JP4479883B2 - 発光半導体装置 - Google Patents
発光半導体装置 Download PDFInfo
- Publication number
- JP4479883B2 JP4479883B2 JP2003390461A JP2003390461A JP4479883B2 JP 4479883 B2 JP4479883 B2 JP 4479883B2 JP 2003390461 A JP2003390461 A JP 2003390461A JP 2003390461 A JP2003390461 A JP 2003390461A JP 4479883 B2 JP4479883 B2 JP 4479883B2
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- JP
- Japan
- Prior art keywords
- group
- epoxy resin
- type epoxy
- silicone
- emitting semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims description 62
- 239000003822 epoxy resin Substances 0.000 claims description 72
- 229920000647 polyepoxide Polymers 0.000 claims description 72
- 229920001296 polysiloxane Polymers 0.000 claims description 69
- 239000011342 resin composition Substances 0.000 claims description 36
- -1 Aluminum compound Chemical class 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 31
- 239000004593 Epoxy Substances 0.000 claims description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 150000001875 compounds Chemical class 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 19
- 229920002050 silicone resin Polymers 0.000 claims description 18
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims description 17
- 239000003054 catalyst Substances 0.000 claims description 14
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- 239000011347 resin Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 claims description 12
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 12
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- 239000010703 silicon Substances 0.000 claims description 11
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- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 claims description 9
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- 125000002723 alicyclic group Chemical group 0.000 claims description 6
- ZSWFCLXCOIISFI-UHFFFAOYSA-N cyclopentadiene Chemical compound C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 claims description 6
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- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 claims description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 3
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- 238000002845 discoloration Methods 0.000 description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical group [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
