JP4522081B2 - Attaching / detaching apparatus, attaching / detaching system, and film forming apparatus - Google Patents

Description

  The present invention relates to an attachment / detachment device that attaches / detaches a mounting body including a substrate and a back plate to / from a conveying member, an attachment / detachment system configured to include the attachment / detachment device, and a film forming apparatus including the attachment / detachment system.

  Conventionally, a film forming apparatus for forming a film on the surface of a substrate such as a glass plate by a chemical vapor deposition method (hereinafter referred to as a CVD method) or a sputtering method has been used for manufacturing a solar cell panel or a flat panel. It is used for display production. Many film forming apparatuses employing the above-described CVD method, sputtering method, and the like perform film forming processing by introducing a mounting member called a substrate holder on which a substrate is mounted into a film forming chamber.

  In recent years, solar cell panels, flat panel displays, and the like have been increased in size, and substrates such as glass plates employed therein have increased in size, making it difficult to manually attach and detach the substrates. Therefore, in order to solve such a problem, a detachable device as shown in Patent Document 1 below has been proposed in the related art.

The attachment / detachment device disclosed in the following Patent Document 1 is configured to attach and detach a substrate to / from a substrate holder by adsorbing and transporting the substrate to a suction pad provided at the tip of an arm of a handling robot.
JP-A-2-101164

  Since the above-described prior art attachment / detachment device directly adsorbs the suction pad to the front surface or back surface of the substrate, suction marks of the suction pad remain on the substrate or dirt on the surface of the suction pad adheres. If adsorption marks and dirt adhere to the front and back surfaces of the substrate, there is a problem that not only the appearance of the substrate is impaired, but also the film formation state by the CVD method, the sputtering method or the like is adversely affected.

  In addition, when a film is formed by a CVD method or the like, the film forming operation is often performed by stacking back plates having high thermal conductivity such as carbon on the back surface of the substrate in order to obtain a good film forming state. In this case, the attachment / detachment device as disclosed in Patent Document 1 has a problem that it cannot be simultaneously attached to the substrate holder while the substrate and the back plate are stacked. More specifically, in the attachment / detachment device disclosed in Patent Document 1, the suction force cannot be increased more than necessary in consideration of breakage of the glass substrate. Furthermore, as described above, the handling robot cannot sufficiently exert the attracting force on a porous sintered body such as carbon or a nonwoven fabric processed as a back plate. For this reason, in the attachment / detachment apparatus as disclosed in Patent Document 1, it is extremely difficult to attach / detach the substrate and the back plate at the same time. Even if a handling robot is used, the work efficiency of the attachment / detachment operation of the substrate and the back plate is difficult. There is a problem that cannot be improved so much.

  Therefore, the present invention includes an attachment / detachment device that can be attached while the substrate and the back plate are stacked without contaminating the front and back surfaces of the substrate, an attachment / detachment system including the attachment / detachment device, and the attachment / detachment system. An object is to provide a film forming apparatus.

In the invention according to claim 1, provided in view of the above-described problem, the substrate is made of glass , the substrate is attached to a mounting member having an exposure opening exposing a part or all of the substrate, and the back surface of the substrate on the side, from a state in which the back plate is mounted a size capable of a substantially equal size as the substrate align the substrate and the end portion, and a substrate attachment body overlaid the substrate and the back plate and the back plate An attachment / detachment device for removing in an overlapped state, and further replacing at least the substrate and attaching the substrate and the back plate again to the attachment member , one of the opposing edge surfaces of the attachment body facing each other . A gripping means that grips the mounting body by contacting the edge surface or both opposing edge surfaces and grips both the substrate and the back plate constituting the mounting body at the same time, and moves while the mounting body is clamped by the clamping means And having a moving means A removable device to.

  The attachment / detachment apparatus of the present invention is configured to attach and detach the attachment means to and from the attachment member by bringing the holding means into contact with the edge surface of the attachment body in which the substrate and the back plate are stacked. Therefore, according to the attachment / detachment apparatus of the present invention, the attachment body can be attached / detached without contaminating the front surface or the back surface of the substrate.

  The detachable device of the present invention can be mounted on the mounting member in a state where the substrate and the back plate are stacked by the clamping means. That is, the attachment / detachment apparatus of the present invention can attach / detach the substrate and the back plate at the same time. Therefore, according to the present invention, the process of attaching and detaching the substrate and the back plate to the mounting member can be simplified and the working efficiency can be greatly improved.

  In addition, since the attachment / detachment device of the present invention is configured to sandwich the edge surfaces of the substrate and the back plate, if the substrate and the back plate are approximately equal in size, the ends are aligned with respect to the mounting member. Detachable. Therefore, according to the present invention, it is possible to improve positioning accuracy in a state where the substrate and the back plate are stacked.

  The invention according to claim 2 is the attachment / detachment device according to claim 1, characterized in that the tip of the clamping means has a hook shape.

  According to such a configuration, it is possible to minimize the displacement of the mounting body in the surface direction while firmly holding the mounting body clamped by the clamping means. Therefore, according to the attachment / detachment device of the present invention, the substrate and the back plate can be accurately mounted at predetermined positions, and damage or the like due to the mounting body falling off from the clamping means can be reliably prevented.

  According to a third aspect of the present invention, the clamping means includes a first movable member that reciprocates on a predetermined surface in a predetermined direction, and a direction that intersects the moving direction of the first movable member on the surface. The attachment / detachment device according to claim 1, further comprising a second movable member that reciprocates.

  In the attachment / detachment device of the present invention, the attachment body is clamped from two directions on a predetermined surface. More specifically, for example, when the mounting body in a state of being erected by the attachment / detachment device of the present invention is sandwiched, the mounting body is sandwiched vertically by the first movable member and left and right by the second movable member. It is possible to adopt a configuration in which it is sandwiched from the direction. Therefore, according to the attachment / detachment device of the present invention, the attachment / detachment operation can be performed with the attachment body firmly held.

  Moreover, since the attachment / detachment device of the present invention clamps the attachment body from two directions, the attachment / detachment device can be attached / detached to / from the attachment member in a state where the end portions of the substrate and the back plate are exactly aligned. Therefore, according to the present invention, the positioning accuracy when the substrate and the back plate are stacked can be improved.

  According to a fourth aspect of the present invention, the moving means has a plurality of arm parts and an attaching / detaching part to which the holding means is attached, and the adjacent arm parts or the arm part and the attaching / detaching part are connected via the joint part. 4. The attachment / detachment device according to claim 1, wherein the attachment / detachment device is rotatably connected.

