JP4381764B2 - IMAGING DEVICE AND OBJECT MOVING DEVICE EQUIPPED WITH THE DEVICE - Google Patents

Description

  The present invention relates to an imaging apparatus that captures an imaged object that moves relatively, and an object-moving apparatus that includes the apparatus.

  In general, the apparatus includes an illuminating unit that irradiates light on the object to be imaged, and an imaging unit that images a part under the illumination conditions of the illuminating unit, and based on the captured image of the imaging unit, An imaging device that detects a shape or the like is known. In this type of imaging apparatus, there is also known an imaging apparatus configured to individually capture an object under a plurality of illumination conditions in order to individually detect a plurality of detection targets set on the object to be captured. (For example, refer to Patent Document 1).

  The surface mounter disclosed in Patent Document 1 adsorbs an area array terminal type package component having bump electrodes called bumps on a package surface represented by BGA (Ball Grid Array) by a head unit. Are transported and mounted on a printed circuit board. For this reason, the above surface mounter detects a defect peculiar to this component such as uneven bump height before mounting, and detects the orientation of the component with respect to the head unit in order to accurately position the component with respect to the printed circuit board. It is required to include an imaging device having a function.

Therefore, the surface mounter includes a first sensor unit that detects the posture of a component and a second sensor unit that detects a bump defect as an imaging device. The first sensor unit includes an illuminating unit that irradiates the lower surface of the component, and an imaging unit that images the component from directly below under the illumination condition, and detects the orientation of the component by imaging the outline of the component. It has become. The second sensor unit includes a pair of illumination means for irradiating light at different inclination angles with respect to the bumps, and a pair of imaging means capable of receiving specularly reflected light from components by these illumination means, and different illumination conditions The bump height is detected based on the image position of the same bump imaged twice below. Then, in the conveying process, the component sucked by the head unit passes over the first sensor unit to detect its posture, and passes through the second sensor unit to detect the presence or absence of bump defects. It is like that.
JP 2003-8300 A

  However, since the surface mounting machine of the above-mentioned patent document 1 has to individually image components under three kinds of illumination conditions in order to image the contours and bumps of the components to be detected, each of the sensor units described above. It is necessary to individually arrange a plurality of image pickup means corresponding to the illumination means, which increases the cost of the apparatus.

  Therefore, it is conceivable to switch each illumination condition and image a part by the number of illumination conditions by one imaging unit. However, in this case, it is necessary to pass the component through the imaging unit by the number of times of imaging. In order to increase the conveyance distance of the component, the efficiency of the component mounting operation is reduced.

  The present invention has been made in view of the above-described problems, and individually captures images of an imaged object under a plurality of illumination conditions by passing the object to be imaged relatively once by a single imaging unit. It is an object of the present invention to provide an imaging apparatus that can perform the imaging, an imaging object moving apparatus equipped with the apparatus, and an imaging method.

In order to solve the above problems, the present invention is an imaging apparatus capable of imaging a relatively moving object to be imaged under a plurality of illumination conditions, and can irradiate the object to be imaged from a plurality of directions. Illuminating means, a line sensor capable of scanning the object to be imaged a predetermined number of times in accordance with relative movement along a direction intersecting the moving direction, and a predetermined sensor for imaging the object to be imaged by the line sensor The light of the illumination direction selected corresponding to the illumination condition so as to appropriately switch the plurality of illumination conditions for irradiating the light by selecting at least one illumination direction from the plurality of illumination directions during the number of scans. Imaging control means for controlling the irradiation timing of the image sensor and the scanning timing of the line sensor, and image processing means for extracting a plurality of images corresponding to the respective illumination conditions from the captured image. At the border Are arranged on the line sensor side, and are provided with a plurality of reflecting illumination means for irradiating light directed from different directions to the object to be imaged, and the imaging control means includes the plurality of reflections during the predetermined number of scans of the line sensor. The illumination device for lighting is configured to be switched on appropriately, the object to be imaged has a detection target portion protruding toward the line sensor side, and the image processing unit is configured to detect an image captured by the line sensor, The plurality of images are extracted such that a plurality of images in which different ranges of the detection target portions are brightened are extracted for each of different illumination directions by the respective reflection illumination means, and the brightened ranges of the detection target portions in the plurality of images remain. and an image synthesizing means for synthesizing the image that is characterized in (claim 1).

Lightness detection means for detecting whether each of the plurality of images extracted by the image processing means is a bright part whose lightness on the image is equal to or higher than a predetermined lightness or a dark part whose brightness is lower than a predetermined lightness. Further, the image synthesizing means may be configured so that a bright area and a dark area in all of the plurality of images become dark and a bright area in one image becomes bright. In addition, it is preferable to combine the plurality of images (claim 2).

During scanning by the line sensor of the predetermined number of times, that is configured to sequentially switch the plurality of illumination conditions for respective scanning (claim 3) is preferable.

