JP2006212770A5 - - Google Patents

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Publication number
JP2006212770A5
JP2006212770A5 JP2006005642A JP2006005642A JP2006212770A5 JP 2006212770 A5 JP2006212770 A5 JP 2006212770A5 JP 2006005642 A JP2006005642 A JP 2006005642A JP 2006005642 A JP2006005642 A JP 2006005642A JP 2006212770 A5 JP2006212770 A5 JP 2006212770A5
Authority
JP
Japan
Prior art keywords
plate
hinge
bars
top surface
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006005642A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006212770A (ja
Filing date
Publication date
Priority claimed from US11/036,438 external-priority patent/US7324323B2/en
Application filed filed Critical
Publication of JP2006212770A publication Critical patent/JP2006212770A/ja
Publication of JP2006212770A5 publication Critical patent/JP2006212770A5/ja
Withdrawn legal-status Critical Current

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JP2006005642A 2005-01-13 2006-01-13 感光性ｍｅｍｓ構造 Withdrawn JP2006212770A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/036,438 US7324323B2 (en) 2005-01-13 2005-01-13 Photo-sensitive MEMS structure

Publications (2)

Publication Number Publication Date
JP2006212770A JP2006212770A (ja) 2006-08-17
JP2006212770A5 true JP2006212770A5 (enExample) 2009-03-12

Family

ID=36652578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006005642A Withdrawn JP2006212770A (ja) 2005-01-13 2006-01-13 感光性ｍｅｍｓ構造

Country Status (4)

Country Link
US (2) US7324323B2 (enExample)
JP (1) JP2006212770A (enExample)
CN (1) CN1821049A (enExample)
CA (1) CA2530252A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1619495A1 (en) * 2004-07-23 2006-01-25 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Method and Apparatus for inspecting a specimen surface and use of fluorescent materials
US7324323B2 (en) * 2005-01-13 2008-01-29 Lucent Technologies Inc. Photo-sensitive MEMS structure
US7495199B2 (en) * 2006-02-10 2009-02-24 Stmicroelectronics, Inc. MEMS radiometer
US20070246665A1 (en) * 2006-04-20 2007-10-25 Lafond Peter H Mechanical isolation for mems devices
US7485870B2 (en) * 2006-09-12 2009-02-03 Alcatel-Lucent Usa Inc. Pneumatic infrared detector
US7851759B2 (en) * 2007-06-21 2010-12-14 Alcatel-Lucent Usa Inc. Infrared imaging apparatus
US7580175B2 (en) * 2007-06-21 2009-08-25 Alcatel-Lucent Usa Inc. Detector of infrared radiation having a bi-material transducer
DE102008011175B4 (de) * 2008-02-26 2010-05-12 Nb Technologies Gmbh Mikromechanischer Aktuator und Verfahren zu seiner Herstellung
US7842923B2 (en) * 2008-07-28 2010-11-30 Alcatel-Lucent Usa Inc. Thermal actuator for an infrared sensor
TW201243287A (en) * 2011-04-28 2012-11-01 Hon Hai Prec Ind Co Ltd Laser range finder
CN104040725B (zh) 2011-08-17 2017-08-22 公共服务解决方案公司 用于成像系统的无源检测器
JP6892727B2 (ja) * 2016-09-26 2021-06-23 カンタツ株式会社 パターン製造装置、パターン製造方法およびパターン製造プログラム
US12089374B2 (en) 2018-08-10 2024-09-10 Frore Systems Inc. MEMS-based active cooling systems
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11456234B2 (en) 2018-08-10 2022-09-27 Frore Systems Inc. Chamber architecture for cooling devices
US11802554B2 (en) 2019-10-30 2023-10-31 Frore Systems Inc. MEMS-based airflow system having a vibrating fan element arrangement
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US12193192B2 (en) 2019-12-06 2025-01-07 Frore Systems Inc. Cavities for center-pinned actuator cooling systems
US11510341B2 (en) * 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
US12033917B2 (en) 2019-12-17 2024-07-09 Frore Systems Inc. Airflow control in active cooling systems
WO2021126791A1 (en) 2019-12-17 2021-06-24 Frore Systems Inc. Mems-based cooling systems for closed and open devices
CN116325139A (zh) 2020-10-02 2023-06-23 福珞尔系统公司 主动式热沉

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4241045C1 (de) * 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
US6392221B1 (en) * 1997-12-22 2002-05-21 Agere Systems Guardian Corp. Micro-electro-mechanical optical device
US6242989B1 (en) * 1998-09-12 2001-06-05 Agere Systems Guardian Corp. Article comprising a multi-port variable capacitor
US6140646A (en) * 1998-12-17 2000-10-31 Sarnoff Corporation Direct view infrared MEMS structure
US6201631B1 (en) * 1999-10-08 2001-03-13 Lucent Technologies Inc. Process for fabricating an optical mirror array
US6229684B1 (en) * 1999-12-15 2001-05-08 Jds Uniphase Inc. Variable capacitor and associated fabrication method
US6708491B1 (en) * 2000-09-12 2004-03-23 3M Innovative Properties Company Direct acting vertical thermal actuator
US6698201B1 (en) * 2001-08-16 2004-03-02 Zyvex Corporation Cascaded bimorph rotary actuator
US6858911B2 (en) * 2002-02-21 2005-02-22 Advanced Micriosensors MEMS actuators
US6972635B2 (en) * 2002-02-26 2005-12-06 The Regents Of The University Of Michigan MEMS-based, computer systems, clock generation and oscillator circuits and LC-tank apparatus for use therein
US7146014B2 (en) * 2002-06-11 2006-12-05 Intel Corporation MEMS directional sensor system
US7015885B2 (en) * 2003-03-22 2006-03-21 Active Optical Networks, Inc. MEMS devices monolithically integrated with drive and control circuitry
US6781744B1 (en) * 2003-06-11 2004-08-24 Lucent Technologies Inc. Amplification of MEMS motion
US7324323B2 (en) * 2005-01-13 2008-01-29 Lucent Technologies Inc. Photo-sensitive MEMS structure

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