  According to this structure, the mounting body clamped by the clamping means of the detachable portion can be mounted on the mounting member at a desired position and angle.

The invention according to claim 5, the attachment apparatus according to any one of claims 1 to 4, and the mounting member mounting member a separate member is mounted to the detachable device, to the mounting member And a fixing means for fixing the mounting body in a fixed state, and the detachable device has a hand portion that is mounted on the moving means and can be moved to the vicinity of the mounting member by the moving means and can be separated from the mounting member, The attachment / detachment system is characterized in that the hand unit is provided with attachment / detachment means that moves the fixing means and moves the fixing means into a fixed state or a fixed release state.

  Since the attachment / detachment system of the present invention includes the attachment / detachment device described above, the attachment body can be attached / detached without contaminating the front and back surfaces of the substrate. Furthermore, the attachment / detachment system of the present invention can be attached to the attachment member simultaneously with the substrate and the back plate being stacked by the attachment / detachment device described above. Therefore, the work time required for the process of attaching and detaching the substrate and the back plate to the mounting member is extremely short.

  In addition to the configuration described above, the attachment / detachment system of the present invention has a fixing means for fixing the mounting body to the mounting member, and the fixing means is fixed or released by the attaching / detaching means of the attachment / detachment device. be able to. Therefore, according to the attachment / detachment system of the present invention, the attachment / detachment and fixing operations of the attachment body to / from the attachment member can be performed simultaneously, and the work efficiency is extremely high.

  Here, when the substrate or back plate is mounted on the mounting means by the above-described attachment / detachment system, if the mounting means is transported in a horizontal state, bending occurs, and in some cases, the substrate, a film formed on the surface of the substrate, etc. There is a risk of damage.

Accordingly, the invention according to claim 6 provided in view of such a problem is the attachment / detachment system according to claim 5, further comprising conveying means for conveying the mounting body in an upright state.

  According to such a configuration, it is possible to reliably prevent the bending of the mounting body during conveyance and the breakage of the substrate, the back plate, and the like due to this.

The invention according to claim 7 is characterized in that the back plate is substantially equal in size to the substrate and can be aligned with the end portion of the substrate and is smaller than the substrate. The attachment / detachment system according to claim 1.

  According to such a configuration, the substrate can be securely held by the holding means of the attachment / detachment device. Therefore, according to the mounting / demounting system of the present invention, it is possible to reliably prevent the substrate from falling off and the substrate from being damaged during the mounting / demounting operation of the mounting body.

  The invention according to claim 8 is that the mounting member has a mounting surface on which the mounting body is mounted, and an insertion port through which a part of the holding means of the detachable device can be inserted is provided on the mounting surface. The attachment / detachment system according to any one of claims 5 to 7.

  According to such a configuration, the clamping means does not interfere with the mounting member during the mounting / demounting operation of the mounting body, and the mounting / demounting operation of the mounting body can be performed efficiently.

The invention according to claim 9 is the attachment / detachment system according to any one of claims 5 to 8, wherein the fixing means is in a position corresponding to the periphery of the exposure opening.

  In the attachment / detachment system of the present invention, the fixing means is provided at a position corresponding to the periphery of the exposure opening provided in the attachment member. Therefore, according to the attachment / detachment system of the present invention, it is possible to prevent the gap between the mounting body and the exposure port of the mounting member, and the atmosphere on the exposed surface side of the mounting member and the atmosphere on the mounting surface side are connected via the exposure port. Can be prevented.

  According to the mounting / demounting system of the present invention, it is possible to reliably prevent the discharge from flowing through the gap between the mounting body and the exposure port of the mounting member and the inflow and outflow of gas. Therefore, according to the attachment / detachment system of the present invention, the film forming operation can be accurately performed on the substrate by a technique such as CVD or sputtering.

  A tenth aspect of the present invention is the attachment / detachment system according to any one of the fifth to ninth aspects, further comprising a biasing unit that biases the mounting body toward the mounting member.

  According to this configuration, it is possible to reliably prevent the displacement of the mounting body with respect to the mounting member.

  Further, according to the mounting / demounting system of the present invention, the positional deviation between the mounting member and the mounting body can be reliably prevented, so that gas inflow / outflow and discharge wrap-around between regions isolated by the mounting member hardly occur. Therefore, according to the attachment / detachment system of the present invention, the film forming operation can be accurately performed on the substrate by a technique such as CVD or sputtering.

Moreover, the attachment / detachment system according to any one of claims 5 to 10 can be suitably used even when the back plate is made of carbon. (Claim 11)
In the twelfth aspect of the present invention, the moving means includes a transfer means for supporting the mounting body from the back plate side and detaching at least the substrate from the mounting body supported by the moving means, leaving at least the back plate. The transfer means has a holding member having an edge surface contact portion that contacts the edge surface side of the substrate and a collar portion that can contact the surface of the substrate, and the transfer plate is mounted on the back plate. The attachment / detachment system according to any one of claims 5 to 11, wherein a notch portion for preventing interference between the flange portion and the back plate is provided at a position corresponding to a clamping member provided in the means. It is.

  In the attachment / detachment system of the present invention, the substrate on the back plate supported on the movement means side is exchanged between the movement means and the transfer means. Therefore, according to the attachment / detachment system of the present invention, attachment / detachment of the mounting body including the substrate and the back plate and replacement of the substrate can be performed without human intervention.

  In the attachment / detachment system of the present invention, the transfer means is provided with a clamping member having an edge surface contact portion that contacts the edge surface side of the substrate and a flange portion that can contact the surface of the substrate. The supported back plate is provided with a notch for preventing interference between the clamping members provided in the second moving means. Therefore, according to the configuration described above, the substrate can be exchanged smoothly between the moving means and the transfer means.

  According to a thirteenth aspect of the present invention, there is provided a film forming apparatus characterized in that a mounting body is attached / detached by the attaching / detaching system according to any of the fifth to twelfth aspects.

  In any of the attachment / detachment systems according to the fifth to twelfth aspects, the attachment body can be attached / detached easily and accurately. Therefore, the film forming apparatus of the present invention has a short time required for attaching and detaching the substrate and the mounting body, and can greatly improve the work efficiency of the film forming work.

In addition, the film forming apparatus according to the thirteenth aspect can be suitably used for an apparatus that forms a film on the surface of a substrate by chemical vapor deposition. (Claim 14)
In the above attachment / detachment system and film forming apparatus, the back plate may have a higher thermal conductivity than the substrate. According to this configuration, heat acting on the mounting body in the attachment / detachment system or the film forming apparatus can be applied to the entire substrate surface substantially evenly.

