JP4351420B2 - 調整可能な液状マイクロレンズとその製造方法 - Google Patents
調整可能な液状マイクロレンズとその製造方法 Download PDFInfo
- Publication number
- JP4351420B2 JP4351420B2 JP2002149586A JP2002149586A JP4351420B2 JP 4351420 B2 JP4351420 B2 JP 4351420B2 JP 2002149586 A JP2002149586 A JP 2002149586A JP 2002149586 A JP2002149586 A JP 2002149586A JP 4351420 B2 JP4351420 B2 JP 4351420B2
- Authority
- JP
- Japan
- Prior art keywords
- droplet
- microlens
- insulating layer
- electrodes
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 title claims description 48
- 238000004519 manufacturing process Methods 0.000 title 1
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- 238000000034 method Methods 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 5
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- 239000010410 layer Substances 0.000 description 42
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- 229910052751 metal Inorganic materials 0.000 description 7
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- 239000012530 fluid Substances 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229920002313 fluoropolymer Polymers 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- 230000005693 optoelectronics Effects 0.000 description 3
- 239000013545 self-assembled monolayer Substances 0.000 description 3
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
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- 229920000052 poly(p-xylylene) Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
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- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
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- 229920005570 flexible polymer Polymers 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 235000020094 liqueur Nutrition 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
- G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/884605 | 2001-06-19 | ||
| US09/884,605 US6538823B2 (en) | 2001-06-19 | 2001-06-19 | Tunable liquid microlens |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003050303A JP2003050303A (ja) | 2003-02-21 |
| JP2003050303A5 JP2003050303A5 (https=) | 2005-08-04 |
| JP4351420B2 true JP4351420B2 (ja) | 2009-10-28 |
Family
ID=25384984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002149586A Expired - Lifetime JP4351420B2 (ja) | 2001-06-19 | 2002-05-23 | 調整可能な液状マイクロレンズとその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6538823B2 (https=) |
| EP (1) | EP1271218B1 (https=) |
| JP (1) | JP4351420B2 (https=) |
| CA (1) | CA2381745C (https=) |
| DE (1) | DE60202815T2 (https=) |
Families Citing this family (114)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR102608098B1 (ko) * | 2021-03-31 | 2023-11-30 | 재단법인 오송첨단의료산업진흥재단 | 초점 가변형 액체렌즈 및 이의 제조방법 |
| CN117092729B (zh) * | 2022-05-12 | 2026-03-06 | 中国科学院沈阳自动化研究所 | 一种新型光流体可变焦微透镜阵列制作方法 |
| CN117742054A (zh) * | 2024-01-19 | 2024-03-22 | 上海燧影光电科技有限公司 | 可变焦及光轴偏转的液体透镜结构及光学系统 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1239141A (https=) | 1969-03-07 | 1971-07-14 | ||
| US4030813A (en) * | 1974-12-20 | 1977-06-21 | Matsushita Electric Industrial Co., Ltd. | Control element having liquid layer attainable to geometrically uneven state in response to electrical signal |
| US4118270A (en) | 1976-02-18 | 1978-10-03 | Harris Corporation | Micro lens formation at optical fiber ends |
| US4137060A (en) | 1977-07-18 | 1979-01-30 | Robert Bosch Gmbh | Method of forming a lens at the end of a light guide |
| US4338352A (en) | 1981-02-23 | 1982-07-06 | Mcdonnell Douglas Corporation | Process for producing guided wave lens on optical fibers |
| US4653847A (en) | 1981-02-23 | 1987-03-31 | Motorola, Inc. | Fiber optics semiconductor package |
| FR2502345B1 (https=) | 1981-03-17 | 1985-01-04 | Thomson Csf | |
| NL8204961A (nl) | 1982-12-23 | 1984-07-16 | Philips Nv | Monomode optische transmissievezel met een taps eindgedeelte en werkwijze voor het vervaardigen daarvan. |
| FR2548431B1 (fr) | 1983-06-30 | 1985-10-25 | Thomson Csf | Dispositif a commande electrique de deplacement de fluide |
| CA1243105A (en) | 1984-07-09 | 1988-10-11 | Giok D. Khoe | Electro-optical device comprising a laser diode, an input transmission fibre and an output transmission fibre |
| GB8421105D0 (en) | 1984-08-20 | 1984-09-26 | British Telecomm | Microlens |
| US4948214A (en) | 1989-07-10 | 1990-08-14 | Eastman Kodak Company | Step-index light guide and gradient index microlens device for LED imaging |
| US5518863A (en) | 1992-01-31 | 1996-05-21 | Institut National D'optique | Method of changing the optical invariant of multifiber fiber-optic elements |
| DE4310291A1 (de) | 1993-03-30 | 1994-10-06 | Sel Alcatel Ag | Optischer Koppler |
| US5486337A (en) | 1994-02-18 | 1996-01-23 | General Atomics | Device for electrostatic manipulation of droplets |
| US6014259A (en) | 1995-06-07 | 2000-01-11 | Wohlstadter; Jacob N. | Three dimensional imaging system |
| US5659330A (en) | 1996-05-31 | 1997-08-19 | Xerox Corporation | Electrocapillary color display sheet |
| DE19623270C2 (de) | 1996-06-11 | 1998-05-20 | Juergen Rebel | Adaptives optisches Abbildungssystem zur Abbildung eines von einem Laser emittierten Strahlenbündels |
| FR2769375B1 (fr) * | 1997-10-08 | 2001-01-19 | Univ Joseph Fourier | Lentille a focale variable |
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- 2002-04-15 CA CA002381745A patent/CA2381745C/en not_active Expired - Fee Related
- 2002-05-23 JP JP2002149586A patent/JP4351420B2/ja not_active Expired - Lifetime
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|---|---|
| JP2003050303A (ja) | 2003-02-21 |
| US20020196558A1 (en) | 2002-12-26 |
| CA2381745A1 (en) | 2002-12-19 |
| US6538823B2 (en) | 2003-03-25 |
| DE60202815T2 (de) | 2006-01-19 |
| CA2381745C (en) | 2006-12-05 |
| EP1271218A1 (en) | 2003-01-02 |
| EP1271218B1 (en) | 2005-02-02 |
| DE60202815D1 (de) | 2005-03-10 |
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