JP2005290428A - Method for manufacturing electroformed parts including decorative groove - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing machine parts with high decorativeness. <P>SOLUTION: The method for manufacturing the electroformed parts comprises the steps of: forming a grid pattern 422b on the top face of a substrate 420 used for manufacturing the parts to be electroformed; forming a metallic thin film 424 on the surface of the top face of the substrate 420 and the surfaces of the top face and side of the grid pattern, to make the surface conductive; providing a thick resist layer 428 on the top face of the substrate 420 provided with the metallic thin film; copying a contouring pattern 428b of the parts to be electroformed on the thick resist layer; forming the electroformed parts 430 in the contouring pattern by electroforming the substrate 420 provided with the contouring pattern; and taking the electroformed parts 430 from the substrate 420. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electroformed metal part including a decorative groove produced using an electroforming technique, and a method for producing the electroformed metal part. More specifically, the present invention relates to a machine part having a high decorative property, in particular, a micro machine part that requires a decorative property such as a watch part, and a manufacturing method thereof. Furthermore, the present invention relates to a mechanical timepiece including at least one electroformed part made by the manufacturing method and an analog electronic timepiece including at least one electroformed part made by the manufacturing method.

  In the first type of prior art, the display board is composed of a resin substrate having a pattern and a decorative thin film member fixed to the resin substrate. As decorative thin film members, natural materials such as cloth, paper, shellfish and wood, ceramic sheets, polarizing films, colored films, electroformed foil, electrodeposition images, etching images, hologram images, etc. are used. Yes. A pattern transfer method is employed for applying the pattern to the resin substrate. That is, electroforming is performed on an article having a pattern. Examples of the article having a pattern include cloth, paper, stone, wood, pyroxene, leaves, petals, shells, leather, and artificial objects having various fine patterns (artificial leather, sculpture, engraving), etc. Cloth, paper, stone, wood, pyroxene, leaves, sculpture and engraving are used. (See Patent Document 1).

In the second type of prior art, spiral decorative grooves are formed in a metal plate by cutting. The spiral cross section is triangular. Of the pair of hypotenuses forming the V-shape of the spiral decorative groove, when the inner hypotenuse of the spiral is set at a gentler inclination angle than the outer hypotenuse, the decoration portion appears to swell. The workpiece provided with the decorative groove is used as a molding die, and the decorative groove provided on the molding die is transferred to the synthetic resin workpiece. And this to-be-molded product can be used as a decorative board. Further, this molding is used as an electroforming mother mold, and a conductive film having electrical conductivity is formed on the surface of the electroforming mother mold. Then, a metal is plated on the surface of the conductive film to produce an electroformed product. This electroformed product can be used as a decorative plate (see Patent Document 2).
Further, in the conventional electroforming process, a mother die is made. When the mother die is a conductor, the surface is subjected to a mold release treatment and the electrodeposition process is started. When the mother die is a non-conductor, the mother die is used. After the mold surface is made into a conductor, a mold release process is performed and an electrodeposition process is started. After electrodeposition to the required thickness, the electroformed part is peeled off from the mother mold (see Non-Patent Document 1).

JP 2002-55621 A (pages 4-7, FIGS. 1-5) JP-A-2002-192900 (pages 5-9, FIGS. 1-5) Toshikazu Sato, “Special Processing”, pp. 235-261, 1st edition published in 1981, 8th edition published in 1997, Yokendo

  In the first type of prior art, an electroforming technique is used for producing a pattern mold when a pattern is transferred to a resin substrate. However, the electroforming technique of the first type of prior art is a technique for producing a flat pattern plate, and there is a problem that it cannot be applied to electroformed machine parts. The second type of prior art is a decoration method for a flat plate such as a dial. In the second type of prior art, a groove is carved into the flat plate while rotating the flat plate, so that there is a problem that it cannot be applied to electroformed machine parts. Conventionally, a decorative dial engraved with a spiral groove with pitch accuracy is known. In such a dial, the reflected light changes to a rainbow color due to the diffraction effect. However, since such a technique is a decoration technique for a flat plate such as a dial, the technique cannot be directly applied to machining of machine parts. That is, even if such a conventional technique is used, it is not possible to decorate a part having an arbitrary shape, and it is impossible to control the cross-sectional shape of the groove. In addition, in such a conventional technique, the pitch accuracy is determined by the accuracy of machining, and there is a problem that the higher the pitch accuracy, the better the appearance.

  An object of the present invention is to manufacture a machine part with high decorativeness by forming a groove with high pitch accuracy on an electroforming substrate and producing an electroformed component by electroforming technology using the substrate. It is to provide a method that can. Moreover, the objective of this invention is providing the method which can manufacture the machine component which cannot produce a fake easily.

  The present invention relates to a method for manufacturing an electroformed component, wherein (a) in order to manufacture the electroformed component, a step of forming a lattice pattern on the upper surface of the substrate used for manufacturing the electroformed component; Forming a metal thin film 424 on the surface of the upper surface, the side surface of the lattice pattern, and the surface of the upper surface to form a surface conductor; and (iii) providing a thick film resist layer on the upper surface of the substrate provided with the metal thin film. (E) a step of transferring the contour pattern of the electroformed part to the thick film resist layer; and (o) performing electroforming on the substrate provided with the contour pattern to form the electroformed part in the contour pattern. And (c) removing the electroformed part from the substrate.

  In one aspect of the method of the present invention, the step of forming a lattice pattern on the upper surface of the substrate can be performed by a photolithography method. In one aspect of the method of the present invention, the step of forming a lattice pattern on the upper surface of the substrate can be performed by an imprinting method. In one aspect of the method of the present invention, the step of forming a lattice pattern on the upper surface of the substrate can be performed by an interference light exposure method.

  In one aspect of the method of the present invention, the grating pattern formed on the upper surface of the substrate is a diffraction grating groove. In one aspect of the method of the present invention, the grating pattern formed on the upper surface of the substrate is manufactured by an imprinting method using a mold having a blazed diffraction grating. Further, according to one aspect of the method of the present invention, the grating pattern formed on the upper surface of the substrate is manufactured in a sine wave shape by using a method for manufacturing a holographic diffraction grating. In the manufacturing method of the present invention, a groove with high pitch accuracy is formed in advance on an electroforming substrate, and an electroformed component is produced using this substrate. Therefore, a mechanical component having high decorativeness can be efficiently manufactured. it can.