It is preferable that the reflecting illumination means is disposed around the optical axis of the line sensor and is formed in a funnel shape that widens toward the object to be imaged.

It is preferable that the reflection illumination means is configured to be individually lit and extinguished in sections divided every 90 ° around the optical axis of the line sensor.

Another aspect of the present invention is an imaging object moving apparatus including the imaging apparatus and a conveying unit that conveys the imaging object (Claim 6 ).

The imaging object moving device includes a head unit as a conveying unit that conveys a component as an imaging object and mounts the component on a printed circuit board, and performs imaging by the imaging device during component conveyance by the head unit. It is preferably a surface mounter (Claim 7 ).

The imaging object moving device includes a head unit as a conveying unit that conveys a component as an imaging object to an inspection socket, and is a component testing apparatus configured to perform imaging by the imaging device during component conveyance by the head unit. It is preferable that it is present (claim 8 ).

  According to the image pickup apparatus of the present invention, since the image pickup control means is provided, for example, when there are two parts to be detected by the object to be picked up, light in two types of irradiation directions is scanned for each scanning of the line sensor. Can be irradiated alternately. Therefore, in the above example, an image in which an imaging line on which a part to be detected is projected and an imaging line on which the part to be detected on the other is projected are arranged with one line sensor. A passing object can be individually captured under each illumination condition, and two types of images under different illumination conditions can be extracted from the image by the image processing means.

  In addition, a plurality of line sensors for imaging a plurality of objects to be imaged, a plurality of illumination means capable of irradiating light to the object to be imaged from a plurality of directions for each line sensor, and a predetermined number of times for each line sensor One or a plurality of imaging control means for controlling a plurality of illumination conditions to be switched appropriately during scanning, and one or a plurality of images for extracting a plurality of images according to each illumination condition from an image captured for each line sensor If the image pickup apparatus is configured with the image processing means, a plurality of types of images corresponding to the region or the portion with a small relative movement (even if the types of images required for each of the various types of regions and the portions are different). It is possible to extract an independent image for each region or portion, or an image composed of a plurality of regions or portions having a common image type.

Furthermore, according to the imaging apparatus of the present invention , since a plurality of reflection illumination means are provided , a plurality of types of different reflection images can be captured with a small relative movement.

According to the imaging device of the second aspect, it is possible to omit the range that becomes the bright portion and the range that becomes the dark portion in all of the plurality of images from the combined image.

According to the imaging apparatus of the third aspect , since the amount of information for controlling the illumination condition can be reduced as compared with the case of controlling the illumination condition for each pixel of the line sensor, the storage for storing this information. In addition to saving resources, the number of processing steps can be reduced and the imaging process can be speeded up.

According to the imaging apparatus of the fourth aspect, the object to be imaged can be irradiated from different directions around the optical axis of the line sensor by the reflecting illumination means formed in a funnel shape.

According to the imaging device of the fifth aspect, it is possible to extract four types of images according to the sections partitioned around the optical axis of the line sensor.

According to the object moving device of claim 6, the object to be imaged is confirmed while performing shape confirmation, position correction, etc. of the object to be picked up based on images individually picked up by the image pickup device under a plurality of illumination conditions. Can be transported to the destination.

According to the surface mounter of the seventh aspect, the component is mounted on the printed circuit board while checking the shape of the component and correcting the position based on the images individually captured under the plurality of illumination conditions by the imaging device. be able to.

According to the component testing apparatus of claim 8, the component is transported to the inspection socket while performing shape confirmation, position correction, etc. of the component based on images individually captured under a plurality of illumination conditions by the imaging device. be able to.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  1 and 2 schematically show a surface mounter (surface mounter according to the present invention) on which an imaging apparatus according to the present invention is mounted. As shown in the drawing, a printed circuit board conveying conveyor 2 is arranged on a base 1 of the mounting machine, and the printed circuit board 3 is conveyed on the conveyor 2 and stopped at a predetermined mounting work position. It has become.

  On both sides of the conveyor 2, component supply units 4 and 5 are arranged. The component supply unit 4 on one side (upper side in FIG. 1) of these component supply units 4 and 5 is provided with a plurality of rows of tape feeders 4a in the X-axis direction. Each tape feeder 4a is configured such that small pieces of chip parts such as ICs, transistors, capacitors, etc. are stored at predetermined intervals, and the held tape is led out from the reel. Parts are taken out intermittently. On the other hand, trays 5a and 5b are set in the component supply unit 5 on the other side at a predetermined interval in the X-axis direction. On each tray 5a, 5b, package type parts such as QFP (Quad Flat Package) and BGA (Ball Grid Array) are arranged and placed so that they can be taken out by the head unit 6. Yes.

