JP2013229619A - Substrate holder and bonding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the throughput of a joining device.SOLUTION: A substrate joining device overlaps multiple substrates and joins the multiple substrates. The substrate joining device includes: a pressurizing part pressurizing the multiple substrate holders holding the multiple substrates while heating the multiple substrate holders; and a temperature control part equalizing thermal distribution of the substrate holders which are carried out from the pressurizing part and release the substrates held by themselves in a shorter time compared to a case that the substrate holders are left. The temperature control part may use a gaseous refrigerant. The substrate joining device may further include a cooling chamber cooling the substrate holders that are carried out from the pressurizing part holding the substrates. The cooling chamber may use a liquid refrigerant.

Description

  The present invention relates to a detection device, a substrate holding member, a transfer device, and a bonding device.

An electrostatic chuck for adsorbing an object to be fixed such as a substrate adsorbs the object to be fixed by an electrostatic attraction force. Further, there is one that monitors the current flowing through the electrostatic chuck in the process of holding the substrate by the electrostatic chuck and confirms that the operation of holding or releasing the substrate is completed by increasing or decreasing the current (for example, patents) Reference 1).
JP-A-11-168133

  The technique described in Patent Document 1 confirms the completion of the operation of the electrostatic chuck holding or releasing the substrate. However, it is difficult to accurately measure a substrate having an insulating layer on the surface because a current flowing through the substrate is very small.

  In order to solve the above problems, as a first embodiment of the present invention, an adsorption surface that adsorbs a substrate by an electrostatic adsorption force, and a substrate that adsorbs a substrate to the adsorption surface by opening one end of the adsorption surface A detection apparatus comprising: a substrate holding member having a detection hole to be sealed; and a detection unit that detects whether the detection hole is sealed by the substrate, thereby detecting that the substrate is sucked to the suction surface. Is provided.

  Further, as a second aspect of the present invention, an adsorption surface that adsorbs a substrate by electrostatic adsorption force, and detection that is sealed by the substrate when one end is opened on the adsorption surface and the substrate is adsorbed to the adsorption surface A detection unit that has a hole and detects whether or not the detection hole is sealed by the substrate provides a substrate holding member that detects that the substrate is adsorbed to the adsorption surface.

  Furthermore, as a third aspect of the present invention, an adsorption surface that adsorbs a substrate by electrostatic adsorption force, and detection that is sealed by the substrate when one end is opened on the adsorption surface and the substrate is adsorbed to the adsorption surface A substrate holding member having a hole, a detection unit that detects whether the detection hole is sealed by the substrate, and a substrate held by the substrate holding member by detecting whether the detection hole is sealed by the substrate. A transport device is provided that includes a transport unit that is moved.

  Furthermore, as a fourth embodiment of the present invention, an adsorption surface that adsorbs a substrate by electrostatic adsorption force, and when the substrate is adsorbed to the adsorption surface by opening one end of the adsorption surface, the substrate is sealed. A pair of a substrate holding member having a detection hole, a detection unit that detects whether the detection hole is sealed by the substrate, and a detection unit that detects that the substrate is adsorbed on the adsorption surface There is provided a bonding apparatus including a bonding portion that aligns and abuts the substrate holding members.

  The above summary of the invention does not enumerate all the features of the invention. Further, a sub-combination of these feature groups can be an invention.

  Hereinafter, the present invention will be described through embodiments of the invention. The embodiments described below do not limit the invention according to the claims. In addition, not all combinations of features described in the embodiments are essential for the solution of the invention.

  FIG. 1 is a plan view schematically showing the entire structure of the bonding apparatus 100. The bonding apparatus 100 includes a normal temperature part 102 and a high temperature part 202 formed inside a common housing 101.

  The normal temperature unit 102 has a plurality of substrate cassettes 111, 112, 113 and a control panel 120 facing the outside of the housing 101. The control panel 120 includes a control unit that controls the operation of the entire bonding apparatus 100. In addition, the control panel 120 has an operation unit that is operated by the user from the outside when the bonding apparatus 100 is turned on and various settings are made. Furthermore, the control panel 120 may include a connection unit that connects to other deployed devices.

  The substrate cassettes 111, 112, and 113 accommodate the substrate 180 bonded in the bonding apparatus 100 or the substrate 180 bonded in the bonding apparatus 100. The substrate cassettes 111, 112, and 113 are detachably attached to the housing 101. As a result, a plurality of substrates 180 can be loaded into the bonding apparatus 100 at once. Further, the substrates 180 bonded in the bonding apparatus 100 can be collected together.

  The room temperature unit 102 includes a pre-aligner 130, a bonding unit 140, a substrate holder rack 150, a substrate removal unit 160, and a pair of robot arms 171 and 172, which are disposed inside the housing 101. The inside of the housing 101 is temperature-managed so that substantially the same temperature as the room temperature of the environment where the bonding apparatus 100 is installed is maintained. Thereby, since the precision of the junction 140 is stabilized, the positioning can be made precise.

  Since the pre-aligner 130 is highly accurate, the positions of the individual substrates 180 are temporarily aligned so that the positions of the substrates 180 are within the narrow adjustment range of the joint 140. Thereby, positioning in the junction 140 can be ensured.

  The substrate holder rack 150 accommodates a plurality of substrate holders 190 and makes them stand by. The substrate 180 is held by the substrate holder 190 by, for example, electrostatic adsorption.

  The joint 140 includes a fixed stage 141, a moving stage 142, and an interferometer 144. Further, a heat insulating wall 145 and a shutter 146 are provided so as to surround the joint 140. The space surrounded by the heat insulating wall 145 and the shutter 146 is communicated with an air conditioner or the like, and the temperature is controlled, so that the alignment accuracy at the joint 140 is maintained. The detailed structure and operation of the joint 140 will be described later with reference to other drawings.