  Moreover, the electroformed part manufactured by said method can be provided by this invention. Further, the present invention is characterized in that a gear train for a timepiece includes the “gear” manufactured by the above method. Further, the present invention is characterized in that, in a train wheel part for a watch, the “gear” manufactured by the above method and the “kana” fixed to the gear are included. Further, according to the present invention, it is possible to realize a mechanical part, in particular, a timepiece part, etc., which fixes the electroformed part manufactured by the above method and includes a gear part. Further, according to the present invention, it is possible to realize a square hole wheel to which the square hole plate manufactured by the above method is fixed. In addition, according to the present invention, a rotating weight including the rotating weight body manufactured by the above method can be realized. Further, according to the present invention, it is possible to realize a component characterized by fixing a plate which is an electroformed component manufactured by the above method. By using the manufacturing method of the present invention, it is possible to efficiently manufacture mechanical parts with high decorativeness, particularly precision machine parts such as watch parts. Furthermore, according to the present invention, it is possible to provide a mechanical timepiece including at least one electroformed part manufactured by any one of the methods described above. Furthermore, according to the present invention, an analog electronic timepiece including at least one electroformed part manufactured by any of the above-described methods can be provided.

  In the manufacturing method of the present invention, a groove with high pitch accuracy is formed in advance on a substrate for electroforming by using a method such as photolithography, imprint lithography, interference light exposure, etc., and this substrate is used for electroforming technology. Since the electroformed part is produced, a mechanical part having high decorativeness can be efficiently manufactured. That is, since the mechanical part produced by the manufacturing method of the present invention uses a diffraction grating groove as a decorative groove, the wavelength dispersion is more accurate than a simply machined groove, and the reflected light from the mechanical part is made decorative. It will be rich. Further, in the manufacturing method of the present invention, a diffraction grating is formed in advance on the entire surface of the electroforming substrate, the part shape is patterned with a resist, and electroforming is performed inside the pattern. According to such a manufacturing method of the present invention, it is possible to form a part shape by electroforming and simultaneously form a diffraction grating groove, and easily manufacture a mechanical part in which the diffraction grating groove is engraved. Can do. Therefore, according to the manufacturing method of the present invention, it is possible to efficiently manufacture a machine part having a high accuracy of the cross-sectional groove shape and a pitch and higher decorativeness than conventional engraving. In addition, by using the manufacturing method of the present invention, diffraction grating grooves can be formed in a non-planar part that has been difficult to manufacture with the prior art, so that highly decorative mechanical parts can be efficiently manufactured. can do.

Embodiments of the present invention will be described below in detail with reference to the drawings.
(1) 1st Embodiment If FIG. 4 is referred, the diffraction grating groove | channel 430a with high pitch accuracy is engraved in the lower surface of the electroformed component 430. FIG. The grating constant (pitch) and diffraction angle of the diffraction grating groove 430a are expressed by the following formula 1.
d * (sin α + sin β) = m * λ (Formula 1)
Here, d is a lattice constant, α is an incident angle, β is a diffraction angle, m is a diffraction order, and λ is a wavelength.
In order to simplify the explanation, considering the case of normal incidence, the above formula 1 becomes the following formula 2.
d * sin β = m * λ (Formula 2)

表１を参照すると、可視光（λ＝４００ｎｍ〜８００ｎｍ）の一次回折光が５°から９０°までの範囲に現われる格子定数ｄは、およそ０．８μｍ〜４．５μｍの範囲にある。望ましくは、格子定数ｄが１．５μｍ〜３．５μｍの範囲にあるようにすると、回折格子溝４３０ａを見る角度によって、回折格子溝４３０ａからの反射光が七色に変化し、回折格子溝４３０ａの装飾性を高くすることができる。 Table 1 shows the calculation results of the pitch (μm) with respect to the wavelength and diffraction angle in the case of normal incidence.

Referring to Table 1, the lattice constant d at which the first-order diffracted light of visible light (λ = 400 nm to 800 nm) appears in the range of 5 ° to 90 ° is in the range of about 0.8 μm to 4.5 μm. Desirably, when the grating constant d is in the range of 1.5 μm to 3.5 μm, the reflected light from the diffraction grating groove 430a changes to seven colors depending on the angle at which the diffraction grating groove 430a is viewed. The decorativeness can be increased.

  Next, an embodiment of a method for producing an electroformed part of the present invention will be described. Referring to FIG. 1A, a photoresist is applied to the upper surface of a substrate 420 used for manufacturing an electroformed component, thereby forming a photoresist layer 422 (step 401). The material constituting the substrate 420 is silicon, glass, plastic, or the like. The size of the substrate 420 is preferably a standard size used in semiconductor manufacturing, for example, in the range of 2 inches (about 50 mm) to 8 inches (about 200 mm). The thickness of the substrate 420 varies depending on the size of the substrate 420. For example, in the case of a 4-inch silicon substrate, a substrate having a thickness of 300 μm to 625 μm is used. As the photoresist layer 422, a positive resist or a negative resist used in a normal semiconductor process is used.

  Referring to FIG. 1B, the photoresist layer 422 is exposed and developed using a photomask on which a lattice pattern is formed, and the lattice pattern 422b is transferred to the photoresist layer 422 (step 402). Other methods for forming the grating pattern 422b in the photoresist layer 422 include a holographic diffraction grating manufacturing method and imprint lithography (described later).

  Referring to FIG. 1C, a metal thin film 424 is formed on the upper surface of the substrate 420 and on the side surfaces and upper surface of the lattice pattern 422b to form a surface conductor (metallization) (step 403). The metal thin film 424 can be used as an electrode for electroforming. The metal thin film 424 formed in the step 403 can be made of, for example, Au (gold), Ag (silver), Cu (copper), Ni (nickel), or the like. The metal thin film 424 can be attached by a method such as sputtering, vapor deposition, or electroless plating. The thickness of the metal thin film 424 is preferably in the range of several nm (discontinuous film) to several μm. In addition, referring to FIG. 1C ', as a process in place of the process 403, a metal film 424 may be formed on the substrate 420 in advance, and then the process 402 may be performed (process 403'). In this case, the metal thin film 424 is exposed only on the bottom surface of the lattice pattern 422b.

