JP6495058B2 - Electroformed part and method for producing electroformed part - Google Patents

Description

  The present invention relates to a machine part having a sliding part, and more particularly to an electroformed part suitable as a part of a small precision machine such as a watch and a manufacturing method thereof.

  In a mechanical timepiece that is one of small precision machines, gears that are mechanical parts having a sliding portion are often used. These parts are formed in various shapes according to applications, and transmit power by combining them in a complicated manner. For example, a metal escape wheel that is one of the gears of a mechanical watch has a claw stone made of a material with high hardness such as ruby or ceramic attached to the ankle corresponding to a pendulum against the side surface of the tooth tip. Since it slides at high speed, wear is significant due to the friction generated between them. Therefore, in order to reduce friction as much as possible, it is necessary to always apply lubricating oil to the sliding portion and its vicinity. On the other hand, in order to prevent the diffusion of the lubricating oil to unnecessary portions, it is necessary to hold the lubricating oil at the sliding portion and the vicinity thereof.

  Under such circumstances, the escape wheel can reduce the friction with the claw stone by locally holding the lubricating oil at the tips of the plurality of tooth portions having a saddle type structure formed in the gear portion. An escape wheel has been devised (see, for example, Patent Document 1). In this escape wheel, a step for reducing the thickness of the tip of the tooth portion is formed, and it is possible to hold the lubricating oil by using a boundary surface that is a boundary between portions having different thicknesses.

  Furthermore, a method has been devised in which a plurality of holes for holding lubricating oil are formed in a side wall portion serving as a sliding portion such as a gear (see, for example, Patent Document 2). In this method, by providing a plurality of holes in the thickness direction of the escape gear serving as the sliding portion, the lubricating oil is held in the holes. In addition, an electroforming method using a photolithography method is adopted as a method for forming the hole. In this step, insoluble beads are mixed in a developer for forming a hole in the photoresist, and the photoresist development is performed. Thereafter, irregularities due to beads appearing on the wall surface of the photoresist remaining portion in the photoresist opening are transferred by electroforming.

Special table 2007-506073 JP 2010-261064 A

  However, in the sliding of a gear or the like provided with a step, since the lubricating oil is held around the boundary surface, the amount of lubricating oil differs between the portion close to the boundary surface and the portion away from it, Lubricating oil was not evenly distributed evenly in the thickness direction of the tooth tip, which was a necessary part. For this reason, the frictional resistance may vary, which may lead to uneven wear.

  In addition, in the method of forming a plurality of holes in the side wall of the gear serving as the sliding portion, the amount of lubricating oil that is retained is only the holes, so the amount is limited, and is consumed and disappears by driving over a long period of time. This would increase the friction of the sliding part, and the effect might be limited. In addition, since different bead materials are mixed in the photoresist in the production, the resolution at the time of exposure of the photoresist and the reattachment to the opening of the photoresist due to the contamination of the developer due to the drop-off of the beads at the time of development, etc. There was a problem that there was a concern about the adverse effect on the opening pattern of the photoresist.

  The present invention has been made in view of the above circumstances, and can uniformly hold the lubricating oil on the side wall serving as the sliding portion of the sliding component such as a gear, and further supply the lubricating oil to the side wall portion. An object of the present invention is to provide an electroformed part that can be used.

The present invention employs the following means in order to solve the above problems.
The electroformed component according to the present invention is an electroformed component formed to a predetermined thickness by electroforming, and has a sliding surface in which at least a part of the thickness direction serves as a sliding portion, and the sliding surface It is characterized in that a streak-like uneven portion is provided in a direction perpendicular to the sliding direction of the above and a recessed portion capable of holding lubricating oil is provided.

The electroformed component according to the present invention is characterized in that a mean square roughness with respect to a sliding direction of the uneven portion is 50 nm to 500 nm.
The electroformed component according to the present invention is characterized in that a surface different from the sliding surface is in a satin state having a surface roughness larger than that of the sliding surface.

The electroformed component according to the present invention is characterized in that the electroformed component has a recess connected to the uneven portion on a surface different from the sliding surface.
The electroformed component according to the present invention comprises an escape wheel portion having a plurality of hook-shaped teeth, and an ankle claw stone slides on the sliding surface provided on the teeth. To do.