  In the bonding unit 140, the moving stage 142 transports the substrate 180 or the substrate holder 190 that holds the substrate 180. In contrast, the fixed stage 141 holds the substrate holder 190 and the substrate 180 in a fixed state.

  The substrate removing unit 160 takes out the substrate 180 sandwiched and bonded by the substrate holder 190 from the substrate holder 190 carried out from the pressurizing unit 240 described later. The substrate 180 taken out from the substrate holder 190 is returned to and stored in one of the substrate cassettes 111, 112, 113 by the robot arms 172, 171 and the moving stage 142. The substrate holder 190 from which the substrate 180 has been taken out is returned to the substrate holder rack 150 and waits.

  Note that the substrate 180 loaded in the bonding apparatus 100 may be a single silicon wafer, compound semiconductor wafer, glass substrate, or the like, in which elements, circuits, terminals, and the like are formed. In addition, the loaded substrate 180 may be a laminated substrate that is already formed by laminating a plurality of wafers.

  Of the pair of robot arms 171 and 172, the robot arm 171 disposed on the side closer to the substrate cassettes 111, 112, and 113 conveys the substrate 180 between the substrate cassettes 111, 112, 113, the pre-aligner 130, and the bonding portion 140. To do. The robot arm 171 also has a function of turning over one of the substrates 180 to be joined. Accordingly, the surfaces of the substrate 180 on which circuits, elements, terminals, and the like are formed can be opposed to each other.

  On the other hand, the robot arm 172 disposed on the side far from the substrate cassettes 111, 112, and 113 includes the substrate 180 and the substrate between the bonding unit 140, the substrate holder rack 150, the substrate removal unit 160, the substrate holder rack 150, and the air lock 220. The holder 190 is conveyed. The robot arm 172 is also responsible for loading and unloading the substrate holder 190 with respect to the substrate holder rack 150.

  The high temperature unit 202 includes a heat insulating wall 210, an air lock 220, a robot arm 230, and a plurality of pressure units 240. The heat insulating wall 210 surrounds the high temperature part 202 to maintain a high internal temperature of the high temperature part 202 and to block heat radiation to the outside of the high temperature part 202. Thereby, the influence which the heat of the high temperature part 202 has on the normal temperature part 102 can be suppressed.

  The robot arm 230 conveys the substrate 180 and the substrate holder 190 between any of the pressurizing units 240 and the air lock 220. The air lock 220 includes shutters 222 and 224 that open and close alternately on the normal temperature part 102 side and the high temperature part 202 side.

  When the substrate 180 and the substrate holder 190 are carried into the high temperature unit 202 from the normal temperature unit 102, first, the shutter 222 on the normal temperature unit 102 side is opened, and the robot arm 172 carries the substrate 180 and the substrate holder 190 into the air lock 220. . Next, the shutter 222 on the normal temperature part 102 side is closed, and the shutter 224 on the high temperature part 202 side is opened.

  Subsequently, the robot arm 230 unloads the substrate 180 and the substrate holder 190 from the air lock 220 and loads them into one of the pressurizing units 240. The pressurizing unit 240 presses the substrate 180 carried into the pressurizing unit 240 while being sandwiched between the substrate holders 190 with heat. Thereby, the substrate 180 is permanently bonded.

  When the substrate 180 and the substrate holder 190 are carried out from the high temperature unit 202 to the normal temperature unit 102, the above series of operations are executed in reverse order. Through a series of these operations, the substrate 180 and the substrate holder 190 can be carried into or out of the high temperature part 202 without leaking the internal atmosphere of the high temperature part 202 to the normal temperature part 102 side.

  As described above, in many areas in the bonding apparatus 100, the substrate holder 190 is transferred to the robot arms 172 and 230 and the moving stage 142 while holding the substrate 180. When the substrate holder 190 holding the substrate 180 is transported, the robot arms 172 and 230 attract and hold the substrate holder 190 by vacuum suction, electrostatic suction or the like. The substrate holder 190 attracts and holds the substrate 180 by electrostatic attraction.

  As a result, the substrate 180 is not dropped from the substrate holder 190 being transferred. However, when an unexpected impact is transmitted from the outside, the substrate 180 is not dropped or the position of the substrate 180 is not shifted on the substrate holder 190.

  In the bonding apparatus 100 having the above structure, each of the substrates 180 is initially individually accommodated in one of the substrate cassettes 111, 112, and 113. The substrate holder 190 is also individually accommodated in the substrate holder rack 150.

  When the bonding apparatus 100 starts operating, the robot arm 171 carries the substrates 180 one by one into the pre-aligner 130 and pre-aligns them. On the other hand, the robot arm 172 carries a single substrate holder 190 on the moving stage 142 and conveys it to the vicinity of the robot arm 171. The robot arm 171 mounts and holds the pre-aligned substrate 180 on the substrate holder 190.

  When the substrate holder 190 holding the substrate 180 is the first one, the moving stage 142 moves again to the robot arm 172 side, and the substrate holder 190 turned upside down by the robot arm 172 is mounted on the fixed stage 141. On the other hand, when the substrate holder 190 is the second one, the moving stage 142 is precisely moved while monitoring the position by the interferometer 144, and the substrate 180 held on the fixed stage 141 via the substrate holder 190 is moved to the substrate 180. Align and join to each other.

  The substrate holder 190 sandwiching the bonded substrates 180 is transferred to the air lock 220 by the robot arm 172. The substrate 180 and the substrate holder 190 conveyed to the air lock 220 are loaded into the pressurizing unit 240.

