JP4371048B2 - 光学ガラス成形用金型及び光学ガラス素子 - Google Patents
光学ガラス成形用金型及び光学ガラス素子 Download PDFInfo
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- JP4371048B2 JP4371048B2 JP2004368888A JP2004368888A JP4371048B2 JP 4371048 B2 JP4371048 B2 JP 4371048B2 JP 2004368888 A JP2004368888 A JP 2004368888A JP 2004368888 A JP2004368888 A JP 2004368888A JP 4371048 B2 JP4371048 B2 JP 4371048B2
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- optical glass
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- 238000000465 moulding Methods 0.000 title claims description 93
- 239000005304 optical glass Substances 0.000 title claims description 62
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 64
- 239000011651 chromium Substances 0.000 claims description 64
- 229910052804 chromium Inorganic materials 0.000 claims description 59
- 230000001681 protective effect Effects 0.000 claims description 51
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 32
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 21
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
- 230000003647 oxidation Effects 0.000 claims description 13
- 238000007254 oxidation reaction Methods 0.000 claims description 13
- 238000005468 ion implantation Methods 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 description 128
- 238000000034 method Methods 0.000 description 11
- 239000006060 molten glass Substances 0.000 description 11
- 230000003746 surface roughness Effects 0.000 description 11
- 238000004544 sputter deposition Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000007493 shaping process Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- -1 chromium nitride compound Chemical class 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- UOUJSJZBMCDAEU-UHFFFAOYSA-N chromium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Cr+3].[Cr+3] UOUJSJZBMCDAEU-UHFFFAOYSA-N 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
- C23C14/5833—Ion beam bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/10—Die base materials
- C03B2215/12—Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/20—Oxide ceramics
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/32—Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Description
一対の超硬合金からなる金型母材10,20を高精度に鏡面加工して、図2に示したような凹面形状の成形面12,22を作製する。当該成形面12,22の上に、下地保護膜としての金属クロム膜14,24を形成した。金属クロム膜14,24は、表1に示した成膜条件Aに従ってスパッタリング法で成膜した。スパッタリング法では、一般的に、薄膜を形成する粒子の持っているエネルギーが数10eVと非常に大きいために、真空蒸着法等に比べて基板に対する付着力が強い。したがって、スパッタリング法で形成した下地保護膜としての金属クロム膜14,24は金型母材10,20に対して強固に付着している。
〇印は、離型不良又はキズの発生がそれぞれ0.1%乃至0.5%であることを示す。
△印は、離型不良又はキズの発生がそれぞれ0.5%乃至10%であることを示す。
一対の超硬合金からなる金型母材10,20を高精度に鏡面加工して、図2に示したような凹面形状の成形面12,22を作製する。当該成形面12,22の上に、下地保護膜としての金属クロム膜14,24を形成した。金属クロム膜14,24は、表1に示した成膜条件Aに従ってスパッタリング法で成膜されている。そして、金属クロム膜14,24の厚さは、0.05μm未満、0.1μm、10μmの三種類である。
