JP4387928B2 - 開環メタセシス共重合体水素添加物およびその製造方法 - Google Patents

開環メタセシス共重合体水素添加物およびその製造方法 Download PDF

Info

Publication number
JP4387928B2
JP4387928B2 JP2004340020A JP2004340020A JP4387928B2 JP 4387928 B2 JP4387928 B2 JP 4387928B2 JP 2004340020 A JP2004340020 A JP 2004340020A JP 2004340020 A JP2004340020 A JP 2004340020A JP 4387928 B2 JP4387928 B2 JP 4387928B2
Authority
JP
Japan
Prior art keywords
general formula
group
carbon atoms
branched
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004340020A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005187804A5 (enExample
JP2005187804A (ja
Inventor
祐一 大川
忠弘 須永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Priority to JP2004340020A priority Critical patent/JP4387928B2/ja
Publication of JP2005187804A publication Critical patent/JP2005187804A/ja
Publication of JP2005187804A5 publication Critical patent/JP2005187804A5/ja
Application granted granted Critical
Publication of JP4387928B2 publication Critical patent/JP4387928B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Materials For Photolithography (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
JP2004340020A 2003-12-01 2004-11-25 開環メタセシス共重合体水素添加物およびその製造方法 Expired - Lifetime JP4387928B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004340020A JP4387928B2 (ja) 2003-12-01 2004-11-25 開環メタセシス共重合体水素添加物およびその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003401920 2003-12-01
JP2004340020A JP4387928B2 (ja) 2003-12-01 2004-11-25 開環メタセシス共重合体水素添加物およびその製造方法

Publications (3)

Publication Number Publication Date
JP2005187804A JP2005187804A (ja) 2005-07-14
JP2005187804A5 JP2005187804A5 (enExample) 2005-09-29
JP4387928B2 true JP4387928B2 (ja) 2009-12-24

Family

ID=34797469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004340020A Expired - Lifetime JP4387928B2 (ja) 2003-12-01 2004-11-25 開環メタセシス共重合体水素添加物およびその製造方法

Country Status (1)

Country Link
JP (1) JP4387928B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5309526B2 (ja) 2007-10-19 2013-10-09 信越化学工業株式会社 開環メタセシス重合体水素添加物、それを含有するレジスト材料及びパターン形成方法
JP5498654B2 (ja) * 2007-10-19 2014-05-21 三井化学株式会社 開環メタセシス重合体水素添加物の製造方法
JP5515232B2 (ja) * 2008-03-26 2014-06-11 信越化学工業株式会社 高分子化合物及びその製造方法、並びにレジスト材料及びパターン形成方法
WO2011105399A1 (ja) * 2010-02-24 2011-09-01 セントラル硝子株式会社 含フッ素ラクトンモノマー化合物、含フッ素ラクトンポリマー化合物とそのレジスト液およびトップコート用組成物、およびそれを用いたパターン形成方法
JP5682363B2 (ja) * 2010-02-24 2015-03-11 セントラル硝子株式会社 トップコート用組成物およびそれを用いたパターン形成方法

Also Published As

Publication number Publication date
JP2005187804A (ja) 2005-07-14

Similar Documents

Publication Publication Date Title
EP1538173B1 (en) Hydrogenated ring-opening metathesis polymer and process for producing the same
JP4236935B2 (ja) フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体、ポリマーの製造方法およびその用途
JP4421698B2 (ja) 開環メタセシス重合体の水素添加物、その用途及びその製造方法
EP1275676B1 (en) Hydrogenated ring-opening metathesis copolymer and process for producing the same
JP5498654B2 (ja) 開環メタセシス重合体水素添加物の製造方法
JP4627918B2 (ja) 開環メタセシス共重合体水素添加物およびその製造方法
JP4387928B2 (ja) 開環メタセシス共重合体水素添加物およびその製造方法
JP3678559B2 (ja) 開環メタセシス(共)重合体の水素添加物及びその製造方法
JP3703277B2 (ja) 酸解離性基を有する狭分散性重合体及びその製造方法
JP3693477B2 (ja) 開環メタセシス(共)重合体の水素添加物及びその製造方法
JP3678560B2 (ja) 酸分解性重合体及びその製造方法
JP3693484B2 (ja) 開環メタセシス共重合体の水素添加物及びその製造方法
JP5635445B2 (ja) 開環メタセシス重合体水素添加物の製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050719

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070709

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20090223

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090914

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090929

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20091001

R150 Certificate of patent or registration of utility model

Ref document number: 4387928

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121009

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121009

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131009

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131009

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term