  Referring to FIG. 1D, a thick resist layer 428 is provided on the upper surface of the substrate 420 provided with the metal thin film 424 (step 404). The thickness of the thick resist layer 428 is preferably set so as to be thicker than the thickness of the electroformed component 430. Although the thickness of the thick resist layer 428 varies depending on the thickness of the electroformed component 430, it is generally desirable that the thickness is 100 μm to several hundred μm. Referring to FIG. 3 (a), the thick film resist layer 428 is exposed and developed using a photomask in which the contour shape of the electroformed part is formed, and the contour pattern 428b of the electroformed part is formed on the thick film resist layer 428. Transfer (step 405). Referring to FIG. 2B, electroforming is performed on the substrate 420 provided with the contour pattern 428b to form an electroformed component 430 having a desired thickness in the contour pattern 428b (step 406). In the case of forming a machine part, the electroformed metal forming the electroformed part 430 is made of chromium, nickel, iron, etc. having high hardness in consideration of slidability when used for a structure such as a gear. It can comprise with the alloy containing. In addition, the electroformed metal forming the electroformed component 430 can be composed of gold, silver, copper, nickel, chromium, and alloys containing these when used in a structure with high decorativeness. In addition, the characteristics are such that the inner surface of the structure is composed of chromium, nickel, iron, and alloys containing these with high hardness, and the surface of the structure is composed of tin, zinc, and alloys containing these with low hardness. The electroformed part 430 can be composed of two or more kinds of metals or alloys different from each other. Further, the electroformed component 430 can be made of an alloy having a different metal composition between the surface and the inner surface of the structure.

  Next, a specific method of electroforming will be described with reference to FIG. Referring to FIG. 3 (a), it is necessary to select an electroforming liquid according to a metal material to be electroformed. For example, a sulfamic acid bath, a watt bath, a sulfuric acid bath, etc. are used in nickel electroforming. When nickel electroforming is performed using a sulfamic acid bath, a sulfamic acid bath electroforming solution 742 containing nickel sulfamate hydrate as a main component is placed in a treatment tank 740 for electroforming. An anode electrode 744 made of a metal material to be electroformed is immersed in a sulfamic acid bath 742. For example, the anode electrode 744 can be configured by preparing a plurality of balls made of a metal material to be electroformed and placing the metal balls in a metal cage made of titanium or the like. An electroforming mold 748 to be electroformed is immersed in a sulfamic acid bath 742. Referring to FIG. 3B, when the electroforming mold 748 is connected to the cathode of the power source 760 and the anode electrode 744 is connected to the anode of the power source 760, the metal constituting the anode electrode 744 is ionized and moves in the sulfamic acid bath. Then, it is deposited as a metal on the mold cavity 748 f of the electroforming mold 748. A valve (not shown) can be connected to the processing tank 740 via a pipe (not shown). A filter for filtration is provided in the pipe, and the sulfamic acid bath discharged from the treatment tank 740 can be filtered. The filtered sulfamic acid bath can be returned to the treatment tank 740 from an injection pipe (not shown).

  Next, referring to FIG. 2C, the thick resist pattern 428b is removed, and the electroformed component 430 is taken out (step 407). On the lower surface of the electroformed component 430, a diffraction grating groove 430a having a high pitch accuracy is formed. Referring again to FIG. 4, a rectangular groove 430 a having a rectangular cross section (rectangle or square) is engraved on the lower surface of the electroformed component 430.

  In the diffraction grating, the groove angle is called “blazed angle”. By making the diffraction angle from the diffraction grating coincide with the reflection angle of light from each groove of the diffraction grating, the energy of the diffracted light can be concentrated at a specific wavelength. Therefore, the color of specific diffracted light can be emphasized by matching the diffraction angle from the diffraction grating with the reflection angle of light from each groove of the diffraction grating. For example, when the lattice constant d is 1.5 μm, the diffraction angle when light having a wavelength of 500 nm is directly incident is about 20 °. Therefore, if the blaze angle is 10 °, it is possible to obtain diffracted light with a wavelength of around 500 nm, that is, from blue to green.

  Referring to FIG. 5, a sawtooth groove 432 a having a sawtooth cross-sectional shape is engraved on the lower surface of the electroformed component 432. If a blazed diffraction grating (sawtooth groove) is used as a mold, an electroformed component 432 including a sawtooth groove 432a as shown in FIG. 5 can be produced. A mold having a blazed diffraction grating (sawtooth groove) can be manufactured by a method such as imprint lithography. In imprintography, a polymer material is applied to a substrate to a desired thickness, a mold on which a fine pattern is formed is pressed against the polymer material on the substrate and heated, and after cooling the mold, the mold is peeled off, This is a processing method for transferring a fine pattern of a mold to a resist layer. Furthermore, when dry etching is performed under conditions where both the resist layer and the substrate are etched, the shape of the resist layer can be transferred to the surface of the substrate.

  Referring to FIG. 6, a sinusoidal groove 434 a in which the cross-sectional shape of the groove has a sine wave shape (sine wave shape) is formed on the lower surface of the electroformed component 434. The sinusoidal groove 434a as shown in FIG. 6 does not cause the energy concentration of diffracted light to a specific wavelength unlike the special sawtooth groove 432a as shown in FIG. Therefore, it is possible to manufacture an electroformed component 434 having a surface having a decorative property that changes in a balanced manner from a short wavelength (blue) to a long wavelength (red) depending on an angle at which the sinusoidal groove 434a is viewed. For example, referring to FIG. 7, FIG. 7 is a schematic side view showing a state where the user is looking at the electroformed part 430 having the rectangular groove 430a in the embodiment of the present invention. As shown in FIG. 7A, when the user looks at the electroformed part 430 having the rectangular groove 430a from a position at an angle of about 80 degrees with respect to the surface of the electroformed part 430, the surface of the electroformed part 430 is as follows. Looks red. In contrast, as shown in FIG. 7B, when the user sees the electroformed part 430 having 430 a from a position that forms an angle of about 10 degrees with respect to the surface of the electroformed part 430, the electroformed part 430. The surface of appears blue. Therefore, according to the present invention, it is possible to manufacture an electroformed part having a decorative surface that changes in a balanced manner from a short wavelength (blue) to a long wavelength (red) depending on an angle at which the user views the surface of the electroformed part. it can.

If a method for manufacturing a holographic diffraction grating is used, an electroformed part 434 including a sinusoidal (sine wave) grating groove 434a as shown in FIG. 6 can be produced. The method for manufacturing a holographic diffraction grating is a method in which plane waves of two light beams interfere with each other and the interference fringes are exposed on a photoresist layer. With this holographic diffraction grating manufacturing method, a sinusoidal (sine wave) grating groove shown in FIG. 6 can be formed. When the incident angle of each of the two light beams is θ and the wavelength is λ, the lattice constant d is expressed by the following Equation 3.
d = λ / (2 sin θ) (Equation 3)
By using Expression 3, it is possible to select the exposure wavelength λ and the incident angle θ at which the desired d is obtained. However, in general, the exposure wavelength is limited with respect to the sensitivity of the photoresist. Therefore, it is an effective method to determine the lattice constant using the incident angle as a parameter.