  Above the base 1, a head unit 6 for component mounting is provided. The head unit 6 is movable over the component supply units 4 and 5 and the component mounting unit on which the printed circuit board 3 is located, and the X-axis direction (conveying direction of the conveyor 2) and the Y-axis direction (X-axis on the horizontal plane) It is possible to move in an orthogonal direction.

  That is, a fixed rail 7 in the Y-axis direction and a ball screw shaft 8 that is rotationally driven by a Y-axis servo motor 9 are disposed on the base 1, and a head unit support member 11 is disposed on the fixed rail 7. The nut portion 12 provided on the support member 11 is screwed onto the ball screw shaft 8. The support member 11 is provided with a guide member 13 in the X-axis direction and a ball screw shaft 14 driven by an X-axis servo motor 15, and the head unit 6 is movably held by the guide member 13. A nut portion (not shown) provided on the head unit 6 is screwed onto the ball screw shaft 14. The support member 11 is moved in the Y-axis direction by the operation of the Y-axis servo motor 9, and the head unit 6 is moved in the X-axis direction with respect to the support member 11 by the operation of the X-axis servo motor 15. It has become.

  The head unit 6 is provided with a plurality of heads 16 each having a component suction nozzle 16a at the tip. The head 16 can be moved up and down (moved in the Z-axis direction) relative to the frame of the head unit 6 and rotated around the nozzle center axis (R-axis: not shown). It is actuated by a rotary drive means such as a lift drive means and an R-axis servo motor. In the present embodiment, a configuration in which six nozzles 16a are arranged is shown.

  Further, the head unit 6 is provided with transmission illumination means 17 that irradiates light to the components adsorbed by the nozzles 16a. The transmitting illumination means 17 includes a plurality of LEDs 17a fixed to the lower surface of the head unit 6, and a diffusion plate 17b arranged so as to cover the LEDs 17a below, and irradiates the light emitted from each LED 17a to the rear surface of the component. Irradiation is performed from the side (upper side) to the base 1 side. In addition, the middle part of each nozzle 16a is inserted through the diffusion plate 17b so that movement in the Z-axis direction and rotation around the R-axis are allowed.

  Further, an imaging device 18 is provided on the base 1 between the trays 5a and 5b for recognizing an image of components taken out from the component supply units 4 and 5 prior to mounting. .

  The imaging device 18 is fixedly disposed on the base 1 and, as shown in FIG. 3, a camera 30 that images the component C adsorbed by the head 16 and an illumination unit that provides illumination for imaging the component. 31. Hereinafter, a case where a part C including a main body H having a substantially square shape in plan view and a plurality of bumps Bu formed on the lower surface of the main body H is imaged will be described.

  The camera 30 is a camera having a line sensor in which a plurality of image sensors are arranged in a line. The camera 30 is arranged on the base 1 so that the image sensors are arranged in the Y-axis direction, and the arrangement direction of the image sensors (main scanning direction). By moving the head unit 6 in a direction (sub-scanning direction; X-axis direction) orthogonal to the head, the parts sucked by the heads 16 are imaged from below.

  The illumination unit 31 is provided above the camera 30. The funnel-shaped illumination unit 32 a disposed in the upper center of the unit 31, the reflection illumination unit 32 b disposed on the inner side of the unit 31, and the unit 31. Three types of illumination means are provided, which are the upper side and the side illumination means 32c disposed outside the funnel-like illumination means 32a.

  As shown in the figure, the funnel-shaped illumination means 32a has an opening in the center, and includes a plurality of LEDs 33 on the inner surface of a funnel-shaped frame that expands upward, and images are taken by lighting these LEDs 33. The suction component C located above the device 18 is configured to irradiate light obliquely from below. In addition, as shown in FIG. 4, in the funnel-shaped illumination unit 32 a, four illumination areas 33 a to 33 d are partitioned every 90 ° around the optical axis of the camera 30. Each of these illumination areas 33a to 33d is configured to be individually lit / extinguishable, with each as one section.

  The reflection illumination unit 32b is disposed below the funnel-shaped illumination unit 32a, and includes a plurality of LEDs 34 and a half mirror 35 arranged side by side as a light source. Then, the light from the LED 34 is refracted by 90 ° by the half mirror 35 so that the light is irradiated in the direction parallel to the optical axis of the camera 30 from directly below the suction component C above the image pickup device 18. It is configured.

  The side illumination means 32c is provided with a plurality of LEDs 36 inward so as to surround the funnel-shaped illumination means 32a. By lighting these LEDs 36, the side illumination means C is located on the side of the suction component C above the imaging device 18. It is comprised so that illumination light may be irradiated.

  By the way, as shown in FIG. 5, the mounting machine described above includes a CPU 61 that executes a logical operation, a ROM 62 that stores a control program by the CPU 61 in advance, a RAM 63 that temporarily stores various data, and the like. A control means 60 is provided, and the servo motors 9 and 15, the head unit 6, the image pickup device 18, etc. are all controlled by the control means so that a series of component mounting is performed according to a program stored in advance. The action is to be executed.