  By being heated and pressurized in the pressurizing unit 240, the substrates 180 are joined and integrated. Thereafter, the substrate 180 and the substrate holder 190 are unloaded from the high temperature unit 202, and the substrate 180 and the substrate holder 190 are separated at the substrate removal unit 160. In view of such a usage method, the substrate holder 190 is used in a pair of two in the bonding apparatus 100.

  The bonded substrates 180 are conveyed and stored in any of the substrate cassettes 111, 112, and 113. In this case, the moving stage 142 is also involved in the transfer from the robot arm 172 to the robot arm 171. The substrate holder 190 is returned to the substrate holder rack 150 by the robot arm 172.

  FIG. 2 is a cross-sectional view schematically showing the structure of the joint 140 alone. The joining unit 140 includes a fixed stage 141, a moving stage 142, and an elevating / lowering unit 360 disposed inside the frame 310.

  The frame 310 includes a top plate 312 and a bottom plate 316 that are parallel to each other and a plurality of support columns 314 that couple the top plate 312 and the bottom plate 316. The top plate 312, the support column 314, and the bottom plate 316 are each formed of a highly rigid material and do not deform even when a reaction force relating to the operation of the internal mechanism is applied. In addition, when it integrates in the bonding apparatus 100, between the support | pillars 314 is sealed with the heat insulation wall 145. FIG.

  The fixed stage 141 is fixed to the lower surface of the top plate 312 and holds the substrate 182 held by the substrate holder 192 on the lower surface. The substrate 182 is held on the lower surface of the substrate holder 192 by electrostatic attraction, and becomes one of alignment targets to be described later.

  The moving stage 142 is placed on the bottom plate 316 and moved in the X direction while being guided by a guide rail 352 fixed to the bottom plate, and the Y stage moves on the X stage 354 in the Y direction. Stage 356. Thereby, the member mounted on the moving stage 142 can be moved in any direction on the XY plane.

  The elevating unit 360 is mounted on the moving stage 142 and includes a cylinder 362 and a piston 364. The piston 364 moves up and down in the Z direction in the cylinder 362 in response to an instruction from the outside.

  A substrate holder 194 is held on the upper surface of the piston 364. Further, the substrate 184 is held on the substrate holder 194. The substrate 184 is one of alignment targets to be described later.

  Each of the substrates 182 and 184 has an alignment mark M serving as an alignment reference on the surface (the lower surface in the drawing). However, the alignment mark M is not necessarily a graphic or the like provided for that purpose, but may be a wiring, a bump, a scribe line, or the like formed on the substrates 182 and 184.

  The joining unit 140 further includes a pair of microscopes 342 and 344 and a reflecting mirror 372. One microscope 342 is fixed to the lower surface of the top plate 312 with a predetermined interval with respect to the fixed stage 141.

  The other microscope 344 and reflecting mirror 372 are mounted on the moving stage 142 together with the elevating unit 360. Thereby, the microscope 344 and the reflecting mirror 372 move on the XY plane together with the lifting unit 360. When the moving stage 142 is in a stationary state, the microscope 344 and the reflecting mirror 372 and the elevating unit 360 have a known distance. Further, the distance between the center of the elevating unit 360 and the microscope 344 coincides with the distance between the center of the fixed stage 141 and the microscope 342.

  When the bonding portion 140 is in the state shown in the drawing, the alignment mark M of the opposing substrates 184 and 182 can be observed using the microscopes 342 and 344. Therefore, for example, the exact position of the substrate 184 can be known from the image obtained by the microscope 342. Further, the exact position of the substrate 182 can be known from the image obtained by the microscope 344.

  The reflecting mirror 372 is used when the moving amount of the moving stage 142 is measured using a measuring device such as an interferometer. In FIG. 1, a reflecting mirror 372 arranged at right angles to the paper surface is shown, but another reflecting mirror 372 for detecting movement in the Y direction is also provided.

  FIG. 3 is a diagram illustrating the operation of the joint 140. As shown in the figure, the moving stage 142 is moved in the X direction. Here, by making the movement amount of the moving stage 142 the same as the distance between the center of the elevating unit 360 and the center of the microscope 344, the substrate 184 is transported directly below the substrate 182. At this time, the alignment marks M of the substrates 182 and 184 are located on one vertical line.

  In addition, the junction part 140 can be used not only for the bonding apparatus 100 but for another use. In addition, by bonding and heating the bonded substrate 180 in the bonding portion 140, the bonding apparatus 100 in which the pressing portion 240 is omitted can be formed.

  FIG. 4 is a perspective view showing a state in which the substrate holder 194 is looked down from above. A substrate 184 is held on the upper surface of the substrate holder 194. FIG. 5 is a perspective view showing the same substrate holder 194 as viewed from below.

  The substrate holder 194 includes a holder main body 910, an adsorber 920, and a voltage application terminal 930, and has a disk shape whose diameter is slightly larger than that of the substrate 184 as a whole. The holder body 910 is integrally formed of a highly rigid material such as ceramic or metal. The adsorbers 920 are formed of a magnetic material, and a plurality of the adsorbers 920 are arranged outside the held substrate 184 on the surface holding the substrate 184. The voltage application terminal 930 is embedded in the back surface of the surface holding the substrate 184.

  The holder main body 910 is in contact with the substrate 184 to be held with a high flatness in the region holding the substrate 184 on the surface thereof. In addition, the holder body 910 has a plurality of positioning holes 912 and observation holes 914 formed through the holder body 910 on the front and back sides, respectively, outside the region where the held substrate 184 is sucked. Furthermore, the holder main body 910 has a plurality of working holes 916 and detection holes 918 formed through the holder main body 910 on the front and back sides inside the region where the held substrate 184 is sucked.

