JP2007535706A5 - - Google Patents

Download PDF

Info

Publication number
JP2007535706A5
JP2007535706A5 JP2007510828A JP2007510828A JP2007535706A5 JP 2007535706 A5 JP2007535706 A5 JP 2007535706A5 JP 2007510828 A JP2007510828 A JP 2007510828A JP 2007510828 A JP2007510828 A JP 2007510828A JP 2007535706 A5 JP2007535706 A5 JP 2007535706A5
Authority
JP
Japan
Prior art keywords
arrangement
axis
reflective region
region
base region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007510828A
Other languages
English (en)
Japanese (ja)
Other versions
JP4502401B2 (ja
JP2007535706A (ja
Filing date
Publication date
Priority claimed from US10/837,037 external-priority patent/US7446919B2/en
Application filed filed Critical
Publication of JP2007535706A publication Critical patent/JP2007535706A/ja
Publication of JP2007535706A5 publication Critical patent/JP2007535706A5/ja
Application granted granted Critical
Publication of JP4502401B2 publication Critical patent/JP4502401B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2007510828A 2004-04-30 2005-04-21 圧電作動スキャニングミラー Expired - Fee Related JP4502401B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/837,037 US7446919B2 (en) 2004-04-30 2004-04-30 Piezoelectric actuated scanning mirror
PCT/US2005/013820 WO2005111692A1 (en) 2004-04-30 2005-04-21 Piezoelectric actuated scanning mirror

Publications (3)

Publication Number Publication Date
JP2007535706A JP2007535706A (ja) 2007-12-06
JP2007535706A5 true JP2007535706A5 (enExample) 2008-05-15
JP4502401B2 JP4502401B2 (ja) 2010-07-14

Family

ID=34966452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007510828A Expired - Fee Related JP4502401B2 (ja) 2004-04-30 2005-04-21 圧電作動スキャニングミラー

Country Status (7)

