JP4493322B2 - Manufacturing method of electronic component package - Google Patents

Manufacturing method of electronic component package Download PDF

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JP4493322B2
JP4493322B2 JP2003398664A JP2003398664A JP4493322B2 JP 4493322 B2 JP4493322 B2 JP 4493322B2 JP 2003398664 A JP2003398664 A JP 2003398664A JP 2003398664 A JP2003398664 A JP 2003398664A JP 4493322 B2 JP4493322 B2 JP 4493322B2
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insulating material
electronic component
connection electrode
package
manufacturing
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JP2005159206A (en
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聡 小野
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Kyocera Crystal Device Corp
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Description

本発明は、電子部品用パッケージの製造方法に関し、特に、小型化に対応した電子部品用パッケージの製造方法に関する発明である。   The present invention relates to a method for manufacturing an electronic component package, and more particularly to an electronic component package manufacturing method corresponding to downsizing.

近年、電子機器に搭載される電子部品の外形サイズの小型化の要求が強く、例えば電子部品の一つである圧電振動子では、数ミリ角の大きさで厚みが1mm以下の圧電振動子が発明開示されている。   In recent years, there has been a strong demand for miniaturization of the external size of electronic components mounted on electronic devices. For example, a piezoelectric vibrator, which is one of electronic components, has a size of several millimeters square and a thickness of 1 mm or less. The invention is disclosed.

このような電子部品には、セラミックス等の絶縁材で形成された矩形状のパッケージが使用される。このようなパッケージの製造方法の一例を図3及び図4に示す。図3は従来のパッケージを作成する工程を図示した工程図である。図4は図3における工程b2の際の絶縁材の形態を表した斜視図である。尚、図3乃至4にあって、説明を明りょうにするため構造体の一部を図示せず、また寸法も一部誇張して図示している。又、各部分の厚さ寸法は、説明を理解し易くするために特にデフォルメした形で現している。   For such an electronic component, a rectangular package formed of an insulating material such as ceramics is used. An example of a method for manufacturing such a package is shown in FIGS. FIG. 3 is a process diagram illustrating a process for producing a conventional package. FIG. 4 is a perspective view showing the form of the insulating material in step b2 in FIG. In FIGS. 3 to 4, a part of the structure is not shown and the dimensions are partially exaggerated for the sake of clarity. In addition, the thickness dimension of each part is shown in a deformed form for easy understanding of the explanation.

即ち、図3に記載の工程(b1)では、板状の絶縁材31の表側となる主面の所定の場所に、複数の凹部32と、凹部32内の底面上に複数の素子接続用電極パッド33と、絶縁材31の裏側となる主面の所定の場所に、素子接続用電極パッド33と電気的に接続しているものを含む複数の外部接続用電極パッド34とを形成している。   That is, in the step (b1) shown in FIG. 3, a plurality of recesses 32 and a plurality of element connection electrodes on the bottom surface in the recesses 32 are provided at predetermined positions on the main surface on the front side of the plate-like insulating material 31. The pads 33 and a plurality of external connection electrode pads 34 including those electrically connected to the element connection electrode pads 33 are formed at predetermined positions on the main surface on the back side of the insulating material 31. .

次に、工程(b2)では、外部接続用電極パッド34を形成した絶縁材31の裏側主面に、粘着シート35を外部接続用電極パッド34上から絶縁材31の裏側主面全面を覆うように貼り付けている。   Next, in the step (b2), the adhesive sheet 35 is covered on the back side main surface of the insulating material 31 from the external connection electrode pad 34 on the back side main surface of the insulating material 31 on which the external connection electrode pads 34 are formed. Is pasted.

次に、工程(b3)及び(b4)では、凹部32を形成した絶縁材31の表側主面側から、切断線36に沿って回転刃37により、絶縁材31のみを切断し、所望の形状の複数個の電子部品用パッケージ30を形成している。尚、粘着シート35は切断されていないので、電子部品用パッケージが個々にバラバラになることはない。   Next, in steps (b3) and (b4), only the insulating material 31 is cut by the rotary blade 37 along the cutting line 36 from the front main surface side of the insulating material 31 in which the recesses 32 are formed, and the desired shape is formed. A plurality of electronic component packages 30 are formed. In addition, since the adhesive sheet 35 is not cut | disconnected, the package for electronic components does not fall apart individually.

