JP4372877B2 - 光学式変位センサ - Google Patents

光学式変位センサ Download PDF

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Publication number
JP4372877B2
JP4372877B2 JP00641199A JP641199A JP4372877B2 JP 4372877 B2 JP4372877 B2 JP 4372877B2 JP 00641199 A JP00641199 A JP 00641199A JP 641199 A JP641199 A JP 641199A JP 4372877 B2 JP4372877 B2 JP 4372877B2
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JP
Japan
Prior art keywords
light
scale
light source
light receiving
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP00641199A
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English (en)
Japanese (ja)
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JP2000205819A5 (https=
JP2000205819A (ja
Inventor
英二 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP00641199A priority Critical patent/JP4372877B2/ja
Priority to US09/480,506 priority patent/US7064842B1/en
Priority to DE10000955A priority patent/DE10000955A1/de
Publication of JP2000205819A publication Critical patent/JP2000205819A/ja
Priority to US11/075,443 priority patent/US7102760B2/en
Priority to US11/075,439 priority patent/US7102759B2/en
Publication of JP2000205819A5 publication Critical patent/JP2000205819A5/ja
Application granted granted Critical
Publication of JP4372877B2 publication Critical patent/JP4372877B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP00641199A 1999-01-13 1999-01-13 光学式変位センサ Expired - Fee Related JP4372877B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP00641199A JP4372877B2 (ja) 1999-01-13 1999-01-13 光学式変位センサ
US09/480,506 US7064842B1 (en) 1999-01-13 2000-01-10 Optical displacement sensor and optical encoder
DE10000955A DE10000955A1 (de) 1999-01-13 2000-01-12 Optischer Verschiebungssensor und optischer Encoder
US11/075,443 US7102760B2 (en) 1999-01-13 2005-03-08 Optical displacement sensor and optical encoder
US11/075,439 US7102759B2 (en) 1999-01-13 2005-03-08 Optical displacement sensor and optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00641199A JP4372877B2 (ja) 1999-01-13 1999-01-13 光学式変位センサ

Publications (3)

Publication Number Publication Date
JP2000205819A JP2000205819A (ja) 2000-07-28
JP2000205819A5 JP2000205819A5 (https=) 2006-02-16
JP4372877B2 true JP4372877B2 (ja) 2009-11-25

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ID=11637636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00641199A Expired - Fee Related JP4372877B2 (ja) 1999-01-13 1999-01-13 光学式変位センサ

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JP (1) JP4372877B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104344786A (zh) * 2013-08-09 2015-02-11 株式会社其恩斯 接触式位移计

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4576013B2 (ja) * 1999-12-21 2010-11-04 オリンパス株式会社 光学式エンコーダ
JP2000337816A (ja) 1999-06-01 2000-12-08 Olympus Optical Co Ltd 光学式変位センサ
US6713756B2 (en) 2000-05-09 2004-03-30 Olympus Corporation Optical encoder and optical rotary encoder
JP4812189B2 (ja) * 2001-06-15 2011-11-09 オリンパス株式会社 光学式検出装置
JP3720751B2 (ja) 2001-10-23 2005-11-30 オリンパス株式会社 光学式エンコーダ
JP4595697B2 (ja) * 2005-06-20 2010-12-08 株式会社安川電機 反射型光ギャップセンサ
JP5984364B2 (ja) 2011-11-22 2016-09-06 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP6003372B2 (ja) * 2012-08-07 2016-10-05 富士通株式会社 光学式ロータリーエンコーダ及びその補正方法
JP6000759B2 (ja) * 2012-08-31 2016-10-05 キヤノン株式会社 スケール、エンコーダ、レンズ装置、および、撮像システム
DE102015216268A1 (de) * 2015-08-26 2017-03-02 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP2017198652A (ja) * 2016-04-25 2017-11-02 セイコーエプソン株式会社 エンコーダーおよびロボット
JP7063743B2 (ja) * 2018-06-19 2022-05-09 株式会社ミツトヨ エンコーダ
CN113551601B (zh) * 2019-08-30 2022-11-25 佛山市顺德区美的饮水机制造有限公司 用于测量物体的物理尺寸的装置
CN113566714B (zh) * 2021-07-29 2022-09-20 同济大学 一种自溯源型光栅干涉精密位移测量系统
CN113638852A (zh) * 2021-08-25 2021-11-12 中国华能集团清洁能源技术研究院有限公司 一种风机塔筒倾斜监测装置及方法
CN115655118B (zh) * 2022-10-11 2025-11-28 中北大学 一种具有光学自细分功能的二维点阵光栅面内位移传感器
CN117804348B (zh) * 2024-03-01 2024-04-30 中国科学技术大学 一种基于纵向莫尔条纹相关计算的光栅位移传感器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104344786A (zh) * 2013-08-09 2015-02-11 株式会社其恩斯 接触式位移计
CN104344786B (zh) * 2013-08-09 2018-07-06 株式会社其恩斯 接触式位移计

Also Published As

Publication number Publication date
JP2000205819A (ja) 2000-07-28

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