  The method for producing an electroformed component according to the present invention includes a sliding surface that is formed to a predetermined thickness by electroforming, and at least a part of the thickness direction serves as a sliding portion, and the sliding direction of the sliding surface A method of manufacturing an electroformed part having a concave portion capable of holding a lubricating oil by providing streaky concave and convex portions in a direction perpendicular to a first photoresist on a conductive film formed on a substrate A first application step of applying a layer to a predetermined thickness; a first exposure step of partially exposing the first photoresist layer through a first photomask; and an upper surface of the first photoresist layer. A second coating step of applying a second photoresist layer to a predetermined thickness, and a second exposure step of partially exposing the first photoresist layer and the second photoresist layer through a second photomask. An exposure step; and the exposed first photoresist layer and A developing process for developing the second photoresist layer to expose the conductive film and forming an electroforming mold having an opening having an outer shape of the electroformed component; and immersing the electroforming mold in a plating solution A plating step of energizing to form a plating layer on the conductive film, and a metal that immerses the whole in an electroforming solution and energizes to deposit metal on the plating layer and at least completely closes the opening. A thickness adjustment that adjusts the thickness so that the metal body overflowing from the opening and the thickness of the remaining metal body become the thickness of the electroformed component A method for producing an electroformed component, comprising: a step; and a removing step of removing the photoresist layer and the plating layer to obtain an electroformed component.

  According to the present invention, the uniform lubricating oil can be held on the side surface serving as the sliding portion, and at the same time, the lubricating oil can be supplied to the side surface serving as the sliding surface over a long period of time. A sliding part can be provided.

It is the figure which showed the relationship between an ankle and a escape wheel among the escapement and speed control devices of the mechanical timepiece according to the embodiment of the present invention. It is the figure which expanded the gear part of the escape wheel which concerns on embodiment of this invention. It is the figure which showed the sliding relationship of the escape wheel and the ankle claw stone which concerns on embodiment of this invention. It is a follow chart at the time of manufacturing the escape wheel which is the electroformed part concerning the embodiment of the present invention. It is a figure which shows the 1st application | coating process which is a process of manufacturing the escape wheel which is the electroformed component which concerns on embodiment of this invention. It is a figure which shows the outline of the pattern of the photomask used in order to manufacture the escape wheel which is the electroformed part which concerns on embodiment of this invention. It is the figure which showed the 1st exposure process for manufacturing the escape wheel which is the electroformed part which concerns on embodiment of this invention. It is a figure which shows the 2nd application | coating process which is a process of manufacturing the escape wheel which is the electroformed component which concerns on embodiment of this invention. It is the figure which showed the 2nd exposure process for manufacturing the escape wheel which is the electroformed part which concerns on embodiment of this invention. It is the figure which showed the image development process for manufacturing the escape wheel which is the electroformed component which concerns on embodiment of this invention. It is the figure which showed the plating process for manufacturing the escape wheel which is the electroformed part which concerns on embodiment of this invention. It is the figure which showed the electroforming process for manufacturing the escape wheel which is the electroformed part which concerns on embodiment of this invention. It is the figure which showed the thickness adjustment process for manufacturing the escape wheel which is the electroformed part which concerns on embodiment of this invention. It is the figure which showed the removal and isolation | separation process for manufacturing the escape wheel which is the electrocast sterling which concerns on embodiment of this invention. It is the figure which showed another form of the escape wheel which is one of the electroformed parts which concern on embodiment of this invention. It is the figure which applied the electroformed part which concerns on embodiment of this invention to the gearwheel.

Embodiments according to the present invention will be described with reference to FIGS. 1 to 16 by taking as an example a escape gear made of nickel electroforming, which is a mechanical wristwatch component.
FIG. 1 is a diagram showing a combination of a escape wheel 101 and an ankle 102, which is a movement as a drive mechanism of a mechanical wristwatch and is called an escapement and speed control device. The escape wheel 101 is driven by a shaft hole 103 and is composed of an escape portion 104 and an escape gear portion 105 that transmit power, and the escape gear portion 105 is provided with a sliding surface 106. ing.

  On the other hand, the ankle 102 vibrates around the shaft portion 106 and the uncle hanger 107 connected to a mechanism including a shaft spring 106 which is a swing center and a not shown spring for keeping the vibration of the ankle 102 constant. It consists of two claw stones 108 for rotating the hand wheel 101 in one direction.