次に、工程(b5)では、切断の際に生じた細かい切断粉や残留した潤滑剤などを、純水や洗浄剤などにより、パッケージ30を洗浄している。特に凹部32内部は、後工程において電子素子が搭載される部分なので、十分な洗浄が必要となる。   Next, in the step (b5), the package 30 is washed with pure water, a cleaning agent, or the like, with fine cutting powder generated during cutting or a remaining lubricant. In particular, since the inside of the recess 32 is a part where an electronic element is mounted in a later process, sufficient cleaning is required.

前記のような電子部品用パッケージの製造方法については、以下のような文献が開示されている。   The following literature is disclosed about the manufacturing method of the above electronic component packages.

特開平7−221454号公報JP-A-7-212454

尚、出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。   In addition, the applicant has not found any prior art documents related to the present invention by the time of filing of the present application other than the prior art documents specified by the above prior art document information.

前述した従来の製造方法では、切断時に発生する絶縁材の切断粉や潤滑剤などが、凹部内を含むパッケージ表面に飛散付着してしまい、その除去のために切断後にパッケージを洗浄する工程を必要としている。   In the above-described conventional manufacturing method, the cutting powder of the insulating material or lubricant generated at the time of cutting scatters and adheres to the surface of the package including the inside of the recess, and a process of cleaning the package after cutting is necessary for the removal. It is said.

しかし、電子部品の小型化が進み、電子部品用パッケージの外形寸法が、長さ寸法及び幅寸法で数mm以下及び厚み寸法が1mm以下となるにつれ、切断後のパッケージの洗浄が難しくなってきた。特にパッケージに形成した凹部内の洗浄においては、凹部自体の外形形状が小さいため、凹部内の角部などに入り込んだ切断粉等は、従来の大きさのパッケージに対応した洗浄機では完全な洗浄ができ難い。そのため、洗浄が不完全になり凹部内に切断粉等が残ってしまい、後の工程で凹部内に搭載する電子素子にこの切断粉が付着し、電子素子の特性に悪影響を与えてしまう可能性がある。   However, as electronic components have become smaller and the external dimensions of electronic component packages are several mm or less in length and width and 1 mm or less in thickness, it has become difficult to clean the package after cutting. . In particular, in the cleaning of the recesses formed in the package, since the outer shape of the recesses themselves is small, the cutting powder that has entered the corners of the recesses, etc., is completely cleaned by a cleaning machine that supports conventional size packages. It is difficult to do. Therefore, cleaning may be incomplete and cutting powder or the like may remain in the recess, and this cutting powder may adhere to the electronic element mounted in the recess in a later step, which may adversely affect the characteristics of the electronic element. There is.

又、小型パッケージに対応した精密な洗浄を行える洗浄機を導入した場合は、パッケージの製造コストが高くなってしまう問題があった。   In addition, when a cleaning machine capable of precise cleaning corresponding to a small package is introduced, there is a problem that the manufacturing cost of the package becomes high.

本発明は前述した問題点を解決するために成されたものであり、絶縁材により形成されたパッケージの内部に凹部空間が形成され、この凹部の内部底面上には素子接続用電極パッドが形成され、パッケージの外部底面には該素子接続用電極パッドと電気的に接続しているものを含む複数の外部接続用電極パッドが形成されている電子部品用パッケージの製造方法において、板状の絶縁材の一方の主面の所定の場所に、複数の凹部と、この凹部内の底面上に素子接続用電極パッドと、絶縁材の他方の主面の所定の場所に素子接続用電極パッドと電気的に接続しているものを含む複数の外部接続用電極パッドとを形成する工程と、夫々の凹部内に電子素子が搭載されていない状態で、形成した複数の凹部が開口している絶縁材の一方の主面の全面に粘着シート又は粘着テープを貼り付ける工程と、絶縁材を、外部接続用電極パッドが形成されている他方の主面側から、所定のカット位置で絶縁材のみを切断し複数の電子部品用パッケージに分離する工程とを具備していることを特徴とする電子部品用パッケージの製造方法である。 The present invention has been made to solve the above-described problems. A recess space is formed inside a package formed of an insulating material, and an element connection electrode pad is formed on the inner bottom surface of the recess. In the method of manufacturing a package for an electronic component in which a plurality of external connection electrode pads including those electrically connected to the element connection electrode pads are formed on the outer bottom surface of the package, A plurality of recesses at a predetermined location on one main surface of the material, an element connection electrode pad on the bottom surface in the recess, and an element connection electrode pad and an electrical connection at a predetermined location on the other main surface of the insulating material Forming a plurality of external connection electrode pads including those connected to each other, and an insulating material in which the plurality of formed recesses are opened in a state in which no electronic element is mounted in each recess The entire surface of one of the main surfaces A process of attaching an adhesive sheet or an adhesive tape and an insulating material from the other main surface side where the external connection electrode pad is formed, by cutting only the insulating material at a predetermined cutting position into a plurality of electronic component packages And a step of separating the electronic component package.