  The CPU 61 includes an imaging control unit 61 a that sets the number of light irradiation directions on the component and the number of scans of the camera 30 corresponding thereto, and controls the imaging timing and illumination lighting timing. An image processing unit 61b for extracting an image corresponding to each illumination direction, a lightness detecting unit 61c for detecting the lightness on the image so as to perform processing as shown in FIG. As shown in FIG. 10, which will be described later, the image synthesizing means 61d for synthesizing each detected image is provided.

  The ROM 62 stores, for example, a timing chart as shown in FIG. 6 in order for the CPU 61 to control the imaging timing of the camera 30 and the lighting timings of the illumination units 32a to 32c of the transmission illumination unit 17 or the illumination unit 31. ing.

  6A and 6B are timing charts showing an example of control by the control means. FIG. 6A shows the timing at the time of transmission-side illumination, and FIG. 6B shows the timing at the time of illumination by the funnel-shaped illumination means 32a.

  For example, when detecting the displacement of the component C with respect to the head 16 and detecting the bump Bu, an image in which the contour of the component C is lifted by irradiating the light from the transmission illumination means 17 and the illumination for reflection. An image is required in which the light of the means 32b is irradiated to brighten the vicinity of the top of the bump Bu. In this case, as shown in FIG. 6A, the control means 60 turns on the transmission illumination means 17 and the side illumination means 32c alternately at every scanning timing of the camera 30. As shown in FIG. 7, in the image captured in this way, the scanning lines captured at the time of illumination by the transmission illumination means 17 and the scanning lines captured at the time of illumination by the side illumination means 32c are alternately arranged. It will be a thing. In this image, the substantially square main body H is projected in a rectangular shape in the sub-scanning bidirectional direction corresponding to the number of scans that the imaging control means 61a predefines, that is, the number of pixels in the scanning direction of the camera 30. This is because a number obtained by multiplying the number of scans by the number of illumination means (transmission illumination means 17 and side illumination means 32c; two) is set as the number of scans.

  Then, an image obtained by individually extracting the imaging line at the time of illumination by the transmission illumination unit 17 and the imaging line at the time of illumination by the side illumination unit 32c from the image by the image processing unit 61b (the number of scanning lines is halved). Image). As shown in FIGS. 8A and 8B, this image has a resolution captured at the regular number of scans. 8A shows an image of a component (outline of the main body H) at the time of illumination by the transmission illumination means 17, and FIG. 8B shows an image at the time of illumination by the side illumination means 32c. The image (bump Bu) of components is shown.

  Further, some parts C include bumps Bu having a hemispherical surface and pads Pa having a flat surface (see FIG. 9), and the bump Bu height of such a part C is detected. In this case, it is preferable to obtain an image in which the image of the pad Pa is omitted in order to distinguish the image of the bump Bu and the image of the pad Pa. In this case, as shown in FIG. 6 (b), the control means 60 sequentially switches on and turns on the illumination areas 33a to 33d of the funnel-shaped illumination means 32a at every scanning timing of the camera 30. Specifically, the illumination areas 33a, 33b, 33c, and 33d are sequentially turned on each time the camera 30 captures images, and these are circulated and turned on. The images captured in this way and individually extracted from the imaging lines for each illumination condition by the illumination areas 33a to 33d are in the vicinity of the vertices of the bump Bu as shown in (a) to (d) of FIG. The light irradiation positions (positions facing the lighting areas 33a to 33d that are turned on) of the lighting areas 33a to 33d that are turned on are partially brightened. In these four images, the lower surface of the pad Pa is brightened at the same position with respect to the component (hereinafter referred to as a bright portion), and these bright portions are detected by the lightness detection means 61c, and this lightness detection means 61c. In accordance with the detection result, the image composition means 61d changes the brightness so that each bright part is darkened. That is, by the logical operation processing corresponding to the exclusive OR, the bright part and the dark part are darkened in all the four images, and the bright part in one of the four images is By synthesizing the images so as to be bright, a composite image G1 as shown in FIG. 10 in which only the bumps Bu are brightened can be obtained. It should be noted that each image in FIGS. 9A to 9D has a normal resolution because the number of illumination means (each illumination area) with respect to the number of scans set in advance by the imaging control means 61a. Since the number obtained by multiplying 33a to 33d (four) is set as the number of scans, an image extracted from the captured image corresponding to each of the illumination lines 33a to 33d (an image in which the imaging lines are ¼) This is because the number of imaging lines in () is regular.