  Moreover, in the said attachment / detachment system and film forming apparatus, the linear expansion coefficient of the mounting body may be lower than that of the mounting member. According to such a configuration, it is possible to prevent warpage of the mounting body due to thermal expansion in a state where the mounting body is mounted on the mounting member, and it is possible to prevent deterioration of heat conduction characteristics and film formation characteristics between the substrate and the back plate.

  According to the present invention, it is possible to mount the mounting member on the mounting member in a state where the substrate and the back plate are stacked without contaminating the front and back surfaces of the substrate, and to efficiently attach and detach the mounting body including the substrate and the back plate. A detachable apparatus, a detachable system, and a film forming apparatus that can be performed well can be provided.

  Subsequently, an attachment / detachment device and an attachment / detachment structure according to an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view showing the attachment / detachment system of the present embodiment. FIG. 2 is a front view showing a hand portion of the attachment / detachment device employed in the attachment / detachment system shown in FIG. 3A is a front view showing a substrate hand included in the hand unit of FIG. 2, FIG. 3B is a sectional view of FIG. 3A, and FIG. 3C is a perspective view of FIG. It is. 4 (a) and 4 (b) are perspective views showing a lock hand included in the hand unit of FIG. Fig.5 (a) is a perspective view which shows the board | substrate and backplate which are attached or detached by the attachment / detachment system of this embodiment, The same (b) is the A section enlarged view of the same (a). 6 (a) is a front view of the back plate shown in FIG. 5, and FIG. 6 (b) is a rear view of FIG. 6 (a). FIG. 7 is a perspective view showing the vicinity of the edge surface of the back plate shown in FIGS. FIG. 8 is a conceptual diagram showing how the back plate locking member shown in FIGS. Fig.9 (a) is a front view which shows the edge surface vicinity in the state which overlap | superposed the board | substrate and the backplate, The same (b) is AA sectional drawing of the same (a).

  In FIG. 1, S is an attachment / detachment system of the present embodiment, and 1 is an attachment / detachment device employed in the attachment / detachment system S. The attachment / detachment system S includes the attachment / detachment device 1, a holder 70 to / from which a mounting body 68 in which the substrate 50 and the back plate 52 are stacked is attached / detached, and a substrate transfer device 80.

  The attachment / detachment device 1 has a hand unit 5 attached to the tip of an industrial robot arm 4. That is, the attachment / detachment apparatus 1 includes a robot arm 4 having a main body 2 and an arm 3 (arm) extending from the main body 2, and a hand 5 (attachment / detachment) attached to the tip of the arm 3. ). The attachment / detachment apparatus 1 moves between a holder 70 (to be described later) and a predetermined substrate attachment / detachment position (not shown) in a state where the attachment body 68 in which the glass substrate 50 and the carbon back plate 52 are stacked is sandwiched. The operation and the attaching / detaching operation of attaching / detaching the mounting body 68 to / from the holder 70 are performed.

  The main body 2 of the robot arm 4 includes a bottom 6 and a body 7 that is rotatably supported on the bottom 6 via a motor or the like (not shown). Equipment 10 such as a power source and a power supply device for operating the arm unit 3 and the hand unit 5 is mounted on the top surface 8 of the body unit 7.

  The arm part 3 of the robot arm 4 includes a first arm part 12a and a second arm part 12b that are flexibly connected to the main body part 2 via joint parts 11a and 11b, and joint parts 15a and 15b. A third arm portion 13 is provided which is flexibly connected. The fourth arm portion 14 is connected to the third arm portion 13 via a joint portion 15c. Each of the joint portions 11a to 11b and 15a to 15c has a built-in power source (not shown) such as a motor. The first arm portion 12a, the second arm portion 12b, and the third arm receive these powers. The bending state of the part 13 and the fourth arm part 14 is adjusted. The fourth arm portion 14 includes a mechanism that expands and contracts using a cylinder or a ball screw that expands and contracts by air pressure, hydraulic pressure, or the like.

  The hand portion 5 is connected to the distal end side of the fourth arm portion 14 via the joint portion 17 so as to be rotatable around the central axis of the fourth arm portion 14. The hand portion 5 is manufactured using a metal material such as stainless steel, and is formed by connecting palm pieces 18 and 20 extending vertically in FIG. 2 with a connecting portion 21 extending horizontally. Has a substantially “H” shape. The palm pieces 18 and 20 include a substrate hand (clamping means) 22 that clamps a glass substrate 50 and a carbon back plate 52, which will be described later, and a lock hand 23 (which operates a lock member 56 of the back plate 52). A plurality of attachment / detachment means are provided.

  As shown in FIG. 2, the substrate hand 22 is fixed in a predetermined posture to both ends in the longitudinal direction of the left and right palm pieces 18, 20 and a central portion in the longitudinal direction. As shown in FIGS. 2 and 3, the substrate hand 22 has a structure in which a slide base 27 and a pad 28 are stacked and fixed, and a claw member 30 is fixed to the side of the slide base 27.

  The slide base 27 is connected to a crank mechanism constituted by a rod 29a and a power transmission mechanism 29b. The slide base 27 slides in the linear direction on the palm pieces 18 and 20 with the operation of the rod 29a and the power transmission mechanism 29b. The pad 28 has elasticity and is fixed to the surface side of the slide base 27. The pad 28 is for mitigating an impact caused by the surface contact of the substrate 50 or the back plate 52 with the substrate hand 22.

  As shown in FIG. 3, the claw member 30 includes a contact portion 31 and a flange portion 32 (drop-off prevention portion) that is bent in a hook shape on the distal end side of the contact portion 31. The claw member 30 is fixed so that the abutment portion 31 abuts against the side surfaces of the slide base 27 and the pad 28, and the collar portion 32 at the tip portion thereof faces the pad 28. More specifically, the claw member 30 forms a locking opening 33 that is opened in a substantially “U” shape by the surface of the pad 28 and the flange 32 as shown in FIG. The collar portion 32 protrudes by a distance d on the surface side. The distance d is slightly wider than the thickness D of the mounting body 68 configured by stacking the substrate 50 and the back plate 52.

  Of the substrate hands 22 attached to the palm pieces 18 and 20, the substrate hands 22a and 22b fixed to the both ends in the longitudinal direction of the palm pieces 18 and 20 are both provided with the locking openings 33. 20 is fixed so as to face the center in the longitudinal direction. More specifically, in the state shown in FIG. 2, the substrate hand 22 a fixed to the upper end side of the palm pieces 18, 20 is fixed so that the locking opening 33 faces downward. , 20 is fixed so that the locking openings 33 face upward. The mounting body 68 is sandwiched by the substrate hands 22a and 22b fixed above and below the palm pieces 18 and 20, thereby preventing the positional displacement in the vertical direction and preventing the positional displacement of the mounting body 68 in the surface direction.

