JP4475009B2 - 有機電界発光素子及びその製造方法 - Google Patents
有機電界発光素子及びその製造方法 Download PDFInfo
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- JP4475009B2 JP4475009B2 JP2004157256A JP2004157256A JP4475009B2 JP 4475009 B2 JP4475009 B2 JP 4475009B2 JP 2004157256 A JP2004157256 A JP 2004157256A JP 2004157256 A JP2004157256 A JP 2004157256A JP 4475009 B2 JP4475009 B2 JP 4475009B2
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- organic electroluminescent
- carbon film
- cathode
- anode
- diamond
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- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims description 34
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 25
- 229910052799 carbon Inorganic materials 0.000 claims description 25
- 239000007789 gas Substances 0.000 claims description 23
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 19
- 238000009832 plasma treatment Methods 0.000 claims description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- 238000005401 electroluminescence Methods 0.000 claims description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 150000002430 hydrocarbons Chemical class 0.000 claims description 7
- 239000004215 Carbon black (E152) Substances 0.000 claims description 6
- 229930195733 hydrocarbon Natural products 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- -1 diborane Chemical compound 0.000 claims description 2
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims description 2
- 239000011368 organic material Substances 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 239000011574 phosphorus Substances 0.000 claims description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000011593 sulfur Substances 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 66
- 239000010408 film Substances 0.000 description 50
- 239000010409 thin film Substances 0.000 description 28
- 239000002344 surface layer Substances 0.000 description 26
- 230000005525 hole transport Effects 0.000 description 16
- 238000001020 plasma etching Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 7
- 229910052731 fluorine Inorganic materials 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 5
- 125000006575 electron-withdrawing group Chemical group 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 4
- 238000005546 reactive sputtering Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 125000006414 CCl Chemical group ClC* 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- JHJNPOSPVGRIAN-SFHVURJKSA-N n-[3-[(1s)-1-[[6-(3,4-dimethoxyphenyl)pyrazin-2-yl]amino]ethyl]phenyl]-5-methylpyridine-3-carboxamide Chemical compound C1=C(OC)C(OC)=CC=C1C1=CN=CC(N[C@@H](C)C=2C=C(NC(=O)C=3C=C(C)C=NC=3)C=CC=2)=N1 JHJNPOSPVGRIAN-SFHVURJKSA-N 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910014033 C-OH Inorganic materials 0.000 description 1
- 229910014570 C—OH Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
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- Electroluminescent Light Sources (AREA)
Description
12,26,47・・・アノード体
32,52,68・・・アノード
13,25,34,46,54,66・・・正孔輸送層
14,24,35,45,55,65・・・有機発光層
15,23,36,44,56,64・・・電子輸送層
16,22,37・・・カソード体
42,58,62・・・カソード
1a・・・C−F構造
1b・・・C−Cl構造
1c・・・C−O構造
2a・・・C−H構造
2b・・・C−R構造
2c・・・C−OH構造
33,53,67・・・アノード表面層
43,57,63・・・カソード表面層
59,69・・・絶縁基体
5A,6B・・・アノード側積層基板
5B,6A・・・カソード側積層基板
Claims (7)
- 基体上に、低分子あるいは高分子の有機物からなる発光層と、少なくともこの発光層を介しアノード体とカソード体が積層されて成る有機電界発光素子において、前記アノード体が、アモルファスカーボン膜を有し、該アモルファスカーボン膜表面がC−O構造で終端されていることを特徴とする有機電界発光素子。
- 前記アモルファスカーボン膜が、ダイヤモンド状カーボン膜であることを特徴とする請求項1に記載の有機電界発光素子。
- 前記ダイヤモンド状カーボン膜に不純物がドープされていることを特徴とする請求項2に記載の有機電界発光素子。
- 前記不純物は、窒素、燐、硫黄、硼素、酸素および珪素からなる群から選ばれた少なくとも一種を含むことを特徴とする請求項3に記載の有機電界発光素子。
- 基体上に、少なくとも、
アノード体として、炭化水素及び水素を含む原料ガスを用いたプラズマCVD法によりアモルファスカーボン膜を成膜する工程、
アモルファスカーボン膜を酸素を含むガスを用いたプラズマ処理を施す工程、
を含むことを特徴とする有機電界発光素子の製造方法。 - 前記アモルファスカーボン膜が、ダイヤモンド状カーボン膜であることを特徴とする請求項5に記載の有機電界発光素子の製造方法。
- 前記ダイヤモンド状カーボン膜を成膜する工程において、ドープガスとして、窒素、フォスフィン、硫化水素、ジボラン、酸素およびシランからなる群から選ばれた少なくとも一種を添加することを特徴とする請求項6に記載の有機電界発光素子の製造方法。
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JP2004157256A JP4475009B2 (ja) | 2004-05-27 | 2004-05-27 | 有機電界発光素子及びその製造方法 |
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JP2004157256A JP4475009B2 (ja) | 2004-05-27 | 2004-05-27 | 有機電界発光素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2005339992A JP2005339992A (ja) | 2005-12-08 |
JP4475009B2 true JP4475009B2 (ja) | 2010-06-09 |
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JP2004157256A Expired - Fee Related JP4475009B2 (ja) | 2004-05-27 | 2004-05-27 | 有機電界発光素子及びその製造方法 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100479228C (zh) * | 2006-08-08 | 2009-04-15 | 中国科学院化学研究所 | 基于电子受体材料的蓝光有机发光二极管的制备方法 |
JP4918387B2 (ja) * | 2007-03-27 | 2012-04-18 | タキロン株式会社 | 機能性薄膜素子、表示体、調光体、及び導電層のイオン化ポテンシャル制御方法 |
US8258508B2 (en) | 2009-08-07 | 2012-09-04 | Mitsui Mining & Smelting Co., Ltd. | Anode structure for use in organic EL device, production method thereof and organic EL device |
WO2014132381A1 (ja) * | 2013-02-28 | 2014-09-04 | 国立大学法人岩手大学 | 発光デバイス、及びその製造方法、塗料並びに塗布装置 |
KR20220108855A (ko) * | 2021-01-27 | 2022-08-04 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
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