  As described above, the imaging control unit 61a selectively irradiates the illumination units 17, 33a to 33c having different irradiation directions depending on the part to be detected, such as the contour of the component C, the bump Bu, or the pad Pa, and the like. The number of times of scanning is controlled by controlling the irradiation timing of the illumination units 17 and 33a to 33c and the imaging timing of the camera 30, and multiplying the number of scans of the camera 30 by the number of the selected illumination units 17 and 33a to 33c. Is set as. In the above example, the case where the illuminating illumination means 17 and the side illumination means 32b are alternately turned on and the case where the illumination areas 33a to 33d of the funnel-like illumination means 32a are sequentially turned on are described. Without being limited thereto, the reflecting illumination unit 32c and the transmission illumination unit 17, the reflection illumination unit 32c and the side illumination unit 32b, or the transmission illumination unit 17 and the side illumination unit 32b are sequentially switched. It is also possible to make it light up. Further, it is possible to alternately switch between a state in which all the illumination areas 33a to 33d in the funnel-shaped illumination unit 32a are turned on and a state in which the reflection illumination unit 32c is turned on.

  In the above example, the funnel-shaped illuminating means 32a is divided into four areas. However, the shape of the division is not limited to the illustrated X shape, and may be a cross shape. It is possible to reduce or increase it further. Moreover, the structure by which each area | region is unequal is also possible for a division | segmentation. Furthermore, although the funnel-shaped illumination means 32a is divided in the above example, the above-described control and imaging can be performed by appropriately dividing the side illumination means 32b without being limited to the funnel-shaped illumination means 32a.

  Moreover, although the said imaging device 18 employ | adopts each illumination means 17 and 32a-32c which irradiate illumination light from which an irradiation direction differs, respectively, it is not limited to this, For example, the illumination light of several colors It can be set as the structure provided with the illumination means which can irradiate. In this case, the imaging control unit 61a controls the imaging timing of the camera 30 and the irradiation timing of the illumination unit so as to sequentially irradiate light of different colors for each scanning of the camera 30. Even in this configuration, it is preferable to configure the imaging control unit 61a so that the number of scans of the camera 30 multiplied by the number of colors of the selected illumination unit is set as the number of scans. An image that has been imaged and from which an imaging line has been extracted for each illumination color has a resolution that has been imaged with the number of regular scans as described above.

  Hereinafter, according to the flowchart of FIG. 11, an example of the mounting operation of the mounting machine based on the control of the control means will be described.

  The components C are sucked from the component supply units 4 and 5 by the nozzles 16a of the head unit 6 (step S1), and when the head unit 6 passes over the imaging means 18, a component recognition process is performed (step S2). In this component recognition processing S2, as shown in FIG. 12, first, the head unit 6 is moved to a preset standby position on the base 1 (step S21), and movement toward the imaging means 18 side is started. (Step S22). Next, it is determined whether or not a plurality of illumination conditions are set for the illumination condition set for the part C to be imaged next (step S23). Here, the single illumination condition (normal illumination) is used. If it is determined that there is (NO in step S23), the preset illumination means is turned on and scanning of the camera 30 is started (step S24). On the other hand, if it is determined that there are a plurality of illumination conditions (YES in step S23), imaging of the part C is started while switching a plurality of preset illumination means for each scan of the camera 30 (step S25). Next, it is determined whether or not the imaging of the part C started in steps S24 and S25 is completed (step S26). If the imaging is not completed (NO in step S26), step S26 is repeatedly executed. On the other hand, if it is determined that the imaging of the part C has been completed (YES in step S27), it is determined whether or not the imaging of all the parts C attracted to each nozzle 16a has been completed (step S27). If it is determined that there is a part C that has not been imaged (NO in step S27), step S23 is repeatedly executed. On the other hand, if imaging of all parts C has been completed, the process proceeds to step S3 in FIG. To do.

  Based on the image captured in the component recognition process, it is detected whether there is a defect in the height of the bump Bu, a defect in the surface state of the component C, or the like (step S3). Then (NO in step S3), the part C is registered as a discard target (step S4), and the process proceeds to step S7 described later. On the other hand, if it is determined that the part C is a non-defective product (YES in step S3), a positional deviation (including a rotational direction deviation) of the part C with respect to the head 16 is detected based on an image showing the outline of the part C. Then, the correction value of the mounting position is calculated according to the detection result (step S5). When the correction value is calculated, the component C is mounted on the printed board 3 while adjusting the movement amount of the head unit 6 according to the correction value (step S6). Next, whether or not all the parts C sucked by the nozzles 16a of the head unit 6 have been mounted or registered as disposal targets in step S3, that is, whether the parts C sucked by the nozzles 16a have been processed. If it is determined whether there is an unprocessed part C (NO in step S7), step S3 is repeated. On the other hand, if it is determined that each component C has been processed (YES in step S7), all the components C registered as discard targets are transferred to a defective product storage box (not shown) (step S8) for mounting. It is determined whether all the target components C are mounted on the printed circuit board 3 (step S9). If it is determined that there is an unmounted component C (NO in step S9), step S1 is repeatedly executed. On the other hand, if it is determined that all mounting targets are mounted (YES in step S9). The process ends.

