|
US5364497A
(en)
*
|
1993-08-04 |
1994-11-15 |
Analog Devices, Inc. |
Method for fabricating microstructures using temporary bridges
|
|
US5862003A
(en)
*
|
1995-06-23 |
1999-01-19 |
Saif; Muhammad T. A. |
Micromotion amplifier
|
|
US5706041A
(en)
*
|
1996-03-04 |
1998-01-06 |
Xerox Corporation |
Thermal ink-jet printhead with a suspended heating element in each ejector
|
|
US5962949A
(en)
*
|
1996-12-16 |
1999-10-05 |
Mcnc |
Microelectromechanical positioning apparatus
|
|
US5909078A
(en)
*
|
1996-12-16 |
1999-06-01 |
Mcnc |
Thermal arched beam microelectromechanical actuators
|
|
US6124663A
(en)
*
|
1996-12-16 |
2000-09-26 |
The Boeing Company |
Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method
|
|
US5994816A
(en)
*
|
1996-12-16 |
1999-11-30 |
Mcnc |
Thermal arched beam microelectromechanical devices and associated fabrication methods
|
|
US5870518A
(en)
*
|
1997-08-21 |
1999-02-09 |
Mcdonnell Douglas Corporation |
Microactuator for precisely aligning an optical fiber and an associated fabrication method
|
|
US7011378B2
(en)
*
|
1998-09-03 |
2006-03-14 |
Ge Novasensor, Inc. |
Proportional micromechanical valve
|
|
US6002507A
(en)
*
|
1998-12-01 |
1999-12-14 |
Xerox Corpoation |
Method and apparatus for an integrated laser beam scanner
|
|
US6014240A
(en)
*
|
1998-12-01 |
2000-01-11 |
Xerox Corporation |
Method and apparatus for an integrated laser beam scanner using a carrier substrate
|
|
US6379989B1
(en)
*
|
1998-12-23 |
2002-04-30 |
Xerox Corporation |
Process for manufacture of microoptomechanical structures
|
|
US6362512B1
(en)
*
|
1998-12-23 |
2002-03-26 |
Xerox Corporation |
Microelectromechanical structures defined from silicon on insulator wafers
|
|
US6236139B1
(en)
*
|
1999-02-26 |
2001-05-22 |
Jds Uniphase Inc. |
Temperature compensated microelectromechanical structures and related methods
|
|
US6137206A
(en)
*
|
1999-03-23 |
2000-10-24 |
Cronos Integrated Microsystems, Inc. |
Microelectromechanical rotary structures
|
|
US6218762B1
(en)
*
|
1999-05-03 |
2001-04-17 |
Mcnc |
Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays
|
|
US6428173B1
(en)
*
|
1999-05-03 |
2002-08-06 |
Jds Uniphase, Inc. |
Moveable microelectromechanical mirror structures and associated methods
|
|
US6133670A
(en)
*
|
1999-06-24 |
2000-10-17 |
Sandia Corporation |
Compact electrostatic comb actuator
|
|
US6291922B1
(en)
*
|
1999-08-25 |
2001-09-18 |
Jds Uniphase, Inc. |
Microelectromechanical device having single crystalline components and metallic components
|
|
US6255757B1
(en)
*
|
1999-09-01 |
2001-07-03 |
Jds Uniphase Inc. |
Microactuators including a metal layer on distal portions of an arched beam
|
|
US6275320B1
(en)
*
|
1999-09-27 |
2001-08-14 |
Jds Uniphase, Inc. |
MEMS variable optical attenuator
|
|
US6262512B1
(en)
*
|
1999-11-08 |
2001-07-17 |
Jds Uniphase Inc. |
Thermally actuated microelectromechanical systems including thermal isolation structures
|
|
US6388359B1
(en)
*
|
2000-03-03 |
2002-05-14 |
Optical Coating Laboratory, Inc. |
Method of actuating MEMS switches
|
|
US6303885B1
(en)
*
|
2000-03-03 |
2001-10-16 |
Optical Coating Laboratory, Inc. |
Bi-stable micro switch
|
|
US6351580B1
(en)
*
|
2000-03-27 |
2002-02-26 |
Jds Uniphase Corporation |
Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements
|
|
US6333583B1
(en)
*
|
