JP4442158B2 - マイクロ電気機械システムの共振器およびその駆動方法 - Google Patents

マイクロ電気機械システムの共振器およびその駆動方法 Download PDF

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JP4442158B2
JP4442158B2 JP2003297275A JP2003297275A JP4442158B2 JP 4442158 B2 JP4442158 B2 JP 4442158B2 JP 2003297275 A JP2003297275 A JP 2003297275A JP 2003297275 A JP2003297275 A JP 2003297275A JP 4442158 B2 JP4442158 B2 JP 4442158B2
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vibrator
temperature
resonator
electrode
resonance frequency
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JP2005072757A (ja
JP2005072757A5 (enExample
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康治 難波田
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Sony Corp
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Sony Corp
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  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2003297275A 2003-08-21 2003-08-21 マイクロ電気機械システムの共振器およびその駆動方法 Expired - Fee Related JP4442158B2 (ja)

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JP2003297275A JP4442158B2 (ja) 2003-08-21 2003-08-21 マイクロ電気機械システムの共振器およびその駆動方法

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JP2003297275A JP4442158B2 (ja) 2003-08-21 2003-08-21 マイクロ電気機械システムの共振器およびその駆動方法

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JP2005072757A JP2005072757A (ja) 2005-03-17
JP2005072757A5 JP2005072757A5 (enExample) 2006-07-06
JP4442158B2 true JP4442158B2 (ja) 2010-03-31

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4760384B2 (ja) * 2006-01-10 2011-08-31 セイコーエプソン株式会社 Ｍｅｍｓ振動子
EP2037574A1 (en) * 2006-06-15 2009-03-18 Koichi Hirama Composite resonator
JP4930769B2 (ja) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 発振器
JP4945204B2 (ja) 2006-09-08 2012-06-06 株式会社東芝 アクチュエータ
JP4690436B2 (ja) * 2008-05-01 2011-06-01 株式会社半導体理工学研究センター Ｍｅｍｓ共振器、ｍｅｍｓ発振回路及びｍｅｍｓデバイス
JP5344175B2 (ja) * 2009-12-22 2013-11-20 セイコーエプソン株式会社 Ｍｅｍｓ発振器及びその製造方法

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