  The ankle 102 works as a pendulum by swinging around the shaft portion 106. At that time, the claw stone 108 rotates to the escape wheel 101 by pushing the escape gear portion 105 of the escape wheel 101. In this case, the sliding surface 106 is slid.

  In general, the claw stone 108 of the ankle 102 is made of a ceramic material such as ruby or alumina having a high hardness in order to suppress wear due to sliding in addition to accuracy, and the cancer made of metal by the driving thereof. The sliding surface 106 of the gear 101 is worn by friction. For this reason, lubrication of the lubricating oil is required to reduce friction on the sliding surface 106.

  2 is an enlarged view of the gear portion 105 of the escape wheel & pinion 101 in FIG. 1, and the surface of the sliding surface 202 of the gear portion 201 has a vertical stripe shape in the thickness direction of the gear and the vertical stripe. Concavities and convexities having a roughness having a root mean square roughness of 50 nm to 500 nm are arranged in the vertical direction, that is, the sliding direction, and this roughness is disposed on one surface of the gear portion 105 having a mean square roughness of 500 nm to 1000 nm. It is connected to the recess 203.

  FIG. 3 is a view showing a sliding state of the sliding surface 106 and the claw stone 108 of the escape wheel 101 in FIG. 1, and the claw stone 301 is a slide having vertical stripes of the escape wheel 302. It moves while rubbing the surface of the moving surface 303. At this time, friction is reduced on the surface of the sliding surface 303 by the lubricating oil held by the vertical streaks, and a concave portion provided in a part of the gear portion 304 of the escape wheel 302 is further provided. Since the lubricating oil held in 305 is supplied to the sliding surface 303 along the vertical streaks, a good lubricating state can be maintained over a long period of time.

Next, the manufacturing method of the escape wheel & pinion 101 mentioned above is demonstrated, referring the flowchart shown in FIG.
The manufacturing method of the escape wheel & pinion 101 according to the present embodiment includes a first application step (S1), a first exposure step (S2), a second application step (S3), and a second exposure step ( This is a method of manufacturing by performing a step S4), a developing step (S5), a plating step (S6), an electroforming step (S7), a thickness adjusting step (S8), and a removing / separating step (S9). Hereinafter, each of these steps will be described in detail.

  In the first coating step (S1), a conductive film 502 is formed on one surface of the silicon wafer substrate 501 as shown in FIG. As the conductive film 502, for example, a metal such as gold, copper, chromium, nickel, and titanium is used. However, the conductive film 502 may be formed of a plurality of films. The formation method may be a vacuum deposition method, a sputtering method, or the like. In addition to the phase plating method, a wet plating method such as an electroless plating method may be employed, and the film thickness is preferably in the range of several nm to several μm. Next, as shown in FIG. 5B, 50 μm of the first photoresist layer 503 is applied. Examples of the coating method include spin coating using a liquid photoresist, spray coating, printing, and the like. A method of applying a dry film photoresist, which is a film-like photoresist, by thermocompression bonding or the like is also employed in this step. be able to. Although either a negative type or a positive type can be applied as the photoresist, an example using a negative type photoresist will be described in this embodiment.

Next, a first exposure step (S2) is performed.
FIG. 6 is an outline of a photomask pattern used for exposure. The first photomask on which the first pattern 601 used for the first exposure is drawn and the second pattern 602 used for the second exposure are shown. It is the figure which showed the positional relationship of the pattern of the drawn 2nd photomask. FIG. 6 shows a pattern of one escape wheel, and a plurality of such patterns are drawn on the photomask, and a plurality of escape wheels can be manufactured at the same time. In this embodiment, since a negative type photoresist is used, the first pattern 601 is a transmission pattern, and the second pattern 602 is a light shielding pattern.

  In the first exposure step, exposure is performed using the first photomask to form the exposure portion 701 as shown in FIG. FIG. 7 illustrates a cross section taken along line A-A ′ in FIG. 6, but the size and interval are changed in order to make the drawing easier to see.

  Next, in the second application step (S3), the same photoresist as that used in the first application step (S1) is applied on the first photoresist layer 801, thereby providing a second photoresist layer. 802 is formed. The two photoresist layers 802 formed as described above become a photoresist non-exposed portion 803 and an exposed portion 804 as shown in FIG.

Next, a second exposure step (S4) is performed.
In the second exposure step shown in FIG. 9, by performing exposure using a second photomask on which a second exposure pattern is drawn, an exposure portion 901 and an escape wheel-shaped opening after development are formed. An unexposed portion 902 is obtained. 9 illustrates a cross section taken along the line AA ′ in FIG. 6, the size and interval are changed in order to make the drawing easier to see.

