JP4429705B2 - 距離測定方法および距離測定装置 - Google Patents
距離測定方法および距離測定装置 Download PDFInfo
- Publication number
- JP4429705B2 JP4429705B2 JP2003405338A JP2003405338A JP4429705B2 JP 4429705 B2 JP4429705 B2 JP 4429705B2 JP 2003405338 A JP2003405338 A JP 2003405338A JP 2003405338 A JP2003405338 A JP 2003405338A JP 4429705 B2 JP4429705 B2 JP 4429705B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light beam
- distance
- light beams
- reference plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/46—Indirect determination of position data
- G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/50—Systems of measurement based on relative movement of target
- G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/87—Combinations of systems using electromagnetic waves other than radio waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
- G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
- G01S7/4813—Housing arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Description
y=v・(t1−t0)
によって与えられる。ここで、vは構造部品4の移動速度である。光ビーム10に対する光ビーム12の傾斜角αが既知であれば、(ここでは光ビーム10が構造部品4に垂直に入射するとして)、構造部品4の前縁と焦平面13との間の距離xは
1’ 距離測定装置
2 基準面
4 構造部品
6 移動方向
10 光ビーム
12 光ビーム
13 焦平面
14 光ビーム
16 光源
18 発光器
20 検出装置
22 評価装置
24 光導波路装置
26 光入出射端
28 レンズ装置
40 光ビーム
42 光ビーム
44 光ビーム
46 光ビーム
50 外被
52 ビーム系
54 ビーム系
56 ビーム系
58 ビーム系
60 能動ファイバ
62 ファイバコリメータ
64 受動ファイバ
Claims (11)
- 基準面の側を通って導かれる構造部品と前記基準面との間の距離を測定する距離測定方法において、互いにほぼ平行に向けられた2つの光ビームと、前記平行な光ビームに対して前記構造部品の移動方向に傾斜して向けられた他の光ビームとが前記構造部品によって形成される各反射系について監視され、一方では前記平行な光ビームに対応する反射系への到達時点間の時間差と、他方では前記平行な光ビームの1つおよび前記傾斜した1つの他の光ビームに、または前記傾斜した2つの他の光ビームに対応する反射系への到達時点間の時間差とに基づいて、前記距離に対する特性値が求められることを特徴とする距離測定方法。
- 前記距離に対する特性値が2つの前記時間差の比から求められることを特徴とする請求項1に記載の方法。
- 前記各光ビームとしてそれぞれ異なる波長の光が用いられることを特徴とする請求項1又は2記載の方法。
- 基準面の側を通って導かれる構造部品と前記基準面との間の距離を測定する距離測定装置において、
互いにほぼ平行に向けられた少なくとも2つの光ビームおよび前記平行な光ビームに対して構造部品の移動方向に傾斜して向けられた少なくとも1つの他の光ビームを発生する光源と、
前記各光ビームにそれぞれ対応し前記構造部品によって形成される各反射系を検出する検出装置とを備え、
前記検出装置に、一方では前記平行な光ビームに対応する反射系への到達時点間の時間差と、他方では前記平行な光ビームの1つおよび前記傾斜した1つの他の光ビームに、または前記傾斜した2つの他の光ビームに対応する反射系への到達時点間の時間差とに基づいて、前記距離に対する特性値を求める評価装置が付設されていることを特徴とする距離測定装置。 - 前記評価装置は2つの前記時間差の比に基づいて距離特性値を求める請求項4記載の装置。
- 前記光源は、前記光ビームの数に一致する数の発光器を備え、これらの発光器はこれらの発光器から発生された光の波長を互いに異ならせていることを特徴とする請求項4又は5記載の装置。
- 前記光源は、前記基準面に配置された光入出射端に光導波路装置を介して接続されていることを特徴とする請求項4乃至6の1つに記載の装置。
- 前記検出装置も前記光導波路装置を介して前記光入出射端に接続されていることを特徴とする請求項7記載の装置。
- 前記光導波路装置は、前記光入出射端の範囲内に部分的にレンズ装置を備えていることを特徴とする請求項7又は8記載の装置。
- 前記光導波路装置は、共通の外被内に配置され前記光ビームの数に一致する数のビーム系を備えていることを特徴とする請求項7乃至9の1つに記載の装置。
- タービンの半径方向隙間を監視するために使用されることを特徴とする請求項4乃至10の1つに記載の装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02027867A EP1429155B1 (de) | 2002-12-12 | 2002-12-12 | Verfahren zur Messung des Abstands eines an einer Referenzfläche vorbei gefürhrten Bauteils und Durchführung des Verfahrens |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004191374A JP2004191374A (ja) | 2004-07-08 |
JP4429705B2 true JP4429705B2 (ja) | 2010-03-10 |
Family
ID=32319591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003405338A Expired - Fee Related JP4429705B2 (ja) | 2002-12-12 | 2003-12-04 | 距離測定方法および距離測定装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7027166B2 (ja) |
EP (1) | EP1429155B1 (ja) |
JP (1) | JP4429705B2 (ja) |
CN (1) | CN1285881C (ja) |
DE (1) | DE50213746D1 (ja) |
ES (1) | ES2330998T3 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10488182B2 (en) | 2016-03-18 | 2019-11-26 | Mitsubishi Heavy Industries, Ltd. | Optical measurement device, optical measurement method, and rotating machine |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2629319C (en) * | 2005-11-10 | 2012-01-03 | Optical Air Data Systems, Llc | Single aperture multiple optical waveguide transceiver |
DE102006054471B4 (de) | 2006-11-18 | 2018-10-31 | Fischerwerke Gmbh & Co. Kg | Verwendung eines feinverteilte Gase beinhaltenden Mehrkomponenten-Kunstsharzsystems zur Befestigung von Befestigungselementen |