  The positioning holes 912 are fitted to drop-off prevention pins provided in the robot arms 171, 172, 230, etc., and are used for positioning the substrate holder 194. The observation hole 914 has a fiducial mark 915 on the end surface on the side holding the substrate 180. By observing the fiducial mark 915 through the observation hole 914, the position of the substrate 180 that cannot be seen when sandwiched between the substrate holders 192 and 194 can be estimated as will be described later.

  The work hole 916 allows a push pin or the like to be inserted from the lower surface of the holder body 910 when the substrate 184 is removed from the substrate holder 194. The detection holes 918 each open at one end near the edge of the substrate 184 in the region of the holder body 910 that attracts the substrate 184. The working hole 916 and the detection hole 918 are formed at positions corresponding to the outer edge region where no element is formed on the substrate 184 so as not to affect the substrate 184 to be joined by pressurization via the substrate holder 194. It is preferable. A method of using the detection hole 918 will be described later with reference to other drawings.

  Note that the detection hole 918 may also be used as a hole in the holder main body 910 used during a period when the substrate holder 190 does not hold the substrate 180. For example, when the detection hole 918 is also used as the work hole 916, a push pin is inserted into the detection hole 918.

  The adsorber 920 is disposed in a depressed region formed in the holder main body 910 so that the upper surface thereof is positioned in substantially the same plane as the plane that holds the substrate 184. The voltage application terminal 930 is embedded in the holder body 910 on the back surface with respect to the front surface that holds the substrate 184. By applying a voltage via the voltage application terminal 930, a potential difference is generated between the substrate holder 194 and the substrate 184, and the substrate 184 is attracted to the substrate holder 194.

  FIG. 6 is a perspective view showing a state in which a substrate holder 192 having another structure is looked down from above. FIG. 7 is a perspective view showing the same substrate holder 192 as viewed from below. The substrate holder 192 holds the substrate 182 on its lower surface.

  The substrate holder 192 includes a holder body 910, a voltage application terminal 930, and a permanent magnet 940, and has a disk shape whose diameter is slightly larger than that of the substrate 182 as a whole. The holder body 910 is integrally formed of a highly rigid material such as ceramic or metal. A plurality of the permanent magnets 940 are arranged outside the held substrate 182 on the surface holding the substrate 182. The voltage application terminal 930 is embedded in the back surface of the surface holding the substrate 182.

  The holder main body 910 has a high flatness in a region for holding the substrate 182 on the surface thereof, and is adsorbed to the substrate 182 to be held. The holder main body 910 has a plurality of positioning holes 912, observation holes 914, and detection holes 918 formed through the holder main body 910 on the front and back sides, respectively, outside the region where the held substrate 182 is sucked. Furthermore, the holder main body 910 has a plurality of working holes 916 formed through the holder main body 910 on the front and back sides inside a region that adsorbs the held substrate 182.

  The positioning hole 912 is fitted to a positioning pin provided in the joint portion 140 and is used for positioning the substrate holder 192. The observation hole 914 has a fiducial mark 915 on the end surface on the side holding the substrate 180. By observing the fiducial mark 915 through the observation hole 914, the position of the substrate 180 that cannot be seen when sandwiched between the substrate holders 192 and 194 can be estimated as will be described later.

  The work hole 916 allows a push pin or the like to be inserted from the back surface of the substrate holder 190 when the substrate 182 is removed from the substrate holder 192. The detection holes 918 each open at one end in the vicinity of the edge of the substrate 182 in the region of the holder body 910 that attracts the substrate 182. This prevents the work hole 916 and the detection hole 918 from affecting the substrate 184 to be bonded by applying pressure through the substrate holder 194. A method of using the detection hole 918 will be described later with reference to other drawings.

  The permanent magnet 940 is disposed on the peripheral edge of the holder main body 910 so that the lower surface is located in the same plane as the surface of the held substrate 182. The voltage application terminal 930 is embedded in the holder main body 910 on the back surface opposite to the lower surface that holds the substrate 182. By applying a voltage via the voltage application terminal 930, a potential difference is generated between the substrate holder 192 and the substrate 182, and the substrate 182 is attracted to the substrate holder 194.

  FIG. 8 is a cross-sectional view illustrating an aspect in the case of using a combination of the two types of substrate holders 192 and 194 as described above. In the bonding apparatus 100 shown in FIG. 1, the substrate holders 192 and 194 holding the substrates 182 and 184 are aligned and brought into contact with each other at the bonding portion 140, and the substrates 182 and 184 are bonded at the pressing portion 240. Let For this reason, it is required to maintain the relative positions of the unbonded substrates 182 and 184 while being transported from the joint 140 to the pressure unit 240. In response to such a request, the substrate holders 192 and 194 can autonomously hold the relative positions of the substrates 182 and 184 by attracting the attractor 920 of the substrate holder 194 to the permanent magnet 940 of the substrate holder 192.

  FIG. 9 is an enlarged perspective view showing the distal ends of the robot arms 172 and 230 used in the bonding apparatus 100. The robot arms 172 and 230 have different specifications from the robot arm 171 in that the substrate holders 192 and 194 may be transferred.

  That is, the robot arm 171 transports the single substrates 182 and 184 or the bonded substrates 182 and 184. On the other hand, the robot arms 172 and 230 convey the substrate holders 192 and 194 holding the substrates 182 and 184, respectively. Since the masses of the substrate holders 192 and 194 are larger than those of the substrates 182 and 184, the robot arms 172 and 230 have a structure capable of withstanding a large load.

  The robot arms 172 and 230 have a mounting portion 410, a fall prevention cover 420, an actuator 430 and a bracket 440. The bracket 440 couples the mounting portion 410, the fall prevention cover 420, and the actuator 430 to the robot arm main body. The mounting portion 410 and the actuator 430 are directly supported from the bracket 440, and the fall prevention cover 420 is supported and driven from the actuator 430.