Country Link
US (1) US7446919B2 (enExample)
EP (1) EP1740997B1 (enExample)
JP (1) JP4502401B2 (enExample)
KR (1) KR20080036905A (enExample)
CN (1) CN100447612C (enExample)
CA (1) CA2560113A1 (enExample)
WO (1) WO2005111692A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7182262B2 (en) * 2003-03-13 2007-02-27 Symbol Technologies, Inc. Inertial drive scanning arrangement and method
KR100682958B1 (ko) * 2006-01-10 2007-02-15 삼성전자주식회사 2축 마이크로 스캐너
JP4400608B2 (ja) * 2006-10-19 2010-01-20 セイコーエプソン株式会社 アクチュエータ、光スキャナ、および画像形成装置
US7993005B2 (en) * 2006-11-10 2011-08-09 Seiko Epson Corporation Color laser image generation
WO2008068735A2 (en) * 2006-12-03 2008-06-12 Maradin Technologies Ltd. A gimbaled scanning micro-mirror actuation scheme and architecture
JP5286906B2 (ja) * 2007-06-08 2013-09-11 大日本印刷株式会社 圧電ミラーデバイスとこれを用いた光学機器および圧電ミラーデバイスの製造方法
NL1036321A1 (nl) * 2007-12-20 2009-06-29 Asml Netherlands Bv Device control method and apparatus.
WO2009147654A1 (en) * 2008-06-02 2009-12-10 Maradin Technologies Ltd. Gimbaled scanning micro-mirror apparatus
JP5539628B2 (ja) * 2008-06-20 2014-07-02 キヤノン電子株式会社 光走査用マイクロミラーデバイス、光走査装置、画像形成装置、表示装置および入力装置
TWI438486B (zh) 2010-08-17 2014-05-21 Ind Tech Res Inst 微振鏡裝置
TWI408413B (zh) 2011-02-25 2013-09-11 Ind Tech Res Inst 二維掃描反射裝置
DE102011006595B4 (de) 2011-03-31 2019-01-17 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
US9291816B2 (en) * 2012-03-23 2016-03-22 Panasonic intellectual property Management co., Ltd Scanning mirror and scanning image display device
TWD166688S (zh) * 2014-03-10 2015-03-21 虹光精密工業股份有限公司 掃描器
US9690093B2 (en) * 2014-10-15 2017-06-27 Medlumics S.L. Optical beam scanner
CN105403997A (zh) * 2015-11-19 2016-03-16 苏州工业园区纳米产业技术研究院有限公司 一种压电驱动二维扫描微镜
CN109491078A (zh) * 2019-01-07 2019-03-19 南京理工大学 一种高精度微扫描装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5029975A (en) 1990-01-24 1991-07-09 The Mitre Corporation Despeckling screen utilizing optical fibers and method of reducing interference using same
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
DE69427860T2 (de) 1993-02-03 2002-04-11 Nitor, San Jose Verfahren und vorrichtung zur projektion von bildern
US5311321A (en) 1993-04-22 1994-05-10 Corporation For Laser Optics Research Laser video imaging system with pulse backtrack and method
JP3600249B2 (ja) 1996-11-29 2004-12-15 コーポレイション フォー レーザー オプティクス リサーチ 単色ｒ、ｇ、ｂレーザ光源ディスプレイ装置及び方法
US5915063A (en) 1997-01-15 1999-06-22 Colbourne; Paul Variable optical attenuator
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6140979A (en) 1998-08-05 2000-10-31 Microvision, Inc. Scanned display with pinch, timing, and distortion correction
US6937221B2 (en) 1998-08-05 2005-08-30 Microvision, Inc. Scanned beam display
JP3552601B2 (ja) * 1998-11-16 2004-08-11 日本ビクター株式会社 光偏向子及びこれを用いた表示装置
US6018408A (en) 1999-03-26 2000-01-25 Samsung Electronics Co., Ltd. Laser projection display apparatus
US6384406B1 (en) * 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
US6515781B2 (en) 1999-08-05 2003-02-04 Microvision, Inc. Scanned imaging apparatus with switched feeds
US6593677B2 (en) 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
US6330102B1 (en) * 2000-03-24 2001-12-11 Onix Microsystems Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
US6489934B1 (en) 2000-07-07 2002-12-03 Judah Klausner Cellular phone with built in optical projector for display of data
JP2004534276A (ja) 2001-07-06 2004-11-11 エクスプレイ エルティーディー 画像投影装置および方法
US6710680B2 (en) * 2001-12-20 2004-03-23 Motorola, Inc. Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges
CN1318878C (zh) * 2002-08-14 2007-05-30 富士通株式会社 具有扭杆的微型摇动元件
WO2004064410A1 (en) 2003-01-08 2004-07-29 Explay Ltd. An image projecting device and method

Similar Documents

Publication Publication Date Title
JP2007535706A5 (enExample)
US10185367B2 (en) Display device
US20110170157A1 (en) Moving structure and micro-mirror device using the same
US8162282B2 (en) Electronic device with support
US11835703B2 (en) Periscope lens module and prism device applied to periscope lens module
WO2021227653A1 (zh) 柔性屏支撑装置和柔性显示终端
BRPI0616285A2 (pt) conector de um limpador de pára-brisa com um braço de acionamento
WO2005069081A3 (en) Polarization-modulating optical element
DE60215754D1 (de) Stellantrieb für optisches Abtastgerät
JP2005078079A5 (enExample)
JP5757034B2 (ja) マイクロスキャナ
EP1854410A4 (en) BIOSENSOR WITH COUPLED NEEDLE
RU2010109814A (ru) Соединительное устройство для соединения первого и второго элементов, шарнирно поворотных относительно друг друга
EP1736627A3 (en) Sprung hinge for supporting a closure element
EG24288A (en) Snap hinge for supporting a closure element
JP2006212770A5 (enExample)
TW200627526A (en) Microswitching element
JP2009077595A5 (enExample)
CN114810805A (zh) 铰链、显示面板及移动终端
JP2007219524A5 (enExample)
WO2008078456A1 (ja) 光走査用アクチュエータ
JP2008170902A5 (enExample)
EP1653029A3 (en) Sprung hinge for supporting closure elements
JP2009196060A (ja) 駆動機構
BR0201763B1 (pt) injetor de combustìvel com acionador piezoelétrico.