JP4444622B2 - 真空排気装置 - Google Patents
真空排気装置 Download PDFInfo
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- JP4444622B2 JP4444622B2 JP2003367451A JP2003367451A JP4444622B2 JP 4444622 B2 JP4444622 B2 JP 4444622B2 JP 2003367451 A JP2003367451 A JP 2003367451A JP 2003367451 A JP2003367451 A JP 2003367451A JP 4444622 B2 JP4444622 B2 JP 4444622B2
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- flow path
- valve
- vacuum
- vacuum exhaust
- flow passage
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- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 17
- 238000010926 purge Methods 0.000 claims abstract description 13
- 239000012530 fluid Substances 0.000 claims abstract description 9
- 238000007689 inspection Methods 0.000 abstract description 7
- 238000003466 welding Methods 0.000 abstract description 7
- 231100000331 toxic Toxicity 0.000 abstract description 5
- 230000002588 toxic effect Effects 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 32
- 239000011261 inert gas Substances 0.000 description 5
- 210000004907 gland Anatomy 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005536 corrosion prevention Methods 0.000 description 1
- 238000001784 detoxification Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Description
図1乃至図5は、本発明の実施の形態の真空排気装置を示している。
図1に示すように、真空排気装置10は、ボデー11と、逆止弁12と、遮断弁13と、真空排気用ノズル14とを有している。真空排気装置10は、パージガスの流路23に真空発生部15を有し、真空発生部15に接続された接続配管16から真空排気可能となっている。
真空排気装置10は、逆止弁12と遮断弁13と真空排気用ノズル14とがボデー11に一体化されることにより、小型化が可能となり、シリンダキャビネットの配置設計を容易にする。ワンブロックのボデー11内に収納される各機能要素も、入口21の流路23部分に逆止弁12のポペットを収納し、遮断弁13のシート内に腐食防止用オリフィス41を設置し、さらには、遮断弁出口流路にラバールノズルを設置するなどの多機能化が図られている。真空排気装置10では、外部リークに係るシールは溶接、もしくはメタルシール化が図られており、Heリーク値1×10−12Pam3/sec.レベルの閉止性が確保できる。
11 ボデー
12 逆止弁
13 遮断弁
14 真空排気用ノズル
15 真空発生部
16 接続配管
Claims (2)
- パージガスの流路に真空発生部を有し、前記真空発生部に接続された接続配管から真空排気可能な真空排気装置であって、
ボデーと、逆止弁と、遮断弁と、真空排気用ノズルとを有し、
前記ボデーは同一方向に入口と出口とを有した前記流路を有し、
前記逆止弁は前記流路の入口に下流から上流への逆流を防止するよう設けられ、
前記遮断弁は前記逆止弁の下流で前記流路を遮断し、作動操作に応じて前記流路を連通させる作動部と、前記流路の前記作動部より上流と下流とを常時パージするオリフィスとを有し、
前記真空排気用ノズルは前記遮断弁が前記流路を連通させたとき前記流路を流れる流体により前記真空発生部に負圧を発生させるよう前記流路の出口に設けられていることを、
特徴とする真空排気装置。 - 前記オリフィスは前記遮断弁の弁シートに設けられ、前記真空排気用ノズルは1次圧に関連した所定の流量になるよう設定され、前記真空排気用ノズルの下流に排出口を有し、前記排出口は下流側の流路内径が上流側の流路内径より大きいことを、特徴とする請求項1記載の真空発生装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003367451A JP4444622B2 (ja) | 2003-10-28 | 2003-10-28 | 真空排気装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003367451A JP4444622B2 (ja) | 2003-10-28 | 2003-10-28 | 真空排気装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005133565A JP2005133565A (ja) | 2005-05-26 |
JP4444622B2 true JP4444622B2 (ja) | 2010-03-31 |
Family
ID=34645450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003367451A Expired - Lifetime JP4444622B2 (ja) | 2003-10-28 | 2003-10-28 | 真空排気装置 |
Country Status (1)
Country | Link |
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JP (1) | JP4444622B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105229305A (zh) * | 2014-04-14 | 2016-01-06 | 维泰克株式会社 | 快放阀及带有快放阀的真空泵装置 |
JP2019127883A (ja) * | 2018-01-24 | 2019-08-01 | 株式会社フジキン | バキュームジェネレータ |
JP2021008829A (ja) * | 2019-06-28 | 2021-01-28 | 株式会社フジキン | バキュームジェネレータ |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101034649B1 (ko) | 2009-03-12 | 2011-05-16 | (주)금성다이아몬드 | 교체가능한 진공노즐 및 체크밸브가 내장된 진공발생기 |
KR101036797B1 (ko) | 2011-03-31 | 2011-05-25 | 한국뉴매틱(주) | 진공 그리퍼 장치 |
KR101395241B1 (ko) | 2012-08-09 | 2014-05-15 | 주식회사 앤투앤 | 진공파괴블럭 |
KR101303749B1 (ko) * | 2013-05-29 | 2013-10-08 | (주)브이텍 | 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 |
-
2003
- 2003-10-28 JP JP2003367451A patent/JP4444622B2/ja not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105229305A (zh) * | 2014-04-14 | 2016-01-06 | 维泰克株式会社 | 快放阀及带有快放阀的真空泵装置 |
JP2019127883A (ja) * | 2018-01-24 | 2019-08-01 | 株式会社フジキン | バキュームジェネレータ |
JP7044240B2 (ja) | 2018-01-24 | 2022-03-30 | 株式会社フジキン | バキュームジェネレータ |
JP2021008829A (ja) * | 2019-06-28 | 2021-01-28 | 株式会社フジキン | バキュームジェネレータ |
Also Published As
Publication number | Publication date |
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JP2005133565A (ja) | 2005-05-26 |
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