(2) Structure of mechanical timepiece Next, an embodiment of a mechanical timepiece including an electroformed part to which the method for producing an electroformed part of the present invention is applied will be described. 8 to 10, in the mechanical timepiece, a movement (machine body) 300 of the mechanical timepiece has a main plate 302 constituting a substrate of the movement. A winding stem 310 is rotatably incorporated in a winding stem guide hole 302a of the main plate 302. A dial 304 (shown in phantom lines in FIG. 9) is attached to the movement 300. In general, of the two sides of the main plate, the side with the dial is referred to as the “back side” of the movement, and the side opposite to the side with the dial is referred to as the “front side” of the movement. A train wheel incorporated in the “front side” of the movement is referred to as “front train wheel”, and a train wheel incorporated in the “back side” of the movement is referred to as “back train wheel”. A position of the winding stem 310 in the axial direction is determined by a switching device including a setting lever 390, a yoke 392, a yoke spring 394, and a back presser 396. A chisel wheel 312 is rotatably provided on the guide shaft portion of the winding stem 310. When the winding stem 310 is rotated in a state where the winding stem 310 is in the first winding stem position (0 stage) closest to the inside of the movement along the rotation axis direction, the rotation of the clutch wheel is caused to rotate. Then, the chichi wheel 312 rotates. The round hole wheel 314 is rotated by the rotation of the hour wheel 312. The square hole wheel 316 is rotated by the rotation of the round hole wheel 314. By rotating the square hole wheel 316, the mainspring 322 accommodated in the barrel complete 320 is wound up. The center wheel & pinion 324 is rotated by the rotation of the barrel complete 320. The escape wheel & pinion 330 rotates through the rotation of the fourth wheel & pinion 328, the third wheel & pinion 326, and the second wheel & pinion 324. The barrel complete 320, the second wheel 324, the third wheel 326, and the fourth wheel 328 constitute a front train wheel.

  The escapement and speed control device for controlling the rotation of the front train wheel includes a balance 340, an escape wheel 330 and an ankle 342. The balance with hairspring 340 includes a balance stem 340a, a balance wheel 340b, and a hairspring 340c. Based on the rotation of the center wheel & pinion 324, the cylindrical pinion 350 is rotated simultaneously. The minute hand 352 attached to the cylindrical pinion 350 displays “minute”. The cylindrical pinion 350 is provided with a slip mechanism for the center wheel & pinion 324. Based on the rotation of the hour pinion 350, the hour wheel 354 is rotated through the rotation of the minute wheel. An hour hand 356 attached to the hour wheel 354 displays “hour”. The hairspring 340c is a thin plate spring having a spiral shape having a plurality of winding numbers. An inner end portion of the hairspring 340c is fixed to a whisker ball 340d fixed to the balance stem 340a, and an outer end portion of the hairspring 340c has a hairspring 370a attached to a hairspring receiver 370 fixed to the balance holder 366. It is fixed by screwing. A slow / fast needle 368 is rotatably attached to the balance holder 366. A beard receiver 1340 and a beard bar 1342 are attached to the slow and quick needle 368. A portion near the outer end portion of the hairspring 340 c is located between the hair support 1340 and the hair stick 1342. The balance with hairspring 340 is supported so as to be rotatable with respect to the main plate 302 and the balance with hairspring 366.

  The barrel complete 320 includes a barrel complete gear 320d, a barrel complete 320f, and a mainspring 322. The barrel complete 320f includes an upper shaft portion 320a and a lower shaft portion 320b. The barrel complete 320f is formed of a metal such as carbon steel. The barrel gear 320d is formed of a metal such as brass. The center wheel & pinion 324 includes an upper shaft portion 324a, a lower shaft portion 324b, a pinion portion 324c, a gear portion 324d, and an abacus ball portion 324h. The pinion 324c of the center wheel & pinion 324 is configured to mesh with the barrel gear 320d. The upper shaft portion 324a, the lower shaft portion 324b, and the abacus ball portion 324b are formed of a metal such as carbon steel. The gear portion 324d is formed of a metal such as brass. The third wheel & pinion 326 includes an upper shaft portion 326a, a lower shaft portion 326b, a pinion portion 326c, and a gear portion 326d. The pinion portion 326c of the third wheel & pinion 326 is configured to mesh with the gear portion 324d. The fourth wheel & pinion 328 includes an upper shaft portion 328a, a lower shaft portion 328b, a pinion portion 328c, and a gear portion 328d. The pinion portion 328c of the fourth wheel & pinion 328 is configured to mesh with the gear portion 326d. The upper shaft portion 328a and the lower shaft portion 328b are formed of a metal such as carbon steel. The gear portion 328d is formed of a metal such as brass. The escape wheel & pinion 330 includes an upper shaft portion 330a, a lower shaft portion 330b, a pinion portion 330c, and a gear portion 330d. The pinion portion 330c of the escape wheel & pinion 330 is configured to mesh with the gear portion 328d. The ankle 342 includes an ankle body 342d and an ankle true 342f. The ankle true 342f includes an upper shaft portion 342a and a lower shaft portion 342b.

  The barrel complete 320 is supported so as to be rotatable with respect to the main plate 302 and the barrel holder 360. That is, the upper shaft portion 320a of the barrel complete 320f is supported so as to be rotatable with respect to the barrel holder 360. The lower shaft portion 320b of the barrel complete 320f is rotatably supported with respect to the main plate 302. The second wheel 324, the third wheel 326, the fourth wheel 328, and the escape wheel 330 are supported so as to be rotatable with respect to the main plate 302 and the train wheel bridge 362. That is, the upper shaft portion 324 a of the second wheel 324, the upper shaft portion 326 a of the third wheel 326, the upper shaft portion 328 a of the fourth wheel 328, and the upper shaft portion 330 a of the escape wheel 330 are connected to the train wheel bridge 362. And is supported so as to be rotatable. In addition, the lower shaft portion 324 b of the center wheel 324, the lower shaft portion 326 b of the third wheel 326, the lower shaft portion 328 b of the fourth wheel 328, and the lower shaft portion 330 b of the escape wheel 330 are It is rotatably supported. The ankle 342 is supported so as to be rotatable with respect to the main plate 302 and the ankle receiver 364. That is, the upper shaft portion 342 a of the ankle 342 is supported so as to be rotatable with respect to the ankle receiver 364. The lower shaft portion 342b of the ankle 342 is rotatably supported with respect to the main plate 302.