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- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
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- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 2
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- 239000000178 monomer Substances 0.000 description 2
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
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- KWEKXPWNFQBJAY-UHFFFAOYSA-N (dimethyl-$l^{3}-silanyl)oxy-dimethylsilicon Chemical group C[Si](C)O[Si](C)C KWEKXPWNFQBJAY-UHFFFAOYSA-N 0.000 description 1
- WZJUBBHODHNQPW-UHFFFAOYSA-N 2,4,6,8-tetramethyl-1,3,5,7,2$l^{3},4$l^{3},6$l^{3},8$l^{3}-tetraoxatetrasilocane Chemical group C[Si]1O[Si](C)O[Si](C)O[Si](C)O1 WZJUBBHODHNQPW-UHFFFAOYSA-N 0.000 description 1
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 description 1
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- MWSKJDNQKGCKPA-UHFFFAOYSA-N 6-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CC(C)=CC2C(=O)OC(=O)C12 MWSKJDNQKGCKPA-UHFFFAOYSA-N 0.000 description 1
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- LFRDHGNFBLIJIY-UHFFFAOYSA-N trimethoxy(prop-2-enyl)silane Chemical compound CO[Si](OC)(OC)CC=C LFRDHGNFBLIJIY-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- PZJJKWKADRNWSW-UHFFFAOYSA-N trimethoxysilicon Chemical group CO[Si](OC)OC PZJJKWKADRNWSW-UHFFFAOYSA-N 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
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- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/32257—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic the layer connector connecting to a bonding area disposed in a recess of the surface of the item
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- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/481—Disposition
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- H01L2224/48257—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a die pad of the item
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- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
Description
(A)ビニル基含有オルガノポリシロキサン、
(B)一分子中にケイ素原子に結合した水素原子を2個以上有するオルガノハイドロジェンポリシロキサン、
(C)白金族金属系触媒
を必須成分とするシリコーン樹脂組成物をダイボンド材として使用して接着した発光半導体装置を、
(E)分子あたり少なくとも一つのシラノール基及び/又はケイ素原子結合アルコキシ基を有するシリコーン化合物 50〜90質量%、
(F)ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、水添ビスフェノールF型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、水添フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、水添クレゾールノボラック型エポキシ樹脂、脂環式エポキシ樹脂、シクロペンタジエン型エポキシ樹脂、ナフタレン型エポキシ樹脂、ビフェニル型エポキシ樹脂、水添ビフェニル型エポキシ樹脂、多官能型エポキシ樹脂及び下記構造で示されるエポキシ樹脂