  In this second exposure step, a raster scan photomask made with a beam diameter of 0.5 μm is used as the second photomask in order to form fine irregularities on the portion that becomes the sliding surface. A photomask manufactured by raster scanning uses linear scanning drawing of a beam, and in a direction not parallel to the scanning direction, extremely fine dot-like boundary surface drawing is performed according to the beam diameter and the drawing line angle. . In the present embodiment, the drawing line that forms the sliding surface 303 of the escape wheel & pinion 101 is arranged so as not to be parallel to the beam scanning when the second photomask is manufactured. With this second photomask, an exposure state having fine irregularities can be obtained.

Next, a developing process (S5) is performed.
As shown in FIG. 10, in the developing step (S5), the unexposed portion is removed by developing with a developing solution (not shown). As a result, an opening 1002 having the outer shape of the escape wheel & pinion 101 with the conductive film 1001 exposed at the bottom and a photoresist layer 1003 serving as an insulator surrounding the opening 1002 are obtained, and when the developing step (S5) is completed, The electroforming mold 1004 is completed. Of the photoresist layer 1003 constituting the electroforming mold 1004, the surface of the side wall portion 1005 on the opening 1002 side is exposed by the second photomask manufactured by the raster scan. The surface has vertical streaks.

Next, a plating step (S6) is performed.
As shown in FIG. 11, in the plating step (S6), the bottom surface of the opening 1002 of the electroforming mold 1004 is obtained by immersing the electroforming mold 1004 shown in FIG. A matte copper plating layer 1101 having a root mean square surface roughness of about 300 nm and a thickness of 5 μm is formed on the surface of the conductive film 1002 exposed in step (1). The matte copper plating layer 1101 is formed only on the conductive film 1102 which is a conductive part, and is not formed on the surface of the photoresist layer 1104 of the electroforming mold 1103.

Next, an electroforming process (S7) is performed.
As shown in FIG. 12, in the electroforming step (S7), the electroforming mold 1103 that has been sufficiently washed through the plating step (S6) shown in FIG. By energizing through the film 1102, nickel electroforming is performed on the electroless plating layer 1101 exposed at the bottom of the opening 1105 of the electroforming mold 1103 to form a nickel electroformed body 1201. Nickel electroforming is performed until the opening 1105 shown in FIG. 11 is filled without a gap, and a part of the nickel electroformed body 1201 reaches the photoresist layer 1202.

Next, a thickness adjustment step (S8) is performed.
After completion of the electroforming step (S7), the substrate 1205 is taken out from the electroforming solution and thoroughly cleaned, and then unnecessary portions of the surface of the substrate 1205 are removed by using a grinding device or a polishing device, and at the same time, thickness adjustment and surface flattening are performed. By performing the above, an electroformed body 1301 having a uniform thickness and surface state as shown in FIG. 13 is obtained. Through this process, from the electroformed body 1301 made of nickel whose shape and thickness are adjusted as a escape wheel, the photoresist layer 1302, the conductive film 1303, the copper plating layer 1304, and the silicon wafer substrate 1305 A substrate 1306 is obtained.

Finally, a removal / separation step (S9) is performed.
After the substrate 1306 that has undergone the thickness adjustment step (S8) is sufficiently washed, the substrate 1306 is immersed in a resist stripping solution (not shown) to remove the photoresist layer 1302, and as shown in FIG. A substrate 1405 including a cast body 1401, a copper plating layer 1402, a conductive film 1403, and a silicon wafer substrate 1404 is obtained. Next, the substrate 1405 is immersed in an aqueous solution of ammonium persulfate (not shown), which is a copper etching solution, so that the copper plating layer 1402 is removed from the end surface direction by so-called side etching, whereby the nickel electrode shown in FIG. A escape wheel 1406 made of a cast can be manufactured.

  The surface 1407 on which the thickness adjustment step (S8) is performed in the escape wheel 1406 thus made is in a mirror state, but the surface 1408 on the copper plating layer 1402 side is in the surface state of the copper plating layer 1402. It has a satin surface having a square surface roughness of 500 nm, and the surface of the escape wheel side wall 1409 that becomes the sliding surface 303 faithfully adheres to the side wall portion 1005 of the photoresist layer 1003 shown in FIG. The square mean roughness is about 100 nm.

