JP4482396B2 - サーマルアクチュエータ - Google Patents

サーマルアクチュエータ Download PDF

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Publication number
JP4482396B2
JP4482396B2 JP2004229712A JP2004229712A JP4482396B2 JP 4482396 B2 JP4482396 B2 JP 4482396B2 JP 2004229712 A JP2004229712 A JP 2004229712A JP 2004229712 A JP2004229712 A JP 2004229712A JP 4482396 B2 JP4482396 B2 JP 4482396B2
Authority
JP
Japan
Prior art keywords
beams
array
thermal actuator
heating
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004229712A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005055914A (ja
JP2005055914A5 (enExample
Inventor
エイ カビー ジョエル
マー ジュン
エイ ジャーマン クリスティン
エム ガルビン ピーター
リン ピンエン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/634,941 external-priority patent/US6983088B2/en
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of JP2005055914A publication Critical patent/JP2005055914A/ja
Publication of JP2005055914A5 publication Critical patent/JP2005055914A5/ja
Application granted granted Critical
Publication of JP4482396B2 publication Critical patent/JP4482396B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2004229712A 2003-08-05 2004-08-05 サーマルアクチュエータ Expired - Fee Related JP4482396B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/634,941 US6983088B2 (en) 2003-08-05 2003-08-05 Thermal actuator and an optical waveguide switch including the same
US10/772,564 US6985650B2 (en) 2003-08-05 2004-02-05 Thermal actuator and an optical waveguide switch including the same

Publications (3)

Publication Number Publication Date
JP2005055914A JP2005055914A (ja) 2005-03-03
JP2005055914A5 JP2005055914A5 (enExample) 2007-09-20
JP4482396B2 true JP4482396B2 (ja) 2010-06-16

Family

ID=34381403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004229712A Expired - Fee Related JP4482396B2 (ja) 2003-08-05 2004-08-05 サーマルアクチュエータ

Country Status (2)

Country Link
US (1) US6985650B2 (enExample)
JP (1) JP4482396B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8232858B1 (en) 2008-02-20 2012-07-31 Sandia Corporation Microelectromechanical (MEM) thermal actuator
JP6395315B2 (ja) * 2015-03-16 2018-09-26 アルプス電気株式会社 温度ヒューズ用インク、これを用いた温度ヒューズおよびヒータ、ならびに温度ヒューズ用インクを用いた温度ヒューズの製造方法