  In the mounting portion 410, packings 412 and 472, a suction hole 414, and a detection hole extension portion 474 are arranged at three locations, each upper surface of the forked end and the root of the forked portion. A pair of connection terminals 450 are arranged on the side of the packing 412 at the base of the mounting portion 410. Further, four dropout prevention pins 460 are disposed on the upper surface of the mounting portion 410.

  The mounting portion 410 includes packings 412 and 472, suction holes 414, and detection hole extensions 474. It has a mounting portion 410, a fall prevention cover 420 that moves forward and backward above the mounting portion 410, and an actuator 430 that drives the fall prevention cover 420. The mounting unit 410, the fall prevention cover 420, and the actuator 430 are also provided with a bracket 440 for mounting the robot arm body.

  The packings 412 and 472 are formed in an annular shape from a material having elasticity, and form an adsorption region on the upper surface of the mounting portion 410. When the substrate holders 192 and 194 are mounted on the mounting portion 410, the packings 412 and 472 are adsorbed on the lower surface of the holder body 910 in an airtight manner. The suction holes 414 are individually arranged inside the area surrounded by the packing 412, and the detection hole extensions 474 are individually arranged inside the area surrounded by the packing 472.

  The dropout prevention pins 460 are arranged corresponding to the outer shape of the substrate holder 192. Thereby, when the substrate holder 192 is mounted on the mounting portion 410, the edge portion of the substrate holder 192 contacts the drop-off prevention pin 460. This prevents the substrate holder 192 from falling off the mounting portion 410. In a state in which the substrate holder 192 is mounted on the mounting portion 410, the detection hole extension 474 communicates with the detection hole 918. Thus, the packing 472 hermetically seals the space between the mounting portion 410 and the substrate holder 192, so that the inside of the detection hole 918 can be exhausted via the detection hole extension 474.

  Further, by mounting the substrate holder 192 on the mounting portion 410, the connection terminal 450 comes into contact with the voltage application terminal 919 of the substrate holder 192. Thereby, electrostatic adsorption of the substrate 184 by the substrate holder 192 held by the mounting portion 410 can be started or released.

  The fall prevention cover 420 is driven by the actuator 430, and moves forward and backward between the illustrated position retracted to the bracket 440 and the position advanced above the mounting portion 410. Further, when moving forward above the mounting portion 410, there is a gap larger than the combined thickness of the substrate holder 192 and the substrate 182 between the upper surface of the mounting portion 410 and the lower surface of the fall prevention cover 420. With such a structure, when the substrate holder 192 is supported on the mounting portion 410, it is possible to prevent the substrate holder 192 located above the substrate holder 192 from being released from being dropped from the mounting portion 410. .

  FIG. 10 is a diagram schematically showing the structure of the detection device 500 using the detection hole 918. Here, the detection apparatus 500 that detects whether the substrate 180 is held by the substrate holder 190 in a state where the substrate holder 190 is mounted on the robot arm 172 will be described. It should be noted that the same reference numerals are assigned to the same components as those in the other drawings, and redundant description is omitted.

  Sensing device 500 includes a pressure sensor 510 and a determination unit 520. The pressure sensor 510 is attached to the mounting portion 410 and detects a change in the internal pressure of the detection hole extension 474. Determination unit 520 determines whether substrate 180 is held by substrate holder 190 based on the change in pressure detected by pressure sensor 510.

  That is, the substrate holder 190 holding the substrate 180 is mounted on the mounting portion 410. The suction hole 414 of the mounting portion 410 communicates with the reduced pressure source 540 via the control valve 560. In addition, the detection hole extension 474 of the mounting portion 410 communicates with the decompression source 540 via the control valve 550.

  When the control unit 530 opens the control valves 550 and 560, the insides of the suction hole 414 and the detection hole extension 474 are depressurized, and the suction hole 414 attracts the substrate holder 190 to the mounting unit 410. In addition, the detection hole extension 474 exhausts the inside of the detection hole 918 of the substrate holder 190.

  Here, when the substrate 180 is held by the substrate holder 190, the detection hole 918 is sealed by the substrate 180, so that the internal pressure thereof decreases. However, when the substrate 180 is not held, the upper end of the detection hole 918 is opened, and the internal pressure of the detection hole extension 474 does not decrease even though the decompression source 540 is exhausted. Accordingly, since the pressure sensor 510 detects a high pressure, the determination unit 520 determines that the substrate 180 is not held by the substrate holder 190.

  In addition, although the structure of the detection apparatus 500 was demonstrated about the substrate holder 190 mounted in the robot arm 172, when mounting the substrate holder 190 in stage apparatuses, such as the fixed stage 141 of the junction part 140, or the moving stage 142, for example. Even if it is, the detection apparatus 500 can be formed. That is, the detection of the substrate 180 using the detection hole 918 can be performed in the same manner by providing a suction hole opened in the surface that adsorbs the substrate holder 190 in the fixed stage 141 or the moving stage 142.

  FIG. 11 is a diagram for explaining another mode in which the substrate 180 is detected by the detection device 500. The figure shows a state where the substrate 180 is held by the substrate holder 190 together with a state of looking down from above and a cross section including a plurality of detection holes 918.

  The plurality of detection holes 918 are opened along the edge of the held substrate 180 on the surface of the substrate holder 190. Therefore, when the substrate 180 is held at the center of the substrate holder 190, all the detection holes 918 are sealed by the substrate 180.

  FIG. 12 shows a state in which the substrate 180 is held biased in contrast to FIG. Since the detection hole 918 is disposed in the vicinity of the edge of the substrate 180, when the substrate 180 is biased and held by the substrate holder 190, any of the detection holes 918 is not sealed. Thereby, the detection apparatus 500 can detect not only the presence / absence of the substrate 180 but also that the substrate 180 is held biased.