(G)アルミニウム化合物 (E)成分と(F)成分との全量100質量部あたり0.05〜5質量部
を必須成分とするエポキシ・シリコーン混成樹脂組成物の硬化物で封止してなることを特徴とする発光半導体装置を提供する。
本発明の発光半導体装置は例えば図1に示されるような構造を持ったものである。
即ち、発光素子1をダイボンド材2によりリード電極(基板)3に固定すると共に、金線5によりリード電極3,4に接続し、これらをシラノール基及び/又はアルコキシル基を含有するシリコーン化合物、エポキシ樹脂及びアルミニウム系触媒からなるエポキシ・シリコーン混成樹脂組成物の透明硬化物6で封止したものである。
k,mは、一般的には5≦k+m≦10,000を満足する0又は正の整数であり、好ましくは10≦k+m≦2,000で、0<k/(k+m)≦0.2を満足する整数である。
Ha(R3)bSiO(4-a-b)/2 (2)
(式中、R3は脂肪族不飽和結合を含有しない同一又は異種の非置換又は置換の一価炭化水素基であり、a及びbは、0.001≦a<2、0.7≦b≦2、かつ0.8≦a+b≦3を満たす数である。)
で表され、一分子中にケイ素原子に結合した水素原子(SiH基)を少なくとも2個、好ましくは3個以上有するものが挙げられる。
(E)分子あたり少なくとも一つのケイ素原子結合水酸基(シラノール基)及び/又はケイ素原子結合アルコキシ基を有するシリコーン化合物、
(F)分子あたり平均一つ以上のエポキシ基を有する化合物(エポキシ樹脂)、
(G)触媒量のアルミニウム化合物
を必須成分とする組成物である。
また、本発明のエポキシ・シリコーン混成樹脂組成物を使用することでシリコーンダイボンド材と界面で強固な結合が形成されることから発光効率が高く、温度サイクルなどの信頼性が向上する。
一方、エポキシ・シリコーン混成樹脂組成物の硬化条件としては、ポッティング方式で硬化させる場合は、一般的に150〜190℃で5〜60分、望ましくは10〜30分である。トランスファー成形で硬化させる場合は、160〜190℃で1〜6分、望ましくは2〜4分である。
下記式(I)
エポキシ樹脂として透明なビスフェノールA型エポキシ樹脂(EP828:ジャパンエポキシ(株)製)100部、フェニルメチルシリコーン樹脂(シロキサン単位としてCH3SiO3/2単位を20モル%、C6H5SiO3/2単位を60モル%及びC6H5(CH3)SiO単位を20モル%含み、5質量%の水酸基を含有する)100部、γ−グリシドキシプロピルトリメトキシシラン(KBM403:信越化学工業(株)製)2部を100℃に加熱しながら混合することで液状の組成物を作製した。これにアルミニウムベンゾエートを1.5部加え、室温で混合することにより透明な硬化性エポキシ・シリコーン混成樹脂組成物Aを得た。エポキシ・シリコーン混成樹脂組成物Aを硬化条件160℃、30分で硬化させた(以下、同様)硬化物は無色透明であった。
下記式
で示されるポリシロキサン50部、シロキサン単位が(C6H5SiO3/2)0.6(CH3SiO3/2)0.2((CH2=CH)(CH3)SiO2/2)0.2の組成(モル比)で示され、ケイ素原子に結合した水酸基を8質量%含有するオルガノポリシロキサン30部、水添ビスフェノールA型エポキシ樹脂(YX8000:ジャパンエポキシ(株)製)20部、下記式
で示されるオルガノハイドロジェンポリシロキサン5部、下記式
で示される接着助剤0.3部、及び、塩化白金酸のオクチルアルコール変性溶液0.05部、アルミニウムアセチルアセトン0.1部を加え、よく撹拌し、エポキシ・シリコーン混成樹脂組成物Bを調製した。硬化物は無色透明であった。
エポキシ樹脂として透明なビスフェノールA型エポキシ樹脂(EP828:ジャパンエポキシ(株)製)100部、酸無水物としてメチルテトラヒドロ無水フタル酸(MH700:新日本理化(株)製)100部、γ−グリシドキシプロピルトリメトキシシラン(KBM403:信越化学工業(株)製)2部及び硬化触媒として1,8−ジアザビシクロ(5,4,0)ウンデセン−7(DBU)1.2部を室温で混合することで液状のエポキシ樹脂組成物Cを作製した。硬化物は無色透明であった。
作製した発光半導体装置(n=10)を、低温側−40℃、高温側120℃の熱衝撃試験を1,000サイクル行って外観のクラック及びシリコーンダイボンド材とエポキシ・シリコーン混成樹脂界面の剥離が発生した数を観察した。
リード引っ張り試験
作製した発光半導体装置のリードを図1に示す方向に強く手で引っ張ることで封止部にクラックやリード抜けが発生するかどうかを確認した。
表面埃付着性
作製した発光半導体装置に微粉末シリカをふりかけ表面に付着させた後、エアーを吹きかけることで半導体装置表面に付着した微粉末シリカを除去できるかどうか確認した。
失透及び界面剥離
作製した発光半導体装置を85℃/85%RHの条件下に72時間放置した後取り出して水中に投入することで急冷した。その後、封止材料の失透及び封止樹脂とダイボンド材界面の剥離を確認した。