  The bearing portion of the barrel holder 360 that rotatably supports the upper shaft portion 320a of the barrel complete 320f, the bearing portion of the train wheel bridge 362 that rotatably supports the upper shaft portion 324a of the center wheel 324, and the third wheel 326 The bearing portion of the train wheel bridge 362 that rotatably supports the upper shaft portion 326a, the bearing portion of the train wheel bridge 362 that rotatably supports the upper shaft portion 328a of the fourth wheel & pinion 328, and the escape wheel 330 Lubricating oil is injected into the bearing portion of the train wheel bridge 362 that rotatably supports the upper shaft portion 330a and the bearing portion of the ankle receiver 364 that rotatably supports the upper shaft portion 342a of the ankle 342. The bearing portion of the main plate 302 that rotatably supports the lower shaft portion 320b of the barrel complete 320f, the bearing portion of the main plate 302 that rotatably supports the lower shaft portion 324b of the center wheel 324, and the lower shaft of the third wheel 326 The bearing portion of the main plate 302 that rotatably supports the portion 326b, the bearing portion of the main plate 302 that rotatably supports the lower shaft portion 328b of the fourth wheel & pinion 328, and the lower shaft portion 320b of the escape wheel 330 are rotatable. Lubricating oil is injected into the bearing portion of the base plate 302 supported on the base plate 302 and the bearing portion of the base plate 302 that rotatably supports the lower shaft portion 342b of the ankle 342. This lubricating oil is preferably a precision machine oil, particularly preferably a so-called watch oil. In order to improve the lubricating oil retention performance, each bearing portion of the base plate 302, the bearing portion of the barrel holder 360, and each bearing portion of the train wheel bridge 362 has a conical, cylindrical, or truncated cone-shaped oil. It is preferable to provide a reservoir. Providing the oil reservoir can effectively prevent the oil from diffusing due to the surface tension of the lubricating oil. The base plate 302, barrel holder 360, train wheel bridge 362, and ankle receiver 364 may be formed of metal such as brass, or may be formed of engineering plastic such as poly-carbonate. The train wheel bridge 362 is preferably provided with a window (not shown) for viewing the upper surface of the third wheel & pinion 326 and the upper surface of the escape wheel & pinion 330. Alternatively, the train wheel bridge 362 can be formed of a transparent plastic in order to see the top surfaces of the third wheel & pinion 326 and the escape wheel & pinion 330.

  Referring to FIGS. 11 and 12, the rotary weight 160 includes a ball bearing 162, a rotary weight body 164, and a rotary weight 166. The ball bearing 162 includes an inner ring 168, an inner holding ring 170, an outer ring 172, and a plurality of balls 174. A rotary weight pinion 178 is provided on the outer ring 172. An inner ring female screw 168j is provided in the center hole of the inner ring 168. A ball bearing set screw 105j is provided on the train wheel bridge 362. The center axis of the ball bearing set screw 105j is configured to be the same as the center axis of the fourth wheel 328 (the center axis of the center wheel 324 and the center axis of the hour wheel 354). The ball bearing 162 is fixed to the train wheel bridge 362 by tightening the inner ring female screw 168j to the ball bearing set screw 105j. The first transmission wheel 182 is incorporated rotatably with respect to the train wheel bridge 362 and the main plate 302. The first transmission wheel 182 includes a first transmission gear 182a, an upper guide shaft portion 182b, a lower guide shaft portion 182c, and an eccentric shaft portion 182d. The first transmission gear 182 a is located between the rotary weight body 164 and the train wheel bridge 362. The first transmission gear 182 a is configured to mesh with the rotary weight pinion 178. The eccentric shaft portion 182d is provided on the first transmission wheel 182 between the first transmission gear 182a and the upper guide shaft portion 182b. The center axis of the eccentric shaft portion 182d is configured to be eccentric from the center axis of the first transmission gear 182a. The upper guide shaft portion 182b is supported rotatably with respect to the train wheel bridge 362. The lower guide shaft portion 182c is supported to be rotatable with respect to the main plate 302.

  A pawl lever 180 is incorporated between the first transmission gear 182 a and the train wheel bridge 362. A part of the pawl lever 180 is located between the transmission gear 182 a and the train wheel bridge 362. The other part of the pawl lever 180 is located between the rotary weight 164 and the train wheel bridge 362. The pawl lever 180 has a pull pawl 180c and a push pawl 180d. The guide hole 180a of the pawl lever 180 is rotatably incorporated in the eccentric shaft portion 182d. A second transmission wheel 184 is supported rotatably with respect to the train wheel bridge 362. The second transmission wheel 184 has a second transmission gear 184a and a second transmission pinion 184b. The second transmission gear 184a is configured in the form of a ratchet gear. The second transmission gear 184 a is located between the rotary weight body 164 and the train wheel bridge 362. The pawl 180c and the push pawl 180d of the pawl lever 180 are engaged with the second transmission gear 184a. Second transmission kana 184 b meshes with square wheel 118. The pull pawl 180c and the push pawl 180d are configured to be urged by an elastic force toward the center of the second transmission gear 184a, and the pull pawl 180c and the push pawl 180d are prevented from being separated from the second transmission gear 184a. The When the rotary weight 160 rotates, the rotary weight pinion 178 is also configured to rotate simultaneously. The transmission wheel 182 is configured to rotate by the rotation of the rotary weight pinion 178. The pawl lever 180 reciprocates based on the eccentric movement of the eccentric shaft portion 182d by the rotation of the first transmission wheel 182 and rotates the second transmission wheel 184 in a certain direction by the pulling pawl 180c and the push pawl 180d. Composed. The square wheel 316 is rotated by the rotation of the second transmission wheel 184, and the mainspring 322 in the barrel complete 320 is wound up. The square hole wheel 316 is screwed to the barrel of the barrel complete 320 by a square hole screw 316b. A square hole plate 316f is fixed to the upper surface of the square hole wheel 316.

(3) Third wheel manufacturing method and structure Referring to FIGS. 13 to 15, in the embodiment of the present invention, the third wheel 326 includes a third pinion gear (pinion gear portion) 326f and a third pinion gear 326g. Including. The thickness of the third gear 326g is, for example, 100 μm to 500 μm, preferably 150 μm to 250 μm. The third kana 326f includes an upper shaft portion 326a, a lower shaft portion 326b, and a kana portion 326c. The third gear 326g includes an upper side surface 326h and a gear portion 326d. The third kana 326f is formed of a metal such as carbon steel. The third gear 326g is formed of a metal such as nickel. Using the electroforming mold 420, the third gear 326g is electroformed. When the third gear 326g is formed, the metal to be electroformed is preferably nickel or copper. A diffraction grating groove (not shown) is provided in part or all of the upper side surface 326h of the third gear 326g. After the gear wheel 326d is electroformed to the unfinished third wheel & pinion 326, the gear portion 326d of the third gear 326g can be formed by pressing or gear cutting as secondary processing. The third kana 326f can be formed by lathe processing or the like. A third wheel 326f can be manufactured by fixing a third pinion 326f to a third gear 326g formed with a gear portion 326d. When the third wheel & pinion 326 is incorporated in the movement 300 and the movement 300 is operated, the decorativeness of the front train wheel can be enhanced by the diffraction effect of the diffraction grating grooves.