本発明の電子部品用パッケージの製造方法において、凹部の開口側の主面に粘着シート又は粘着テープを貼り付け、更に粘着シート又は粘着テープが貼り付けられていない側の主面から切断を行うことにより、切断時に発生する切断粉や潤滑剤が飛散して凹部内に入ることがなくなるので、凹部内を精密洗浄する工程は必要なくなる。更に凹部内に切断粉等が侵入することがないので、不完全な洗浄ために凹部内に残った切断粉などにより、後工程で凹部内に搭載する電子素子の特性に不具合が生じることが少なくなる。又、切断工程後に行う洗浄工程におけるパッケージの洗浄箇所が、主にパッケージ裏側の平坦部となるので、従来の洗浄機でも十分に洗浄することが可能となる。   In the method for manufacturing an electronic component package of the present invention, an adhesive sheet or an adhesive tape is attached to the main surface on the opening side of the recess, and further, cutting is performed from the main surface on the side where the adhesive sheet or adhesive tape is not attached. Therefore, the cutting powder and lubricant generated at the time of cutting do not scatter and enter the recess, so that the step of precisely cleaning the recess is not necessary. Furthermore, since cutting powder or the like does not enter the recess, cutting powder remaining in the recess due to incomplete cleaning is less likely to cause problems in the characteristics of the electronic device mounted in the recess in a later process. Become. In addition, since the package cleaning portion in the cleaning step performed after the cutting step is mainly a flat portion on the back side of the package, it can be sufficiently cleaned even with a conventional cleaning machine.

従って、本発明の電子部品用パッケージの製造方法により、パッケージを使用する電子部品の特性の信頼性の向上及び特性不良品の減少による歩留まりの向上、更に製造コストの高騰抑止に著しい効果を奏する。   Therefore, according to the method for manufacturing an electronic component package of the present invention, there are significant effects in improving the reliability of the characteristics of electronic components using the package, improving the yield due to the reduction of defective products, and further suppressing the increase in manufacturing cost.

以下、本発明における電子部品用パッケージの製造方法の一実施形態を、図面を参照しながら説明する。
図1は本発明に係わる電子部品用パッケージ製造工程の一部の実施形態を示す工程図である。図2は、図1に記載の工程のうち、工程(a2)における絶縁材を斜め上部より示した斜視図である。尚、図1及び図2にあって、説明を明りょうにするため構造体の一部を図示せず、また寸法も一部誇張して図示している。各部分の厚さ寸法は本発明を理解し易くするために特にデフォルメした形で現している。更に、以下説明では、説明を簡易にするために、図1における紙面上方を絶縁材の表側、紙面下方を裏側として説明を行っている。
Hereinafter, an embodiment of a method for manufacturing an electronic component package according to the present invention will be described with reference to the drawings.
FIG. 1 is a process diagram showing an embodiment of a part of an electronic component package manufacturing process according to the present invention. FIG. 2 is a perspective view showing the insulating material in the step (a2) from an oblique upper part among the steps shown in FIG. In FIG. 1 and FIG. 2, a part of the structure is not shown and a part of the dimensions is exaggerated for clarity of explanation. The thickness dimension of each part is shown in a particularly deformed form to facilitate understanding of the present invention. Furthermore, in the following description, in order to simplify the description, the description is made with the upper side of the paper in FIG.