  Further, the outer shape of the escape wheel & pinion 101 is determined by the shape of the exposure unit 901 shown in FIG. 9 made by the second exposure step (S4), and the recess 305 provided in the gear unit 304 is: It is formed by transfer of a pattern produced by the exposure unit 804 made by the first exposure step (S2) shown in FIG. 8 and the exposure unit 901 made by the second exposure step (S4).

The escape wheel 1406 produced in this way is combined with a normal ankle as shown in FIG. 1, and lubricating oil is injected into the escape wheel portion 304 to form the sliding surface 303 and the gear portion 304. The lubricating oil reaches the recessed portion 305.
Furthermore, in the endurance test equivalent to 3 years and 10 years performed by driving at high speed by this combination, there is no problem such as stopping.

The sliding characteristics of the escape wheel according to the present embodiment show excellent sliding characteristics by holding and supplying the lubricating oil by the fine vertical streaks and the concave portions provided on the other surface.
In this embodiment, a photomask produced by raster scan is used as a means for forming fine vertical stripes on the sliding surface. However, the same can be achieved by adding fine irregularities to the photomask. The effect can be fulfilled. In addition, by using the unevenness of the exposure boundary generated by adjusting the optical system such as collimation of the exposure apparatus and using the light interference by using the gap between the photomask and the photoresist, Since the uneven surface can be formed on the photoresist wall surface, the vertical streak unevenness on the sliding surface according to the present invention can be formed by transferring the uneven surface to the electroformed body.

  Further, in the present embodiment, the escape gear 101 of the gear portion 201 having the concave portion 203 shown in FIG. 2 is taken as an example, but instead of the concave portion 203, the sliding surface 1502 shown in FIG. A escape wheel having a gear portion 1501 having a step 1503 may be used. Further, as shown in FIG. 16, a sliding surface 1601 and a concave portion 1602 formed with fine vertical stripes, and the concave portion 1602 and the sliding surface. Needless to say, the present invention can be applied to a normal gear 1604 by providing the recess 1603 that connects the two.

  Further, in this embodiment, a photolithography method mold is used as an electroforming mold for producing an electroformed part. However, electroforming in which fine vertical stripes are formed on a portion to be a sliding surface by a photolithography method. It goes without saying that a method for producing an electroformed part is also possible by producing a mother die, using this electroformed mother die, transferring this pattern to a resin or the like, and performing electroforming thereon.

As described above, the electroformed part according to the present embodiment is an electroformed part formed to a predetermined thickness by electroforming, and has a sliding surface in which at least a part in the thickness direction becomes a sliding part. In addition, the present invention is characterized in that a streak-like uneven portion is provided in a direction perpendicular to the sliding direction of the sliding surface, and a recessed portion capable of holding lubricating oil is provided.
This electroformed part is an electroformed part in which the whole or part of the electroformed thickness direction is a sliding part, and the concave part is formed by providing fine vertical streaks in one direction on the sliding surface. At the same time as holding the lubricating oil, this recess serves as a lubricating oil supply path from other than the sliding portion, so it is possible to maintain a uniform lubricating oil surface and simultaneously hold the lubricating oil for a long period of time, Long-term and stable lubrication can be maintained.

In addition, the electroformed component according to this embodiment is characterized in that the mean square roughness with respect to the sliding direction of the concavo-convex portion is 50 nm to 500 nm.
This electroformed part is provided with unidirectional unevenness having a fine vertical streak-like mean square roughness of 50 nm to 500 nm on the sliding surface, thereby retaining the lubricating oil in the recessed portion and simultaneously sliding the recessed portion. Since the lubricating oil supply path is provided from other than the part, the lubricating oil can be maintained for a long time while maintaining a uniform lubricating oil surface, so that a long-term and stable lubricating state can be maintained.

In addition, the electroformed component according to the present embodiment is characterized in that the surface different from the sliding surface is in a satin state having a surface roughness larger than that of the sliding surface.
This electroformed part has fine vertical streaks in one direction on the sliding surface, and a satin-like surface having roughness larger than the vertical streaks on a surface different from the vertical streaks. Since the lubricating oil can be retained and the retained lubricating oil can be supplied to the vertical streaks provided on the sliding surface, the sliding surface can be lubricated. Since the amount of oil can always be kept stable, a long-term and stable lubricating state can be maintained.

