JP4502401B2 - 圧電作動スキャニングミラー - Google Patents

圧電作動スキャニングミラー Download PDF

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Publication number
JP4502401B2
JP4502401B2 JP2007510828A JP2007510828A JP4502401B2 JP 4502401 B2 JP4502401 B2 JP 4502401B2 JP 2007510828 A JP2007510828 A JP 2007510828A JP 2007510828 A JP2007510828 A JP 2007510828A JP 4502401 B2 JP4502401 B2 JP 4502401B2
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JP
Japan
Prior art keywords
arrangement
mirror
axis
reflective region
hinge
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Expired - Fee Related
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JP2007510828A
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English (en)
Japanese (ja)
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JP2007535706A (ja
JP2007535706A5 (enExample
Inventor
フレデリック エフ． ウッド，
Original Assignee
シンボル テクノロジーズ， インコーポレイテッド
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Application filed by シンボル テクノロジーズ， インコーポレイテッド filed Critical シンボル テクノロジーズ， インコーポレイテッド
Publication of JP2007535706A publication Critical patent/JP2007535706A/ja
Publication of JP2007535706A5 publication Critical patent/JP2007535706A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141—Constructional details thereof
    • H04N9/315—Modulator illumination systems
    • H04N9/3161—Modulator illumination systems using laser light sources

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2007510828A 2004-04-30 2005-04-21 圧電作動スキャニングミラー Expired - Fee Related JP4502401B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/837,037 US7446919B2 (en) 2004-04-30 2004-04-30 Piezoelectric actuated scanning mirror
PCT/US2005/013820 WO2005111692A1 (en) 2004-04-30 2005-04-21 Piezoelectric actuated scanning mirror

Publications (3)

Publication Number Publication Date
JP2007535706A JP2007535706A (ja) 2007-12-06
JP2007535706A5 JP2007535706A5 (enExample) 2008-05-15
JP4502401B2 true JP4502401B2 (ja) 2010-07-14

Family

ID=34966452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007510828A Expired - Fee Related JP4502401B2 (ja) 2004-04-30 2005-04-21 圧電作動スキャニングミラー

Country Status (7)

Country Link
US (1) US7446919B2 (enExample)
EP (1) EP1740997B1 (enExample)
JP (1) JP4502401B2 (enExample)
KR (1) KR20080036905A (enExample)
CN (1) CN100447612C (enExample)
CA (1) CA2560113A1 (enExample)
WO (1) WO2005111692A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7182262B2 (en) * 2003-03-13 2007-02-27 Symbol Technologies, Inc. Inertial drive scanning arrangement and method
KR100682958B1 (ko) * 2006-01-10 2007-02-15 삼성전자주식회사 2축 마이크로 스캐너
JP4400608B2 (ja) * 2006-10-19 2010-01-20 セイコーエプソン株式会社 アクチュエータ、光スキャナ、および画像形成装置
US7993005B2 (en) * 2006-11-10 2011-08-09 Seiko Epson Corporation Color laser image generation
WO2008068735A2 (en) * 2006-12-03 2008-06-12 Maradin Technologies Ltd. A gimbaled scanning micro-mirror actuation scheme and architecture
JP5286906B2 (ja) * 2007-06-08 2013-09-11 大日本印刷株式会社 圧電ミラーデバイスとこれを用いた光学機器および圧電ミラーデバイスの製造方法
NL1036321A1 (nl) * 2007-12-20 2009-06-29 Asml Netherlands Bv Device control method and apparatus.
WO2009147654A1 (en) * 2008-06-02 2009-12-10 Maradin Technologies Ltd. Gimbaled scanning micro-mirror apparatus
JP5539628B2 (ja) * 2008-06-20 2014-07-02 キヤノン電子株式会社 光走査用マイクロミラーデバイス、光走査装置、画像形成装置、表示装置および入力装置
TWI438486B (zh) 2010-08-17 2014-05-21 Ind Tech Res Inst 微振鏡裝置
TWI408413B (zh) 2011-02-25 2013-09-11 Ind Tech Res Inst 二維掃描反射裝置
DE102011006595B4 (de) 2011-03-31 2019-01-17 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
US9291816B2 (en) * 2012-03-23 2016-03-22 Panasonic intellectual property Management co., Ltd Scanning mirror and scanning image display device
TWD166688S (zh) * 2014-03-10 2015-03-21 虹光精密工業股份有限公司 掃描器
US9690093B2 (en) * 2014-10-15 2017-06-27 Medlumics S.L. Optical beam scanner
CN105403997A (zh) * 2015-11-19 2016-03-16 苏州工业园区纳米产业技术研究院有限公司 一种压电驱动二维扫描微镜
CN109491078A (zh) * 2019-01-07 2019-03-19 南京理工大学 一种高精度微扫描装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5029975A (en) 1990-01-24 1991-07-09 The Mitre Corporation Despeckling screen utilizing optical fibers and method of reducing interference using same
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
DE69427860T2 (de) 1993-02-03 2002-04-11 Nitor, San Jose Verfahren und vorrichtung zur projektion von bildern
US5311321A (en) 1993-04-22 1994-05-10 Corporation For Laser Optics Research Laser video imaging system with pulse backtrack and method
JP3600249B2 (ja) 1996-11-29 2004-12-15 コーポレイション フォー レーザー オプティクス リサーチ 単色ｒ、ｇ、ｂレーザ光源ディスプレイ装置及び方法
US5915063A (en) 1997-01-15 1999-06-22 Colbourne; Paul Variable optical attenuator
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6140979A (en) 1998-08-05 2000-10-31 Microvision, Inc. Scanned display with pinch, timing, and distortion correction
US6937221B2 (en) 1998-08-05 2005-08-30 Microvision, Inc. Scanned beam display
JP3552601B2 (ja) * 1998-11-16 2004-08-11 日本ビクター株式会社 光偏向子及びこれを用いた表示装置
US6018408A (en) 1999-03-26 2000-01-25 Samsung Electronics Co., Ltd. Laser projection display apparatus
US6384406B1 (en) * 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
US6515781B2 (en) 1999-08-05 2003-02-04 Microvision, Inc. Scanned imaging apparatus with switched feeds
US6593677B2 (en) 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
US6330102B1 (en) * 2000-03-24 2001-12-11 Onix Microsystems Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
US6489934B1 (en) 2000-07-07 2002-12-03 Judah Klausner Cellular phone with built in optical projector for display of data
JP2004534276A (ja) 2001-07-06 2004-11-11 エクスプレイ エルティーディー 画像投影装置および方法
US6710680B2 (en) * 2001-12-20 2004-03-23 Motorola, Inc. Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges
CN1318878C (zh) * 2002-08-14 2007-05-30 富士通株式会社 具有扭杆的微型摇动元件
WO2004064410A1 (en) 2003-01-08 2004-07-29 Explay Ltd. An image projecting device and method

Also Published As

Publication number Publication date
US7446919B2 (en) 2008-11-04
US20050243446A1 (en) 2005-11-03
EP1740997B1 (en) 2014-08-20
CA2560113A1 (en) 2005-11-24
JP2007535706A (ja) 2007-12-06
CN1947051A (zh) 2007-04-11
KR20080036905A (ko) 2008-04-29
WO2005111692A1 (en) 2005-11-24
CN100447612C (zh) 2008-12-31
EP1740997A1 (en) 2007-01-10

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