  In the above-described embodiment, the configuration in which the imaging device 18 is mounted on the surface mounter has been described. It is also possible.

  FIG. 13 is a plan view showing a component testing apparatus 40 on which an imaging apparatus according to the present invention is mounted. In the figure, the X axis and the Y axis are shown in order to clarify the directionality.

  As shown in FIG. 13, the base 41 of the component testing apparatus 40 is provided with a cassette installation unit 43 on which cassettes 42 in which the wafers Wa in which bare chips are diced are stored in multiple stages can be mounted. The cassette 42 mounted on the cassette installation unit 43 is transported to a position below the opening 44 formed in the base 41 by a transport mechanism (not shown), and the bare chip is picked up by the head 45 at this position. The head 45 conveys the bare chip from the opening 44 to the component standby unit 47 along the rail 46 extending in the Y-axis direction on the base 41. The component standby unit 47 is disposed between a pair of rails 48 extending in the X-axis direction on the base 41, and the bare chip conveyed to the component standby unit 47 is paired with a pair of head units 49 that are driven along the rails 48. , 50 to the inspection socket 51 on the base 41, and a predetermined inspection is performed.

  In such a component inspection apparatus 40, imaging devices 118 and 218 are provided on the base 41 between the component standby unit 47 and the inspection socket 51. Although not shown in the drawing, the head units 49 and 50 are provided with the transmission illumination means 17 (see FIG. 2) corresponding to the imaging devices 118 and 218, respectively. In 218, for example, a camera 30 as shown in FIG. 3 and a lighting unit 31 capable of switching light having different irradiation directions are provided.

  The imaging devices 118 and 218 detect a defect (for example, bump height defect) of the bare chip conveyed from the component standby unit 47 to the inspection socket 51, and the bare chip detected as a defective product is the head The units 49 and 50 are transported to the defective product tray 53 placed on the defective product collecting section 52 on the base 41. In addition, the imaging devices 118 and 218 detect the posture of the bare chip with respect to the head units 49 and 50, and the bare chip detected as being displaced with respect to the head units 49 and 50 is After the position correction is executed by the units 49 and 50, the unit 49 and 50 are transported to the inspection socket 51.

  As a result of the inspection in the inspection socket 51, the bare chip determined to be a defective product is conveyed to the defective product tray 53 by the head units 49 and 50, while the bare chip determined to be a non-defective product is Each of the head units 49 and 50 is transported to a component storage section 54 on the base 41 and is stored in a base tape 55 for a tape feeder in the component storage section 54. The tape will be attached.

  When the defective product tray 53 of the defective product collection unit 52 becomes full, the tray 53 is transferred to the tray discharge unit 56 by a tray moving mechanism (not shown), and the tray standby adjacent to the defective product collection unit 52 is waited for. The tray 58 in the section 57 is transferred to the defective product collecting section 52 by the head units 49 and 50, and the empty tray is transferred from the empty tray mounting section 59 to the tray standby section 57 by a tray moving mechanism (not shown). It has become.

  In each of the above embodiments, the configuration in which the imaging device 18 is arranged on the base of the surface mounter and the component testing device 40 has been described. However, the present invention is not limited to this. It is also possible to adopt a configuration in which the head unit is attached to be relatively displaceable.

  FIG. 14 is a side view schematically showing a component transport head unit on which the imaging apparatus according to the present invention is mounted. In the figure, the X axis and the Y axis are shown in order to clarify the directionality.

  As shown in FIG. 14, a head unit 306 for conveying parts includes a base 307 extending vertically, a head 308 attached to the front surface of the base 307, and an X-axis direction with respect to the back surface of the base 307. And an image pickup unit 309 that is detachably mounted. The head 308 is capable of moving up and down and rotating around the nozzle central axis with respect to the frame of the head unit 306 as in the above embodiments. The imaging unit 309 includes a frame 310 attached to the base 307 and an imaging device 318 disposed on the frame 310.

  The imaging device 318 includes a camera 330 including a line sensor, a mirror 331 that reflects an image of the suction component so that the camera 330 can capture an image, a side illumination unit 332c that illuminates the side of the suction component, and a suction Reflecting illumination means 332b for illuminating the component from below.

  The camera 330 is arranged on the frame 310 so that the image pickup devices are arranged in the Y-axis direction as in the above-described embodiments, and is attracted to the head 308 by moving the frame 310 with respect to the head 308 in the X-axis direction. The parts that are present are imaged from below. The side illumination means 332c includes a plurality of LEDs 336 that are arranged opposite to each other in the X-axis direction, and is configured to irradiate the suction component with illumination light from the side. The reflection illumination unit 332b includes a plurality of LEDs 334 and a half mirror 335 arranged side by side, and irradiates light in a direction parallel to the optical axis of the camera 30 in the same manner as the reflection illumination unit 32b. .