(4) Manufacturing method and structure of escape wheel Referring to FIGS. 16 to 18, in the embodiment of the present invention, escape wheel 330 has an escape wheel (pinion gear portion) 330f. Hanger gear 330g. The thickness of the escape gear 330 g is, for example, 100 μm to 500 μm, preferably 100 μm to 200 μm. The escape hook 330f includes an upper shaft portion 330a, a lower shaft portion 330b, and a pinion portion (pinion gear portion) 330c. The escape gear 330g includes an upper side surface 330h and a gear portion (that is, a portion that operates in contact with the pallet of the ankle) 330d. The treacherous 330f is formed of a metal such as carbon steel. The escape gear 330g is formed of a metal such as nickel. A diffraction grating groove (not shown) is provided on a part or all of the upper side surface 330h of the escape gear 330g. The gear portion 330d of the escape gear 330g can be formed by pressing, gear cutting, or the like as secondary processing after the gear portion 330d has electroformed the unprocessed escape wheel 330. . Furthermore, as shown in the drawing, when it is necessary to provide the slope portion 330k on the outermost peripheral portion of the escape gear 330g, the slope portion 330k is formed by pressing or milling as secondary processing. be able to. The escape 330f can be formed by lathe processing or the like. The escape wheel 330 can be manufactured by fixing the escape gear 330f to the escape gear 330g formed with the gear portion 330d. When the escape wheel & pinion 330 is incorporated in the movement 300 and the movement 300 is operated, the decorativeness of the front train wheel can be enhanced by the diffraction effect of the diffraction grating grooves.

(5) Manufacturing method and structure of square hole wheel A plate having a diffraction grating groove formed on the surface is manufactured by the manufacturing method of the present invention, and the plate with the diffraction grating groove is fixed to the upper surface of the square hole wheel by bonding or the like. be able to. 19 and 20, in the embodiment of the present invention, the square hole wheel 316 includes a square hole gear 316d and a square hole plate 316f. The square hole gear includes a gear portion 316g on the outer peripheral portion. The square hole plate 316f is preferably thin and formed in a ring shape. The square hole plate 316f is fixed to the upper surface of the square hole wheel 316 by a method such as adhesion. The thickness of the square hole gear 316d is, for example, 100 μm to 500 μm, and preferably 150 μm to 250 μm. The square hole gear 316d is formed of a metal such as carbon steel. The square hole gear 316d can be formed by press working or lathe working. The square hole plate 316f can be electroformed using the electroforming mold 420. When forming the square hole plate 316f, it is preferable that the metal to be electroformed is nickel or copper. A diffraction grating groove (not shown) is formed on a part or all of the upper surface of the square hole plate 316f. The thickness of the square hole plate 316f is, for example, 50 μm to 300 μm, and preferably 100 μm to 200 μm. When the square hole wheel 316 including the square hole plate 316f is incorporated in the movement 300, the decorativeness of the movement 300 can be enhanced by the diffraction effect of the diffraction grating groove provided on the upper surface of the square hole plate 316f.

(6) Manufacturing Method and Structure of Rotating Weight With reference to FIGS. 11 and 12, the rotating weight 160 includes a ball bearing 162, a rotating weight body 164, and a rotating weight 166. The rotary weight 164 can be electroformed using the electroforming mold 420. When forming the rotary weight 164, the metal to be electroformed is preferably nickel or copper. A diffraction grating groove (not shown) is formed on a part or all of the upper surface of the rotary weight 164. The thickness of the rotary weight 164 is, for example, 100 μm to 500 μm, and preferably 150 μm to 250 μm. When the rotating weight 160 including the rotating weight body 164 is incorporated in the movement 300 and the movement 300 is moved by shaking, the decoration of the automatic winding mechanism of the movement 300 is achieved by the diffraction effect of the diffraction grating grooves provided on the upper surface of the rotating weight body 164. Can increase the sex. Furthermore, by the manufacturing method of the present invention, a plate with a diffraction grating groove having a diffraction grating groove formed on the surface thereof can be produced, and this plate with a diffraction grating groove 164f can be fixed to the upper surface of the rotary weight 164 (FIG. 21, (Indicated by imaginary lines in FIG. 22). The diffraction grating grooved plate 164f is preferably formed in a thin plate shape. The diffraction grating grooved plate 164f is fixed to the upper surface of the rotating weight body 164 by a method such as adhesion. The thickness of the diffraction grating grooved plate 164f is, for example, 50 μm to 500 μm, and preferably 100 μm to 200 μm. Using the electroforming mold 420, the diffraction grating grooved plate 164f is electroformed. When forming the diffraction grating grooved plate 164f, the metal to be electroformed is preferably nickel or copper. A diffraction grating groove (not shown) is formed on the upper surface of the diffraction grating grooved plate 164f. When the rotating weight 160 including the rotating weight body 164 to which the plate 164f with the diffraction grating groove is fixed is incorporated in the movement 300 and the movement 300 is shaken and moved, the diffraction effect of the diffraction grating groove provided on the upper surface of the rotating weight body 164 is caused. The decorativeness of the automatic winding mechanism of the movement 300 can be enhanced.

