JP4500736B2 - 形状測定装置 - Google Patents

形状測定装置 Download PDF

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Publication number
JP4500736B2
JP4500736B2 JP2005170265A JP2005170265A JP4500736B2 JP 4500736 B2 JP4500736 B2 JP 4500736B2 JP 2005170265 A JP2005170265 A JP 2005170265A JP 2005170265 A JP2005170265 A JP 2005170265A JP 4500736 B2 JP4500736 B2 JP 4500736B2
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JP2005170265A
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Japanese (ja)
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JP2006343249A5 (enrdf_load_stackoverflow
JP2006343249A (ja
Inventor
光太郎 保坂
正行 飯野
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Canon Inc
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Canon Inc
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Priority to JP2005170265A priority Critical patent/JP4500736B2/ja
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Publication of JP2006343249A5 publication Critical patent/JP2006343249A5/ja
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  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2005170265A 2005-06-10 2005-06-10 形状測定装置 Expired - Fee Related JP4500736B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005170265A JP4500736B2 (ja) 2005-06-10 2005-06-10 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005170265A JP4500736B2 (ja) 2005-06-10 2005-06-10 形状測定装置

Publications (3)

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JP2006343249A JP2006343249A (ja) 2006-12-21
JP2006343249A5 JP2006343249A5 (enrdf_load_stackoverflow) 2008-07-24
JP4500736B2 true JP4500736B2 (ja) 2010-07-14

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Family Applications (1)

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JP2005170265A Expired - Fee Related JP4500736B2 (ja) 2005-06-10 2005-06-10 形状測定装置

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JP (1) JP4500736B2 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5025444B2 (ja) * 2007-12-12 2012-09-12 キヤノン株式会社 三次元形状測定装置
JP5179852B2 (ja) * 2007-12-19 2013-04-10 Ｎｔｎ株式会社 軸受の回転精度の測定装置
JP5438988B2 (ja) * 2009-02-17 2014-03-12 株式会社ミツトヨ 測定システムおよび干渉計
JP2012237686A (ja) * 2011-05-12 2012-12-06 Canon Inc 測定装置
JP2014077692A (ja) * 2012-10-10 2014-05-01 Kosaka Laboratory Ltd 触針式測定装置及び触針式測定装置による高さ測定方法
JP6655888B2 (ja) * 2014-08-20 2020-03-04 キヤノン株式会社 計測装置、計測方法、および物品の製造方法
JP6039718B2 (ja) * 2015-03-05 2016-12-07 株式会社ミツトヨ 測定プローブ
JP6049785B2 (ja) 2015-03-05 2016-12-21 株式会社ミツトヨ 測定プローブ
JP6049786B2 (ja) * 2015-03-05 2016-12-21 株式会社ミツトヨ 測定プローブ
CN110388875B (zh) * 2019-08-29 2021-04-06 合肥工业大学 能提高测量范围的微纳米三维接触式测量探头及控制方法
JP7340761B2 (ja) * 2019-10-28 2023-09-08 パナソニックＩｐマネジメント株式会社 測定用プローブ
CN112066900B (zh) * 2020-09-16 2022-04-29 江西财经大学 一种距离测量装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001317933A (ja) * 2000-05-02 2001-11-16 Ricoh Co Ltd 形状測定装置

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JP2006343249A (ja) 2006-12-21

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