即ち、図1に記載の工程(a1)において、板状の絶縁材11の裏側となる主面の所定の場所(後の工程において個々の電子部品用パッケージに切断した際に形成される、各々の主面の中央部分)に、複数の凹部12と、凹部12内の底面上に複数の素子接続用電極パッド13と、絶縁材11の表側となる主面の所定の場所(後の工程において個々のパッケージに切断した際に形成される4つの角部付近)に、素子接続用電極パッド33と電気的に接続しているものを含む4個の外部接続用電極パッド14とを形成している。   That is, in the step (a1) shown in FIG. 1, a predetermined place on the main surface that is the back side of the plate-like insulating material 11 (formed when cut into individual electronic component packages in the subsequent steps, A plurality of recesses 12, a plurality of element connection electrode pads 13 on the bottom surface in the recess 12, and a predetermined location on the main surface on the front side of the insulating material 11 (in a later step) Four external connection electrode pads 14 including those electrically connected to the element connection electrode pads 33 are formed in the vicinity of the four corners formed when the individual packages are cut. Yes.

次に、工程(a2)では、凹部12の開口口を形成した絶縁材11の裏側主面に、紫外線硬化性粘着テープ15を、絶縁材11の裏側主面全面を覆うように貼り付けている。図2には、紫外線硬化性粘着テープ15を貼り付けた状態の絶縁材11を斜視した図面を示した。尚、実際の紫外線硬化性粘着テープは、厚みが数百μm以下である。   Next, in the step (a2), an ultraviolet curable adhesive tape 15 is attached to the back main surface of the insulating material 11 in which the opening of the recess 12 is formed so as to cover the entire back main surface of the insulating material 11. . FIG. 2 is a perspective view of the insulating material 11 with the ultraviolet curable adhesive tape 15 attached thereto. The actual UV curable adhesive tape has a thickness of several hundreds of μm or less.

次に、工程(a3)及び(a4)では、外部接続用電極パッド14を形成した絶縁材11の表側主面から、切断線16に沿って回転刃17により、絶縁材11のみを精密切断し、矩形状の複数個の電子部品用パッケージ10を形成する。このとき、切断の際に発生した切断粉や切断時に使用した潤滑剤などは、絶縁材11の表側(電子部品用パッケージ10としては外部底面に該当する)には付着するが、紫外線硬化性粘着テープ15の表面や凹部12内部には入り込まない。尚、紫外線硬化性粘着シート15は切断しないので、この段階では切断された電子部品用パッケージ10が個々にバラバラになることはない。   Next, in steps (a3) and (a4), only the insulating material 11 is precisely cut by the rotary blade 17 along the cutting line 16 from the front main surface of the insulating material 11 on which the external connection electrode pad 14 is formed. A plurality of rectangular electronic component packages 10 are formed. At this time, the cutting powder generated at the time of cutting and the lubricant used at the time of cutting adhere to the front side of the insulating material 11 (corresponding to the external bottom surface as the electronic component package 10), but UV curable adhesive It does not enter the surface of the tape 15 or the inside of the recess 12. Since the ultraviolet curable adhesive sheet 15 is not cut, the cut electronic component packages 10 are not individually separated at this stage.

この工程の後で、紫外線硬化性粘着シート15により一つにまとめられた複数個の電子部品用パッケージ10の外面(主に電子部品用パッケージ10の外部底面)を洗浄し、その後紫外線を照射し紫外線硬化性粘着テープ15を剥がして電子部品用パッケージ10を個々に分離した状態にしたり、又は、紫外線硬化性粘着テープ15が貼付されて複数個の電子部品用パッケージが一体化している状態で、洗浄後の外部接続用電極パッド14が形成されている電子部品用パッケージの外部底面上に別の紫外線硬化性粘着テープを全面に貼付し、紫外線硬化性粘着テープ15を剥がした後でも複数個の電子部品用パッケージを一体で作業できるような状態にしたりして、次の凹部12内に電子素子を搭載する工程へ進む。   After this step, the outer surface of the plurality of electronic component packages 10 (mainly the outer bottom surface of the electronic component package 10) combined by the ultraviolet curable adhesive sheet 15 is washed, and then irradiated with ultraviolet rays. In a state in which the ultraviolet curable adhesive tape 15 is peeled off and the electronic component packages 10 are individually separated, or the ultraviolet curable adhesive tape 15 is attached and a plurality of electronic component packages are integrated. A plurality of ultraviolet curable adhesive tapes are applied to the entire bottom surface of the electronic component package on which the external connection electrode pads 14 are formed after cleaning, and a plurality of the ultraviolet curable adhesive tapes 15 are peeled off. The electronic component package is brought into a state where it can be worked as a unit, and the process proceeds to the step of mounting the electronic element in the next recess 12.