  In addition, the substrate hand 22c at the center in the longitudinal direction of the palm pieces 18 and 20 is fixed so that the locking opening 33 faces the other palm pieces 20 and 18 side. More specifically, the substrate hand 22c fixed to the palm piece portion 18 side in FIG. 2 is fixed in such a posture that the locking opening 33 opens toward the palm piece portion 20 side. The substrate hand 22c fixed to the side is fixed so that the locking opening 33 faces the palm piece 18 side. Therefore, the hand unit 5 holds the mounting body 68 by the substrate hand 22c to prevent the positional displacement in the left-right direction, and supports the mounting body 68 so that the positional displacement does not occur in the surface direction.

  As described above, the hand unit 5 includes the substrate hands 22a and 22b that reciprocate in the vertical direction in the state shown in FIG. 2, and the substrate hand 22c that reciprocates in the direction (left-right direction) perpendicular thereto. These simultaneously operate and come into contact with the edge surfaces of the substrate 50 and the back plate 52 located at the center of the hand portion 5. Therefore, the hand unit 5 can grip the substrate 50 and the back plate 52 at the same time, and can correct the positional deviation between the substrate 50 and the back plate 52 when gripping.

  The lock hand 23 includes vertical movement lock hands 23a and 23b provided at both longitudinal ends of the palm pieces 18 and 20, and left and right movement lock hands 23c provided at intermediate portions in the longitudinal direction of the palm pieces 18 and 20. 23d. The vertical movement lock hands 23a and 23b and the left and right movement lock hands 23c and 23d all perform the same operation, but their operation directions and some configurations are different.

  More specifically, the vertical movement lock hands 23a and 23b are fixed in a cantilevered manner at positions protruding from the side surfaces between the palm pieces 18 and 20. As shown in FIG. 2 and FIG. 4A, the vertical movement lock hands 23a and 23b are formed between the two holding plates 35 and 35 extending in the extending direction of the connecting shaft 21 and the holding plates 35 and 35, respectively. Two connection guide shafts 36, 36 connected in the vertical direction, and knobs 37, 37 slidably mounted on the connection guide shafts 36, 36 are provided. The knobs 37, 37 are configured by rotatably mounting rollers 40, 40 on the surface side of the blocks 38, 38. The knobs 37 and 37 are slidably supported by connection guide shafts 36 and 36, and rollers 40 and 40 are mounted on the surfaces thereof. The knobs 37 and 37 are both connected to a power source (not shown), and are guided by connecting guide shafts 36 and 36, respectively, and slide independently or integrally in the vertical direction. As shown in FIG. 8, the vertical movement lock hands 23a, 23b are guided by the connecting guide shafts 36, 36 with the gripping portions 37, 37 sandwiched between the rollers 40, 40 with a gripping portion 65 of the lock member 56 described later. Then, the lock member 56 is opened and closed.

  As shown in FIGS. 2 and 4B, the left and right lock hands 23c and 23d are both a frame 42 fixed to the palm pieces 18 and 20, and a guide member 43 having a substantially “L” -shaped cross section. The two connection guide shafts 41, 41 extending in the left-right direction are fixed in the space surrounded by the structure, and the knobs 45, 45 are slidably mounted on the connection guide shafts 41, 41. It has become. The knobs 45 and 45 have the same configuration as the knob 37 described above, and rollers 47 and 47 are rotatably mounted on the surface side of the blocks 46 and 46. The knobs 45 and 45 are both connected to a power source (not shown), and are guided by the connecting guide shafts 41 and 41 to slide independently or integrally in the left-right direction. As shown in FIG. 8, the left and right lock hands 23 c and 23 d move in the left and right directions with gripping portions 65 sandwiching grips 45 and 45 of a lock member 56 (described later) between the rollers 47 and 47. Perform the operation.

The substrate 50 is a substantially square glass plate. The substrate 50 has a thermal conductivity of 0.79 W / m · K and a linear expansion coefficient of 8.5 × 10 ⁻⁶ / K. Further, the back plate 52 stacked on the back surface 51 side of the substrate 50 is a plate body having a substantially square shape like the substrate 50. The back plate 52 is slightly smaller than the substrate 50. More specifically, the length Lh of one side of the back plate 52 is smaller than the length Lb of one side of the substrate 50. The length Lh of the back plate 52 is preferably smaller than the length Lb of the substrate 50 by about 0.2 to 1.0 mm, and more preferably about 0.4 to 0.6 mm. In the present embodiment, the length Lh of the back plate 52 is about 0.5 mm smaller than the length Lb of the substrate 50.

It is desirable that the back plate 52 has a higher thermal conductivity than the substrate 50 so that heat can be propagated substantially uniformly over the entire surface of the substrate 50. As in this embodiment, when the substrate 50 is made of glass, the thermal conductivity of the back plate 52 is preferably about 100 to 150 W / m · K, and is within the range of 120 to 130 W / m · K. It is even more desirable to be. The back plate 52 employed in the present embodiment is made of carbon, and is a plate body having a substantially square shape like the substrate 50. The back plate 52 has a thermal conductivity of 128 W / m · K and a linear expansion coefficient of 1.0 × 10 ⁻⁶ / K. Since the back plate 52 has higher thermal conductivity than the substrate 50, heat can be applied to the entire surface of the substrate 50 substantially evenly.

  The back plate 52 is flat on the side of the contact surface 53 that makes surface contact with the back surface of the substrate 50. On the other hand, a plurality of locking members 56 are fixed to the outer peripheral portion of the back plate 52 on the back surface 55 side as shown in FIGS. As shown in FIG. 7, the lock member 56 is embedded in and fixed to the peripheral portion of the back plate 52 so as to be flush with the edge surface 57 and the back surface 55, and a linear direction with respect to the fixed plate 58. The sliding piece 61 is slidably connected to the sliding piece 61, and a leaf spring-like fixing piece 62 fixed to one end side of the sliding piece 61. The sliding piece 61 has a long hole 63, and the screw 60 is fixed to the fixing plate 58 through the long hole 63. The sliding piece 61 has a gripping portion 65 formed by bending the other end side vertically. As shown in FIG. 8, the sliding piece 61 is guided by the screw 60 and the long hole 63 in the linear direction by the gripping portion 65 being pushed and moved by the vertical movement lock hands 23a and 23b and the left and right movement lock hands 23c and 23d. Move to. As a result, the fixed piece 62 advances and retreats from the edge surface 57 of the back plate 52 as indicated by arrows in FIGS.

