JP4375902B2 - 光ファイバープレフォームの製造方法 - Google Patents
光ファイバープレフォームの製造方法 Download PDFInfo
- Publication number
- JP4375902B2 JP4375902B2 JP2000543399A JP2000543399A JP4375902B2 JP 4375902 B2 JP4375902 B2 JP 4375902B2 JP 2000543399 A JP2000543399 A JP 2000543399A JP 2000543399 A JP2000543399 A JP 2000543399A JP 4375902 B2 JP4375902 B2 JP 4375902B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- silica
- layer
- target
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01861—Means for changing or stabilising the diameter or form of tubes or rods
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
- C03B37/01426—Plasma deposition burners or torches
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01466—Means for changing or stabilising the diameter or form of tubes or rods
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02152—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating involving moving the fibre or a manufacturing element, stretching of the fibre
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/28—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/32—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2203/00—Fibre product details, e.g. structure, shape
- C03B2203/10—Internal structure or shape details
- C03B2203/22—Radial profile of refractive index, composition or softening point
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5820798A | 1998-04-10 | 1998-04-10 | |
US09/058,207 | 1998-04-10 | ||
PCT/US1999/007872 WO1999052832A1 (en) | 1998-04-10 | 1999-04-09 | Method of making an optical fiber preform |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003510234A JP2003510234A (ja) | 2003-03-18 |
JP2003510234A5 JP2003510234A5 (pt) | 2006-06-01 |
JP4375902B2 true JP4375902B2 (ja) | 2009-12-02 |
Family
ID=22015362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000543399A Expired - Lifetime JP4375902B2 (ja) | 1998-04-10 | 1999-04-09 | 光ファイバープレフォームの製造方法 |
Country Status (10)
Country | Link |
---|---|
EP (1) | EP1086053A4 (pt) |
JP (1) | JP4375902B2 (pt) |
KR (1) | KR20010081941A (pt) |
CN (1) | CN1295169C (pt) |
AU (1) | AU750390B2 (pt) |
BR (1) | BR9909569B1 (pt) |
CA (1) | CA2328143A1 (pt) |
RU (1) | RU2235071C2 (pt) |
WO (1) | WO1999052832A1 (pt) |
ZA (1) | ZA992666B (pt) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10035951C2 (de) * | 2000-07-21 | 2002-06-27 | Heraeus Quarzglas | Verfahren zur Herstellung eines Bauteils für die Herstellung optischer Fasern, sowie Verwendung des Bauteils |
JP2002326834A (ja) * | 2001-04-27 | 2002-11-12 | Sumitomo Electric Ind Ltd | 光ファイバコア母材及び光ファイバ母材の製造方法 |
US20030027054A1 (en) * | 2001-08-01 | 2003-02-06 | Ball Laura J. | Method for making photomask material by plasma induction |
US6769275B2 (en) * | 2002-03-15 | 2004-08-03 | Fibercore, Inc. | Method for making optical fiber preform using simultaneous inside and outside deposition |
FR2847893B1 (fr) * | 2002-12-02 | 2006-05-05 | Cit Alcatel | Procede et dispositif de recharge par plasma d'une preforme pour fibre optique, a oxydes d'azote reduits |
JP4349148B2 (ja) * | 2003-03-03 | 2009-10-21 | 住友電気工業株式会社 | ガラス加工方法及びガラス加工装置 |
DE10316487B4 (de) * | 2003-04-09 | 2005-03-31 | Heraeus Tenevo Ag | Verfahren zur Herstellung einer Vorform für optische Fasern |