発光素子として、InGaNからなる発光層を有し、主発光ピークが470nmのLEDチップを用いて、図1に示すような発光半導体装置を作製した。発光素子1をリード電極3にシリコーンダイボンド材2を用い、180℃で10分間加熱して固定した。発光素子1とリード電極3,4を金線5にて接続させた後、エポキシ・シリコーン混成樹脂組成物Aをポッティングし、180℃で1時間硬化することで発光半導体装置を作製した。この発光半導体装置を低温側−40℃、高温側120℃の熱衝撃試験を1,000サイクル行って外観のクラック及びシリコーンダイボンド材とエポキシ・シリコーン混成樹脂界面の剥離が発生した数を観察した結果、全く不良は発生しなかった。また、半導体装置表面に対する埃の付着は全く起こらなかった。更に、外部リード端子を図1で示される方向に強く引っ張った結果では、全く封止材料にクラックやリード抜けは発生しなかった。また、発光半導体装置を用いて85℃/85%RHに72時間放置した後、封止材料が失透しているかどうか肉眼で調べたところ全く失透は起こっていなかった。
エポキシ・シリコーン混成樹脂組成物Bを用いた以外は実施例1と全く同じ条件で発光半導体装置を作製した。この発光半導体装置を低温側−40℃、高温側120℃の熱衝撃試験を1,000サイクル行って外観のクラック及びシリコーンダイボンド材とエポキシ・シリコーン混成樹脂界面の剥離が発生した数を観察した結果、全く不良は発生しなかった。また、半導体装置表面に対する埃の付着は全く起こらなかった。また、発光半導体装置を用いて85℃/85%RHに72時間放置した後、封止材料が失透しているかどうか肉眼で調べたところ全く失透は起こっていなかった。更に、外部リード端子を図1で示される方向に強く引っ張った結果では、全く封止材料にクラックやリード抜けは発生しなかった。
発光素子として、InGaNからなる発光層を有し、主発光ピークが470nmのLEDチップを用いて、図2に示すような発光半導体装置を作製した。発光素子1をリード電極3にシリコーンダイボンド材2を用い、180℃で10分間加熱して10mm×10mmのセラミック基板上に20個固定した。発光素子1とリード電極3,4を金線5にて接続させた後、金型にこの基板をセットし、トランスファー成形によりエポキシ・シリコーン混成樹脂組成物Bを175℃で5分間硬化させることで封止した。封止後、150℃で1時間後硬化させた後、切断装置を用いて個片化した。この発光半導体装置10個を用い、低温側−40℃、高温側120℃の熱衝撃試験を1,000サイクル行って外観のクラック及びシリコーンダイボンド材とエポキシ・シリコーン混成樹脂界面の剥離が発生した数を観察した結果、全く不良は発生しなかった。また、半導体装置表面に対する埃の付着は全く起こらなかった。また、発光半導体装置を用いて85℃/85%RHに72時間放置した後、封止材料が失透しているかどうか肉眼で調べたところ全く失透は起こっていなかった。
エポキシ樹脂組成物Cを用いた以外は実施例1と全く同じ条件で発光半導体装置を作製した。この発光半導体装置10個を低温側−40℃、高温側120℃の熱衝撃試験を1,000サイクル行って外観のクラック及びシリコーンダイボンド材とエポキシ樹脂界面の剥離が発生した数を観察した結果、クラックは全く起こっていなかったが、10個中6個にシリコーンダイボンド材とエポキシ樹脂界面に剥離不良が認められた。また、半導体装置表面に対する埃の付着は全く起こらなかった。また、発光半導体装置を用いて85℃/85%RHに72時間放置した後、封止材料が失透しているかどうか肉眼で調べたところ全く失透は起こっていなかったが、シリコーンダイボンド材とエポキシ樹脂界面が剥離し、光の散乱が認められた。更に、外部リード端子を図1で示される方向に強く引っ張った結果では全く封止材料にクラックやリード抜けは発生しなかった。
2 シリコーンダイボンド材
3,4 リード電極
5 金線
6 エポキシ・シリコーン混成樹脂組成物の硬化物
7 セラミックス筐体
Claims (3)
- 発光半導体素子と基板とを、
(A)ビニル基含有オルガノポリシロキサン、
(B)一分子中にケイ素原子に結合した水素原子を2個以上有するオルガノハイドロジェンポリシロキサン、
(C)白金族金属系触媒
を必須成分とするシリコーン樹脂組成物をダイボンド材として使用して接着した発光半導体装置を、
(E)分子あたり少なくとも一つのシラノール基及び/又はケイ素原子結合アルコキシ基を有するシリコーン化合物 50〜90質量%、
(F)ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、水添ビスフェノールF型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、水添フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、水添クレゾールノボラック型エポキシ樹脂、脂環式エポキシ樹脂、シクロペンタジエン型エポキシ樹脂、ナフタレン型エポキシ樹脂、ビフェニル型エポキシ樹脂、水添ビフェニル型エポキシ樹脂、多官能型エポキシ樹脂及び下記構造で示されるエポキシ樹脂
(G)アルミニウム化合物 (E)成分と(F)成分との全量100質量部あたり0.05〜5質量部
を必須成分とするエポキシ・シリコーン混成樹脂組成物の硬化物で封止してなることを特徴とする発光半導体装置。 - 上記シリコーン樹脂組成物が、更に、(D)アルコキシシラン化合物及び一分子中にケイ素原子に結合した水素原子(SiH基)、ケイ素原子に結合したアルケニル基、アルコキシシリル基及びエポキシ基から選ばれる官能性基を少なくとも2種含有し、ケイ素原子数4〜30の、直鎖状又は環状構造のシロキサン化合物から選ばれる接着助剤を含有する請求項1記載の発光半導体装置。
- 上記(E)成分のシリコーン化合物が、CH 3 SiO 3/2 単位、C 6 H 5 SiO 3/2 単位及びC 6 H 5 (CH 3 )SiO単位を含むシリコーン化合物である請求項1又は2記載の砲弾型発光半導体装置。
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