  Cutouts 66 are provided on four sides of the back plate 52. The notch 66 is for preventing interference with the substrate hand 22 of the substrate transfer device 80 described later, and is directed toward the contact surface 53 side and the edge surface 54 of the back plate 52 as shown in FIG. And has an open rectangular shape. The notch 66 is slightly larger than the collar portion 32 of the substrate hand 22. As shown in FIG. 9, the notch 66 forms a gap below the substrate 50 when covered with the substrate 50 when the substrate 50 is stacked on the back plate 52. Therefore, as shown in FIG. 9B, when the flange portion 32 of the substrate hand 22 of the substrate transfer device 80 described later is applied from the back surface 55 side of the substrate 50 and moved as indicated by the arrow, the substrate stacked on the back plate 52 is stacked. 50 can be clamped, and the substrate 50 can be lifted by moving the substrate transfer device 80 away from the back plate 52.

  Subsequently, the holder 70 employed in the present embodiment will be described. 10A is a front view showing the holder 70, FIG. 10B is an enlarged view of a portion A of FIG. 10A, and FIG. 10C is a sectional view taken along the line CC of FIG. FIG. 11 is a perspective view showing a portion B in FIG.

The holder 70 is a member on which the mounting body 68 in which the above-described substrate 50 and back plate 52 are stacked is mounted, and is formed by molding a metal plate such as stainless steel. More specifically, the holder 70 is made of SUS304, its thermal conductivity is 16.3 W / m · K, and its linear expansion coefficient is 17.3 × 10 ⁻⁶ / K. The holder 70 has a larger linear expansion coefficient than the substrate 50 and the back plate 52 described above. Therefore, even if the substrate 50 and the back plate 52 are mounted on the holder 70 and they are thermally expanded, the substrate 50 and the back plate 52 are deformed in the thickness direction. It is possible to reliably prevent a gap from occurring between them.

  The holder 70 is a frame-like member having an exposure port 71 formed in the center as shown in FIG. As shown in FIG. 10C, the holder 70 has a mounting surface 72 on which the mounting body 68 including the substrate 50 and the back plate 52 is mounted, and an exposed surface 73 on which the substrate 50 mounted from the mounting surface 72 is exposed. . The holder 70 has a stepped portion 75 and a notch 76 at a position surrounding the exposure port 71 on the mounting surface 72 side. The step portion 75 is a groove for fitting the substrate 50 as shown in FIG. 10C, and has a flange 77 for preventing the substrate 50 from dropping off on the exposed surface 73 side.

  The notch 76 is positioned to surround the exposure port 71 and penetrates in the thickness direction of the holder 70. The notch 76 is located at a position corresponding to the claw member 30 of each substrate hand 22 (22a to 22c) when the hand portion 5 of the attachment / detachment device 1 described above is opposed. The notch 76 has an opening region with a size that allows the hook 32 of the claw member 30 to be inserted. Therefore, even if the mounting body 68 (substrate 50) is brought into close contact with the mounting surface 72 of the holder 70 so that the mounting body 68 held between the hand portions 5 is mounted on the holder 70, the claw member 30 enters the notch 76, It does not interfere with the holder 70. An engaging tool 78 into which the fixing piece 62 can be inserted is provided around the step portion 75 and at a position corresponding to the lock member 56 of the back plate 52 as shown in FIGS.

  The engagement tool 78 is opened toward the center side (the exposure port 71 side) of the holder 70. Therefore, when the mounting body 68 is mounted so that the substrate 50 fits in the stepped portion 75 and the gripping portion 65 of the lock member 56 provided on the back plate 52 is reciprocated, the spring plate-like fixing piece 62 is bent. The opening of the engagement tool 78 enters and exits. More specifically, when the fixing piece 62 is inserted into the engaging tool 78, the fixing piece 62 bends and presses the back plate 52 against the substrate 50, and the entire mounting body 68 is pressed against the holder 70 and comes into close contact.

  Next, the substrate transfer device 80 employed in this embodiment will be described. FIG. 12 is a front view of the hand unit employed in the substrate transfer apparatus 80. FIG. 13 is a conceptual diagram showing how a substrate is transferred by the substrate transfer device 80.

  As shown in FIG. 1, the substrate transfer device 80 has the same configuration as that of the above-described attachment / detachment device 1, and is different only in the configuration of the hand portion 85 attached to the tip of the fourth arm portion 14. The substrate transfer device 80 replaces the substrate 50 with respect to the attachment / detachment device 1. As shown in FIG. 13A, the substrate transfer device 80 covers the hand portion 85 above the hand portion 5 of the detachable device 1 in a state where the substrate 50 and the back plate 52 are sandwiched, and sandwiches only the substrate 50. Or for loading the substrate 50 on the back plate 52 placed on the hand portion 5 as shown in FIG.

  The hand portion 85 is substantially entirely made of a metal material such as stainless steel, and is formed by connecting palm pieces 81 and 82 with a connecting portion 83 as shown in FIG. It has a shape of "". The palm pieces 81 and 82 are provided with a plurality of substrate hands 22 that sandwich the back plate 52 described above.

  The substrate hand 22 has the same configuration as that adopted in the above-described attachment / detachment device 1, and the slide base 27 and the claw member 30 fixed thereto are reciprocated in the linear direction in accordance with the operation of the rod 29a. It moves. As shown in FIG. 12, the substrate hand 22 is placed at a position corresponding to the notch 66 of the back plate 52 mounted on the hand unit 5 side when the hand unit 85 is covered on the hand unit 5 of the detachable device 1. It arrange | positions so that the nail | claw member 30 by the side of the hand part 85 may come.

  Then, operation | movement of the attachment / detachment system S of this embodiment is demonstrated in detail. The attachment / detachment system S includes a control device (not shown), and each unit performs a predetermined operation in response to a control signal from the control device. The control device of the attachment / detachment system S is roughly divided into an attachment operation of the attachment body 68 to the holder 70 by the attachment / detachment device 1, a removal operation of removing the attachment body 68 from the holder 70, and replacement of the substrate 50 held by the attachment / detachment device 1. Work. Hereinafter, operations during each operation will be described in sequence.