  The head unit 306 configured as described above moves the imaging unit 309 with respect to the base 307, and alternately irradiates the side illumination means 332c and the reflection illumination means 332b for each imaging of the camera 330. Thus, it is possible to individually image the suction component under each of these illumination conditions.

  The imaging devices 18, 118, 218, and 318 can be applied to various devices other than the mounting machine and the component inspection device. For example, the imaging devices 18, 118, 218, and 318 can also be applied to an inspection device that inspects a substrate after component mounting. . In other words, the substrate is imaged by the imaging device while the head unit including the imaging device capable of imaging the substrate surface is moved relative to the substrate carried into the predetermined work position by the conveyor 2 of the mounting machine. An apparatus for inspecting the substrate based on the image has been conventionally known. For example, the imaging apparatuses 18, 118, 218, and 318 as in the above-described embodiment can be mounted as the imaging apparatus. According to such an inspection apparatus, for example, when irradiating illumination light having a plurality of irradiation angles, and when it is not possible to detect the shape of the component mounted on the substrate without imaging individually under these illumination conditions, Components can be reliably detected using the imaging devices 18, 118, 218, and 318.

  As described above, according to the imaging devices 18, 118, 218, and 318, since the imaging control unit 61a is provided, for example, when there are two parts to be detected for the part C, the camera 30 is used. It is possible to alternately irradiate light of two kinds of irradiation directions for each scanning. Therefore, in the above example, an image in which an imaging line on which a part to be detected is projected and an imaging line on which the part to be detected on the other is projected are arranged on one camera 30. The passing part C can be individually imaged under each illumination condition, and two types of images under different illumination conditions can be extracted from the image by the image processing means 61b.

  According to the configuration including the reflection illumination unit 32b and the transmission illumination unit 17, an image in which the surface of the component C is projected by the reflection illumination unit 32b and an image in which the outline of the component C is projected by the transmission illumination unit 17 are shown. Can be captured separately.

  According to the configuration including the reflection illumination means 32b and the side illumination means 32c, an image in which the surface of the component C is projected by the reflection illumination means 32b and the surface of the component C formed by the side illumination means 32c are formed. It is possible to individually capture an image showing the bumps Bu and the like.

  Note that the outline when the part C is a quadrangle is transmissive illumination during the first and last few operations of the main scanning multiple times (for example, 50 times or 100 times) as the head unit 6 moves. The image may be taken by turning on the means 17 and turning on the side illumination means 32b and the reflection illumination means 32c during many intermediate scans. Alternatively, the camera 30 captures an image while the transmission illumination means 17 is turned on, the camera 30 captures an image while the side illumination means 32b is lit, and the camera while the reflection illumination means 32c is turned on. When c is 30 for capturing an image, a, b, b, b, c, and c may be repeated for each scan. Furthermore, even if an image pickup device arranged in the Y direction sequentially captures images during a single operation, images of a, a, a, b, b..., B, a, a, a may be taken. Good. This is because data indicating which illumination means is to be turned on in advance is stored in the RAM 63 of the imaging control means 61a corresponding to the imaging coordinates in the X-axis direction and the Y-axis direction, and which scan is accompanied by the movement of the head unit 6. It is possible to turn on the illuminating means corresponding to the stored data according to the number of times, or in accordance with the timing at which the image sensor of the camera 30 sequentially captures images. Furthermore, in the above description, a, b, and c are described as illumination conditions. However, the present invention is not limited to this. For example, a state in which the transmission illumination means 17 and the side illumination means 32b are turned on. (A + b) The state (b + c) in which the reflecting illumination means 32c and the side illumination means 32b are turned on may be set as illumination conditions, and these may be sequentially switched for each scanning line or each pixel.

  In addition, when imaging is performed not only by one camera 30 but also by a plurality of cameras 30 at the same time or at different times, it is possible to irradiate light from a plurality of directions to each object to be imaged by each camera 30. A plurality of illumination means are provided, and the irradiation timing of each illumination means 17, 32a to 32c and the scanning timing of each camera 30 are controlled so as to appropriately switch a plurality of illumination conditions during a predetermined number of operations for each camera 30. The imaging control unit 61a may be configured as described above. In this case, one or a plurality of images for extracting a plurality of images (however, images composed of imaging pixels corresponding to different predetermined coordinates) from the images captured for each camera 30 according to the respective illumination conditions. Processing means 61b may be provided.

  In addition, according to the imaging apparatus including the illumination unit that can emit light of a plurality of colors, since the imaging control unit 61a is provided, for example, light of three colors of red, green, and blue for each scan of the camera 30 By sequentially irradiating, the component C passing through one camera 30 can be individually imaged under the illumination conditions of each color, and three types of images under different illumination conditions by the image processing means from the captured images. Can be extracted. If these images are combined, a color image of the part C can be formed, so that it is not necessary to separately provide a line sensor having a color filter to capture the color image, and the cost of the apparatus can be reduced. it can.