DE202007007160U1 (de) * | 2007-05-19 | 2007-08-02 | Leica Microsystems Nussloch Gmbh | Vorrichtung zur Erzeugung von Dünnschnitten |
US8654315B2 (en) * | 2008-10-24 | 2014-02-18 | Prime Photonics, Lc | Differential focus blade clearance probe |
TWI428568B (zh) | 2010-09-03 | 2014-03-01 | Pixart Imaging Inc | 測距方法、測距系統與其處理軟體 |
CN102445181B (zh) * | 2010-10-13 | 2013-08-14 | 原相科技股份有限公司 | 测距方法、测距系统与其处理方法 |
JP6143085B2 (ja) * | 2013-06-14 | 2017-06-07 | 三菱重工業株式会社 | チップクリアランス計測装置 |
US9593941B2 (en) * | 2014-09-24 | 2017-03-14 | Hood Technology Corporation | Clearance detection system and method using frequency identification |
US9557164B2 (en) * | 2015-04-15 | 2017-01-31 | General Electric Company | Data acquisition devices, systems and method for analyzing strain sensors and monitoring turbine component strain |
JP2017173017A (ja) * | 2016-03-22 | 2017-09-28 | 三菱重工業株式会社 | 光学センサ、回転機械及びクリアランス計測方法 |
JP6629118B2 (ja) * | 2016-03-30 | 2020-01-15 | 三菱重工業株式会社 | 光学センサ及び回転機械 |
JP6599285B2 (ja) * | 2016-06-07 | 2019-10-30 | 三菱重工業株式会社 | 光学センサ |
JP2018004313A (ja) * | 2016-06-28 | 2018-01-11 | 三菱重工業株式会社 | 回転機械におけるクリアランスの計測方法、計測装置および計測システム |
JP6596399B2 (ja) * | 2016-08-30 | 2019-10-23 | 三菱重工業株式会社 | クリアランス計測装置およびクリアランス制御システム |
IT202000008923A1 (it) * | 2020-04-24 | 2021-10-24 | Cemb S P A | Macchina equilibratrice e metodo di equilibratura di ruote di veicoli |
WO2023275242A1 (en) | 2021-07-02 | 2023-01-05 | Trinamix Gmbh | Measurement head |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US3591290A (en) * | 1969-04-04 | 1971-07-06 | Battelle Development Corp | Urological apparatus and method |
DE2229887C3 (de) * | 1972-06-19 | 1980-07-17 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Entfernungsmeßgerät mit einem als Sender arbeitenden Laser und seine Anwendung zur Geschwindigkeitsmessung |
DE2508836C2 (de) * | 1972-06-19 | 1984-03-29 | Siemens AG, 1000 Berlin und 8000 München | Entfernungsmeßgerät |
DE2510537C2 (de) * | 1975-03-11 | 1983-01-13 | Siemens AG, 1000 Berlin und 8000 München | Entfernungsmeßgerät |
US4373804A (en) * | 1979-04-30 | 1983-02-15 | Diffracto Ltd. | Method and apparatus for electro-optically determining the dimension, location and attitude of objects |
US4630927A (en) * | 1983-02-15 | 1986-12-23 | General Electric Company | Optical projector |
DE10012138B4 (de) * | 2000-03-13 | 2010-02-25 | Sick Ag | Verfahren und Vorrichtung zur Erfassung von Kantenbereichen von Objekten |
DE10161502A1 (de) * | 2001-12-14 | 2003-06-26 | Arteva Tech Sarl | Verfahren und Vorrichtung zur kontinuierlichen Ermittlung und Lokalisierung von Fadenfehlern einer in einer Ebene laufenden Fadenschar |
-
2002
- 2002-12-12 DE DE50213746T patent/DE50213746D1/de not_active Expired - Lifetime
- 2002-12-12 ES ES02027867T patent/ES2330998T3/es not_active Expired - Lifetime
- 2002-12-12 EP EP02027867A patent/EP1429155B1/de not_active Expired - Fee Related
-
2003
- 2003-06-04 US US10/453,657 patent/US7027166B2/en active Active
- 2003-12-04 JP JP2003405338A patent/JP4429705B2/ja not_active Expired - Fee Related
- 2003-12-09 CN CN200310120198.9A patent/CN1285881C/zh not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10488182B2 (en) | 2016-03-18 | 2019-11-26 | Mitsubishi Heavy Industries, Ltd. | Optical measurement device, optical measurement method, and rotating machine |
Also Published As
Publication number | Publication date |
---|---|
EP1429155A1 (de) | 2004-06-16 |
JP2004191374A (ja) | 2004-07-08 |
ES2330998T3 (es) | 2009-12-18 |
DE50213746D1 (de) | 2009-09-17 |
US7027166B2 (en) | 2006-04-11 |
US20040114154A1 (en) | 2004-06-17 |
EP1429155B1 (de) | 2009-08-05 |
CN1285881C (zh) | 2006-11-22 |
CN1506654A (zh) | 2004-06-23 |
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