Family Cites Families (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5364497A (en) * 1993-08-04 1994-11-15 Analog Devices, Inc. Method for fabricating microstructures using temporary bridges
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
US5706041A (en) * 1996-03-04 1998-01-06 Xerox Corporation Thermal ink-jet printhead with a suspended heating element in each ejector
US5962949A (en) * 1996-12-16 1999-10-05 Mcnc Microelectromechanical positioning apparatus
US5909078A (en) * 1996-12-16 1999-06-01 Mcnc Thermal arched beam microelectromechanical actuators
US6124663A (en) * 1996-12-16 2000-09-26 The Boeing Company Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method
US5994816A (en) * 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US5870518A (en) * 1997-08-21 1999-02-09 Mcdonnell Douglas Corporation Microactuator for precisely aligning an optical fiber and an associated fabrication method
US7011378B2 (en) * 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
US6002507A (en) * 1998-12-01 1999-12-14 Xerox Corpoation Method and apparatus for an integrated laser beam scanner
US6014240A (en) * 1998-12-01 2000-01-11 Xerox Corporation Method and apparatus for an integrated laser beam scanner using a carrier substrate
US6379989B1 (en) * 1998-12-23 2002-04-30 Xerox Corporation Process for manufacture of microoptomechanical structures
US6362512B1 (en) * 1998-12-23 2002-03-26 Xerox Corporation Microelectromechanical structures defined from silicon on insulator wafers
US6236139B1 (en) * 1999-02-26 2001-05-22 Jds Uniphase Inc. Temperature compensated microelectromechanical structures and related methods
US6137206A (en) * 1999-03-23 2000-10-24 Cronos Integrated Microsystems, Inc. Microelectromechanical rotary structures
US6218762B1 (en) * 1999-05-03 2001-04-17 Mcnc Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays
US6428173B1 (en) * 1999-05-03 2002-08-06 Jds Uniphase, Inc. Moveable microelectromechanical mirror structures and associated methods
US6133670A (en) * 1999-06-24 2000-10-17 Sandia Corporation Compact electrostatic comb actuator
US6291922B1 (en) * 1999-08-25 2001-09-18 Jds Uniphase, Inc. Microelectromechanical device having single crystalline components and metallic components
US6255757B1 (en) * 1999-09-01 2001-07-03 Jds Uniphase Inc. Microactuators including a metal layer on distal portions of an arched beam
US6275320B1 (en) * 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
US6262512B1 (en) * 1999-11-08 2001-07-17 Jds Uniphase Inc. Thermally actuated microelectromechanical systems including thermal isolation structures
US6388359B1 (en) * 2000-03-03 2002-05-14 Optical Coating Laboratory, Inc. Method of actuating MEMS switches
US6303885B1 (en) * 2000-03-03 2001-10-16 Optical Coating Laboratory, Inc. Bi-stable micro switch
US6351580B1 (en) * 2000-03-27 2002-02-26 Jds Uniphase Corporation Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements
US6333583B1 (en) * 2000-03-28 2001-12-25 Jds Uniphase Corporation Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams
US6360539B1 (en) * 2000-04-05 2002-03-26 Jds Uniphase Corporation Microelectromechanical actuators including driven arched beams for mechanical advantage
US6367251B1 (en) * 2000-04-05 2002-04-09 Jds Uniphase Corporation Lockable microelectromechanical actuators using thermoplastic material, and methods of operating same
US6675578B1 (en) * 2000-05-22 2004-01-13 Microsoft Corporation Thermal buckle-beam actuator
US6734597B1 (en) * 2000-06-19 2004-05-11 Brigham Young University Thermomechanical in-plane microactuator
US6308631B1 (en) * 2000-07-20 2001-10-30 The United States Of America As Represented By The Secretary Of The Navy Mems vertical to horizontal motion translation device
EP1346445B1 (en) * 2000-08-09 2011-11-09 Santur Corporation Tunable distributed feedback laser
CN1468197A (zh) * 2000-08-09 2004-01-14 ���Ͷ�����Ӧ�ü����о�Ժ 具有可变电容的组件
US6708492B2 (en) * 2000-10-31 2004-03-23 Microsoft Corporation Resonant thermal out-of-plane buckle-beam actuator
US6422011B1 (en) * 2000-10-31 2002-07-23 Microsoft Corporation Thermal out-of-plane buckle-beam actuator
WO2002058089A1 (en) * 2001-01-19 2002-07-25 Massachusetts Institute Of Technology Bistable actuation techniques, mechanisms, and applications
US6747389B2 (en) * 2001-06-11 2004-06-08 Intel Corporation Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications therefor
US20030053231A1 (en) * 2001-09-17 2003-03-20 Mark Missey Thermally actuated microelectromechanical tilt mirror
US6658179B2 (en) * 2001-11-08 2003-12-02 Xerox Corporation Monolithic reconfigurable optical multiplexer systems and methods
US6804959B2 (en) * 2001-12-31 2004-10-19 Microsoft Corporation Unilateral thermal buckle-beam actuator
US6828171B2 (en) * 2002-01-16 2004-12-07 Xerox Corporation Systems and methods for thermal isolation of a silicon structure
KR100439423B1 (ko) * 2002-01-16 2004-07-09 한국전자통신연구원 마이크로전자기계 액튜에이터
US6828887B2 (en) * 2002-05-10 2004-12-07 Jpmorgan Chase Bank Bistable microelectromechanical system based structures, systems and methods
TW593125B (en) * 2002-08-09 2004-06-21 Ind Tech Res Inst MEMS type differential actuator
US6753582B2 (en) * 2002-08-14 2004-06-22 Intel Corporation Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation
US6747773B2 (en) * 2002-10-31 2004-06-08 Agilent Technologies, Inc. Method and structure for stub tunable resonant cavity for photonic crystals
US7796847B2 (en) * 2003-03-19 2010-09-14 Xerox Corporation Electrical stimuli of MEMS devices
US6968100B2 (en) * 2003-03-19 2005-11-22 Xerox Corporation MEMS waveguide shuttle optical latching switch
US6904191B2 (en) * 2003-03-19 2005-06-07 Xerox Corporation MXN cantilever beam optical waveguide switch
US6947624B2 (en) * 2003-03-19 2005-09-20 Xerox Corporation MEMS optical latching switch
US6853765B1 (en) * 2003-03-31 2005-02-08 The United States Of America As Represented By The Secretary Of The Navy MEMS optical switch with thermal actuator

Also Published As

Publication number Publication date
US20050031252A1 (en) 2005-02-10
US6985650B2 (en) 2006-01-10
JP2005055914A (ja) 2005-03-03

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