In addition, the electroformed component according to the present embodiment is characterized in that a concave portion connected to the concave and convex portion is provided on a surface different from the sliding surface.
This electroformed component is provided with a fine vertical stripe-shaped unevenness on the sliding surface, and a recess connected to the unevenness on a different surface from the vertical stripe unevenness. Since the lubricating oil can be retained and this retained lubricating oil can be supplied to the vertical streaks provided on the sliding surface, the amount of lubricating oil on the sliding surface is always reduced. Since it can be kept stable, a long-term and stable lubricating state can be maintained.

Moreover, the electroformed component according to the present embodiment includes an escape wheel portion having a plurality of saddle-shaped tooth portions, and an anvil claw stone slides on the sliding surface provided in the tooth portions. It is characterized by.
This electroformed part can be used as a escape wheel which escapes and adjusts the mechanical watch together with the ankle. In particular, since the recess capable of holding the lubricating oil is provided on the sliding surface on which the ankle claw stone is slid, the frictional resistance generated when the claw stone slides can be effectively reduced. Therefore, it can be set as the reliable escape wheel excellent in durability.

In addition, the method for manufacturing an electroformed component according to the present embodiment includes a sliding surface that is formed to a predetermined thickness by electroforming, and at least a part of the thickness direction is a sliding portion. A method of manufacturing an electroformed component having a concave portion capable of holding lubricating oil by providing streaky concave and convex portions in a direction perpendicular to a sliding direction, wherein the first is formed on a conductive film formed on a substrate. A first coating process for coating the first photoresist layer to a predetermined thickness, a first exposure process for partially exposing the first photoresist layer through a first photomask, and the first photoresist. A second coating step of applying a second photoresist layer on the layer to a predetermined thickness, and partially exposing the first photoresist layer and the second photoresist layer through a second photomask. A second exposure step and the exposed first photo-resist; A developing process for developing the resist layer and the second photoresist layer to expose the conductive film and forming an electroforming mold having an opening having an outer shape of the electroformed part; and A plating step in which a plating layer is formed on the conductive film by applying current to the conductive film, and the whole is immersed in an electroforming solution to deposit metal on the plating layer, and at least completely open the opening. The electroforming process for growing the metal until it becomes a metal body to be closed, and removing the metal body overflowing from the opening, and adjusting the thickness so that the thickness of the remaining metal body becomes the thickness of the electroformed component A thickness adjusting step to be performed; and a removing step of removing the photoresist layer and the plating layer to obtain an electroformed component.
According to this method for producing an electroformed part, since electroforming is used, an electroformed part can be precisely produced even in a complicated shape, and high quality can be achieved.

101, 302, 1406 escape wheel 102 ankle 103 shaft hole 104 escape pinion 105, 201, 304, 1501 gear part 106, 202, 303, 1502, 1601 sliding surface 107 ankle joint 108, 301 claw stone 203 , 305, 1602, 1603 Recesses 501, 1305, 1404 Silicon wafer substrates 502, 1001, 1102, 1303, 1403 Conductive films 503, 801, 802, 1003, 1104, 1202, 1302 Photoresist layers 601, 602 Patterns 701, 804, 901 Exposed portions 803, 902 Unexposed portions 1002, 1105 Open portions 1004, 1103 Electroforming mold 1005 Side wall portions 1101, 1304, 1402 Copper plating layers 1201, 1301, 1401 Electroformed bodies 1306, 1405 Substrates 1407, 14 Eighth surface 1409 side walls 1604 gears

Claims (4)

An electroformed part formed to a predetermined thickness by electroforming,
A recess having a sliding surface, at least a part of which is a sliding portion, provided with a streak-like uneven portion perpendicular to the sliding direction of the sliding surface and capable of holding lubricating oil; Prepared ,
The electroformed component according to claim 1, wherein the surface different from the sliding surface is in a satin state having a surface roughness larger than that of the sliding surface .   2. The electroformed component according to claim 1, wherein a mean square roughness with respect to a sliding direction of the uneven portion is 50 nm to 500 nm.   The electroformed component according to claim 1, further comprising a concave portion connected to the concave and convex portion on a surface different from the sliding surface. It consists of an escape wheel portion having a plurality of hook-shaped teeth,
Electroformed component according to any one of claims 1 to 3, pallet pallet stones of the sliding surface provided in the tooth portion, characterized in that the slide.

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