  In this case, by detecting whether each of the plurality of detection holes 918 is sealed, it is possible to detect which side the substrate 180 is biased on the surface of the substrate holder 190. For example, in the bonding portion 140, since the deviation of the substrate 180 affects the alignment operation, it is effective to detect the deviation as well as the presence or absence of the substrate 180.

  FIG. 13 is a flowchart showing a control procedure of the bonding apparatus 100 using the detection apparatus 500. As illustrated, during the period in which the substrate holder 190 should hold the substrate 180, the determination unit 520 determines whether there is a detection hole 918 that is not sealed by the substrate 180 (step S101).

  When all the detection holes 918 are sealed with the substrate 180 (step S101: NO), the detection holes 918 are continuously monitored. On the other hand, if there is a detection hole 918 that is not sealed (step S101: YES), it is monitored whether there is a detection hole 918 that is sealed (step S102).

  When there is no sealed detection hole 918 (step S102: NO), the determination unit 520 determines that the substrate 180 has dropped from the substrate holder 190, and notifies the control panel 120 to perform bonding. The operation of the apparatus 100 is stopped (step S104). Thereby, the failure which arises in the bonding apparatus 100 by the board | substrate 180 which fell can be prevented beforehand.

  On the other hand, when there is a sealed detection hole 918 (step S102: YES), it is determined that the substrate 180 is displaced on the substrate holders 190 and 192, and the control panel 120 is notified. Thereby, the control panel 120 conveys the substrate holder 190 to another area different from the joining part 140, the pressurizing part 240, and the like (step S103). Thereby, for example, by remounting the substrate 180 on the substrate holder 190, the yield of the stacked semiconductor device can be improved.

  By the way, there are cases where the substrate 180 and the substrate holder 190 are handled in a vacuum environment, such as an extreme ultraviolet exposure apparatus. In such a case, whether or not the detection hole 918 is sealed cannot be detected even if the inside of the detection hole 918 is depressurized or the gas flows from the inside of the detection hole 918 to the outside and depressurizes. .

  FIG. 14 is a diagram schematically showing a form of a detection device 500 corresponding to a vacuum environment. The substrate holder 190 holds the substrate 180 inside the vacuum vessel 570. The vacuum vessel 570 is exhausted from the exhaust port 580, and the inside is in a reduced pressure environment. For this reason, since the mounting part 410 cannot be attracted | sucked by pressure reduction, the board | substrate holder 190 is hold | maintained by electrostatic attraction | suction. Therefore, the suction hole 414 is not provided in the mounting portion 410.

  However, the mounting portion 410 has a detection hole extension 474 that communicates with the pressure source 542. When the substrate holder 190 is mounted on the mounting portion 410, the detection hole 918 communicates with the detection hole extension 474 in an airtight manner by the packing 412. Therefore, when the substrate holder 190 holds the substrate 180 and the detection hole 918 is sealed by the substrate 180, the inside of the detection hole 918 is pressurized according to the pressure of the pressure source 542.

  On the other hand, when the substrate holder 190 does not hold the substrate 180, all the detection holes 918 are opened, and the pressure inside the detection holes 918 decreases. In addition, when the substrate holder 190 holds the substrate 180 in a biased state, one of the detection holes 918 is opened. Accordingly, by monitoring the pressure inside the detection hole extension 474 by the pressure sensor 510, the determination unit 520 determines that the substrate holder 190 does not hold the substrate 180 or the substrate holder 190 biases the substrate 180. It can be determined that it is held.

  That is, when the internal pressure of the detection hole extension 474 is close to the pressure of the pressure source 542, the substrate holder 190 holds the substrate 180. Further, when the internal pressure of the detection hole extension 474 becomes low, it can be determined that the substrate holder 190 does not hold the substrate 180.

  Note that since the gas supplied into the detection hole 918 contacts the substrate 180 held by the substrate holder 190, an inert gas that is chemically stable with respect to the substrate 180 can be selected as the gas. preferable. Further, as long as the internal pressure of the detection hole 918 does not exceed the force by which the substrate holder 190 attracts the substrate 180, the presence / absence of the substrate 180 can be detected with the same structure even in a non-reduced environment. Can do. In that case, the inside of the detection hole 918 may be pressurized by the atmosphere of the substrate 180, for example, air.

  FIG. 15 is a diagram schematically showing another form of the detection device 500 corresponding to the vacuum environment. Note that the same reference numerals are assigned to elements common to those in FIG. 14, and redundant description is omitted. Except for the parts described below, the other elements and operations are the same as those shown in FIG.

  The detection device 500 includes a mass spectrometer 512 provided at the exhaust port 580 instead of the pressure sensor 510 provided at the detection hole extension 474. The mass spectrometer 512 detects the composition of the gas flowing through the exhaust port 580 with high sensitivity using the fact that the movement of the charged particles in the magnetic field is related to the mass and the charge. On the other hand, the detection apparatus 500 includes a He pressure source 544 and pressurizes the inside of the detection hole 918 by supplying He gas to the detection hole 918 via the detection hole extension 474.

  When the substrate holder 190 does not hold the substrate 180, all the detection holes 918 are opened, and He gas flows out into the vacuum vessel 570. When the substrate holder 190 holds the substrate 180 in a biased state, one of the detection holes 918 is opened and He gas flows out into the vacuum vessel 570.

  Since the inside of the vacuum vessel 570 is always evacuated, the He gas that has flowed into the interior eventually reaches the exhaust port 580 and is detected by the mass spectrometer 512. Accordingly, the determination unit 520 can determine that the substrate holder 190 does not hold the substrate 180 or that the substrate 180 is biased and held by the substrate holder 190.

  The He gas may be detected by a method other than mass spectrometry. Further, the gas supplied to the detection hole 918 is not limited to He. That is, any gas can be selected as long as it does not have a chemical effect on the substrate 180 and has a composition that can be detected at the exhaust port 580.