(7) Application example of the present invention As described above, although the embodiment of the present invention has been described with respect to the third wheel, escape wheel, square hole wheel, and rotary weight, the present invention is the third wheel, escape wheel. , Applied to various wheel train members such as second wheel, fourth wheel, fifth wheel, transmission wheel, sun wheel, small iron wheel, round hole wheel, correction wheel can do. In addition, the present invention is applied to a watch part (for example, second wheel, fourth wheel, fifth wheel, escape wheel, day wheel, etc.) constituting a train wheel including “gear” and “kana”. It can also be applied to timepiece parts that do not include “kana” but include only “gear” (for example, a small iron wheel, a round hole wheel, a square hole wheel, etc.). Furthermore, the present invention is not limited to the timepiece components constituting the train wheel, but also the upper surface (surface visible from the back cover side) of the receiving member (first receiver, second receiver, balance holder, ankle receiver, train wheel receiver, etc.), presser Upper surfaces (surfaces visible from the glass side) of parts (day wheel presser, back object presser, calendar back plate, etc.), upper surfaces (day wheel, date indicator, calendar correction wheel, etc.) constituting the calendar mechanism (from the glass side) It can also be widely applied to the upper surface of the dial (the surface visible from the glass side). Furthermore, a plate having a diffraction grating groove formed on the surface is manufactured by the manufacturing method of the present invention, and the plate with the diffraction grating groove is made into various parts (for example, wheel train parts such as a receiver and a gear, day wheel, date wheel, It can also be fixed to the holding member, dial, etc.) by adhesion or the like. As described above, the mechanical timepiece to which the method for producing an electroformed part of the present invention is applied preferably includes at least one electroformed part produced by the method for producing an electroformed part of the present invention.

  When a part or all of the third wheel, escape wheel, square hole wheel, rotary weight, etc., to which the manufacturing method of the present invention is applied, are incorporated into the movement 300, and further, when the movement 300 is incorporated into a watch case (exterior), The back cover of the watch case (exterior) is preferably formed of a transparent material (for example, plastic such as glass or acrylic). With such a configuration, the appearance of the third wheel, escape wheel, square hole wheel, and rotary weight to which the manufacturing method of the present invention is applied can be seen through the back cover of the watch case (exterior). Further, when the date wheel presser to which the present invention is applied is incorporated into the movement 300, and the movement 300 is incorporated into the watch case (exterior), the watch dial is made of a transparent material (for example, glass, plastic such as acrylic). It is good to form. With such a configuration, the appearance of the date indicator press to which the present invention is applied can be seen through the watch glass and the dial.

(8) Structure of analog electronic timepiece The embodiment to which the method for manufacturing an electroformed part of the present invention described below is applied relates to a timepiece having a train wheel, that is, an analog electronic timepiece. However, the method for producing an electroformed part of the present invention is not limited to an analog electronic timepiece, and is widely applied to members constituting a train wheel of measuring instruments, printing machines, video equipment, recording equipment, recording equipment, etc. can do. Referring to FIG. 23, a movement (machine body) 900 of an analog electronic timepiece has a main plate 902 constituting a substrate of the movement. A winding stem 910 is rotatably incorporated in the winding stem guide hole of the main plate 902. A dial (not shown) is attached to the movement 900. The movement 900 includes a switching spring 966 for determining the position of the winding stem 910 in the axial direction. On the “front side” of the movement 900, a battery 920, a circuit block 916, an hour motor 210, an hour display wheel train 220, a minute motor 240, a minute display wheel train 250, a second motor 270, a second display train wheel 280, and the like are arranged. . The main plate 902, the train wheel bridge 912, and the second bridge 914 constitute a support member. The hour display train wheel 220 is rotated by the rotation of the hour motor 210, and “hour” of the current time is displayed by the hour hand 230. The minute display wheel train 250 is rotated by the rotation of the minute motor 240, and “minute” of the current time is displayed by the minute hand 260. The second display train 280 is rotated by the rotation of the second motor 270, and “second” of the current time is displayed by the second hand 290. An IC 918 and a crystal resonator 922 are attached to the circuit block 916. The circuit block 916 is fixed to the main plate 902 and the train wheel bridge 912 by the switch spring 962 through the insulating plate 960. The switching spring 966 is integrally formed with the switch spring 962. The battery 920 constitutes a power source for the analog electronic timepiece. As a power source of the analog electronic timepiece, a rechargeable secondary battery or a chargeable capacitor can be used. The quartz oscillator 922 constitutes the source oscillation of an analog electronic timepiece, and oscillates at 32,768 hertz, for example.

  Second motor 270 includes second coil block 272, second stator 274, and second rotor 276. When the second coil block 272 receives a second motor drive signal, the second stator 274 is magnetized to rotate the second rotor 276. The second rotor 276 is configured to rotate 180 degrees every second, for example. Based on the rotation of the second rotor 276, the second wheel 284 is configured to rotate via the rotation of the second transmission wheel 282. The second wheel 284 is configured to rotate once per minute. A second hand (not shown) is attached to the second wheel 284. A battery negative terminal 970 is attached to the main plate 902. The battery minus terminal 970 conducts the cathode of the battery 920 and the minus input portion Vss of the IC 918 through the minus pattern of the circuit block 916. A battery retainer 972 is attached to the switch spring 962. The battery retainer 972 and the switch spring 962 conduct the anode of the battery 920 and the plus input portion Vdd of the IC 918 through the plus pattern of the circuit block 916. The minute motor 240 includes a minute coil block 242, a minute stator 244, and a minute rotor 246. When the minute coil block 242 receives the minute motor drive signal, the minute stator 244 is magnetized to rotate the minute rotor 246. The minute rotor 246 is configured to rotate 180 degrees every 20 seconds, for example. The minute transmission wheel 252 is rotated based on the rotation of the minute rotor 246, and the minute wheel 256 is rotated via the second transmission wheel 254 based on the rotation of the first minute transmission wheel 252. The minute wheel 256 is configured to rotate once per hour. A minute hand (not shown) is attached to the minute wheel 256. The rotation center of the minute wheel 256 is the same as the rotation center of the second wheel 284.

  The hour motor 210 includes an hour coil block 212, an hour stator 214, and an hour rotor 216. When the hour coil block 212 receives the hour motor drive signal, the hour stator 214 is magnetized to rotate the hour rotor 216. The hour rotor 216 is configured to rotate 180 degrees every 20 minutes, for example. Based on the rotation of the hour rotor 216, the hour transmission wheel 222 rotates. Based on the rotation of the hour transmission wheel 222, the hour wheel, that is, the hour wheel (not shown) is configured to rotate through the rotation of the second transmission wheel 224. The hour wheel is configured to rotate once in 12 hours. An hour hand (not shown) is attached to the hour wheel. The center of rotation of the hour wheel is the same as the center of rotation of the minute wheel 256. Therefore, the rotation center of the hour wheel, the rotation center of the minute wheel 256, and the rotation center of the second wheel 284 are the same. The method for producing an electroformed part according to the present invention includes various parts (second transmission wheel 282, second wheel 284, first transmission wheel 222, second transmission wheel 224, first minute wheel) constituting the train wheel of the analog electronic timepiece. A diffraction grating groove can be formed on the transmission wheel 252, the second transmission wheel 254, and the like. As described above, the analog electronic timepiece to which the method for manufacturing an electroformed part of the present invention is applied preferably includes at least one of the electroformed parts manufactured by the method for manufacturing an electroformed part of the present invention.