尚、上記実施例においては紫外線硬化性粘着テープを電子部品用パッケージ10の形成後の分離防止のために使用しているが、本発明における紫外線硬化性粘着テープの成す作用と同じ作用を成すのであれば、例えば溶剤溶融性の粘着剤を塗布したシート又はテープを使用しても良い。   In the above embodiment, the ultraviolet curable adhesive tape is used for preventing separation after the formation of the electronic component package 10, but it has the same effect as the ultraviolet curable adhesive tape in the present invention. If there is, for example, a sheet or tape coated with a solvent-melting adhesive may be used.

図1は、本発明に係わる電子部品用パッケージの製造方法の一実施形態における一部を示した工程図である。FIG. 1 is a process diagram showing a part of an embodiment of a method for manufacturing an electronic component package according to the present invention. 図2は、図1に例示の電子部品用パッケージの製造方法の工程のうち、工程(a2)における形態を示した斜視図ある。FIG. 2 is a perspective view showing the form in step (a2) among the steps of the method for manufacturing the electronic component package illustrated in FIG. 図3は、従来における電子部品用パッケージの製造方法の一実施形態の一部を示した工程図である。FIG. 3 is a process diagram showing a part of an embodiment of a conventional method for manufacturing an electronic component package. 図4は、図3に例示の従来の電子部品用パッケージの製造方法の工程のうち、工程(b2)における形態を示した斜視図ある。FIG. 4 is a perspective view showing the form in step (b2) among the steps of the conventional method for manufacturing an electronic component package illustrated in FIG.

符号の説明Explanation of symbols

10,電子部品用パッケージ
11,絶縁材
12,凹部
13,素子接続用電極パッド
14,外部接続用電極パッド
15,紫外線硬化性粘着テープ
DESCRIPTION OF SYMBOLS 10, Package for electronic components 11, Insulation material 12, Recessed part 13, Element connection electrode pad 14, External connection electrode pad 15, UV curable adhesive tape

Claims (1)

絶縁材により形成されたパッケージの内部に凹部空間が形成され、該凹部の内部底面上には素子接続用電極パッドが形成され、該パッケージの外部底面には該素子接続用電極パッドと電気的に接続しているものを含む複数の外部接続用電極パッドが形成されている電子部品用パッケージの製造方法において、
板状の絶縁材の一方の主面の所定の場所に、複数の該凹部と、該凹部内の底面上に素子接続用電極パッドと、該絶縁材の他方の主面の所定の場所に該素子接続用電極パッドと電気的に接続しているものを含む複数の外部接続用電極パッドとを形成する工程と、
夫々の該凹部内に電子素子が搭載されていない状態で、形成した複数の該凹部が開口している該絶縁材の一方の主面の全面に粘着シート又は粘着テープを貼り付ける工程と、
該絶縁材を、該外部接続用電極パッドが形成されている他方の主面側から、所定のカット位置で該絶縁材のみを切断し、該絶縁材を複数の電子部品用パッケージに分離する工程と
を具備していることを特徴とする電子部品用パッケージの製造方法。
A recess space is formed inside the package formed of an insulating material, an element connection electrode pad is formed on the inner bottom surface of the recess, and the element connection electrode pad is electrically connected to the outer bottom surface of the package. In a method for manufacturing an electronic component package in which a plurality of external connection electrode pads including those connected are formed,
A plurality of the concave portions, a device connection electrode pad on the bottom surface in the concave portion, and a predetermined location on the other main surface of the insulating material at a predetermined location on one main surface of the plate-like insulating material. Forming a plurality of external connection electrode pads including those electrically connected to the element connection electrode pads;
A step of attaching an adhesive sheet or an adhesive tape to the entire surface of one main surface of the insulating material in which the plurality of recesses are opened in a state where no electronic element is mounted in each of the recesses;
A step of cutting only the insulating material at a predetermined cutting position from the other main surface side where the external connection electrode pad is formed, and separating the insulating material into a plurality of electronic component packages. And a method for manufacturing an electronic component package.
JP2003398664A 2003-11-28 2003-11-28 Manufacturing method of electronic component package Expired - Fee Related JP4493322B2 (en)

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