  FIG. 16 is a diagram schematically showing still another form of the detection device 500 corresponding to the vacuum environment. Note that the same reference numerals are assigned to elements common to those in FIG. 15 and redundant description is omitted. Except for the part described below, the other elements and operations are the same as those shown in FIG.

The detection device 500 includes a He pressure source 544 and an N ₂ pressure source 546 that are individually provided for the plurality of detection holes 918 of the substrate holder 190. Thereby, when the substrate holder 190 holds the substrate 180 in a biased state, gases having different compositions flow out into the vacuum vessel 570 according to the opened detection holes 918. Since the composition of the outflow gas is detected by the mass spectrometer 512, the determination unit 520 can determine which of the substrate 180 is biased on the substrate holder 190.

  If no gas is detected, it can be seen that the substrate holder 190 holds the substrate 180 in the center. When the substrate holder 190 does not hold the substrate 180, all gases are detected.

  In the example described above, an example in which holes that are not sealed by the substrate 180 are identified by supplying gases having different compositions to the detection holes 918 has been described. However, the form of the detection device 500 is not limited to this. For example, the detection hole in which the outflow of gas is generated by shifting the period of supplying the gas having the same composition to each of the detection holes 918 in terms of time. 918 can also be distinguished.

  That is, the gas that has flowed out of any of the detection holes 918 is supplied to the detection holes 918 one by one after a period of time during which the gas is scavenged from the inside of the vacuum vessel 570, so that the gas is detected by the mass spectrometer 512. Based on the detected timing, the detection hole 918 from which the gas is flowing out can be identified. Thereby, the determination unit 520 can determine in which direction the substrate 180 is displaced on the substrate holder 190.

  FIG. 17 is a diagram schematically illustrating the structure of a detection device 500 according to still another embodiment. This detection device 500 is depicted in contrast to the detection device 500 shown in FIG. 10, and common elements are denoted by the same reference numerals and redundant description is omitted. Further, except for the part described below, it has the same structure as the embodiment shown in FIG.

  This detection device 500 has a unique structure in that it includes an optical sensor 590 formed inside the detection hole extension 474 of the mounting portion 410. The optical sensor 590 includes a light source 592, a half mirror 594, and a light receiving element 596.

  When the substrate holder 190 holds the substrate 180 and the detection hole 918 is sealed by the substrate 180, the probe light emitted from the light source 592 passes through the detection hole 918 after passing through the half mirror 594. Then, the lower surface of the substrate 180 is irradiated. Since the substrate 180 such as a Si wafer has a high reflectance in the visible band, most of the irradiated light is reflected and reenters the half mirror 594. A part of the re-entered probe light is reflected by the half mirror 594 and enters the light receiving element 596. Thereby, the determination unit 520 determines that the detection hole 918 is sealed by the substrate 180 and the substrate 180 is held by the substrate holder 190.

  On the other hand, when the substrate holder 190 does not hold the substrate 180, the probe light emitted from the light source 592 is emitted from the detection hole 918 to the outside of the substrate holder 190 and there is no incident light to the light receiving element 596. Therefore, the determination unit 520 determines that the detection hole 918 is not sealed by the substrate 180. The detection device 500 operates in the same manner even in a vacuum environment.

  As described above, by providing a detection hole in the substrate holder 190, it is possible to easily monitor whether or not the substrate holder 190 is holding the substrate 180. Therefore, it is possible to continuously monitor that the substrate holder 190 does not hold the substrate 180 accidentally. Accordingly, the operation of the bonding apparatus or the bonding apparatus 100 can be stabilized, and the productivity of the stacked semiconductor device can be improved.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. In addition, it will be apparent to those skilled in the art that various modifications or improvements can be added to the above embodiment. Furthermore, it is apparent from the description of the scope of claims that embodiments with such changes or improvements can be included in the technical scope of the present invention.

1 is a plan view schematically showing the entire structure of a bonding apparatus 100. FIG. It is sectional drawing which shows typically the structure of the junction part 140 single. It is a figure which shows operation | movement of the junction part. It is a perspective view which shows a mode that the substrate holder 194 was looked down from upper direction. It is a perspective view which shows a mode that the substrate holder 194 was looked up from the downward direction. It is a perspective view which shows a mode that the substrate holder 192 was looked down from upper direction. It is a perspective view which shows a mode that the substrate holder 192 was looked up from the downward direction. It is sectional drawing which shows the use condition of the substrate holders 192 and 194. It is a perspective view which expands and shows the front-end | tip part of the robot arms 172 and 230. FIG. It is a figure which shows the structure of the detection apparatus 500 typically. It is a figure which shows the other aspect of the detection apparatus. It is a figure which shows the state by which the board | substrate 180 was biased and hold | maintained. 5 is a flowchart showing a control procedure of the bonding apparatus 100. It is a figure which shows typically one form of the detection apparatus. It is a figure which shows the other form of the detection apparatus 500 typically. It is a figure which shows typically the other form of the detection apparatus 500. FIG. It is a figure which shows the structure of the detection apparatus 500 typically.

