CN100447612C - 光扫描设备 - Google Patents

光扫描设备 Download PDF

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Publication number
CN100447612C
CN100447612C CNB2005800131079A CN200580013107A CN100447612C CN 100447612 C CN100447612 C CN 100447612C CN B2005800131079 A CNB2005800131079 A CN B2005800131079A CN 200580013107 A CN200580013107 A CN 200580013107A CN 100447612 C CN100447612 C CN 100447612C
Authority
CN
China
Prior art keywords
mirror
basal region
reflector space
hinge
piezoelectric elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005800131079A
Other languages
English (en)
Chinese (zh)
Other versions
CN1947051A (zh
Inventor
福莱得里克·F.·伍德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microvision Inc
Original Assignee
Symbol Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Symbol Technologies LLC filed Critical Symbol Technologies LLC
Publication of CN1947051A publication Critical patent/CN1947051A/zh
Application granted granted Critical
Publication of CN100447612C publication Critical patent/CN100447612C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141—Constructional details thereof
    • H04N9/315—Modulator illumination systems
    • H04N9/3161—Modulator illumination systems using laser light sources

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CNB2005800131079A 2004-04-30 2005-04-21 光扫描设备 Expired - Fee Related CN100447612C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/837,037 US7446919B2 (en) 2004-04-30 2004-04-30 Piezoelectric actuated scanning mirror
US10/837,037 2004-04-30

Publications (2)

Publication Number Publication Date
CN1947051A CN1947051A (zh) 2007-04-11
CN100447612C true CN100447612C (zh) 2008-12-31

Family

ID=34966452

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005800131079A Expired - Fee Related CN100447612C (zh) 2004-04-30 2005-04-21 光扫描设备

Country Status (7)