It is a top view which shows roughly the surface mounter by which the imaging device which concerns on embodiment of this invention was mounted. It is a front view which abbreviate | omits and shows a part of surface mounting machine of FIG. FIG. 2 is a partial schematic cross-sectional view schematically illustrating the imaging apparatus of FIG. 1. It is a top view which shows the illumination area of a funnel-shaped illumination means. It is a block diagram which shows the electrical structure of the control means of the surface mounting machine of FIG. It is a timing chart which shows the illumination by an imaging device, and an imaging timing. It is a figure which shows the picked-up image at the time of the illumination by the illumination means for permeation | transmission, and a side illumination means. It is the image figure which extracted the image of FIG. 6 for every illumination condition, (a) has shown the image at the time of the illumination by the transmission illumination means, (b) has each shown the image at the time of the illumination by the side illumination means. It is the figure which showed typically the lighting location of the illumination area in a funnel-shaped illumination means, and the image of the bump and pad corresponding to this location. Is a diagram showing an image obtained by synthesizing the respective images of FIG. It is a flowchart which shows the mounting control operation | movement by the control means of a surface mounting machine. It is a flowchart which shows the operation | movement in the components recognition process of FIG. It is a top view which shows roughly the components test apparatus by which the imaging device which concerns on embodiment of this invention is mounted. It is a side view which shows roughly the head unit by which the imaging device which concerns on another embodiment of this invention is mounted.

17 Illumination means for transmission 18, 118, 218, 318 Imaging device 30 Camera 32a Funnel-shaped illumination means 32b Illumination means for reflection 32c Side illumination means 40 Parts testing device 61a Imaging control means 61b Image processing means

Claims (8)

An imaging device capable of imaging a relatively moving object under a plurality of illumination conditions,
Illuminating means capable of irradiating the object to be imaged from a plurality of directions;
A line sensor capable of scanning the object to be imaged by scanning a predetermined number of times corresponding to the relative movement along a direction intersecting the moving direction;
This illumination is performed so that a plurality of illumination conditions for irradiating light by selecting at least one illumination direction from among the plurality of illumination directions and appropriately switching a plurality of illumination conditions during scanning a predetermined number of times for imaging of an object to be imaged by a line sensor Imaging control means for controlling the irradiation timing of the light in the illumination direction selected corresponding to the conditions and the scanning timing of the line sensor;
Image processing means for extracting a plurality of images according to each illumination condition from the captured image,
The illumination unit includes a plurality of reflection illumination units that are arranged on the line sensor side with the object to be imaged as a boundary, and irradiate light from the different directions toward the object to be imaged,
The imaging control means is configured to appropriately switch and turn on the plurality of reflecting illumination means during the predetermined number of scans of the line sensor .
The object to be imaged has a detection target portion protruding toward the line sensor,
The image processing means extracts a plurality of images in which a different range of the detection target portion is brightened for each different illumination direction by each of the reflection illumination means, from an image captured by the line sensor,
An image pickup apparatus, comprising: an image compositing unit that synthesizes the plurality of images such that a brightened range of a detection target portion in the plurality of images remains . Lightness detection means for detecting whether each of the plurality of images extracted by the image processing means is a bright part whose lightness on the image is equal to or higher than a predetermined lightness or a dark part whose brightness is lower than a predetermined lightness. In addition,
The image synthesizing unit is configured so that a range that is a bright portion and a range that is a dark portion are dark in all of the plurality of images, and a range that is a bright portion is bright in one of the plurality of images. The imaging apparatus according to claim 1, wherein a plurality of images are synthesized. The imaging apparatus according to claim 1 or 2, wherein the plurality of illumination conditions are sequentially switched for each scanning during the predetermined number of scans by the line sensor. 4. The reflection illumination means is disposed around the optical axis of the line sensor and is formed in a funnel shape that widens toward the object to be imaged. The imaging apparatus of Claim 1. The imaging apparatus according to claim 4, wherein the reflection illumination unit is configured to be individually lit and extinguished in sections divided every 90 ° around the optical axis of the line sensor. . 6. An imaging object moving apparatus comprising: the imaging apparatus according to claim 1; and a conveying unit that conveys the imaging object. It comprises a surface mounter that includes a head unit as a conveying means for conveying a component as an object to be imaged and mounting it on a printed circuit board, and that performs imaging by the imaging device during component conveyance by the head unit. The imaging object moving device according to claim 6. A component testing device comprising a head unit as a conveying means for conveying a component as an object to be inspected to an inspection socket, and performing imaging by the imaging device during component conveyance by the head unit. The imaging object moving device according to 6.

Images