一対の超硬合金からなる金型母材10,20を高精度に鏡面加工して、図2に示したような凹面形状の成形面12,22を作製する。当該成形面12,22の上に、下地保護膜としての金属クロム膜14,24を形成した。金属クロム膜14,24は、表1に示した成膜条件B及びCに従ってスパッタリング法で成膜した。すなわち、Arガスに微量の酸素ガス又は窒素ガスを含ませた反応性ガスで金属クロムのターゲットに対してスパッタリングして、金属クロム膜14,24の成膜を行った。成膜条件Bで作製した金属クロム膜14,24では、金属クロムが主成分の形で存在しており、酸素が酸化クロムの形で又は金属クロム結晶格子の中に取り込まれた形で存在している。同様に、成膜条件Cで作製した金属クロム膜14,24では、金属クロムが主成分の形で存在しており、窒素が窒化クロムの形で又は金属クロム結晶格子の中に取り込まれた形で存在している。
本願発明の効果を見るために、上記と同様のプロセスで、金属クロム膜14,24だけが形成された光学ガラス成形用金型1,2を作製した。当該光学ガラス成形用金型1,2は、図1に示した成形方法に従って、大気中で熔融ガラス6を順次200回プレス成形して、離型性や耐衝撃性・耐摩耗性について調べた。プレス成形した結果を比較例として表2に示す。表2から明らかなように、比較例の光学ガラス成形用金型は、本願発明に係る光学ガラス成形用金型1,2よりも、離型性や耐衝撃性・耐摩耗性の面で劣っていた。
2 成形用上金型
4 ノズル
6 熔融ガラス
7 光学ガラス素子
10,20 金型母材
12,22 成形面
14,24 金属クロム膜(下地保護膜)
16,26 酸化クロム膜(表面保護膜)
Claims (5)
- ノズルから滴下した熔融光学ガラスを受ける光学ガラス成形用金型であって、
金型母材の成形面に形成された金属クロムからなる下地保護膜と、該下地保護膜上に形成された酸化クロムからなる表面保護膜とを備えてなり、
前記表面保護膜の膜厚が、0.003乃至0.05μmであることを特徴とする光学ガラス成形用金型。 - 前記表面保護膜は、下地保護膜である金属クロムを酸化処理することによって作製されることを特徴とする、請求項1記載の光学ガラス成形用金型。
- 前記酸化処理は、酸素を含む雰囲気中で熱処理するものであることを特徴とする、請求項2記載の光学ガラス成形用金型。
- 前記酸化処理は、酸素をイオン注入するものであることを特徴とする、請求項2記載の光学ガラス成形用金型。
- 前記下地保護膜の膜厚は、0.05乃至10μmであることを特徴とする、請求項1記載の光学ガラス成形用金型。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004368888A JP4371048B2 (ja) | 2004-12-21 | 2004-12-21 | 光学ガラス成形用金型及び光学ガラス素子 |
US11/300,733 US20060130522A1 (en) | 2004-12-21 | 2005-12-15 | Mold for molding optical glass and method of manufacturing optical glass element |
US12/567,502 US8327663B2 (en) | 2004-12-21 | 2009-09-25 | Method of manufacturing an optical glass element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004368888A JP4371048B2 (ja) | 2004-12-21 | 2004-12-21 | 光学ガラス成形用金型及び光学ガラス素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006176344A JP2006176344A (ja) | 2006-07-06 |
JP4371048B2 true JP4371048B2 (ja) | 2009-11-25 |
Family
ID=36594005
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004368888A Expired - Fee Related JP4371048B2 (ja) | 2004-12-21 | 2004-12-21 | 光学ガラス成形用金型及び光学ガラス素子 |
Country Status (2)
Country | Link |
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US (2) | US20060130522A1 (ja) |
JP (1) | JP4371048B2 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8505338B2 (en) * | 2007-08-01 | 2013-08-13 | Konica Minolta Opto, Inc. | Method for manufacturing lower mold, method for manufacturing glass gob, and method for manufacturing molded glass article |
JP5042769B2 (ja) * | 2007-10-18 | 2012-10-03 | オリンパス株式会社 | 光学素子成形用金型の製造方法、及び光学素子成形用金型 |
WO2009099235A1 (ja) * | 2008-02-08 | 2009-08-13 | Tokyo University Of Science Educational Foundation Administrative Organization | 金属膜を有する構造体の製造方法、それに用いる母型及びそれにより製造される構造体 |
JPWO2010071050A1 (ja) * | 2008-12-18 | 2012-05-24 | コニカミノルタオプト株式会社 | 成形型及びガラス成形体の製造方法 |