DESCRIPTION OF SYMBOLS 100 Bonding apparatus, 101 Case, 102 Room temperature part, 111, 112, 113 Substrate cassette, 120 Control panel, 130 Pre-aligner, 140 Joint part, 141 Fixed stage, 142 Moving stage, 144 Interferometer, 145 Thermal insulation wall, 146, 222, 224 Shutter, 150 Substrate holder rack, 160 Substrate removal part, 171, 172, 230 Robot arm, 180, 182, 184 Substrate, 190, 192, 194 Substrate holder, 202 High temperature part, 210 Thermal insulation wall, 220 Air lock, 240 Pressurizing unit, 310 frame, 312 top plate, 314 column, 316 bottom plate, 342, 344 microscope, 352 guide rail, 354 X stage, 356 Y stage, 360 lifting unit, 362 cylinder, 364 piston, 372 reflector, 410 Mounting part, 412 , 472 Packing, 414 Suction hole, 420 Fall prevention cover, 430 Actuator, 440 Bracket, 450 connection terminal, 460 Drop-off prevention pin, 474 Detection hole extension, 500 Detector, 510 Pressure sensor, 512 Mass spectrometer, 520 Judgment unit 540 Depressurization source, 530 Control unit, 542 Pressure source, 544 He pressure source, 546 N ₂ pressure source, 550, 560 Control valve, 570 Vacuum vessel, 580 Exhaust port, 590 Optical sensor, 592 Light source, 594 Half mirror, 596 Light receiving element, 910 Holder body, 912 Positioning hole, 914 Observation hole, 915 Fiducial mark, 916 Work hole, 918 Detection hole, 919, 930 Voltage application terminal, 920 Adsorber, 940 Permanent magnet

Claims (20)

An adsorption surface for adsorbing the substrate by electrostatic adsorption force, and a substrate holding member having a detection hole sealed by the substrate when one end is opened on the adsorption surface and the substrate is adsorbed to the adsorption surface;
A detection device comprising: a detection unit that detects whether or not the detection hole is sealed by the substrate to detect that the substrate is adsorbed to the adsorption surface.   2. The detection device according to claim 1, wherein the substrate holding member has a plurality of detection holes each having one end opened in the vicinity of an edge portion of the substrate in a region of the suction surface that is attracted to the substrate.   The detection unit further includes a decompression unit that depressurizes the inside of the detection hole, and the detection hole is formed on the substrate based on the internal pressure of the detection hole that rises when the detection hole is not sealed by the substrate. The detection device according to claim 1, wherein the detection device detects whether or not sealing is performed.   The detection device according to claim 1, wherein the detection unit further includes an air supply unit that supplies air into the detection hole.   The detection device according to claim 4, wherein the force with which the gas supplied into the detection hole pushes the substrate is smaller than the force with which the electrostatic attraction force attracts the substrate.   The detection device according to claim 4, wherein the air supply unit supplies an inert gas.   The said detection part detects whether the said detection hole is sealed with the board | substrate based on the internal pressure of the said detection hole reduced when the said detection hole is not sealed with the board | substrate. Item 7. The detection device according to any one of Items 6 to 6.   The detection according to any one of claims 4 to 6, wherein the detection unit detects a gas leaked from the one end to the outside of the substrate holding member when the detection hole is not sealed by the substrate. apparatus.   The detection unit is configured to detect the gas leaked in association with the composition of the gas leaked from the one end of the detection hole to the outside of the substrate holding member when the detection hole is not sealed by the substrate. The detection device according to claim 8 which specifies.   The detection device according to claim 8, wherein the detection unit specifies a detection hole in which the gas has leaked in association with a time when the gas leaked out of the substrate holding member from the one end of the detection hole is detected.   The detection unit irradiates the substrate adsorbed on the adsorption surface with probe light through the detection hole, and the detection hole is formed on the substrate based on the detection result of the probe light reflected by the substrate adsorbed on the adsorption surface. The detection device according to claim 1, wherein the detection device detects that sealing is performed.   The detection apparatus according to claim 1, wherein the substrate holding member opens the one end in a region where a device is not formed on a substrate adsorbed on an adsorption surface.   The detection device according to any one of claims 1 to 12, wherein the detection hole is inserted with a pressing tool that pushes the substrate when the substrate held by the substrate holding member is removed. An adsorption surface for adsorbing the substrate by electrostatic adsorption force, and a detection hole that is sealed by the substrate when one end is opened on the adsorption surface and the substrate is adsorbed to the adsorption surface;
A substrate holding member that detects that the substrate has been adsorbed to the adsorption surface by a detection unit that detects whether the detection hole is sealed by the substrate. An adsorption surface for adsorbing the substrate by electrostatic adsorption force, and a substrate holding member having a detection hole sealed by the substrate when one end is opened on the adsorption surface and the substrate is adsorbed to the adsorption surface;
By detecting whether or not the detection hole is sealed by the substrate, a detection unit that detects that the substrate is adsorbed to the adsorption surface, and a conveyance unit that moves the substrate holding member holding the substrate are provided. Conveying device provided.   The transport apparatus according to claim 15, wherein the transport unit includes a suction region that sucks the mounted substrate holding member by a negative pressure, and a detection hole extension that opens in a region different from the suction region. An adsorption surface for adsorbing the substrate by electrostatic adsorption force, and a substrate holding member having a detection hole sealed by the substrate when one end is opened on the adsorption surface and the substrate is adsorbed to the adsorption surface;
By detecting whether or not the detection hole is sealed by the substrate, a detection unit that detects that the substrate is adsorbed to the adsorption surface and a pair of substrate holding members each holding the substrate are mutually connected. A joining apparatus comprising: a joining portion that aligns and abuts.   The bonding apparatus according to claim 17, further comprising a control unit that stops the operation of the bonding apparatus when the detection unit detects that there is no substrate held by the substrate holding unit. The substrate holding member has a plurality of detection holes that open at one end in the vicinity of the edge of the substrate in a region that sucks the held substrate;
The joining device according to claim 17 or 18, wherein the detection unit individually detects the presence or absence of a substrate for each of the detection holes.   If the detection unit detects that the substrate is sucked in one of the detection holes, and the other one of the detection holes does not detect that the substrate is sucked, the substrate holding The bonding apparatus according to claim 19, further comprising a control unit configured to convey the member to a region different from the alignment unit.

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