JP4405260B2 - 急速に焦点距離を変更する為のシステム及び方法 - Google Patents
急速に焦点距離を変更する為のシステム及び方法 Download PDFInfo
- Publication number
- JP4405260B2 JP4405260B2 JP2003534949A JP2003534949A JP4405260B2 JP 4405260 B2 JP4405260 B2 JP 4405260B2 JP 2003534949 A JP2003534949 A JP 2003534949A JP 2003534949 A JP2003534949 A JP 2003534949A JP 4405260 B2 JP4405260 B2 JP 4405260B2
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- focal length
- control signal
- acceleration voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/241—High voltage power supply or regulation circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/15—Means for deflecting or directing discharge
- H01J2237/1501—Beam alignment means or procedures
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
- General Induction Heating (AREA)
- Control Of Heat Treatment Processes (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Details Of Aerials (AREA)
- Prostheses (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
ダイナミックフォーカスランプ振幅=ΔWD・ΔVacc・BitToVolt/Δz
ここで、
1.ΔWD=0.7071・FOV
2.ΔVacc/Δz=a+b・Vacc(Vaccは、kVで測定される。aとbは、一対の定数であり、その値はVaccに依存する。)
較正されるのに必要なパラメータは、ΔVacc/Δzである。実際、それは、色彩の収差係数の測定値である。色彩の収差係数は、カラム毎に変わるので、このパラメータとして固定値を入れることはできず、測定されなければならない。ΔVacc/Δzを測定する最も簡単な方法は、ΔOLC/ΔzおよびΔVacc/ΔOLCから導き出すことである。
ΔVacc/Δz=(ΔOLC/Δz)・(ΔVacc/ΔOLC)
ΔOLC/Δzは、階段状ターゲットにおいて測定され、これは、各階段の間の高さの差が50ミクロンの階段を含む。
ΔOLC/Δz=(OLC1−OLC3)/100μm
になる。
ΔVacc/ΔOLC=10V/(OLC5−OLC4)
になる。
Claims (7)
- 荷電粒子ビームの焦点距離を変更する方法であって、
階段状の較正ターゲットに対する、前記荷電粒子ビームのための加速電圧と前記荷電粒子ビームの焦点距離との関係を決定するステップと、
前記荷電粒子ビームに対して傾けられた対象物を撮像する間、加速電圧値と前記荷電粒子ビームの焦点距離との前記関係に応じて制御信号を変化させるステップと、
を含み、
前記制御信号が、前記加速電圧に加えられる変調電圧に変化を生じせしめ、
前記変調電圧は0〜200Vで変化すると共に制御可能電源によって印加される、
前記方法。 - 前記荷電粒子ビームは、電子ビームである、請求項1記載の方法。
- 前記荷電粒子ビームは、対物レンズで集束される、請求項1記載の方法。
- 前記対象物は、45度を超えない角度で前記荷電粒子ビームに対して傾いている、請求項1記載の方法。
- 荷電粒子ビームの焦点距離を変更するためのシステムにおいて、
制御信号に応答した焦点距離を有する荷電粒子ビームを発生させる為の荷電粒子ジェネレータと、
階段状の較正ターゲットに対する、前記荷電粒子ビームに対する加速電圧と前記荷電粒子ビームの焦点距離との決定された関係に応じて、前記荷電粒子ビームに対して傾けられた対象物に対する前記荷電粒子ビームの前記焦点距離を変更するための制御信号であって、前記加速電圧に加えられる変調電圧である前記制御信号を提供する為の制御信号ジェネレータと、
前記加速電圧を供給する第1の電圧源と、
前記加速電圧に印加される前記変調電圧を供給する制御可能電源と、
を備え、
前記変調電圧は、0〜200Vの間で変化する、
前記システム。 - 前記荷電粒子ビームは、電子ビームである、請求項5記載のシステム。
- 前記荷電粒子ビームは、対物レンズにより集束される、請求項5記載のシステム。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2002/032424 WO2003032022A2 (en) | 2001-10-10 | 2002-10-09 | System and method for fast focal length alterations |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008181754A Division JP4928506B2 (ja) | 2001-10-10 | 2008-07-11 | 急速に焦点距離を変更する為のシステム及び方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005505896A JP2005505896A (ja) | 2005-02-24 |
JP2005505896A5 JP2005505896A5 (ja) | 2008-09-04 |
JP4405260B2 true JP4405260B2 (ja) | 2010-01-27 |
Family
ID=42830777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003534949A Expired - Lifetime JP4405260B2 (ja) | 2002-10-09 | 2002-10-09 | 急速に焦点距離を変更する為のシステム及び方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7161158B2 (ja) |
EP (1) | EP1442471B1 (ja) |
JP (1) | JP4405260B2 (ja) |