  By using the manufacturing method of the present invention, it is possible to manufacture a machine part having high cross-sectional groove shape accuracy and pitch accuracy and high decorativeness. Moreover, since the diffraction grating groove can be formed on the surface of the mechanical component by using the manufacturing method of the present invention, a mechanical component with high decorativeness can be manufactured. Further, by using the manufacturing method of the present invention, diffraction grating grooves can be formed in various parts constituting the timepiece, so that a timepiece having high decorativeness can be manufactured.

FIG. 1 is a principle diagram (part 1) for explaining a manufacturing process in an embodiment of a method for manufacturing an electroformed component of the present invention. FIG. 2 is a principle diagram (part 2) for explaining the manufacturing process in the embodiment of the method for manufacturing an electroformed component of the present invention. FIG. 3 is a principle diagram for explaining the outline of electroforming in the embodiment of the method for manufacturing an electroformed part of the present invention. FIG. 4 is a cross-sectional view showing a schematic shape of an electroformed part having a rectangular groove in the embodiment of the method for producing an electroformed part of the present invention. FIG. 5 is a cross-sectional view showing a schematic shape of an electroformed part having a sawtooth groove in the embodiment of the method for producing an electroformed part of the present invention. FIG. 6 is a cross-sectional view showing a schematic shape of an electroformed part having a sinusoidal groove in the embodiment of the method for producing an electroformed part of the present invention. FIG. 7 is a schematic side view showing a state in which a user is looking at an electroformed component having a rectangular groove in the embodiment of the present invention. FIG. 8 is a plan view showing a schematic shape on the front side of the movement in the embodiment of the present invention (in FIG. 8, some parts are omitted, and the receiving member is indicated by an imaginary line). FIG. 9 is a schematic partial cross-sectional view showing a portion of the barrel from the barrel in the embodiment of the present invention. FIG. 10 is a schematic partial cross-sectional view showing the portion of the balance wheel from the escape wheel in the embodiment of the present invention. FIG. 11 is a plan view showing a schematic shape of the automatic winding mechanism in the embodiment of the present invention (some components are omitted in FIG. 11). FIG. 12 is a partial cross-sectional view showing an automatic winding mechanism in the embodiment of the present invention. FIG. 13 is a top view showing the third wheel in the embodiment of the present invention. FIG. 14 is a side view showing the third wheel in the embodiment of the present invention. FIG. 15 is a perspective view showing a third wheel in the embodiment of the present invention. FIG. 16 is a top view showing the escape wheel in the embodiment of the present invention. FIG. 17 is a side view showing the escape wheel in the embodiment of the present invention. FIG. 18 is a perspective view showing a escape wheel in an embodiment of the present invention. FIG. 19 is a perspective view showing a square hole wheel in the embodiment of the present invention. FIG. 20 is a cross-sectional view showing a square hole wheel in the embodiment of the present invention. FIG. 21 is a perspective view showing a rotating weight in the embodiment of the present invention. FIG. 22 is a cross-sectional view showing a rotary weight in the embodiment of the present invention. FIG. 23 is a plan view showing a schematic shape of the movement of the analog electronic timepiece to which the electroformed part is applied as viewed from the front side in the embodiment of the method for producing the electroformed part of the present invention (part of FIG. (Parts are omitted.)

Explanation of symbols

160 Rotating weight 162 Ball bearing 164 Rotating weight 166 Rotating weight 180 Claw lever 182 First transmission wheel 184 Second transmission wheel 300 Movement (mechanical body)
302 ground plate 316 square hole car 320 barrel wheel 324 second car 326 third car 328 fourth car 330 escape wheel 420 substrate 422 photoresist layer 424 metal thin film 428 resist layer 430 electroformed parts 432 electroformed parts 434 electroformed parts

Claims (16)

In the production method of electroformed parts,
(A) forming a lattice pattern (422b) on the upper surface of a substrate (420) used for producing an electroformed component in order to produce an electroformed component;
(Ii) forming a metal thin film (424) on the surface of the upper surface of the substrate (420) and on the side surface and the surface of the upper surface of the lattice pattern (422b) to make a surface conductor;
(Iii) providing a thick film resist layer (428) on the upper surface of the substrate (420) provided with the metal thin film (424);
(E) transferring the contour pattern (428b) of the electroformed part to the thick film resist layer;
(O) performing electroforming on the substrate (420) provided with the contour pattern (428b) to form an electroformed component (430) in the contour pattern (428b);
(Ka) removing the electroformed component (430) from the substrate (420);
A method comprising the steps of:   The method according to claim 1, wherein the step of forming the lattice pattern (422b) on the upper surface of the substrate (420) is performed by a photolithography method.   The method according to claim 1, wherein the step of forming a lattice pattern (422b) on the upper surface of the substrate (420) is performed by an imprinting method.   The method according to claim 1, wherein the step of forming the grating pattern (422b) on the upper surface of the substrate (420) is performed by an interference light exposure method.   The method of claim 1, wherein the grating pattern formed on the top surface of the substrate (420) is a diffraction grating groove.   The method according to claim 1, characterized in that the grating pattern formed on the upper surface of the substrate (420) is produced by an imprinting method using a mold having a blazed diffraction grating. Method.   The method according to claim 1, characterized in that the grating pattern formed on the upper surface of the substrate (420) is manufactured in a sinusoidal shape using a method of manufacturing a holographic diffraction grating.   An electroformed part manufactured by the method according to any one of claims 1 to 7.   A train wheel component for a timepiece, comprising a “gear” manufactured by the method according to claim 1.   A wheel train component for a timepiece, comprising: a "gear" manufactured by the method according to any one of claims 1 to 7, and a "kana" fixed to the gear. Wheel train parts.   A mechanical part including a gear part, wherein the electroformed part manufactured by the method according to any one of claims 1 to 7 is fixed.   A square hole wheel for a watch, wherein a square hole plate (316f) which is an electroformed part manufactured by the method according to any one of claims 1 to 7 is fixed. Square hole car to do.   A rotating weight comprising a rotating weight body (164) manufactured by the method according to any one of claims 1 to 7.   A component for a timepiece, wherein a plate, which is an electroformed component manufactured by the method according to any one of claims 1 to 7, is fixed.   A mechanical timepiece comprising at least one electroformed part manufactured by the method according to any one of claims 1 to 7.   An analog electronic timepiece comprising at least one electroformed part manufactured by the method according to any one of claims 1 to 7.

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