JP5077251B2 (ja) * | 2009-01-20 | 2012-11-21 | コニカミノルタアドバンストレイヤー株式会社 | 金型、金型の製造方法、ガラスゴブの製造方法及びガラス成形体の製造方法 |
CN102190423A (zh) * | 2010-03-19 | 2011-09-21 | 亚特控制系统股份有限公司 | 光学基材及其制造方法 |
JP5565285B2 (ja) * | 2010-11-19 | 2014-08-06 | コニカミノルタ株式会社 | ガラス光学素子の製造方法 |
EP2947172A4 (en) * | 2013-01-18 | 2016-03-02 | Fujimi Inc | ARTICLE WITH A METAL-OXYGENIC FILM |
JP6411734B2 (ja) * | 2013-12-12 | 2018-10-24 | Hoya株式会社 | 研磨用ガラス光学素子ブランク用成形型、並びに、研磨用ガラス光学素子ブランクおよび光学素子の製造方法 |
JP6282899B2 (ja) * | 2014-03-11 | 2018-02-21 | セイコーインスツル株式会社 | 光センサの製造方法 |
CN207800582U (zh) | 2015-06-19 | 2018-08-31 | 株式会社村田制作所 | 模块 |
Family Cites Families (15)
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US5380349A (en) * | 1988-12-07 | 1995-01-10 | Canon Kabushiki Kaisha | Mold having a diamond layer, for molding optical elements |
US5171347A (en) * | 1989-01-13 | 1992-12-15 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing glass optical element |
JPH0597449A (ja) * | 1990-12-21 | 1993-04-20 | Canon Inc | 光学素子の成形法 |
JP2973533B2 (ja) | 1991-02-12 | 1999-11-08 | ミノルタ株式会社 | 光学素子成形方法および成形用金型 |
SG68649A1 (en) * | 1997-02-21 | 1999-11-16 | Matsushita Electric Ind Co Ltd | Press-molding die method for manufacturing the same and glass article molded with the same |
JPH10330123A (ja) * | 1997-05-27 | 1998-12-15 | Asahi Glass Co Ltd | ガラス成形用金型及びガラス成形方法 |
JP2000044258A (ja) * | 1998-07-29 | 2000-02-15 | Olympus Optical Co Ltd | 光学素子成形用型及びその製造方法 |
JP2000327344A (ja) * | 1999-05-17 | 2000-11-28 | Olympus Optical Co Ltd | 光学素子成形用型の製造方法及び光学素子成形用型 |
JP2001089181A (ja) | 1999-09-21 | 2001-04-03 | Olympus Optical Co Ltd | 光学素子成形用型の製造方法および光学素子成形用型 |
JP2002020129A (ja) | 2000-07-03 | 2002-01-23 | Olympus Optical Co Ltd | 光学素子成形用型及びその製造方法 |
JP2002074531A (ja) | 2000-08-31 | 2002-03-15 | As Brains Inc | 防犯装置及びシステム |
JP2002097028A (ja) | 2000-09-22 | 2002-04-02 | Olympus Optical Co Ltd | 光学素子成形用型 |
JP2002255568A (ja) | 2001-03-05 | 2002-09-11 | Olympus Optical Co Ltd | 光学素子成形用型の製造方法 |
JP2002338267A (ja) * | 2001-05-16 | 2002-11-27 | Olympus Optical Co Ltd | 光学素子成形用型 |
US7415841B2 (en) * | 2002-03-27 | 2008-08-26 | Hoya Corporation | Method for producing chemically strengthened glass substrate for information recording medium |
-
2004
- 2004-12-21 JP JP2004368888A patent/JP4371048B2/ja not_active Expired - Fee Related
-
2005
- 2005-12-15 US US11/300,733 patent/US20060130522A1/en not_active Abandoned
-
2009
- 2009-09-25 US US12/567,502 patent/US8327663B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20060130522A1 (en) | 2006-06-22 |
JP2006176344A (ja) | 2006-07-06 |
US8327663B2 (en) | 2012-12-11 |
US20100064727A1 (en) | 2010-03-18 |
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