AT (1) | ATE477586T1 (ja) |
AU (1) | AU2002340156A1 (ja) |
DE (1) | DE60237298D1 (ja) |
WO (1) | WO2003032022A2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010078478A (ja) * | 2008-09-26 | 2010-04-08 | Toshiba Corp | 欠陥検査装置および欠陥検査方法 |
US8507855B2 (en) * | 2011-07-28 | 2013-08-13 | Applied Materials Israel, Ltd. | Inductive modulation of focusing voltage in charged beam system |
JP6305703B2 (ja) * | 2013-08-07 | 2018-04-04 | 東芝メモリ株式会社 | 画像取得装置、画像取得方法及び欠陥検査装置 |
DE102015001292A1 (de) | 2015-02-02 | 2016-08-04 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlmikroskop und Verfahren zum Betreiben eines Teilchenstrahlmikroskops |
DE102015001297B4 (de) | 2015-02-02 | 2023-03-30 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlmikroskop und Verfahren zum Betreiben eines Teilchenstrahlmikroskops |
CN106813680A (zh) * | 2016-12-28 | 2017-06-09 | 兰州空间技术物理研究所 | 一种高精度、高分辨率石英扰性传感器的静态标定方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4142133A (en) * | 1976-10-20 | 1979-02-27 | Balandin Genrikh D | Cathode-ray tube with variable energy of beam electrons |
US4438336A (en) * | 1982-03-26 | 1984-03-20 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Corpuscular radiation device for producing an irradiation pattern on a workpiece |
DE3522340A1 (de) * | 1985-06-22 | 1987-01-02 | Finnigan Mat Gmbh | Linsenanordnung zur fokussierung von elektrisch geladenen teilchen und massenspektrometer mit einer derartigen linsenanordnung |
US5089699A (en) * | 1989-03-14 | 1992-02-18 | Hitachi, Ltd. | Secondary charged particle analyzing apparatus and secondary charged particle extracting section |
JPH0766766B2 (ja) * | 1989-03-30 | 1995-07-19 | 株式会社日立製作所 | 電子顕微鏡 |
CA1308203C (en) * | 1989-06-01 | 1992-09-29 | Nanoquest (Canada) Inc. | Magnification compensation apparatus |
JP3717202B2 (ja) * | 1995-05-24 | 2005-11-16 | 和夫 石塚 | 電子顕微鏡及びその軸合わせ方法 |
JP2001210263A (ja) * | 2000-01-27 | 2001-08-03 | Hitachi Ltd | 走査電子顕微鏡、そのダイナミックフォーカス制御方法および半導体デバイスの表面および断面形状の把握方法 |
-
2002
- 2002-10-09 AU AU2002340156A patent/AU2002340156A1/en not_active Abandoned
- 2002-10-09 US US10/492,393 patent/US7161158B2/en not_active Expired - Lifetime
- 2002-10-09 AT AT02778501T patent/ATE477586T1/de not_active IP Right Cessation
- 2002-10-09 JP JP2003534949A patent/JP4405260B2/ja not_active Expired - Lifetime
- 2002-10-09 DE DE60237298T patent/DE60237298D1/de not_active Expired - Lifetime
- 2002-10-09 WO PCT/US2002/032424 patent/WO2003032022A2/en active Application Filing
- 2002-10-09 EP EP02778501A patent/EP1442471B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2003032022A3 (en) | 2004-03-04 |
EP1442471A4 (en) | 2007-06-06 |
US7161158B2 (en) | 2007-01-09 |
ATE477586T1 (de) | 2010-08-15 |
AU2002340156A1 (en) | 2003-04-22 |
WO2003032022A2 (en) | 2003-04-17 |
EP1442471B1 (en) | 2010-08-11 |
DE60237298D1 (de) | 2010-09-23 |
JP2005505896A (ja) | 2005-02-24 |
US20050017192A1 (en) | 2005-01-27 |
EP1442471A2 (en) | 2004-08-04 |
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