Country Link
US (1) US7446919B2 (enExample)
EP (1) EP1740997B1 (enExample)
JP (1) JP4502401B2 (enExample)
KR (1) KR20080036905A (enExample)
CN (1) CN100447612C (enExample)
CA (1) CA2560113A1 (enExample)
WO (1) WO2005111692A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7182262B2 (en) * 2003-03-13 2007-02-27 Symbol Technologies, Inc. Inertial drive scanning arrangement and method
KR100682958B1 (ko) * 2006-01-10 2007-02-15 삼성전자주식회사 2축 마이크로 스캐너
JP4400608B2 (ja) * 2006-10-19 2010-01-20 セイコーエプソン株式会社 アクチュエータ、光スキャナ、および画像形成装置
US7993005B2 (en) * 2006-11-10 2011-08-09 Seiko Epson Corporation Color laser image generation
WO2008068735A2 (en) * 2006-12-03 2008-06-12 Maradin Technologies Ltd. A gimbaled scanning micro-mirror actuation scheme and architecture
JP5286906B2 (ja) * 2007-06-08 2013-09-11 大日本印刷株式会社 圧電ミラーデバイスとこれを用いた光学機器および圧電ミラーデバイスの製造方法
NL1036321A1 (nl) * 2007-12-20 2009-06-29 Asml Netherlands Bv Device control method and apparatus.
WO2009147654A1 (en) * 2008-06-02 2009-12-10 Maradin Technologies Ltd. Gimbaled scanning micro-mirror apparatus
JP5539628B2 (ja) * 2008-06-20 2014-07-02 キヤノン電子株式会社 光走査用マイクロミラーデバイス、光走査装置、画像形成装置、表示装置および入力装置
TWI438486B (zh) 2010-08-17 2014-05-21 Ind Tech Res Inst 微振鏡裝置
TWI408413B (zh) 2011-02-25 2013-09-11 Ind Tech Res Inst 二維掃描反射裝置
DE102011006595B4 (de) 2011-03-31 2019-01-17 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
US9291816B2 (en) * 2012-03-23 2016-03-22 Panasonic intellectual property Management co., Ltd Scanning mirror and scanning image display device
TWD166688S (zh) * 2014-03-10 2015-03-21 虹光精密工業股份有限公司 掃描器
US9690093B2 (en) * 2014-10-15 2017-06-27 Medlumics S.L. Optical beam scanner
CN105403997A (zh) * 2015-11-19 2016-03-16 苏州工业园区纳米产业技术研究院有限公司 一种压电驱动二维扫描微镜
CN109491078A (zh) * 2019-01-07 2019-03-19 南京理工大学 一种高精度微扫描装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
US5915063A (en) * 1997-01-15 1999-06-22 Colbourne; Paul Variable optical attenuator
US6198565B1 (en) * 1998-11-16 2001-03-06 Victor Company Of Japan, Limited Light deflection element and display apparatus using same
US20010050801A1 (en) * 2000-03-24 2001-12-13 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5029975A (en) 1990-01-24 1991-07-09 The Mitre Corporation Despeckling screen utilizing optical fibers and method of reducing interference using same
DE69427860T2 (de) 1993-02-03 2002-04-11 Nitor, San Jose Verfahren und vorrichtung zur projektion von bildern
US5311321A (en) 1993-04-22 1994-05-10 Corporation For Laser Optics Research Laser video imaging system with pulse backtrack and method
JP3600249B2 (ja) 1996-11-29 2004-12-15 コーポレイション フォー レーザー オプティクス リサーチ 単色ｒ、ｇ、ｂレーザ光源ディスプレイ装置及び方法
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6140979A (en) 1998-08-05 2000-10-31 Microvision, Inc. Scanned display with pinch, timing, and distortion correction
US6937221B2 (en) 1998-08-05 2005-08-30 Microvision, Inc. Scanned beam display
US6018408A (en) 1999-03-26 2000-01-25 Samsung Electronics Co., Ltd. Laser projection display apparatus
US6384406B1 (en) * 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
US6515781B2 (en) 1999-08-05 2003-02-04 Microvision, Inc. Scanned imaging apparatus with switched feeds
US6330102B1 (en) * 2000-03-24 2001-12-11 Onix Microsystems Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
US6489934B1 (en) 2000-07-07 2002-12-03 Judah Klausner Cellular phone with built in optical projector for display of data
JP2004534276A (ja) 2001-07-06 2004-11-11 エクスプレイ エルティーディー 画像投影装置および方法
US6710680B2 (en) * 2001-12-20 2004-03-23 Motorola, Inc. Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges
CN1318878C (zh) * 2002-08-14 2007-05-30 富士通株式会社 具有扭杆的微型摇动元件
WO2004064410A1 (en) 2003-01-08 2004-07-29 Explay Ltd. An image projecting device and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
US5915063A (en) * 1997-01-15 1999-06-22 Colbourne; Paul Variable optical attenuator
US6198565B1 (en) * 1998-11-16 2001-03-06 Victor Company Of Japan, Limited Light deflection element and display apparatus using same
US20010050801A1 (en) * 2000-03-24 2001-12-13 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods

Also Published As

Publication number Publication date
JP4502401B2 (ja) 2010-07-14
US7446919B2 (en) 2008-11-04
US20050243446A1 (en) 2005-11-03
EP1740997B1 (en) 2014-08-20
CA2560113A1 (en) 2005-11-24
JP2007535706A (ja) 2007-12-06
CN1947051A (zh) 2007-04-11
KR20080036905A (ko) 2008-04-29
WO2005111692A1 (en) 2005-11-24
EP1740997A1 (en) 2007-01-10

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: MICROVISION INC.

Free format text: FORMER OWNER: SYMBOL TECHNOLOGIES, INC.

Effective date: 20101224

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: NEW YORK, USA TO: WASHINGTON, USA

TR01 Transfer of patent right

Effective date of registration: 20101224

Address after: Washington, USA

Patentee after: Microvision Inc.

Address before: American New York

Patentee before: Symbol Technologies Co., Ltd.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20081231

Termination date: 20160421

CF01 Termination of patent right due to non-payment of annual fee