  When performing the mounting operation of the mounting body 68 by the mounting / demounting system S, the mounting / demounting device 1 mounts the mounting body 68 including the substrate 50 and the back plate 52 on the hand unit 5 by a replacement operation described later or manually. At this time, the mounting body 68 is mounted such that the back plate 52 faces the hand portion 5 side and the substrate 50 is exposed. Further, the gripping portion 65 of the lock member 56 on the back side of the back plate 52 is formed between the rollers 40 and 40 of the lock hand 23 (23a to 23d) provided in each portion of the hand portion 5 as shown in FIG. It will be in the state which protruded between 47.

  When the mounting body 68 is mounted as described above, the control device operates each power transmission mechanism 29b of the hand unit 5 to operate the rod 29a. Thereby, each board hand 22 (22a-22c) of the hand part 5 slides, and the contact part 31 contacts the edge surfaces 54 and 57 of the board 50 and the back plate 52 as shown in FIG. At the same time as the substrate 50 and the back plate 52 are sandwiched from the top, bottom, left, and right (chuck state), these positions are aligned.

  When the substrate 50 and the back plate 52 are sandwiched as described above, the body portion 7 and the arm portion 3 of the main body portion 2 start to operate, and the hand portion 5 is moved to the vicinity of the holder 70. Thereafter, the control means of the attachment / detachment system S places the hand unit 5 in a posture in which the mounting body 68 faces the holder 70. The control means finely adjusts the position so that the substrate 50 held by the hand portion 5 is accommodated in the stepped portion 75 of the holder 70 and the substrate hand 22 (22a to 22c) enters the notch 76 on the holder 70 side. While moving the hand portion 5 gently toward the holder 70 side.

  When it is confirmed that the substrate 50 mounted on the hand unit 5 is in surface contact with the mounting surface 72 of the holder 70, the control means stops the movement of the hand unit 5. Thereafter, the control means operates each lock hand 23 (23a to 23d) of the hand unit 5. As a result, the gripping portion 65 of the lock member 56 located at a position corresponding to each lock hand 23 is moved to the rollers 40 or 47 of the knobs 37 and 45 provided in each portion of the hand portion 5 as indicated by an arrow L in FIG. The fixed piece 62 protrudes from the edge surface 57 of the back plate 52 and fits into the engagement tool 78 fixed to the holder 70 side. As a result, the back plate 52 is locked with respect to the holder 70.

  When the fixing piece 62 of the lock member 56 and the engagement tool 78 are engaged, the control means operates each power transmission mechanism 29b to extend the rod 29a. Thereby, each board | substrate hand 22 (22a-22c) leaves | separates from each edge surface 54 and 57 of the mounting body 68, and a clamping state is cancelled | released. Thereafter, the control means operates the body portion 7 and the arm portion 3 to separate the hand portion 5 from the holder 70, and completes a series of mounting operations.

  When performing the removal operation of the mounting body 68 by the mounting / demounting system S, the mounting / demounting device 1 removes the substrate 50 and the back plate 52 from the holder 70 in the reverse order of the mounting operation described above. More specifically, when performing the removal work, the control means operates the body portion 7 and the arm portion 3 so that the substrate hand 22 (22a to 22c) enters the notch 76 on the holder 70 side. The hand part 5 is brought close to the holder 70 while finely adjusting.

  When it is confirmed that the substrate hand 22 has entered the notch 76 and the hand portion 5 has come into surface contact with the back plate 52, the control means operates each rod 29a and each substrate hand 22 connected thereto. Slide (22a-22c). When it is confirmed that the contact portion 31 of the claw member 30 of each substrate hand 22 contacts the edge surfaces 54 and 57 of the substrate 50 and the back plate 52 as shown in FIG. 3B, the substrate 50 and the back plate. 52 is sandwiched from above, below, left and right.

  When the substrate 50 and the back plate 52 are sandwiched between the claw members 30, the control means actuates the lock hands 23 (23a to 23d), and the rollers of the knobs 37 and 45 in the direction indicated by the arrow U in FIG. The gripping portion 65 of the lock member 56 is pushed by 40 or 47. Thereby, the fixing piece 62 of each lock member 56 is detached from the engaging portion 78 of the holder 70, and the locked state is released.

  When the locked state is released as described above, the control means operates the body portion 7 and the arm portion 3 to move the hand portion 5 away from the holder 70 and move the mounting body 68 to a predetermined substrate storage position. . When the hand unit 5 reaches the substrate storage position, the hand unit 5 is in a state in which the fixed side surfaces of the substrate 50 and the back plate 52 are directed upward, and a series of removal operations are completed.

  The attachment / detachment system S performs a replacement operation for replacing only the substrate 50 among the attachments 68 attached to and detached from the holder 70 by the substrate transfer device 80 in accordance with the above-described procedure. Hereinafter, replacement work by the substrate transfer apparatus 80 will be described in order.

  As described above, when the substrate 50 is removed from the mounting body 68 loaded on the hand unit 5 disposed horizontally at a predetermined substrate storage position or the like, the substrate transfer device 80 is configured as shown in FIG. The hand part 85 of the substrate transfer device 80 is covered from above the mounting body 68 loaded on the hand part 5, and the rod 29a on the hand part 85 side is operated. As a result, the claw member 30 on the hand portion 85 side enters the notch 66 of the back plate 52 as shown in FIG. 9B and contacts the edge surface 54 of the substrate 50. Thereafter, the substrate transfer device 80 moves the hand unit 85 in a direction away from the hand unit 5 as shown in FIG. As a result, the substrate transfer device 80 removes only the substrate 50 from the mounting body 68 loaded on the hand unit 5 of the attachment / detachment device 1, and moves the substrate 50 to a predetermined substrate storage location (not shown).

  On the other hand, when the substrate 50 stored in a predetermined substrate storage location is loaded on the back plate 52 on the hand portion 5 of the attachment / detachment apparatus 1, the substrate hand 22 of the hand portion 85 is contracted at the storage location to reduce the substrate. 50 is sandwiched and conveyed to the vicinity of the hand portion 5 of the detachable device 1. Thereafter, the substrate transfer device 80 brings the hand unit 85 into a posture in which the substrate 50 faces the hand unit 5 side, and brings the hand unit 85 close to the surface of the hand unit 5 of the attachment / detachment device 1 as shown in FIG. At this time, the claw member 30 of the substrate hand 22 on the hand portion 85 side enters the notch 66 of the back plate 52 and does not interfere with the hand portion 5. When it is confirmed that the substrate 50 sandwiched between the hand portions 85 has been transferred to the back plate 52 mounted on the hand portion 5 side, the substrate transfer device 80 is indicated by an arrow B in FIG. As shown, the claw member 30 is removed from the notch 66 after the claw member 30 is horizontally moved to a position outside the edge surface 54 of the substrate 50 in the notch 66. Thereby, the substrate transfer device 80 finishes the loading operation of the substrate 50 on the back plate 52 loaded on the hand portion 5 of the attachment / detachment device 1.

