including the upper layer remaining in a position corresponding to the sliding surface;
And a step of selectively removing a part of the side surface between the upper surface and the lower surface of the material layer. The mechanical part is a gear, and the sliding surface is a tooth tip portion of the gear;
The first mask material is formed so as to include only a position corresponding to the tooth tip portion on the outer peripheral surface of the machine part in the outline,
Before the electroformed product forming step, the second mask material forming step of forming a second mask material in a region other than the formation region of the mechanical part and the first mask material,
The method of manufacturing a machine part according to claim 1, wherein, in the electroformed product forming step, the electroformed product is formed in a formation region of the machine component using the second mask material. The mechanical component has a through hole into which a shaft member can be fitted;
3. The method of manufacturing a machine part according to claim 1, wherein, in the step of forming the first mask material, the first mask material is formed in a formation region of the through hole. The substrate includes a metal layer in the lower layer,
The method for manufacturing a machine part according to any one of claims 1 to 3, wherein, in the electroformed product forming step, the electroformed product is formed using the metal layer as an electrode. The substrate is an SOI substrate having a buried oxide film layer in the lower layer,
A step of forming a metal layer on the surface of the buried oxide layer before the second mask material forming step;
5. The method of manufacturing a machine part according to claim 1, wherein, in the electroformed product forming step, the electroformed product is formed using the metal layer as an electrode.

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