KR20080036905A - 압전 작동 스캐닝 미러 - Google Patents

압전 작동 스캐닝 미러 Download PDF

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Publication number
KR20080036905A
KR20080036905A KR1020067022714A KR20067022714A KR20080036905A KR 20080036905 A KR20080036905 A KR 20080036905A KR 1020067022714 A KR1020067022714 A KR 1020067022714A KR 20067022714 A KR20067022714 A KR 20067022714A KR 20080036905 A KR20080036905 A KR 20080036905A
Authority
KR
South Korea
Prior art keywords
mirror
laser
rays
scanning mirror
piezoelectric elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020067022714A
Other languages
English (en)
Korean (ko)
Inventor
프레데릭 에프. 우드
Original Assignee
심볼테크놀로지스,인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 심볼테크놀로지스,인코포레이티드 filed Critical 심볼테크놀로지스,인코포레이티드
Publication of KR20080036905A publication Critical patent/KR20080036905A/ko
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141—Constructional details thereof
    • H04N9/315—Modulator illumination systems
    • H04N9/3161—Modulator illumination systems using laser light sources

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
KR1020067022714A 2004-04-30 2005-04-21 압전 작동 스캐닝 미러 Ceased KR20080036905A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/837,037 US7446919B2 (en) 2004-04-30 2004-04-30 Piezoelectric actuated scanning mirror
US10/837,037 2004-04-30

Publications (1)

Publication Number Publication Date
KR20080036905A true KR20080036905A (ko) 2008-04-29

Family

ID=34966452

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067022714A Ceased KR20080036905A (ko) 2004-04-30 2005-04-21 압전 작동 스캐닝 미러

Country Status (7)

Country Link
US (1) US7446919B2 (enExample)
EP (1) EP1740997B1 (enExample)
JP (1) JP4502401B2 (enExample)
KR (1) KR20080036905A (enExample)
CN (1) CN100447612C (enExample)
CA (1) CA2560113A1 (enExample)
WO (1) WO2005111692A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7182262B2 (en) * 2003-03-13 2007-02-27 Symbol Technologies, Inc. Inertial drive scanning arrangement and method
KR100682958B1 (ko) * 2006-01-10 2007-02-15 삼성전자주식회사 2축 마이크로 스캐너
JP4400608B2 (ja) * 2006-10-19 2010-01-20 セイコーエプソン株式会社 アクチュエータ、光スキャナ、および画像形成装置
US7993005B2 (en) * 2006-11-10 2011-08-09 Seiko Epson Corporation Color laser image generation
US8508098B2 (en) * 2006-12-03 2013-08-13 Maradin Technologies Ltd. Gimbaled scanning micro-mirror actuation scheme and architecture
JP5286906B2 (ja) * 2007-06-08 2013-09-11 大日本印刷株式会社 圧電ミラーデバイスとこれを用いた光学機器および圧電ミラーデバイスの製造方法
NL1036321A1 (nl) * 2007-12-20 2009-06-29 Asml Netherlands Bv Device control method and apparatus.
WO2009147654A1 (en) * 2008-06-02 2009-12-10 Maradin Technologies Ltd. Gimbaled scanning micro-mirror apparatus
JP5539628B2 (ja) * 2008-06-20 2014-07-02 キヤノン電子株式会社 光走査用マイクロミラーデバイス、光走査装置、画像形成装置、表示装置および入力装置
TWI438486B (zh) 2010-08-17 2014-05-21 Ind Tech Res Inst 微振鏡裝置
TWI408413B (zh) 2011-02-25 2013-09-11 Ind Tech Res Inst 二維掃描反射裝置
DE102011006595B4 (de) 2011-03-31 2019-01-17 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
US9291816B2 (en) * 2012-03-23 2016-03-22 Panasonic intellectual property Management co., Ltd Scanning mirror and scanning image display device
TWD166688S (zh) * 2014-03-10 2015-03-21 虹光精密工業股份有限公司 掃描器
US9690093B2 (en) * 2014-10-15 2017-06-27 Medlumics S.L. Optical beam scanner
CN105403997A (zh) * 2015-11-19 2016-03-16 苏州工业园区纳米产业技术研究院有限公司 一种压电驱动二维扫描微镜
CN109491078A (zh) * 2019-01-07 2019-03-19 南京理工大学 一种高精度微扫描装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5029975A (en) 1990-01-24 1991-07-09 The Mitre Corporation Despeckling screen utilizing optical fibers and method of reducing interference using same
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
EP0704138B1 (en) 1993-02-03 2001-08-01 Nitor Method and apparatus for image projection
US5311321A (en) 1993-04-22 1994-05-10 Corporation For Laser Optics Research Laser video imaging system with pulse backtrack and method
US6304237B1 (en) 1996-11-29 2001-10-16 Corporation For Laser Optics Research Monochromatic R,G,B laser light source display system and method
US5915063A (en) * 1997-01-15 1999-06-22 Colbourne; Paul Variable optical attenuator
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6140979A (en) 1998-08-05 2000-10-31 Microvision, Inc. Scanned display with pinch, timing, and distortion correction
US6937221B2 (en) 1998-08-05 2005-08-30 Microvision, Inc. Scanned beam display
JP3552601B2 (ja) * 1998-11-16 2004-08-11 日本ビクター株式会社 光偏向子及びこれを用いた表示装置
US6018408A (en) 1999-03-26 2000-01-25 Samsung Electronics Co., Ltd. Laser projection display apparatus
US6384406B1 (en) * 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
US6515781B2 (en) 1999-08-05 2003-02-04 Microvision, Inc. Scanned imaging apparatus with switched feeds
US6593677B2 (en) * 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
US6330102B1 (en) * 2000-03-24 2001-12-11 Onix Microsystems Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
US6489934B1 (en) 2000-07-07 2002-12-03 Judah Klausner Cellular phone with built in optical projector for display of data
IL159677A0 (en) 2001-07-06 2004-06-20 Explay Ltd An image projecting device and method
US6710680B2 (en) * 2001-12-20 2004-03-23 Motorola, Inc. Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges
JP3905539B2 (ja) * 2002-08-14 2007-04-18 富士通株式会社 トーションバーを備えるマイクロ揺動素子
JP4898121B2 (ja) 2003-01-08 2012-03-14 エクスプレイ エルティーディー 画像投影装置

Also Published As

Publication number Publication date
EP1740997B1 (en) 2014-08-20
CN100447612C (zh) 2008-12-31
WO2005111692A1 (en) 2005-11-24
CN1947051A (zh) 2007-04-11
JP2007535706A (ja) 2007-12-06
US7446919B2 (en) 2008-11-04
EP1740997A1 (en) 2007-01-10
US20050243446A1 (en) 2005-11-03
CA2560113A1 (en) 2005-11-24
JP4502401B2 (ja) 2010-07-14

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Patent event date: 20061030

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