JP4431350B2 - 封止リングとその管理システム - Google Patents

封止リングとその管理システム Download PDF

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Publication number
JP4431350B2
JP4431350B2 JP2003338541A JP2003338541A JP4431350B2 JP 4431350 B2 JP4431350 B2 JP 4431350B2 JP 2003338541 A JP2003338541 A JP 2003338541A JP 2003338541 A JP2003338541 A JP 2003338541A JP 4431350 B2 JP4431350 B2 JP 4431350B2
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JP
Japan
Prior art keywords
sealing ring
information
circuit chip
ring
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003338541A
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English (en)
Japanese (ja)
Other versions
JP2005106137A (ja
JP2005106137A5 (https=
Inventor
勤 広木
勝通 野口
慎也 櫻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Nippon Valqua Industries Ltd
Original Assignee
Tokyo Electron Ltd
Nippon Valqua Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Nippon Valqua Industries Ltd filed Critical Tokyo Electron Ltd
Priority to JP2003338541A priority Critical patent/JP4431350B2/ja
Priority to PCT/JP2004/014432 priority patent/WO2005031195A1/en
Priority to US10/570,109 priority patent/US7398692B2/en
Publication of JP2005106137A publication Critical patent/JP2005106137A/ja
Publication of JP2005106137A5 publication Critical patent/JP2005106137A5/ja
Application granted granted Critical
Publication of JP4431350B2 publication Critical patent/JP4431350B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3296—Arrangements for monitoring the condition or operation of elastic sealings; Arrangements for control of elastic sealings, e.g. of their geometry or stiffness
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
JP2003338541A 2003-09-29 2003-09-29 封止リングとその管理システム Expired - Lifetime JP4431350B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003338541A JP4431350B2 (ja) 2003-09-29 2003-09-29 封止リングとその管理システム
PCT/JP2004/014432 WO2005031195A1 (en) 2003-09-29 2004-09-24 Sealing ring and its managing system
US10/570,109 US7398692B2 (en) 2003-09-29 2004-09-24 Sealing ring and its managing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003338541A JP4431350B2 (ja) 2003-09-29 2003-09-29 封止リングとその管理システム

Publications (3)

Publication Number Publication Date
JP2005106137A JP2005106137A (ja) 2005-04-21
JP2005106137A5 JP2005106137A5 (https=) 2006-10-26
JP4431350B2 true JP4431350B2 (ja) 2010-03-10

Family

ID=34386159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003338541A Expired - Lifetime JP4431350B2 (ja) 2003-09-29 2003-09-29 封止リングとその管理システム

Country Status (3)

