JP4474208B2 - 樹脂発泡体およびそれからなる研磨パッド - Google Patents

樹脂発泡体およびそれからなる研磨パッド Download PDF

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Publication number
JP4474208B2
JP4474208B2 JP2004173128A JP2004173128A JP4474208B2 JP 4474208 B2 JP4474208 B2 JP 4474208B2 JP 2004173128 A JP2004173128 A JP 2004173128A JP 2004173128 A JP2004173128 A JP 2004173128A JP 4474208 B2 JP4474208 B2 JP 4474208B2
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Japan
Prior art keywords
resin
polishing pad
resin composition
temperature
foam
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Expired - Fee Related
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JP2004173128A
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English (en)
Japanese (ja)
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JP2005350574A5 (https=
JP2005350574A (ja
Inventor
俊二 金田
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Kuraray Co Ltd
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Kuraray Co Ltd
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Priority to JP2004173128A priority Critical patent/JP4474208B2/ja
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Publication of JP2005350574A5 publication Critical patent/JP2005350574A5/ja
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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2004173128A 2004-06-10 2004-06-10 樹脂発泡体およびそれからなる研磨パッド Expired - Fee Related JP4474208B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004173128A JP4474208B2 (ja) 2004-06-10 2004-06-10 樹脂発泡体およびそれからなる研磨パッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004173128A JP4474208B2 (ja) 2004-06-10 2004-06-10 樹脂発泡体およびそれからなる研磨パッド

Publications (3)

Publication Number Publication Date
JP2005350574A JP2005350574A (ja) 2005-12-22
JP2005350574A5 JP2005350574A5 (https=) 2007-04-26
JP4474208B2 true JP4474208B2 (ja) 2010-06-02

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ID=35585314

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JP2004173128A Expired - Fee Related JP4474208B2 (ja) 2004-06-10 2004-06-10 樹脂発泡体およびそれからなる研磨パッド

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JP (1) JP4474208B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101290490B1 (ko) 2005-09-22 2013-07-26 가부시키가이샤 구라레 고분자 재료, 그것으로부터 얻어지는 발포체 및 이들을사용한 연마 패드
JP4994807B2 (ja) * 2006-11-29 2012-08-08 株式会社クラレ 発泡体の製造方法
JP4994894B2 (ja) * 2007-03-09 2012-08-08 株式会社クラレ 樹脂発泡体およびそれからなる研磨パッド
JP5393434B2 (ja) 2008-12-26 2014-01-22 東洋ゴム工業株式会社 研磨パッド及びその製造方法
JP6117645B2 (ja) * 2013-07-31 2017-04-19 三菱樹脂株式会社 ポリアミド系樹脂組成物、及びそれを成形してなるフィルム、射出成形体
FR3093726B1 (fr) 2019-03-15 2021-10-01 Arkema France Procédé de fabrication d’une mousse de copolymère à blocs polyamides et à blocs polyéthers
CN114410102B (zh) * 2022-01-29 2022-09-13 浙江环龙新材料科技有限公司 一种微孔热塑性聚氨酯纳米复合发泡卷材及其制备方法与在抛光垫中的应用
CN115791885B (zh) * 2022-11-25 2024-07-05 巨石集团有限公司 玻纤增强结晶性树脂复合材料中树脂含量的测定方法

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Publication number Publication date
JP2005350574A (ja) 2005-12-22

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