  In the attachment / detachment system S of the present embodiment, the attachment / detachment device 1 is attached to and detached from the edge surfaces 54 and 57 of the substrate 50 and the back plate 52 by the substrate hand 22. Therefore, according to the attachment / detachment device 1, the substrate 50 can be attached / detached without contaminating the front surface or the back surface.

  Further, the attachment / detachment device 1 can attach and detach the substrate 50 and the back plate 52 simultaneously by the substrate hand 22. Further, the attaching / detaching means 1 can open and close the lock member 56 by the lock hand 23 simultaneously with the attaching / detaching operation of the substrate 50 and the back plate 52. Therefore, the attachment / detachment apparatus 1 has high work efficiency of the attachment / detachment work of the substrate 50 and the back plate 52.

  The attachment / detachment device 1 is configured to sandwich the edge surfaces 54 and 57 between the substrate hands 22a and 22b that reciprocate in the vertical direction on the surface parallel to the hand portion 5 and the substrate hand 22c that reciprocates in the left and right directions. Moreover, although the board | substrate 50 and the backplate 52 differ in magnitude | size slightly, it is set as the substantially equal magnitude | size. Therefore, in the attachment / detachment system S of the present embodiment, the substrate 50 and the back plate 52 are sandwiched by the substrate hands 22a to 22c, and the attachment / detachment can be performed with these end portions aligned.

  As described above, the claw member 30 of the substrate hand 22 has the collar portion 32 extending in the direction parallel to the hand portion 5. Therefore, the attachment / detachment apparatus 1 is in a state in which the edge surfaces 54 and 57 are sandwiched by the substrate hand 22c during the attachment / detachment operation, and the collar portion 32 slightly wraps around and grips the surface side of the substrate 50. Therefore, according to the attachment / detachment device 1, the substrate 50 and the back plate 52 do not fall off even if an external force in the direction of the surface of the hand unit 5 acts on some beat.

  The holder 70 employed in the above attachment / detachment system S is provided with a notch 76 at a position corresponding to the substrate hand 22 of the attachment / detachment device 1. Therefore, even if the hand portion 5 of the attachment / detachment apparatus 1 is brought close to the holder 70 so as to perform the attachment / detachment operation, the substrate hand 22 does not interfere with the holder 70 and the attachment / detachment work can be performed efficiently.

  The attachment / detachment system S is configured to lock by providing a plurality of lock members 56 at the boundary between the holder 70 and the back plate 52. Further, the lock member 56 is configured to allow the plate spring-like fixing piece 62 to enter the engagement tool 78 on the holder 70 side to be locked. The back plate 52 and the substrate 50 are urged toward the holder 70 by the elastic force of the fixing piece 62, and are fixed in a state of being in close contact with each other. Therefore, if the holder 50 is mounted on the substrate 50 and the back plate 52 by the attachment / detachment system S, for example, the inflow / outflow of the gas and the discharge of the discharge even if the film forming operation is performed on the substrate by a technique such as CVD or sputtering. Almost no film formation failure due to.

  The present attachment / detachment system S includes a substrate transfer device 80, and the substrate 50 can be transferred to the hand portion 5 of the attachment / detachment device 1 without human intervention. Therefore, according to the present attachment / detachment system S, the replacement work of the substrate 50 can be performed extremely smoothly.

  Further, the back plate 52 has a notch 66 for preventing interference of the substrate hand 22 provided in the hand portion 85 of the substrate transfer device 80. Therefore, the substrate hand 22 does not interfere with the back plate 52 even if the hand portion 85 of the substrate transfer device 80 is brought close to the back plate 52 in order to replace the substrate 50.

  The above attachment / detachment system can be suitably used for a film forming apparatus such as a CVD apparatus shown in FIG. Hereinafter, an example in which the above attachment / detachment system is applied to a CVD apparatus will be described in detail with reference to the drawings. FIG. 14 is an operation principle diagram showing the CVD apparatus of this embodiment.

  In FIG. 14, reference numeral 100 denotes the CVD apparatus of this embodiment. The CVD apparatus 100 forms a semiconductor layer on a glass substrate 50. The CVD apparatus 100 of this embodiment is roughly divided into a substrate receiving / dispensing unit 102 and a film forming chamber 103.

  To explain sequentially, the substrate receiving / dispensing unit 102 is configured to include the attachment / detachment system S described in the above embodiment, and the holder is provided from both sides of a pair of frame members 107 mounted in a standing state on a substrate carrier 105 described later. 70 is a portion where the substrate 50 and the back plate 52 are mounted. In FIG. 14, the attachment / detachment system S provided on one side of the substrate carrier 105 is omitted for simplification of the drawing.

  The substrate carrier 105 has such a shape that two frame members 107 are erected on an elongated carriage. That is, the substrate carrier 105 has a rectangular parallelepiped carrier base 108, and a total of eight wheels 110 are provided on both sides thereof. A rack 111 is attached to the bottom surface of the carrier base 108.

  Above the carrier base 108, two sets of frame members 107 are fixed so as to be parallel and opposed to each other. The frame member 107 is obtained by connecting two holder holding frames 109 to which the above-described holder 70 is fixed in parallel via a connecting plate 117. The holder holding frame 109 is a substantially “U” -shaped plate body having a holder mounting region 116 that is cut out on the upper side 114 side and surrounded by the left and right side sides 112 and 113 and the bottom side 115. The frame member 107 is fixed in a standing state with a lower end portion of the base 115 above the carrier base 108 by screwing or welding.

  As shown in FIG. 15, the holder 70 described in the above embodiment is fixed to the frame member 107 by screws to the holder mounting region 116. The substrate carrier 105 having the frame member 107 fixed to the carrier base 108 moves to the side of the substrate receiving / dispensing portion 102 along the rail 118 laid along the substrate receiving / dispensing portion 102, and the film forming chamber 103 side Move to.

  The substrate carrier 105 stops when it reaches the substrate receiving / dispensing section 102. The attachment / detachment system S attaches / detaches the attachment body 68 to / from the holder 70 attached to the frame member 107 while the substrate carrier 105 is stopped. As a result, the exposed surfaces of the respective substrates 50 face each other and face the inside of the frame member 107. When the mounting of the mounting body 68 including the substrate 50 and the back plate 52 on the frame members 107 and 107 is completed, the substrate carrier 105 moves along the rail 118 laid on the side of the substrate receiving / dispensing portion 102, It is drawn into the membrane chamber 103.