JP2009522199A (ja) * | 2005-12-29 | 2009-06-11 | シリカ テック リミテッド ライアビリティ カンパニー | 合成シリカを作製するための、改善されたプラズマトーチ |
NL1032463C2 (nl) * | 2006-09-08 | 2008-03-11 | Draka Comteq Bv | Werkwijze voor het vervaardigen van een optische voorvorm. |
DE102009010497A1 (de) * | 2008-12-19 | 2010-08-05 | J-Fiber Gmbh | Mehrdüsiger rohrförmiger Plasma-Abscheidebrenner zur Herstellung von Vorformen als Halbzeuge für optische Fasern |
EP2226301A1 (en) * | 2009-02-22 | 2010-09-08 | Silitec Fibers SA | Method for producing and processing a preform, preform and optical fiber |
RU2543006C2 (ru) * | 2010-12-13 | 2015-02-27 | Учреждение Российской Академии Наук Научный Центр Волоконной Оптики Ран | Способ производства преформ с заданным профилем показателя преломления, преформа и оптическое волокно |
RU2547032C1 (ru) * | 2014-03-31 | 2015-04-10 | Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) | Способ изготовления многомодовых малодисперсионных световодов |
WO2018098810A1 (zh) * | 2016-12-02 | 2018-06-07 | 中天科技精密材料有限公司 | 光纤预制棒的制造设备及其制造方法 |
CN107082558B (zh) * | 2017-04-27 | 2019-12-03 | 烽火通信科技股份有限公司 | 一种采用光纤预制棒制造单模光纤的方法 |
CN107098578B (zh) * | 2017-04-27 | 2019-06-25 | 烽火通信科技股份有限公司 | 用于制造多层结构光纤的光纤预制棒及制造光纤的方法 |
CN111847866A (zh) * | 2020-07-14 | 2020-10-30 | 复旦大学 | 低损耗光纤预制棒外包层及制备设备和制备方法及光纤 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63248733A (ja) * | 1987-04-06 | 1988-10-17 | Hitachi Cable Ltd | シングルモ−ド光フアイバ母材の製造法 |
JPH04231336A (ja) * | 1990-12-27 | 1992-08-20 | Fujikura Ltd | 光ファイバ母材の製造方法 |
KR950000588A (ko) * | 1993-06-18 | 1995-01-03 | 쿠라우찌 노리타카 | 싱글모드광파이버모재의 제조방법 |
FR2713621B1 (fr) * | 1993-12-14 | 1996-01-05 | Alcatel Fibres Optiques | Procédé de recharge par plasma d'une préforme pour fibre optique et fibre optique issue de la préforme rechargée selon ce procédé. |
KR0184481B1 (ko) * | 1996-06-10 | 1999-05-15 | 김광호 | 광섬유 제조장치의 고생산성 광섬유 인출장치 및 그 인출방법 |
-
1999
- 1999-04-09 JP JP2000543399A patent/JP4375902B2/ja not_active Expired - Lifetime
- 1999-04-09 AU AU34884/99A patent/AU750390B2/en not_active Ceased
- 1999-04-09 RU RU2000128024/03A patent/RU2235071C2/ru not_active IP Right Cessation
- 1999-04-09 BR BRPI9909569-6A patent/BR9909569B1/pt not_active IP Right Cessation
- 1999-04-09 WO PCT/US1999/007872 patent/WO1999052832A1/en not_active Application Discontinuation
- 1999-04-09 KR KR1020007011260A patent/KR20010081941A/ko not_active Application Discontinuation
- 1999-04-09 EP EP99916592A patent/EP1086053A4/en not_active Withdrawn
- 1999-04-09 CN CNB99815119XA patent/CN1295169C/zh not_active Expired - Fee Related
- 1999-04-09 CA CA002328143A patent/CA2328143A1/en not_active Abandoned
- 1999-04-12 ZA ZA9902666A patent/ZA992666B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
KR20010081941A (ko) | 2001-08-29 |
WO1999052832A9 (en) | 2000-02-17 |
WO1999052832A1 (en) | 1999-10-21 |
EP1086053A1 (en) | 2001-03-28 |
BR9909569A (pt) | 2002-11-05 |
JP2003510234A (ja) | 2003-03-18 |
CA2328143A1 (en) | 1999-10-21 |
ZA992666B (en) | 1999-10-13 |
CN1332702A (zh) | 2002-01-23 |
WO1999052832A8 (en) | 1999-12-29 |
BR9909569B1 (pt) | 2010-07-27 |
AU750390B2 (en) | 2002-07-18 |
CN1295169C (zh) | 2007-01-17 |
EP1086053A4 (en) | 2008-03-05 |
RU2235071C2 (ru) | 2004-08-27 |
AU3488499A (en) | 1999-11-01 |
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