2000-03-28 |
2001-12-25 |
Jds Uniphase Corporation |
Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams
|
|
US6360539B1
(en)
*
|
2000-04-05 |
2002-03-26 |
Jds Uniphase Corporation |
Microelectromechanical actuators including driven arched beams for mechanical advantage
|
|
US6367251B1
(en)
*
|
2000-04-05 |
2002-04-09 |
Jds Uniphase Corporation |
Lockable microelectromechanical actuators using thermoplastic material, and methods of operating same
|
|
US6675578B1
(en)
*
|
2000-05-22 |
2004-01-13 |
Microsoft Corporation |
Thermal buckle-beam actuator
|
|
US6734597B1
(en)
*
|
2000-06-19 |
2004-05-11 |
Brigham Young University |
Thermomechanical in-plane microactuator
|
|
US6308631B1
(en)
*
|
2000-07-20 |
2001-10-30 |
The United States Of America As Represented By The Secretary Of The Navy |
Mems vertical to horizontal motion translation device
|
|
EP1346445B1
(en)
*
|
2000-08-09 |
2011-11-09 |
Santur Corporation |
Tunable distributed feedback laser
|
|
CN1468197A
(zh)
*
|
2000-08-09 |
2004-01-14 |
���Ͷ�����Ӧ�ü����о�Ժ |
具有可变电容的组件
|
|
US6708492B2
(en)
*
|
2000-10-31 |
2004-03-23 |
Microsoft Corporation |
Resonant thermal out-of-plane buckle-beam actuator
|
|
US6422011B1
(en)
*
|
2000-10-31 |
2002-07-23 |
Microsoft Corporation |
Thermal out-of-plane buckle-beam actuator
|
|
WO2002058089A1
(en)
*
|
2001-01-19 |
2002-07-25 |
Massachusetts Institute Of Technology |
Bistable actuation techniques, mechanisms, and applications
|
|
US6747389B2
(en)
*
|
2001-06-11 |
2004-06-08 |
Intel Corporation |
Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications therefor
|
|
US20030053231A1
(en)
*
|
2001-09-17 |
2003-03-20 |
Mark Missey |
Thermally actuated microelectromechanical tilt mirror
|
|
US6658179B2
(en)
*
|
2001-11-08 |
2003-12-02 |
Xerox Corporation |
Monolithic reconfigurable optical multiplexer systems and methods
|
|
US6804959B2
(en)
*
|
2001-12-31 |
2004-10-19 |
Microsoft Corporation |
Unilateral thermal buckle-beam actuator
|
|
US6828171B2
(en)
*
|
2002-01-16 |
2004-12-07 |
Xerox Corporation |
Systems and methods for thermal isolation of a silicon structure
|
|
KR100439423B1
(ko)
*
|
2002-01-16 |
2004-07-09 |
한국전자통신연구원 |
마이크로전자기계 액튜에이터
|
|
US6828887B2
(en)
*
|
2002-05-10 |
2004-12-07 |
Jpmorgan Chase Bank |
Bistable microelectromechanical system based structures, systems and methods
|
|
TW593125B
(en)
*
|
2002-08-09 |
2004-06-21 |
Ind Tech Res Inst |
MEMS type differential actuator
|
|
US6753582B2
(en)
*
|
2002-08-14 |
2004-06-22 |
Intel Corporation |
Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation
|
|
US6747773B2
(en)
*
|
2002-10-31 |
2004-06-08 |
Agilent Technologies, Inc. |
Method and structure for stub tunable resonant cavity for photonic crystals
|
|
US7796847B2
(en)
*
|
2003-03-19 |
2010-09-14 |
Xerox Corporation |
Electrical stimuli of MEMS devices
|
|
US6968100B2
(en)
*
|
2003-03-19 |
2005-11-22 |
Xerox Corporation |
MEMS waveguide shuttle optical latching switch
|
|
US6904191B2
(en)
*
|
2003-03-19 |
2005-06-07 |
Xerox Corporation |
MXN cantilever beam optical waveguide switch
|
|
US6947624B2
(en)
*
|
2003-03-19 |
2005-09-20 |
Xerox Corporation |
MEMS optical latching switch
|
|
US6853765B1
(en)
*
|
2003-03-31 |
2005-02-08 |
The United States Of America As Represented By The Secretary Of The Navy |
MEMS optical switch with thermal actuator
|