  The film formation chamber 103 is a cavity for forming a film in a gas by a plasma CVD method, and has the same configuration as a film formation chamber of a conventionally known CVD apparatus. More specifically, the film forming chamber 103 has a configuration in which a heater and an RF electrode (not shown) are provided inside. The film forming chamber 103 supplies a source gas into the RF electrode, applies a high-frequency alternating current to the RF electrode, generates a glow discharge between the RF electrode and the substrate carrier 105, decomposes the source gas, and A thin film is formed on the surface of the substrate 50 erected on the carrier 105.

  As described above, the CVD apparatus 100 employing the attachment / detachment system S of the above embodiment can attach / detach the substrate 50 and the back plate 52 without manual intervention. Therefore, the CVD apparatus 100 has high work efficiency of the film forming operation on the substrate 50.

  Moreover, since the attachment / detachment system S is for attaching / detaching the substrate by holding the edge surface 54 of the substrate 50, the front and back surfaces of the substrate 50 are not contaminated. Therefore, according to the CVD apparatus 100, a good film formation state on the substrate 50 can be obtained.

It is a perspective view which shows the attachment / detachment system of one Embodiment of this invention. It is a front view which shows the principal part of the attachment / detachment apparatus employ | adopted with the attachment / detachment system shown in FIG. (A) is a front view which shows the principal part of FIG. 2, (b) is sectional drawing of the same (a), (c) is a perspective view of the (a). (A), (b) is a perspective view which shows the other principal part of FIG. (A) is a perspective view which shows the board | substrate and backplate which are attached or detached by the attachment or detachment system shown in FIG. 1, The same (b) is the A section enlarged view of the same (a). (A) is a front view of the back board shown in FIG. 5, (b) is a rear view of the same (a). It is a perspective view which shows the principal part of the backplate shown in FIG. It is a conceptual diagram which shows the mode of operation of the locking member of the backplate shown to FIG. (A) is a front view which shows the principal part of the state which overlap | superposed the board | substrate and the backplate, The same (b) is AA sectional drawing of the same (a). (A) is the front view which shows the holder 70, (b) is the A section enlarged view of (a), (c) is CC sectional drawing of the (b), (d) is (d). It is a perspective view which shows the A section of the same (a). It is a perspective view which shows the B section of Fig.10 (a). It is a front view of the hand part employ | adopted as the board | substrate transfer apparatus. It is a conceptual diagram which shows the mode of the transfer of the board | substrate by a board | substrate transfer apparatus. It is an operation | movement principle figure which shows the CVD apparatus of one Example of this invention. (A) is a front view of a substrate carrier adopted in the CVD apparatus of FIG. 14, and (b) is a side view of (a).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Detachable device 4 Robot arm 5 Hand part 22 Substrate hand 23 Lock hand 32 Gutter part 37, 45 Hand pick 50 Substrate 51 Back surface 52 Back plate 53 Contact surface 54, 57 Edge surface 55 Back surface 56 Lock member 70 Holder (mounting member)
71 Exposed Port 72 Mounting Surface 73 Exposed Surface 80 Substrate Transfer Device 85 Hand Unit 100 CVD Device (Film Forming Device)
102 Board receiving / dispensing department

Claims (14)

The substrate is made of glass, and the substrate is attached to a mounting member having an exposure opening that exposes a part or all of the substrate. Further, on the back side of the substrate, the substrate and the end are approximately the same size as the substrate. After the back plate of a size that can be aligned is attached, remove the mounting body with the substrate and the back plate overlapped, with the substrate and the back plate overlapped, and at least replace the substrate to replace the substrate and the back plate. clamping a detachable device for re-inserted into the mounting member overlapping the plate, of the edge surface facing the mounting member, the contact with the mounting member to the edge surface facing edge surface or both to one face An attaching / detaching device comprising: a holding means for simultaneously holding two substrates and a back plate constituting the mounting body; and a moving means for moving the mounting body while holding the mounting body by the holding means.   The attachment / detachment device according to claim 1, wherein the holding means has a hook-like tip.   The sandwiching means includes a first movable member that reciprocates on a predetermined surface in a predetermined direction, and a second movable member that reciprocates on the surface in a direction intersecting the moving direction of the first movable member. The attachment / detachment device according to claim 1, further comprising:   The moving means has a plurality of arm parts and an attaching / detaching part to which the holding means is attached, and the adjacent arm parts or the arm part and the attaching / detaching part are rotatably connected via the joint part. The attachment / detachment device according to any one of claims 1 to 3.   5. The attachment / detachment device according to claim 1, the attachment member which is a member separate from the attachment / detachment device and to which the attachment body is attached, and the attachment body is fixed to the attachment member. A fixing means, and the attachment / detachment device has a hand portion that is mounted on the moving means and can be moved to the vicinity of the mounting member by the moving means and can be separated from the mounting member. An attachment / detachment system comprising: attachment / detachment means for moving the fixing means to a fixed state or a fixed release state.   6. The attachment / detachment system according to claim 5, further comprising conveying means for conveying the mounting body in a standing state. The attachment / detachment system according to claim 5 or 6, wherein the back plate is substantially equal in size to the substrate and can be aligned with the end portion of the substrate and is smaller than the substrate.   The mounting member has a mounting surface on which the mounting body is mounted, and the mounting surface is provided with an insertion port through which a part of the holding means of the attachment / detachment device can be inserted. The detachable system according to any one of   9. The attachment / detachment system according to claim 5, wherein the fixing means is located at a position corresponding to the periphery of the exposure port.   The attaching / detaching system according to claim 5, further comprising an urging unit that urges the mounting body toward the mounting member.   The attachment / detachment system according to any one of claims 5 to 10, wherein the back plate is made of carbon.   The moving means has a transfer means for supporting the mounting body from the back plate side and detaching at least the substrate leaving at least the back plate from the mounting body supported by the moving means. A holding member having an edge contact portion that contacts the edge surface side and a flange that can contact the surface of the substrate, and the back plate corresponds to the holding member provided in the transfer means The attachment / detachment system according to any one of claims 5 to 11, wherein a notch portion for preventing interference between the flange portion and the back plate is provided at a position to be mounted.   A film forming apparatus, wherein the attachment body is attached / detached by the attachment / detachment system according to claim 5.   The film forming apparatus according to claim 13, wherein the film is formed on the surface of the substrate by chemical vapor deposition.

Images