Country Link
US (1) US7398692B2 (https=)
JP (1) JP4431350B2 (https=)
WO (1) WO2005031195A1 (https=)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100653720B1 (ko) * 2005-10-04 2006-12-05 삼성전자주식회사 열처리 설비 및 이의 구동방법
US7810816B1 (en) * 2005-12-13 2010-10-12 Horace P. Halling Seal
US20070241510A1 (en) * 2006-04-12 2007-10-18 Dileo Anthony Filter seating monitor
US20070243113A1 (en) 2006-04-12 2007-10-18 Dileo Anthony Filter with memory, communication and concentration sensor
US20070240578A1 (en) * 2006-04-12 2007-10-18 Dileo Anthony Filter with memory, communication and temperature sensor
US20110094310A1 (en) * 2006-04-12 2011-04-28 Millipore Corporation Filter with memory, communication and pressure sensor
US8007568B2 (en) 2006-04-12 2011-08-30 Millipore Corporation Filter with memory, communication and pressure sensor
JP4925178B2 (ja) * 2006-09-25 2012-04-25 大和製罐株式会社 容器のシール不良検査方法
JP4925189B2 (ja) * 2007-02-13 2012-04-25 大和製罐株式会社 注出口付き袋状容器のシール不良検査方法
JP4925188B2 (ja) * 2007-02-13 2012-04-25 大和製罐株式会社 袋状容器のシール不良検査方法
EP1965107B1 (de) * 2007-02-27 2010-07-14 Carl Freudenberg KG Dichtring
RU2335680C1 (ru) * 2007-04-09 2008-10-10 Государственное образовательное учреждение высшего профессионального образования "Мордовский государственный университет им. Н.П. Огарева" Уплотнительное соединение
US8264347B2 (en) * 2008-06-24 2012-09-11 Trelleborg Sealing Solutions Us, Inc. Seal system in situ lifetime measurement
EP2379918B1 (en) 2009-01-16 2012-11-21 Parker-Hannifin Corporation Rfid-tagged seal
DE102009013003A1 (de) * 2009-03-13 2010-09-16 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Dichtungskomponente mit elektronischer Komponente
EP2242004B1 (de) * 2009-04-14 2016-01-27 Carl Freudenberg KG Bauteil
US8448949B2 (en) 2009-08-13 2013-05-28 Parker-Hannifin Corporation Sealing assembly with integral sensor
DE102011005371A1 (de) 2011-03-10 2012-09-13 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Überwachung einer Integrität einer Schraubverbindung
US9739402B2 (en) * 2013-03-04 2017-08-22 Eaton Corporation Electrically conductive seals for fluid conveyance systems
JP6196721B1 (ja) * 2016-10-07 2017-09-13 ジャパンマテックス株式会社 グラスライニング機器用ガスケット及びその製造方法
RU2677434C1 (ru) * 2018-01-10 2019-01-16 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") Уплотнительное устройство
EP3650700B1 (de) * 2018-11-09 2024-02-28 Pfeiffer Vacuum Gmbh Vakuumgerät
EP3976999A4 (en) 2019-05-31 2023-06-28 Greene, Tweed Technologies, Inc. Smart seals for monitoring and analysis of seal properties useful in semiconductor valves
US12194818B2 (en) 2019-10-30 2025-01-14 Mitsubishi Electric Corporation Vehicle-mounted device
DE102019131267A1 (de) * 2019-11-20 2021-05-20 Carl Freudenberg Kg Dichtungsanordnung und Dichtelement
RU195568U1 (ru) * 2019-11-28 2020-01-31 Общество с ограниченной ответственностью Управляющая компания "Алтайский завод прецизионных изделий" Торцовое уплотнение
DE102019219416A1 (de) 2019-12-12 2021-06-17 Eagleburgmann Germany Gmbh & Co. Kg Gleitringdichtungsanordnung mit Sensor
JP7657802B2 (ja) * 2019-12-19 2025-04-07 ラム リサーチ コーポレーション 消耗チャンバ部品におけるカプセル化ｒｆｉｄ
US20230084703A1 (en) * 2020-01-10 2023-03-16 Glatt Gesellschaft Mit Beschränkter Haftung Sealing Device and Method for the Production Thereof and Pipeline System
DE102020212767A1 (de) 2020-10-09 2022-04-14 Glatt Gesellschaft Mit Beschränkter Haftung Dichtungsvorrichtung und Verfahren zu deren Herstellung sowie Rohrleitungssystem
DE102020106470B3 (de) * 2020-03-10 2020-11-26 Carl Freudenberg Kg Dichtungsanordnung und deren Verwendung
JP7338571B2 (ja) * 2020-07-02 2023-09-05 トヨタ自動車株式会社 劣化推定装置、劣化推定方法、劣化推定プログラム
CN116206938B (zh) * 2022-08-03 2026-01-02 拓荆科技股份有限公司 一种密封环及其制备方法
US12352355B2 (en) * 2022-11-15 2025-07-08 Goodrich Corporation System and method for monitoring gasket sealing health
CN116697144B (zh) * 2023-05-31 2024-07-05 广东工业大学 一种深远海三浮体转驳输油系统
CN117371171B (zh) * 2023-08-31 2024-05-24 湖北江城实验室科技服务有限公司 密封环可靠性的评估方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU498874B2 (en) * 1974-09-02 1979-03-29 Rieber + Son A/S Moulding a pipe end socket
US4120521A (en) * 1975-08-28 1978-10-17 Rieber & Son Plastic-Industri A/S Combined mould element and sealing ring
JP2849894B2 (ja) 1993-11-02 1999-01-27 株式会社弘電社 Ｉｄタグ付き安全ロープおよび安全ロープの管理装置
JPH09105466A (ja) 1995-10-11 1997-04-22 Mitsubishi Chem Corp グランドパッキンシール診断装置
JP2000304620A (ja) 1999-04-23 2000-11-02 Matsushita Electric Works Ltd 非接触ｉｄタグ
JP2002168348A (ja) 2000-11-27 2002-06-14 Seiko Epson Corp Ｏリング構造
JP2002310333A (ja) 2001-04-17 2002-10-23 Hitachi Ltd 弁のメンテナンス時期予測方法及びその装置
JP2003095280A (ja) 2001-09-26 2003-04-03 Toppan Printing Co Ltd 非接触方式ｉｃチップ付きスタンディングパウチ

Also Published As

Publication number Publication date
JP2005106137A (ja) 2005-04-21
WO2005031195A1 (en) 2005-04-07
US7398692B2 (en) 2008-07-15
US20070012117A1 (en) 2007-01-18

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