JP4464561B2 - 軸外球面鏡と屈折素子を用いる分光計測システム - Google Patents

軸外球面鏡と屈折素子を用いる分光計測システム Download PDF

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Publication number
JP4464561B2
JP4464561B2 JP2000542645A JP2000542645A JP4464561B2 JP 4464561 B2 JP4464561 B2 JP 4464561B2 JP 2000542645 A JP2000542645 A JP 2000542645A JP 2000542645 A JP2000542645 A JP 2000542645A JP 4464561 B2 JP4464561 B2 JP 4464561B2
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Japan
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sample
mirror
optical system
sampling
radiation
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Expired - Fee Related
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JP2000542645A
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Japanese (ja)
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JP2002510797A (ja
JP2002510797A5 (enExample
Inventor
イー． ノートン，アダム
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KLA Corp
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KLA Corp
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Publication of JP2002510797A5 publication Critical patent/JP2002510797A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2000542645A 1998-04-08 1999-03-25 軸外球面鏡と屈折素子を用いる分光計測システム Expired - Fee Related JP4464561B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/057,245 US5917594A (en) 1998-04-08 1998-04-08 Spectroscopic measurement system using an off-axis spherical mirror and refractive elements
US09/057,245 1998-04-08
PCT/US1999/006608 WO1999051955A1 (en) 1998-04-08 1999-03-25 Spectroscopic measurement system using an off-axis spherical mirror and refractive elements

Publications (3)

Publication Number Publication Date
JP2002510797A JP2002510797A (ja) 2002-04-09
JP2002510797A5 JP2002510797A5 (enExample) 2006-04-06
JP4464561B2 true JP4464561B2 (ja) 2010-05-19

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JP2000542645A Expired - Fee Related JP4464561B2 (ja) 1998-04-08 1999-03-25 軸外球面鏡と屈折素子を用いる分光計測システム

Country Status (4)

Country Link
US (2) US5917594A (enExample)
JP (1) JP4464561B2 (enExample)
AU (1) AU3205999A (enExample)
WO (1) WO1999051955A1 (enExample)

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Publication number Publication date
JP2002510797A (ja) 2002-04-09
US5917594A (en) 1999-06-29
WO1999051955A1 (en) 1999-10-14
US6323946B1 (en) 2001-11-27
AU3205999A (en) 1999-10-25

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